The present invention provides a three-dimensional
gallium nitride-based
PN diode and a method for preparing the same. The three-dimensional
gallium nitride-based
PN diode comprises: a three-dimensional substrate having a plurality of device regions spaced apart on its outer surface, a plurality of devices correspondingly arranged on each device region, and an interconnecting
dielectric layer covering the device surface and the non-device region of the three-dimensional substrate; each device comprises a first
dielectric layer arranged on the surface of the three-dimensional substrate, and an n-type
dielectric layer arranged on the side of the first
dielectric layer facing away from the three-dimensional substrate. ‑ ‑GaN layer, set on n ‑ The p-GaN layer has a
cathode on the side facing away from the 3D substrate, and a p-GaN layer, and an
anode on the p-GaN layer, also facing away from the 3D substrate. The interconnect
dielectric layer is fixed with a number of interconnect metals, connecting the corresponding anodes between devices via the interconnect metals, and also connecting the corresponding cathodes between devices via the interconnect metals. The diodes of this invention have excellent heat dissipation from the 3D substrate, a high degree of
diode integration, superior
electrical performance, a wider range of application scenarios, and improved device performance and lifespan.