1276 results about "Projection optics" patented technology

An exposure apparatus includes a projection optical system for projecting a pattern on a reticle onto an object to be exposed, a reference mark that serves as a reference for an alignment between the reticle and the object, a first fluid that has a refractive index of 1 or greater, and fills a space between at least part of the projection optical system and the object and a space between at least part of the projection optical system and the reference mark, and an alignment mechanism for aligning the object by using the projection optical system and the first fluid.

Optical Projection System and Method for Photolithography. A lithographic immersion projection system and method for projecting an image at high resolution over a wide field of view. The projection system and method include a final lens which decreases the marginal ray angle of the optical path before light passes into the immersion liquid to impinge on the image plane.

An exposure method includes the steps of introducing fluid between a surface of an object to be exposed, and a final surface of a projection optical system, displacing an interface of the fluid arranged between the surface of the object and the final surface of the projection optical system, and projecting a pattern on a mask onto the object via the projection optical system and the fluid.

When a transition from a first state where one stage is positioned at a first area directly below projection optical system to which liquid is supplied to a state where the other stage is positioned at the first area, both stages are simultaneously driven while a state where both stages are close together in the X-axis direction is maintained. Therefore, it becomes possible to make a transition from the first state to the second state in a state where liquid is supplied in the space between the projection optical system and the specific stage directly under the projection optical system. Accordingly, the time from the completion of exposure operation on one stage side until the exposure operation begins on the other stage side can be reduced, which allows processing with high throughput. Further, because the liquid can constantly exist on the image plane side of the projection optical system, generation of water marks on optical members of the projection optical system on the image plane side is prevented.

There is provided an exposure apparatus capable of forming a desirable device pattern by removing unnecessary liquid when performing exposure by projecting a pattern onto the substrate via a projection optical system and the liquid. The exposure device projects an image of the pattern onto the substrate P via the projection optical system and the liquid so as to expose the substrate P. The exposure device includes a liquid removing mechanism 40 which removes the liquid remaining on a part 7 arranged in the vicinity of the image plane of the projection optical system.

This invention comprises a method and system for displaying free-space, full color, high-resolution video or still images while simultaneously enabling the user to have real-time direct interaction with the visual images. The system comprises a self-generating means for creating a dynamic, non-solid particle cloud by ejecting atomized condensate present in the surrounding air, in a controlled fashion, into an invisible particle cloud. A projection system consisting of an image generating means and projection optics, projects an image onto the particle cloud. Any physical intrusion, occurring spatially within the image region, is captured by a detection system and the intrusion information is used to enable real-time user interaction in updating the image. This input / output (I / O) interface provides a display and computer link, permitting the user to select, translate and manipulate free-space floating visual information beyond the physical constraints of the device creating the image.

A digital image projector for increasing brightness includes a first light source; a second light source that is spectrally adjacent to the first light source; a dichroic beamsplitter disposed to direct light of both the first and second light source; a spatial light modulator that receives light from both the first and second light sources; and projection optics for delivering imaging light from the spatial light modulator.

A projection apparatus (18) forms an image frame (22) on a display surface (12), where the image frame (22) is a two-dimensional array of pixels. The projection apparatus (18) has a laser (40) light source, an image modulator (42) for forming an image-bearing beam according to scanned line data, and projection optics (44) for projecting the image-bearing beam toward the display surface (12). A camera (20) obtains a sensed pixel array by sensing the two-dimensional array of pixels from the display surface (12). A control logic processor (28) compares the sensed pixel array with corresponding image data to identify any portion of the image-bearing beam that is obstructed from the display surface (12) and to disable obstructed portions of the image-bearing beam for at least one subsequent image frame (22).

Imaging apparatus includes an illumination assembly, including a plurality of radiation sources and projection optics, which are configured to project radiation from the radiation sources onto different, respective regions of a scene. An imaging assembly includes an image sensor and objective optics configured to form an optical image of the scene on the image sensor, which includes an array of sensor elements arranged in multiple groups, which are triggered by a rolling shutter to capture the radiation from the scene in successive, respective exposure periods from different, respective areas of the scene so as to form an electronic image of the scene. A controller is coupled to actuate the radiation sources sequentially in a pulsed mode so that the illumination assembly illuminates the different, respective areas of the scene in synchronization with the rolling shutter.

An image projecting device and method are presented. The device comprises a light source system, a spatial light modulator (SLM) unit, and an image projection optics accommodated at the output side of the SLM unit. The SLM unit may be reflective or transmissive. The SLM unit comprises an SLM pixel arrangement enclosed between two glass substrates. The pixel array arrangement is formed by a pixel array assembly and at least one microlens assembly. The microlens assembly includes at least one microlens array accommodated proximate of the pixel array assembly. The light source system may comprise n light sources and a light converting means in optical path of light generated by the n light sources, to thereby produce m light beams of different wavelength ranges, wherein m>n. The light source system may comprise a multi-mode laser, thereby reducing a speckle effect in an integrated speckle pattern produced by the multiple modes, as compared to that of a single mode.

The present invention provides a projection display comprising an illumination system comprising at least one laser source unit and configured and operable for producing one or more light beams; a spatial light modulating (SLM) system accommodated at output of the illumination system and comprising one or more SLM units for modulating light incident thereon in accordance with image data; and a light projection optics for imaging modulated light onto a projection surface. The illumination system comprises at least one beam shaping unit comprising a Dual Micro-lens Array (DMLA) arrangement formed by front and rear micro-lens arrays (MLA) located in front and rear parallel planes spaced-apart along an optical path of light propagating towards the SLM unit, the DMLA arrangement being configured such that each lenslet of the DMLA directs light incident thereon onto the entire active surface of the SLM unit, each lenslet having a geometrical aspect ratio corresponding to an aspect ratio of said active surface of the SLM unit.

A projection optical system guiding and projecting a light beam from a projected object surface onto a projection surface in an upstream-downstream direction through a transmission dioptric system and a reflection dioptric system. An intermediate image surface of the projected object surface is positioned closer to the reflection dioptric system than to the transmission dioptric system, and an intermediate image on the intermediate image surface is formed as the final image on the projection surface via the reflecting mirrors, which include at least one anamorphic polynomial free-formed surface having different vertical and lateral powers. A light beam from the reflection dioptric system to the projection surface is guided at an angle to a normal of the projection surface and the transmission dioptric system is decentered with respect to a normal of the projected object surface, the transmission refractive elements prevented from being decentered with respect to each other.

There is provided an exposure apparatus capable of accurately performing an exposure process and a measurement process based on a liquid immersion method. The exposure apparatus (EX), which forms a liquid immersion area (AR2) of a liquid (LQ) on an image surface side of a projection optical system (PL), and exposes a substrate (P) via the projection optical system (PL) and the liquid (LQ) of the immersion area (AR2), is provided with a measuring device (60) which measures at least one of a property and composition of the liquid (LQ) for forming the liquid immersion area (AR2).

An image display system and associated method for image displaying The system includes an image source configured to generate image light, projection optics configured to project the image light, and a polarizing beam splitter optically coupled to the projection optics and configured to propagate into a first optical path first polarized light having a first polarization and to propagate into a second optical path second polarized light having a second polarization The system includes a quarter wave converter disposed in the first optical path and configured to rotate the first polarization by a quarter phase as the first polarized light first passes through the quarter wave converter, and includes a reflective screen disposed in the first optical path and configured to reflect rotated first polarized light from the quarter wave converter back through the quarter wave converter for further quarter phase rotation.

Disclosed is a projection optical system for projecting an image of an object onto an image plane, which includes a first imaging optical system for forming an image of the object, a second imaging optical system for re-imaging the image upon the image plane, wherein the first and second imaging optical systems are disposed in an order from the object side and are disposed along a common straight optical axis, wherein the first imaging optical system includes a first mirror for reflecting and collecting abaxial light from the object, wherein one of the first and second imaging optical systems includes a second mirror for reflecting light from the first mirror to the image plane side, and wherein, with the second mirror, the abaxial light is caused to pass an outside of an effective diameter of the first mirror.

A projection apparatus (18) forms an image frame (22) on a display surface (12), where the image frame (22) is a two-dimensional array of pixels. The projection apparatus (18) has a laser (40) light source, an image modulator (42) for forming an image-bearing beam according to scanned line data, and projection optics (44) for projecting the image-bearing beam toward the display surface (12). A camera (20) obtains a sensed pixel array by sensing the two-dimensional array of pixels from the display surface (12). A control logic processor (28) compares the sensed pixel array with corresponding image data to identify any portion of the image-bearing beam that is obstructed from the display surface (12) and to disable obstructed portions of the image-bearing beam for at least one subsequent image frame (22).

A light valve such as an active matrix LCD between crossed polarizers, utilizing, for instance, individual transistors to control each "pixel area" of the LCD and storage elements to store video signal data for each pixel, with optically shielded "dead spaces" between pixels to eliminate electric field cross-talk and non-information-bearing light bleed-through, is illuminated with a bright independent light source which creates a video image projected via specialized projection optics onto an internal or external screen without distortions, regardless of the angle of projection onto the screen. Use of heat sinks, IR reflective coatings, heat absorbing optics, optional fluid and a thermistor controlled pixel transistor bias voltage injection servo circuit stabilizes image performance, maintaining accurate color and contrast levels as the LCD changes temperature. In one embodiment of the invention, use of a multi-color LCD with a stepped cavity, producing different thicknesses of LCD for the different wavelengths that pass through it, allows a linear correspondence between the wavelengths passing through the LCD to produce true black, high contrast and CRT-like color rendition. A dichroic mirror arrangement is used to overlap differently colored pixels in the projected image. Use of striped mirrors duplicate pixels, where necessary, eliminating spaces between pixels, creating a continuous image with no apparent stripes or dots. A special venetian-blind type of screen is also disclosed and methods for using the system to view three-dimensional video are also explained.

This invention has incorporated projective optics and phase conjugate material thus eliminating the requisite use of an external phase conjugate material to provide a see-through head mounted projective display. A key component of the invention is the use of optical imaging technology in combination with projective optics to make this revolutionary technology work. In previous head mounted projective displays the phase conjugate material had to be placed in the environment to display images, but in this invention one is not limited to the use of an external phase conjugate material but further extends its use to outdoor see-through augmented reality to produce images using the see-through head mounted projective display system. Furthermore, this invention extends the use of projective head mounted displays to clinical guided surgery, surgery medical, an outdoor augmented see-through virtual environment for military training and wearable computers.

An exposure apparatus wherein an image of a pattern is projected onto a substrate via a projection optical system to expose the substrate, includes: a substrate moving device that is movable while holding the substrate above the projection optical system; and a liquid immersion unit that fills at least a portion of the space between the projection optical system and the substrate with a liquid, wherein the image of the pattern is projected onto the substrate via the projection optical system and the liquid.

A display panel assembly comprises a transflective holographic screen, i.e., a transparent screen that reflects light from a projection system, comprising at least a volume hologram, a first protective element and a second protective element, each arranged in contact with the volume hologram such that the volume hologram is sandwiched between the first protective element and the second protective element. The display panel assembly further comprises a projection system focusing an image on the volume hologram comprising at least projection optics, mounting means arranged to fixedly mount the projection system relatively to the transflective holographic screen. The volume hologram comprises a plurality of diffractive patterns disposed in sequence across the volume hologram, each of the plurality of diffractive patterns being configured to diffuse the light rays from the projection system in a determined direction corresponding to the specific diffractive pattern and oriented towards a position of an intended eye of a user wearing the display panel assembly.

In projection exposure of isolated pattern such as a contact hole, in order to increase the depth of focus a coherence reducing member is disposed on a Fourier transform plane in an image-forming optical path between a mask and a sensitized base, so that coherence is reduced between image-forming beams respectively passing through a plurality of different, concentric regions around the optical axis of the projection optical system on the Fourier transform plane. The coherence reducing member may be a polarization state control member for making a difference in polarization state, a member for making a difference in optical path length, or space filters with different shapes.

Electronic displays are provided which can reproduce image data with high contrast ratios and a gray scale range comparable to conventional X-ray film viewed on a light box. One such display includes a rear low-resolution LCD or DLP display which projects an image onto a high-resolution LCD display. In such embodiments, the mechanical and optical registration between the two displays is not critical. Therefore, modulation transfer function and distortion of the projection optics are not critical. Accordingly, the brightness of the inventive display can be maximized with high power lamps and high aperture projection optics. Because the display has a high dynamic range, the need for dynamic range compression algorithms is reduced.

The invention relates to techniques for speckle reduction in holographic optical systems, in particular holographic image display systems. We describe a holographic image display system for displaying an image holographically on a display surface, the system including: a spatial light modulator (SLM) to display a hologram; a light source to illuminate said displayed hologram; projection optics to project light from said illuminated displayed hologram onto said display surface to form a holographically generated two-dimensional image, said projection optics being configured to form, at an intermediate image surface, an intermediate two-dimensional image corresponding to said holographically generated image; a diffuser located at said intermediate image surface; and an actuator mechanically coupled to said diffuser to, in operation, move said diffuser to randomise phases over pixels of said intermediate image to reduce speckle in an image displayed by the system.

A projection exposure device, in particular for micro-lithography, serves to produce an image of an object in an image plane positioned in an object plane. This happens with the aid of a light source emitting projection light and illumination optics positioned in the ray path between the light source and the object plane. In addition projection optics positioned in the ray path between the object plane and the image plane serve to guide the projection light. A filter (7) is positioned in a filter plane which lies in the vicinity of a pupil plane between the light source and the object plane. This has a moveable filter element (22') which has at least in certain areas (24) for the projection light a transmission factor which is greater than zero and less than 100%. The moveable filter element (22') is moveable in the filter plane and has a distribution of the transmission factor over the filter face, in such a way that the intensity distribution of the projection light perpendicular to the optical axis (14) in the ray path after the filter (7) changes with the movement of the filter element (22'). With such a filter (7) an illumination angle distribution can be adapted to a pre-set value (FIG. 5).

A projection optical system forming an image of an object in a first plane onto a second plane, comprising, an optical element group including at least one refractive member and a plurality of reflective members, and a plurality of lens-barrel units holding the optical element group divided into a plurality of groupings, wherein the plurality of reflective members is all held by one lens-barrel unit of the plurality of lens-barrels units.

This exposure system projects a pattern image onto a substrate via a projection optical system and a liquid to expose the substrate, with a space between the projection optical system and the substrate filled with the liquid. The exposure system is provided with a vaporization preventing unit for preventing the vaporization of the liquid.

A holographic head up display (HUD) for a vehicle to display an image holographically on a curved display surface such as a windshield is disclosed. The HUD can include a spatial light modulator (SLM) to display a hologram, an illumination system to illuminate said displayed hologram, projection optics to project light from said hologram onto said display surface to form said image, and a processor configured to process said image data to generate hologram data for display on the SLM to form said image. The HUD can further include a non-volatile data memory coupled to said processor to store wavefront correction data for said display surface, and the processor can be configured to apply a wavefront correction responsive to said stored wavefront correction data when generating the hologram data to correct the image for aberration due to a shape of said display surface.

A catadioptric projection optical system is provided, which can use a beam splitting optical system smaller in size than a conventional polarizing beam splitter, can set a long optical path from a concave reflecting mirror to an image plane, allows easy adjustment of the optical system, and has excellent imaging performance. A light beam from an object surface forms a first intermediate image through a refracting lens group. A light beam from the first intermediate image passes through a polarizing beam splitter and is reflected by a concave reflecting mirror to form a second intermediate image in the polarizing beam splitter. A light beam from the second intermediate image is reflected by the polarizing beam splitter means to form a final image on the image plane via a refracting lens group. The polarizing beam splitter means is arranged near the positions at which the intermediate images are formed.

A catoptric reduction projection optical system (5) is provided with a first catoptric optical system (10) that images an object (R) in first (object) plane (OP) into a second plane (12) and forming an intermediate image (II) therein, and a second catoptric optical system (20) that images the intermediate image in the second plane onto a third (image) plane (IP), thereby forming a reduced image of the object in the first (object) plane onto the third (image) plane. The first catoptric optical system comprises a first mirror pair comprising two reflective mirrors (M1, M2). The second catoptric optical system comprises a second mirror pair comprising a convex mirror (M3) and a concave mirror (M4). The system also preferably satisfied a number of design conditions.

A projection exposure apparatus that exposes a substrate with a liquid interposed between a surface of the substrate and an optical element on the substrate side of a projection optical system; includes liquid supply and discharge mechanisms, which supply the liquid via a liquid supply tube as they recover the liquid via a liquid recovery tube, and an adhesion preventing mechanism that prevents an adhesion of impurities on member forming a flow path for the liquid.