522 results about "Projection optics" patented technology

The utility model discloses a three-color micro-projection optical system, the three-color micro-projection optical system is provided with an object side and an image side which are correspondingly arranged along an optical axis direction, the three-color micro-projection optical system comprises a diaphragm, a lens group and a color combination prism assembly which are sequentially arranged from the object side to the image side; the color combination prism assembly comprises a color combination prism, a red light-emitting chip, a green light-emitting chip and a blue light-emitting chip; the focal length of the three-color micro projection optical system is f, 5.9 mlt; flt; the thickness is 6.4 mm; the distance from the diaphragm to the image surface is the total optical length TTL and TTLlt of the three-color micro-projection optical system; and the thickness is 10.2 mm. By means of the arrangement, in the environment temperature range of 20-60 DEG C, the optical system does not defocus during working, the MTF full frequency is higher than 0.5, the total length of the optical system can be controlled within 10.2 mm, and the working performance is more stable.

The invention relates to the technical field of light detection, in particular to a light detection sensor and a light projection device and an optical module thereof, the light projection device comprises an illumination optical system, a light modulation element and a projection optical system, and the illumination optical system is configured to emit light advancing along a first preset light path; the light modulation element is configured to receive light emitted by the illumination optical system and modulate the light to generate modulated light, and the modulated light travels along a second preset light path; the projection optical system is configured to receive the modulated light and guide the modulated light to advance along a second preset light path; the projection optical system comprises a plurality of lenses, and optical axes of partial lenses in the plurality of lenses are offset by a preset offset amount relative to a main optical axis of the projection optical system. According to the invention, under the condition that a relatively small Samm angle is adopted, the misalignment amount is preset for a part of lenses in the plurality of lenses, so that the miniaturization requirement of the sensor can be met, and the light energy transmission efficiency can be improved.

To provide technology suitable for performing highly precise measurement of optical characteristics.SOLUTION: An evaluation method for evaluating an optical characteristic of a projection optical system is provided. The evaluation method includes a measurement step of illuminating a test reticle having a test pattern disposed on an object plane of the projection optical system, and measuring an amount of positional deviation of an image of the test pattern formed on an image plane of the projection optical system, and an estimation step of estimating the optical characteristic of the projection optical system based on a result of the measurement, wherein in the estimation step, the optical characteristic is estimated using a polynomial model including a regularization term.SELECTED DRAWING: Figure 2

A head-up display that projects an image onto an object capable of transmitting or reflecting light, and forms a virtual image on a side opposite an observer relative the object, is a head-up display that includes: an image generation device that projects the image; and a projection optical system that guides the image projected onto the object, and forms the virtual image. The projection optical system includes a first optical element and a second optical element provided in order along a light path on which the image generation device projects the image. The virtual image is inclined to cause an upper side of the virtual image, in an up-and-down direction of the virtual image as viewed by the observer, to appear farther away. An intensity of combined power in a left-and-right direction of the virtual image as viewed by the observer is greater than that of the up-and-down direction.

The invention provides a projection optical system. The projection optical system comprises a lens barrel and a color combination prism assembly which are sequentially arranged from the imaging side to the image source side in the optical axis direction. A lens group and a spacing assembly are accommodated in the lens barrel; the lens group comprises a first lens, a second lens, a third lens and a fourth lens which are sequentially arranged from the imaging side to the image source side in the optical axis direction. The spacing assembly comprises first, second and third spacing elements; the color combination prism assembly comprises a color combination prism, a red light-emitting chip, a green light-emitting chip and a blue light-emitting chip; a blue light band-pass filtering film and a red light band-pass filtering film are respectively arranged on two diagonal surfaces of the color combination prism; the green light-emitting chip is perpendicular to the optical axis, and the red light-emitting chip and the blue light-emitting chip are parallel to the optical axis; the projection optical system also satisfies the following conditions: (CT1 + CT2) / CP1 is more than 0.90 and less than 1.65; 4.90 < d2m / (T23 + CT3) < = 7.30; and 5.50 < d3s / T34 < 9.80.

A method for installing an optical element (102) for use with radiation (8) having a wavelength of 365 nm in a projection optics (4), comprising the following steps: a) installing (S100) the optical element (102), which is accommodated in an auxiliary mount (118), in the projection optics (4), b) adjusting (S200) the projection optics (4) together with the optical element (102), c) removing (S300) the optical element (102) together with the auxiliary mount (118) from the projection optics (4), d) correcting (S400) optical properties of the optical element (102) by machining a front side (104) of the optical element (102) using an ion bombardment method, e) removing (S500) the optical element (102) from the auxiliary mount (118), f) coating (S600) the front side (104) with a hot coating, and g) installation (S700) of the optical element (102) into the projection optics (4).

A wearable display system includes one or more nanowire LED micro-displays. The nanowire micro-LED displays may be monochrome or full-color. The nanowire LEDs forming the arrays may have an advantageously narrow angular emission profile and high light output. Where a plurality of nanowire LED micro-displays is utilized, the micro-displays may be positioned at different sides of an optical combiner, for example, an X-cube prism which receives light rays from different micro-displays and outputs the light rays from the same face of the cube. The optical combiner directs the light to projection optics, which outputs the light to an eyepiece that relays the light to a user's eye. The eyepiece may output the light to the user's eye with different amounts of wavefront divergence, to place virtual content on different depth planes.

The invention relates to a method for reducing long-term changes (ΔP) in a pass (P) of an optical surface (25a) of an optical element (Mi), preferably a mirror, in particular an EUV mirror. The method comprises processing the optical element (Mi), preferably a substrate (25) of the optical element (Mi), outside the optical surface (25a) to reduce surface damage, in particular to reduce surface roughness R. a, of the optical element (Mi) outside the optical surface (25a). During processing, material is preferably removed from the substrate (25) of the optical element (Mi) by brushing with at least one brush tool (27). The invention also relates to an optical element (Mi) comprising: an optical surface (25a), preferably for reflecting radiation, in particular for reflecting EUV radiation. The optical element (Mi), preferably a substrate (25) of the optical element (Mi) that is particularly transparent, has a surface roughness R on one or more partial surfaces outside the optical surface (25a). aof 5 µm or less, preferably of 3 µm or less, particularly preferably of 1.5 µm or less, and / or the partial surface or the multiple partial surfaces are transparent. The invention also relates to a semiconductor lithography system comprising at least one such optical element (Mi), which is preferably arranged in a projection optic (10).

The invention relates to the technical field of projection optical devices, in particular to a projection lens which adopts a framework with two lens groups and eight lenses. The projection lens is simple in structure, small in lens number, good in light weight, small in occupied size, large in imaging clear range, small in aberration, small in distortion, high in resolution, large in aperture number, telecentric in image space and high in brightness, and the imaging quality is improved.

A projection optics unit (10), in particular an EUV projection optics unit, with a housing structure (128), wherein the housing structure (128) has: an interior space (140) which the housing structure (128) encloses at least in sections, and support sections (146, 148, 150, 152) which extend out of the housing structure (128) facing away from the interior space (140), wherein an optical element (102) of the projection optics unit (10) can be arranged at least in sections within the interior space (140), wherein the housing structure (128) is a one-piece component, and wherein the housing structure (128) has a dimension of at least 2,900 mm in at least one spatial direction (x, y, z).

A method for operating a projection exposure system (1) comprises the following steps: providing a projection exposure system (1) with a radiation source (1) for generating illumination radiation (3), an illumination optic (11) for transferring the illumination radiation (3) from the radiation source (2) to an object field (8) extending in a scan direction (y) and a cross-scan direction (x), wherein the illumination optic (11) has at least one faceted mirror (6, 7) with a plurality of individual mirrors, and wherein at least a subset of the individual mirrors is configured such that they only partially illuminate the object field (8) in the scan direction (y), and a projection optic (10) for imaging a reticle (12) arranged in the object field (8) of the illumination optic (11) onto a wafer (19) arranged in an image field (17) of the projection optic (10), and specifying a set of at least one element of field-dependent aberrations. (Ai(x, y);i=(1..M)), specification of a target vector (Z(x) = (Z1(x), ..., Z; M (x) T ) for the target values ​​Z i (x) of the aberrations Ai(x, y) after averaging over the scan direction (y), dividing the extent of the object field (8) in the scan direction (y) into j ≥ 2 intervals ([y0; y1], ..., [y j-1 ; y j ]) and determining scan weights (gi(x, y)) which characterize a dependence of an illuminance at a location x in the cross-scan direction in the object field () on a position in the scan direction (y) such that a deviation of a weighted aberration vector A weighted ( x ) → : = ∑ gi A l → is reduced from the target vector (Z(x)).

The invention relates to the technical field of projection optical systems, and discloses a speckle eliminating device which is arranged in a projection optical system and comprises a polarization conversion element and a vibration mechanism. Wherein the polarization conversion element is provided with at least two sub-regions, and at least one sub-region can convert the polarization state of the first light beam incident on the sub-region, so that the polarization conversion element outputs the first light beam with at least two different polarization states. The vibration mechanism is connected with the polarization conversion element and used for driving the polarization conversion element to vibrate. The speckle effect of the projection picture can be reduced, and the watching experience of a user is enhanced. The invention further discloses a projection optical system and projection equipment.

The invention relates to a range hood, which comprises an exhaust fume collecting hood, an exhaust fume collecting cavity, an exhaust fume outlet, an exhaust fume outlet, a smoke outlet and an exhaust fume outlet, and is characterized in that the interior of the exhaust fume collecting hood is hollow to form an exhaust fume collecting cavity, and the front side wall of the exhaust fume collecting hood is provided with an exhaust fume inlet; the smoke baffle is arranged at the smoke inlet in a front-back overturning mode so as to open or close the smoke inlet, and in the open state, the smoke baffle is located above the smoke inlet and extends forwards relative to the front side wall of the smoke collecting hood; the projection optical system is arranged on the smoke collecting hood and above the smoke barrier and is provided with an output end for outputting a graph; meanwhile, the smoke barrier in the open state is made of a transparent material and is arranged to be capable of reflecting the pattern output by the output end of the projection optical system to the position where the human eyes above the smoke barrier are located, and therefore a user can see the virtual image of the pattern below the smoke barrier through the smoke barrier. According to the invention, the user can watch the picture and also can consider the cooking condition in the cookware.

Systems and methods for simulation of laser fluence simulate a laser treatment process to be performed on a part by a laser processing system and determine simulated fluence values at points on a surface of the part to be processed. The simulated fluence value is determined at each point on the surface of the part to be processed by virtually measuring a ray distance to each point and ray angle at each point during a simulation of the laser treatment process. The ray distances and ray angles are virtually measured based on a ray origin associated with an optics component used to deliver the laser to the surface. The optics component may include a scanning optics component that scans the laser beam on the surface or a projection optics component that projects the laser beam on the surface. The simulated fluence values determined by the simulation may be used to optimize the actual laser treatment process.

A wearable display system includes one or more nanowire LED micro-displays. The nanowire micro-LED displays may be monochrome or full-color. The nanowire LEDs forming the arrays may have an advantageously narrow angular emission profile and high light output. Where a plurality of nanowire LED micro-displays is utilized, the micro-displays may be positioned at different sides of an optical combiner, for example, an X-cube prism which receives light rays from different micro-displays and outputs the light rays from the same face of the cube. The optical combiner directs the light to projection optics, which outputs the light to an eyepiece that relays the light to a user's eye. The eyepiece may output the light to the user's eye with different amounts of wavefront divergence, to place virtual content on different depth planes.

A lighting device for vehicles including a light source, a transparent light guide body with a light coupling area and a projection optics device. The shape of the lower light deflection surface deviates from the shape of a base surface. The shape of the base surface is such that if the lower light deflection surface would not deviate from the shape of the base surface in form of the first facet, the light reflected from the base surface would be projected from the projection optics device into a non-deviation region of the light distribution, wherein the non-deviation region contains a defined point of the light distribution. The first surface element is inclined with respect to the base surface such that light totally reflected by the first surface element is imaged in the light distribution by the projection optics device into an “eraser region” region below the defined point.

A wearable display system includes one or more emissive micro-displays, e.g., micro-LED displays. The micro-displays may be monochrome micro-displays or full-color micro-displays. The micro-displays may include arrays of light emitters. Light collimators may be utilized to narrow the angular emission profile of light emitted by the light emitters. Where a plurality of emissive micro-displays is utilized, the micro-displays may be positioned at different sides of an optical combiner, e.g., an X-cube prism which receives light rays from different micro-displays and outputs the light rays from the same face of the cube. The optical combiner directs the light to projection optics, which outputs the light to an eyepiece that relays the light to a user's eye. The eyepiece may output the light to the user's eye with different amounts of wavefront divergence, to place virtual content on different depth planes.

The invention relates to a method and system for identifying a projectable area of a projector. The method comprises the steps of establishing a coordinate system taking the center of a projector lens as a base point based on boundary contour parameters of the projector, generating corresponding contour line data by utilizing the boundary contour parameters, and projecting contour lines on a projection surface to identify a movable axis range and / or a variable focus range of the projector lens. The system comprises a projection optical module, a boundary detection unit, a contour generation unit, and an independent contour projection unit and a control unit which are arranged on a shell. According to the scheme, the contour line data is generated based on the boundary contour parameters and is projected on the projection surface, so that a user can intuitively perceive the adjustable limit range, blind adjustment is avoided, the risks of image distortion, dark corners and content missing are reduced, the adjustment efficiency and accuracy are improved, practicability and flexibility are both achieved, and the user experience is improved. The usability of the projector and the user interaction experience can be effectively improved, and the defect of lack of visual boundary prompt in the prior art is overcome.

The invention relates to a method for producing an optical device (1) comprising at least one light source (16), at least one light guide (10) having an entry surface (11) facing the light source (16), and having an exit surface (12) formed at an end of the light guide (10) lying opposite the entry surface (11), in order to allow light entering into the light guide (10) to exit same, and a projection optics (20) which is designed to project the light exiting the exit surface (12) onto a projection plane (26) provided at a distance from and at an angle of inclination (γ) relative to a main direction of emission (Z) of the optical device (1). The method comprises the following steps: specifying a target distribution of the illuminance in the image (15) projected into the projection plane (26) by the projection optics (20); determining a non-homogenous distribution of the illuminance (Ev) of the light across the exit surface (12) from the distribution to be specified of the illuminance in the image (15) projected into the projection plane (26); determining a three-dimensional shape of the at least one light guide (10) with which the non-homogenous distribution of the illuminance (Ev) of the light across the exit surface (12) is generated when light is emitted by the at least one light source (16); and producing the light guide (10) with the three-dimensional shape and assembling the components of the optical device (1).

An optical system (100) for a projection exposure system (1), comprising an optical element (104, 106, 108), and a mount (132) which supports the optical element (104, 106, 108), wherein the mount (132) has a displacement device (138) which is configured to displace the optical element (104, 106, 108) linearly along exactly one spatial direction (152, 154, 156) in the event of a heat-induced deformation of the mount (132).

The invention relates to a projection optical system which comprises a lens barrel and a color combination prism assembly which are sequentially arranged from an imaging side to an image source side in the optical axis direction, a first lens, a second lens, a third lens and a fourth lens are arranged in the lens barrel, and a spacing element is arranged between every two adjacent lenses in the lens barrel. The color combination prism assembly comprises a color combination prism and red, green and blue light-emitting chips, the green light-emitting chip is arranged perpendicular to the optical axis, the red and blue light-emitting chips are arranged parallel to the optical axis, the diagonal surfaces of the color combination prism are respectively provided with a blue light band-pass filter film and a red light band-pass filter film, and the projection optical system meets the following conditions: d3s / R6 is more than 1.05 and less than 3.05; 1.43 < = EP23 / CT3 < = 2.70.

A projection device includes a light source that emits parallel light, a spatial light modulator including a modulation part that modulates a phase of the parallel light emitted from the light source, a control unit that tiles the modulation part with tiles of at least two resolutions in which a phase image related to an image displayed by projection light being set, sets the phase image to each of the plurality of tiles that are tiled, and causes the light source to radiate the parallel light toward the modulation part in which the phase image is set; and, and a projection optical system that projects light modulated by the spatial light modulator as the projection light.

A tabletop device forms a thin upward-facing fog screen above its housing. Projection optics cast dynamic images onto the screen to create a free-floating avatar. Integrated microphones, speaker, camera and AI control circuitry interpret voice commands and emotional cues, generating synchronized visual and verbal responses for therapeutic and assistive interaction.

The invention discloses an off-axis catadioptric miniature projection optical lens group suitable for near-to-eye display of a one-dimensional waveguide, which comprises an optical prism and an optical lens which are sequentially arranged from an exit pupil position side to an image source side, and is characterized in that image light emitted by an image source is propagated to the exit pupil position through the optical lens and the optical prism; according to the projection optical lens group provided by the invention, the optical prism and the optical lens are preferably selected to be in a free-form surface form, so that the size and the weight of the whole device are more suitable for the whole integrated glasses form of a waveguide system, and the size and the weight of the whole device are more suitable for the whole integrated glasses form of the waveguide system. The earphone is more suitable for daily wearing and use.

An augmented reality system includes a projector and projection optics coupled to the projector. The augmented reality system also includes an eyepiece waveguide including hybrid diffractive structure including: one or more first nanofeatures having first material with a first index of refraction; and one or more second nanofeatures having a second material with a second index of refraction.

The invention relates to a lighting device (1) for a motor vehicle comprising: - a first (10) and a second (20) light modules, each module comprising a light source (100, 200) and a collector (101, 201), the sources emitting light in opposite directions; - a projection optic (30) common to said modules for projecting the beam reflected by the collectors; - a first optical element (40) for generating a virtual image (201a) of the second collector, with a rear area positioned at the focal point of the projection optic; the focal point of the projection optic (30) being located at a rear area of ​​the first collector (101), or the lighting device (1) comprising a second optical element (50) for generating a virtual image (101a) of the first collector (101) with a rear area positioned at the focal point (300) of the projection optic (30). Figure to be published with the abbreviation: Fig. 1

The objective is to provide an exposure apparatus, a measuring apparatus, a measuring method, and a component manufacturing method that, for high-precision exposure, can measure the operating state of a spatial light modulator with high precision within a short time during the exposure intervals using a spatial light modulator. The exposure apparatus includes: an exposure illumination optical system for illuminating the spatial light modulator, the spatial light modulator including a plurality of spatial light modulating devices having reflective surfaces arranged on an array surface; a projection optical system for projecting light from the spatial light modulator onto a substrate to be exposed; a first detection unit for detecting light from the reflective surfaces; a second detection unit for detecting light from the reflective surfaces, and having a wider detection field than the first detection unit; and a position changing mechanism that positions the first and second detection units relative to the spatial light modulator such that the spatial light modulator faces the first detection unit, and the spatial light modulator faces the second detection unit, respectively.

A projector according to the present disclosure includes: an exterior housing; a light source unit configured to emit illumination light; an image forming unit configured to generate image light; a projection optical unit configured to project the image light generated by the image forming unit; a first heat exchanger for heat absorption configured to absorb heat generated by the light source unit; a second heat exchanger for heat absorption configured to absorb heat generated by the image forming unit; a first heat exchanger for heat dissipation configured to dissipate heat transferred from the first heat exchanger for heat absorption; a second heat exchanger for heat dissipation configured to dissipate heat transferred from the second heat exchanger for heat absorption; and a heat exchanger fan configured to supply an air flow to the first heat exchanger for heat dissipation and the second heat exchanger for heat dissipation.

The invention relates to a method for reducing a long-term change (∆P) in a form (P) of an optical surface (25a) of an optical element (Mi), preferably a mirror, in particular an EUV mirror. The method comprises processing the optical element (Mi), preferably an in particular transparent substrate (25) of the optical element (Mi), outside the optical surface (25a) in order to reduce surface damage, in particular in order to reduce a surface roughness Ra, of the optical element (Mi) outside the optical surface (25a). During processing, material is removed from the substrate (25) of the optical element (Mi) preferably by brushing by means of at least one brushing tool (27). The invention also relates to an optical element (Mi), comprising: an optical surface (25a), preferably for reflecting radiation, in particular for reflecting EUV radiation. The optical element (Mi), preferably an in particular transparent substrate (25) of the optical element (Mi), has a surface roughness Ra of 5 µm or less, preferably of 3 µm or less, particularly preferably of 1.5 µm or less, on a partial surface or on multiple partial surfaces outside the optical surface (25a) and / or the partial surface or the multiple partial surfaces are transparent. The invention also relates to an system for semiconductor lithography, which has at least one optical element (Mi) of this type, which is preferably arranged in a projection optical unit (10).

A mammography apparatus includes: an imaging table; a radiation source; a compression plate that compresses the breast and is movable between the radiation source and the imaging table; a projector that includes a display displaying an image including first information projected onto a first surface facing the radiation source on the imaging table and second information projected onto a second surface facing the radiation source on the compression plate, and a projection optical system, in which a focus of the projection optical system is adjusted in accordance with a projection distance to the first surface; and a processor that is configured to control the display and change at least one of a display size or a display position of the second information in the image on an image display surface of the display in accordance with movement of the compression plate having the second surface independently of the first information.