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53 results about "Plasma particle" patented technology

Disposable for a spray drying system

The present invention includes a spray drying disposable device for use in a spray drying system. The disposable has a spray drying head and a plasma drying chamber. The head has a spray dry nozzle assembly in fluid communication with the plasma source and the pressurized aerosol gas source. The pressurized gas flows in a vortex pattern that atomizes plasma droplets in the chamber. The head also includes a plenum has uniform air pressure of the drying gas. A baffle plate forms the floor of the plenum having drying gas jets that supply drying gas to the chamber. The atomized plasma droplets evaporate in the presence of the drying gas emitted from the jets to obtain dried plasma particles and humid air. A capture filter captures the dried plasma particles and allows the humid air to pass. The humid air passes through the gas outlet and the exhaust port.
Owner:VELICO MEDICAL INC

Method for providing dried plasma

The present invention includes a spray drying disposable device for use in a spray drying system. The disposable has a spray drying head and a plasma drying chamber. The head has a spray dry nozzle assembly in fluid communication with the plasma source and the pressurized aerosol gas source. The pressurized gas flows in a vortex pattern that atomizes plasma droplets in the chamber. The head also includes a plenum has uniform air pressure of the drying gas. A baffle plate forms the floor of the plenum having drying gas jets that supply drying gas to the chamber. The atomized plasma droplets evaporate in the presence of the drying gas emitted from the jets to obtain dried plasma particles and humid air. A capture filter captures the dried plasma particles and allows the humid air to pass. The humid air passes through the gas outlet and the exhaust port.
Owner:VELICO MEDICAL INC

Baffle plate used in a disposable for a spray drying system

The present invention includes a spray drying disposable device for use in a spray drying system. The disposable has a spray drying head and a plasma drying chamber. The head has a spray dry nozzle assembly in fluid communication with the plasma source and the pressurized aerosol gas source. The pressurized gas flows in a vortex pattern that atomizes plasma droplets in the chamber. The head also includes a plenum has uniform air pressure of the drying gas. A baffle plate forms the floor of the plenum having drying gas jets that supply drying gas to the chamber. The atomized plasma droplets evaporate in the presence of the drying gas emitted to from the jets to obtain dried plasma particles and humid air. A capture filter captures the dried plasma particles and allows the humid air to pass. The humid air passes through the gas outlet and the exhaust port.
Owner:VELICO MEDICAL INC

Rapid spray drying system

The present invention includes a spray drying disposable device for use in a spray drying system. The disposable has a spray drying head and a plasma drying chamber. The head has a spray dry nozzle assembly in fluid communication with the plasma source and the pressurized aerosol gas source. The pressurized gas flows in a vortex pattern that atomizes plasma droplets in the chamber. The head also includes a plenum has uniform air pressure of the drying gas. A baffle plate forms the floor of the plenum having drying gas jets that supply drying gas to the chamber. The atomized plasma droplets evaporate in the presence of the drying gas emitted from the jets to obtain dried plasma particles and humid air. A capture filter captures the dried plasma particles and allows the humid air to pass. The humid air passes through the gas outlet and the exhaust port.
Owner:VELICO MEDICAL INC

Dryer for a spray drying system

The present invention includes a spray drying disposable device for use in a spray drying system. The disposable has a spray drying head and a plasma drying chamber. The head has a spray dry nozzle assembly in fluid communication with the plasma source and the pressurized aerosol gas source. The pressurized gas flows in a vortex pattern that atomizes plasma droplets in the chamber. The head also includes a plenum has uniform air pressure of the drying gas. A baffle plate forms the floor of the plenum having drying gas jets that supply drying gas to the chamber. The atomized plasma droplets evaporate in the presence of the drying gas emitted from the jets to obtain dried plasma particles and humid air. A capture filter captures the dried plasma particles and allows the humid air to pass. The humid air passes through the gas outlet and the exhaust port.
Owner:VELICO MEDICAL INC

Methods for a spray drying system

The present invention includes a spray drying disposable device for use in a spray drying system. The disposable has a spray drying head and a plasma drying chamber. The head has a spray dry nozzle assembly in fluid communication with the plasma source and the pressurized aerosol gas source. The pressurized gas flows in a vortex pattern that atomizes plasma droplets in the chamber. The head also includes a plenum has uniform air pressure of the drying gas. A baffle plate forms the floor of the plenum having drying gas jets that supply drying gas to the chamber. The atomized plasma droplets evaporate in the presence of the drying gas emitted from the jets to obtain dried plasma particles and humid air. A capture filter captures the dried plasma particles and allows the humid air to pass. The humid air passes through the gas outlet and the exhaust port.
Owner:VELICO MEDICAL INC

Increasing energy gain in magnetically confined plasma by increasing edge temperature: super-XT divertor

An annular confinement plasma vessel having a substantially symmetric magnetically confinement plasma region wherein the plurality of magnetic field coils are configured to provide at least one X-point and direct plasma particles from the magnetically confinement region to the divertor target; and wherein the total magnetic field strength (including all components of the magnetic field) at the divertor target is lower than the total magnetic field strength (including all components of the magnetic field) at a location between the divertor target and the X point on the last closed flux surface of the SOL closest to the divertor target. When the mean free path of the neurons is longer than the width of the SOL, the two critical functions can be separated: a) withstanding high heat flux, and b) pumping plasma particles to maintain low density.
Owner:迈克尔·托马斯·柯申鲁瑟

Disposable for a spray drying system

The present invention includes a spray drying disposable device for use in a spray drying system. The disposable has a spray drying head and a plasma drying chamber. The head has a spray dry nozzle assembly in fluid communication with the plasma source and the pressurized aerosol gas source. The pressurized gas flows in a vortex pattern that atomizes plasma droplets in the chamber. The head also includes a plenum has uniform air pressure of the drying gas. A baffle plate forms the floor of the plenum having drying gas jets that supply drying gas to the chamber. The atomized plasma droplets evaporate in the presence of the drying gas emitted from the jets to obtain dried plasma particles and humid air. A capture filter captures the dried plasma particles and allows the humid air to pass. The humid air passes through the gas outlet and the exhaust port.
Owner:VELICO MEDICAL INC

Finishing apparatus for a spray drying system

The present invention includes a spray drying disposable device for use in a spray drying system. The disposable has a spray drying head and a plasma drying chamber. The head has a spray dry nozzle assembly in fluid communication with the plasma source and the pressurized aerosol gas source. The pressurized gas flows in a vortex pattern that atomizes plasma droplets in the chamber. The head also includes a plenum has uniform air pressure of the drying gas. A baffle plate forms the floor of the plenum having drying gas jets that supply drying gas to the chamber. The atomized plasma droplets evaporate in the presence of the drying gas emitted from the jets to obtain dried plasma particles and humid air. A capture filter captures the dried plasma particles and allows the humid air to pass. The humid air passes through the gas outlet and the exhaust port.
Owner:VELICO MEDICAL INC

Oxygen-nitrogen co-doped hollow carbon nanoparticles, preparation method thereof and application of oxygen-nitrogen co-doped hollow carbon nanoparticles in electrosynthesis of hydrogen peroxide

The invention provides an oxygen-nitrogen co-doped hollow carbon nanoparticle, a preparation method thereof and application of the oxygen-nitrogen co-doped hollow carbon nanoparticle in electro-synthesis of hydrogen peroxide, and belongs to the technical field of electro-catalysis. The preparation method comprises the following steps: by taking carbon nanoparticles as a base material, firstly bombarding the surfaces of the carbon nanoparticles through high-energy plasma particles generated by radio frequency excitation in an oxygen-containing atmosphere, forcing carbon-carbon bonds in a carbon material to break, and generating a strong ablation effect on a graphite layer of carbon, thereby forming a special hollow carbon structure; a large number of oxygen atoms can be introduced in the ablation process of the graphite layer, and the geometric configuration of the graphite layer can be adjusted through the type of excited atmosphere and the reaction temperature, so that the oxygen-doped hollow carbon nanoparticles with excellent electro-catalytic performance are obtained; after the oxygen doping reaction is finished, the oxygen-containing atmosphere is switched into the nitrogen-containing atmosphere, and the oxygen-nitrogen co-doped hollow carbon nanoparticle catalyst is prepared and can be used for electro-catalytic synthesis of hydrogen peroxide. The preparation method is simple, efficient, environmentally friendly and beneficial to industrial production.
Owner:ZHEJIANG YIPAI TECHNOLOGY CO LTD

Cleaning a structure surface in an EUV chamber

In some general aspects, a surface of a structure within a chamber of an extreme ultraviolet (EUV) light source is cleaned using a method. The method includes generating a plasma state of a material that is present at a location adjacent to a non-electrically conductive body that is within the chamber. The generation of the plasma state of the material includes electromagnetically inducing an electric current at the location adjacent the non-electrically conductive body to thereby transform the material that is adjacent the non-electrically conductive body from a first state into the plasma state. The plasma state of the material includes plasma particles, at least some of which are free radicals of the material. The method also includes enabling the plasma particles to pass over the structure surface to remove debris from the structure surface without removing the structure from the chamber of the EUV light source.
Owner:ASML NETHERLANDS BV

Plasma composition control method

The invention relates to the technical field of plasma application, and discloses a plasma composition control method, which comprises the following steps of: setting the range of a current change rate and adjusting the change rate of a power supply output current; designing a control algorithm based on a dynamic response model between the current change rate and the plasma reaction; a feedback control system is configured based on the plasma state monitored in real time; in the judgment process, when blockage is carried out, the plasma state is adjusted by detecting various process parameters, and the current change rate and the various process parameters are optimized according to the detection result in the adjustment process. By introducing the current change rate, namely the current acceleration, as a key control parameter, regulation and control of the plasma particle density and charge distribution by the current are realized, a plasma composition regulation effect which is more efficient and more controllable compared with traditional constant current or constant voltage control is obtained, and the precision and consistency of material treatment are improved.
Owner:HEFEI YIMITE TECH CO LTD

Positioning mechanism for plasma coating

The invention discloses a positioning mechanism for plasma coating, which relates to the field of plasma coating equipment and comprises a coating box, an upper cavity cover is fixed on the inner top wall of the coating box through screws, a lower cavity cover matched with the upper cavity cover is arranged below the upper cavity cover, and a coating nozzle is mounted in the center of the top of the upper cavity cover. The coating nozzle penetrates through the cover body and the box body through a connecting pipe and is connected with an external plasma generator; protective shells are fixed to the inner walls of the two sides of the lower cavity cover correspondingly, positioning mechanisms are arranged in the protective shells, the two positioning mechanisms are each composed of a clamping assembly and an alternate contraction assembly, the clamping assemblies clamp, position and rotate a base material, the alternate contraction assemblies switch clamping and positioning points of the base material after the clamping assemblies rotate, and the clamping assemblies are fixed to the lower cavity cover; according to the invention, the dynamic rotation of the base material in the coating process is realized, a new contact positioning point is automatically switched, the problem of the contact blind area of a fixed clamp is thoroughly eliminated, and plasma particles are uniformly deposited.
Owner:SOUTH CHINA UNIV OF TECH +1

Display panel, display device thereof and preparation method

The embodiment of the invention provides a display panel, a display device thereof and a preparation method. The display panel comprises a first substrate, a cofferdam and a second substrate. A plurality of plasma cavities are defined by the cofferdams, and plasma particles are contained in the plasma cavities. The second substrate is located on the side, away from the first substrate, of the cofferdam. A gap exists between at least part of the cofferdam and the second substrate. The display area comprises a plurality of expansion supporting structures, and the expansion supporting structures are located between the first substrate and the second substrate. The side, facing the first substrate, of the expansion supporting structure is in contact with the first substrate or / and the cofferdam, and the side, away from the first substrate, of the expansion supporting structure is in contact with the second substrate, so that when the display panel is pressed, the expansion supporting structure provides supporting force, and the influence that the cofferdam is directly pressed to deform and the like is avoided; the pressure resistance of the display panel is improved, and the durability of the display panel is further improved.
Owner:SHANGHAI TIANMA MICRO ELECTRONICS CO LTD

A plasma display module and plasma display screen with a polymer dielectric coating

ActiveCN224457193USolve uneven conditionsHigh compressive strengthPolymer dielectricsPlasma particle
This utility model relates to the field of electronic paper display technology, specifically to a plasma display module with a polymer dielectric coating, comprising: a first substrate and a second substrate, the second substrate being disposed opposite to the first substrate, forming a plasma display cavity between the first and second substrates, the plasma display cavity being filled with plasma particles; a pixel electrode layer is disposed on the surface of the second substrate facing the first substrate, a filter layer is disposed on the surface of the first substrate facing the second substrate, and a conductive dielectric layer is disposed on the surface of the filter layer facing the second substrate; a polymer dielectric coating is disposed on the surface of the conductive dielectric layer facing the second substrate or the surface of the pixel electrode layer facing the first substrate. The polymer dielectric coating in this utility model possesses the characteristics of strong vertical conductivity and weak horizontal conductivity, which can effectively reduce the oblique electric field and help particles move orderly between the upper and lower substrates, thereby eliminating image retention.
Owner:WUXI VISION PEAK TECH

Low-additive migration transparent adhesive film and preparation method thereof

The invention discloses a low-additive migration transparent adhesive film and a preparation method thereof, and relates to the technical field of photovoltaic adhesive films. The low-additive migration transparent adhesive film comprises an EVA upper layer, a POE middle layer and an EVA lower layer which are arranged in a laminated manner, wherein the EVA upper layer and the EVA lower layer are made of EVA materials, the POE middle layer is made of POE materials, the aluminum-doped zinc oxide modified resin and the thermal initiator are added into the POE materials, and the aluminum-doped zinc oxide modified resin and the thermal initiator can cooperatively regulate and control the surface state, dispersity and surrounding medium environment of aluminum-doped zinc oxide plasma particles, so that the thermal stability of the aluminum-doped zinc oxide plasma particles is improved, and the service life of the aluminum-doped zinc oxide plasma particles is prolonged. According to the present invention, with the POE resin as the auxiliary agent, the plasma resonance condition is met, the pre-curing of the adhesive film during the plasticizing extrusion is easily achieved, the stability of the auxiliary agent in the POE resin is significantly increased, the auxiliary agent migration rate is substantially reduced, and the effective control of the auxiliary agent is achieved so as to reduce the auxiliary agent loss and prolong the service life of the assembly.
Owner:NINGBO EXCITON TECH +1

A method of plasma direct deinking

The application relates to a plasma direct deinking method, belonging to the paper deinking technical field.The plasma direct deinking method is characterized in that: a plasma spray gun with a special electrode structure is designed and manufactured, ionized working gas is used as a working medium, a plasma jet is generated to directly process the surface of paper materials, and different carrier gases are used according to different inks.The application uses ionized gas instead of chemical deinking agents, adopts a direct surface processing method, and under the bombardment of plasma particles, the combination of ink components with paper fibers is lost, and the pigments and other particles in the components are stripped from the surface of the paper, so that the ink on the surface of the paper is directly removed.The application can obtain a plasma direct deinking method.
Owner:BEIJING TAIRUIXINNA TECH CO LTD

Display panel and display device

A display panel comprises: a first substrate; the first electrode layer is located on the first substrate; a first weir layer and a second weir layer on the first electrode layer; the second electrode layer is positioned on one side, far away from the first substrate, of the first weir layer and the second weir layer; the second substrate is located on the side, away from the first substrate, of the second electrode layer. The first weir layer includes a plurality of first weir structures. The second weir layer includes a plurality of second weir structures. Each first weir structure surrounds a plurality of plasma particles in a respective one of the plurality of sub-pixels. Each first weir structure surrounds a respective second weir structure. Each second weir structure surrounds at least a portion of the plurality of plasma particles in the respective sub-pixel.
Owner:BOE TECHNOLOGY GROUP CO LTD +1

Spray Drying System

The present invention includes a spray drying disposable device for use in a spray drying system. The disposable has a spray drying head and a plasma drying chamber. The head has a spray dry nozzle assembly in fluid communication with the plasma source and the pressurized aerosol gas source. The pressurized gas flows in a vortex pattern that atomizes plasma droplets in the chamber. The head also includes a plenum has uniform air pressure of the drying gas. A baffle plate forms the floor of the plenum having drying gas jets that supply drying gas to the chamber. The atomized plasma droplets evaporate in the presence of the drying gas emitted from the jets to obtain dried plasma particles and humid air. A capture filter captures the dried plasma particles and allows the humid air to pass. The humid air passes through the gas outlet and the exhaust port.
Owner:VELICO MEDICAL INC

Snap-fit plasma display module and plasma display

A snap-fit plasma display module includes a first substrate and a second substrate. A plasma display cavity is formed between the first substrate and the second substrate, and the plasma display cavity is filled with plasma particles. A surface of the first substrate is provided with a filter layer, and a surface of the second substrate facing the first substrate is provided with a pixel electrode layer. A plasma isolation structure extending toward the first substrate is arranged on the pixel electrode layer, a surface of the filter layer facing the second substrate is provided with a snap-fit structure, the snap-fit structure is adapted to the plasma isolation structure to fix the first substrate and the second substrate, and each of the surface of the filter layer facing the second substrate and a surface of the snap-fit structure facing the second substrate is provided with a conductive dielectric layer.
Owner:WUXI VISION PEAK TECH

A plasma irradiation platform simulating solar wind bombardment of space-grade chips

This invention discloses a plasma irradiation platform for simulating solar wind bombardment of aerospace-grade chips. This platform is designed to simulate the blinding effect of high-speed solar wind plasma particle streams on aerospace-grade electronic chips. Specifically, it relates to the fields of pulsed plasma sources and chip irradiation detection technology, including an irradiation host system, a multi-pulse high-voltage, high-current power supply, a power controller, a vacuum chamber, a vacuum pump assembly, a high-speed pulse intake valve, a stage, and a real-time chip failure monitoring system. This invention can be used to simulate the impact of multi-pulse high-speed plasma irradiation on aerospace-grade chips in space on chip failure. The target plasma generated by the plasma source designed in this invention has parameters close to those of solar wind plasma in a space environment, making it an effective means of simulating the blinding effect of this phenomenon on aerospace-grade electronic chips.
Owner:INST OF ENERGY HEFEI COMPREHENSIVE NAT SCI CENT (ANHUI ENERGY LAB)

Dried plasma system

The present invention includes a spray drying disposable device for use in a spray drying system. The disposable has a spray drying head and a plasma drying chamber. The head has a spray dry nozzle assembly in fluid communication with the plasma source and the pressurized aerosol gas source. The pressurized gas flows in a vortex pattern that atomizes plasma droplets in the chamber. The head also includes a plenum has uniform air pressure of the drying gas. A baffle plate forms the floor of the plenum having drying gas jets that supply drying gas to the chamber. The atomized plasma droplets evaporate in the presence of the drying gas emitted from the jets to obtain dried plasma particles and humid air. A capture filter captures the dried plasma particles and allows the humid air to pass. The humid air passes through the gas outlet and the exhaust port.
Owner:VELICO MEDICAL INC

Dried Plasma System

The present invention includes a spray drying disposable device for use in a spray drying system. The disposable has a spray drying head and a plasma drying chamber. The head has a spray dry nozzle assembly in fluid communication with the plasma source and the pressurized aerosol gas source. The pressurized gas flows in a vortex pattern that atomizes plasma droplets in the chamber. The head also includes a plenum has uniform air pressure of the drying gas. A baffle plate forms the floor of the plenum having drying gas jets that supply drying gas to the chamber. The atomized plasma droplets evaporate in the presence of the drying gas emitted from the jets to obtain dried plasma particles and humid air. A capture filter captures the dried plasma particles and allows the humid air to pass. The humid air passes through the gas outlet and the exhaust port.
Owner:VELICO MEDICAL INC

Low-pressure plasma particle simulation method based on variational auto-encoder

The invention discloses a low-pressure plasma particle simulation method based on a variational auto-encoder, and the method comprises the following steps: firstly, building a plasma particle model which is used for generating a data set needed by neural network training; constructing a neural network framework based on a variational auto-encoder to reconstruct a source field of the model and derive a corresponding solution field; designing a loss function according to a closure relationship of the neural network, and optimizing hyper-parameters of the neural network; and training the network until the loss function converges to a predetermined threshold. According to the method, the source field of the plasma particle model can be accurately reconstructed, and the solution field can be accurately solved. Compared with a traditional particle simulation method based on a neural network, the problems that a complex source field is difficult to express and the equation solving precision is insufficient are effectively solved, and the accurate mapping relation can be efficiently trained through limited sample data.
Owner:SOUTHEAST UNIV

Plasma display module, display device and manufacturing method of plasma display module

The invention relates to a plasma display module, a display device and a manufacturing method of the plasma display module. The plasma display module comprises a first substrate and a second substrate which are oppositely arranged; a first lens layer and a conductive layer are sequentially arranged on the side, facing the second substrate, of the first substrate, and a plurality of first grooves arranged at intervals are formed in the side, facing the second substrate, of the first lens layer. A second lens layer and a pixel electrode layer are sequentially arranged on the side, facing the first substrate, of the second substrate, a plurality of second grooves arranged at intervals are formed in the side, facing the first substrate, of the second lens layer, each first groove corresponds to the corresponding second groove, a display cavity is defined by the first grooves and the second grooves, and the display cavities are filled with plasma particles; the supporting pieces are arranged in the display cavity at intervals so as to support the first substrate and the second substrate and keep the distance between the first substrate and the second substrate. According to the technical scheme, the problems that an existing plasma display module is complex in manufacturing process, high in manufacturing cost, poor in optical performance, low in structural efficiency and the like are solved.
Owner:CHONGQING HKC OPTOELECTRONICS TECH CO LTD

Plasma particle and oscillation propagation velocity measuring device and measuring method thereof

The invention provides a plasma particle and oscillation propagation velocity measuring device and a measuring method thereof, and relates to the technical field of electric propulsion. An X-shaped groove is formed in the end face of a base body and used for fixing electrodes in the x direction and the y direction, a through hole is formed in the middle of the end face of the base body, and a mounting component is arranged in the through hole; the two electrodes in the Z direction are fixed through the two mounting holes in the mounting component, the plasma particle velocity and the plasma oscillation propagation velocity can be measured, and the whole device is simple, low in cost, small in occupied space and convenient to transport. The technical problems that in the prior art, a traditional plasma velocity measuring device is high in cost, complex and difficult to transport between facilities are solved.
Owner:BEIHANG UNIV

Operator learning based low-pressure plasma particle simulation method and system

The application discloses a low-pressure plasma particle simulation method and system based on operator learning, and relates to the technical field of low-pressure plasma. The application comprises the following steps: constructing a plasma particle model, giving a training task set and a task target set of the plasma particle model; constructing an operator neural network based on operator learning based on a field equation of the plasma particle model, designing corresponding constraint conditions and a loss function, and selecting appropriate neural network parameters; training the constructed operator neural network, ending the training after the loss function value gradually converges to a set value; and taking the trained operator neural network as a field equation solver of the plasma particle model to calculate and output simulation results of the plasma particle model. The application can significantly improve the simulation efficiency of the particle model under the condition of the same model structure and different parameters, and overcomes the defects of the traditional particle simulation method, such as dependence on a large number of iterations for field equation solving and high calculation cost.
Owner:SOUTHEAST UNIV

Driver for a particle accelerator

A driver (1) for a plasma particle accelerator includes a plasma (10) and laser system(s) (2) that generate first and second pulses. The first pulse (4) has a duration less than the electron plasma period. The second pulse (6) is temporally smooth and has a duration greater than the electron plasma period and less than the ion plasma period. The first pulse generates a plasma wake and the second pulse interacts with the wake to form red and blue-shifted sidebands. The driver also includes a dispersive optical device (20) that introduces a chromatic dispersion to shift the spectral phases of the red and blue-shifted sidebands, to temporally shift them relative to each other, so as to form coincident pulses (22) for generating a plasma wake in a plasma particle accelerator (26).
Owner:OXFORD UNIVERSITY INNOVATION LTD

Display panel and display apparatus

A display panel (DPL) includes a first base substrate (BS1); a first electrode layer (E1) on the first base substrate (BS1); a first dam layer (DL1) and a second dam layer (DL2) on the first electrode layer (E1); a second electrode layer (E2) on a side of the first dam layer (DL1) and the second dam layer (DL2) away from the first base substrate (BS1), and a second base substrate (BS2) on a side of the second electrode layer (E2) away from the first base substrate (BS1). The first dam layer (DL1) includes a plurality of first dam structures (DS1). The second dam layer (DL2) includes a plurality of second dam structures (DS2). A respective first dam structure (DS1) surrounds a plurality of plasma particles (PP) in a respective subpixel (Sp) of a plurality of subpixels (Sp). The respective first dam structure (DS1) surrounds a respective second dam structure (DS2). The respective second dam structure (DS2) surrounds at least a portion of the plurality of plasma particles (PP) in the respective subpixel (Sp).
Owner:BOE TECHNOLOGY GROUP CO LTD +1

Method for depositing highly doped aluminum nitride piezoelectric material

The invention relates to a method for manufacturing a doped wurtzite aluminum nitride piezoelectric thin film material, which method comprises the steps of: providing a deposition device, such as a pulsed lased deposition device or a physical vapor deposition device, with a target and a substrate, wherein the target material is a doped aluminum nitride composite, wherein the doping element is a rare earth element, preferably scandium; depositing a first layer of the target material on the substrate by operating the deposition device, wherein the kinetic energy of the plasma particles being deposited is above a first threshold value; depositing a second layer of the target material on top of the first layer by operating the deposition device, wherein the kinetic energy of the plasma particles being deposited is below a second threshold value and wherein the first threshold value is larger than the second threshold value.
Owner:LAM RES CORP