The invention relates to a
fast recovery MOSFET (
Metal-
Oxide-
Semiconductor Field Effect Transistor) structure and a manufacturing method thereof, and belongs to the technical field of power devices. The epitaxial layer is arranged on the substrate; at least two
body regions are arranged in the epitaxial layer, and a partition structure is formed between the two
body regions; an active region and an accumulation type channel are arranged in the
body region, and the accumulation type channel is located on one side close to the partition structure; the gate structures are arranged on the epitaxial layer, and the number of the gate structures is at least two; the source
dielectric layer is arranged on the partition structure and covers the accumulation type channel and the partition structure; the source
dielectric layer is located between the two gate structures; and the source
electrode is arranged on the source region and the source
dielectric layer. According to the invention, the partition structure, the accumulation type channel and the source
dielectric layer are arranged, so that the accumulation type channel is opened when the
voltage of the source
electrode and the
voltage of the drain
electrode are greater than a threshold value, thereby inhibiting the opening of a parasitic
PN diode, and achieving high reliability and low loss while guaranteeing
high voltage resistance and
high frequency performance.