2123results about "Automatic grinding control" patented technology

The invention relates to the technical field of grinding, in particular to a self-adaptive force control grinding system and method for a complex curved surface machining robot. Three-dimensional point cloud data of a workpiece are obtained through machine vision, gridding processing is carried out, and normal vector and curvature characteristic parameters are calculated; performing operation area division and operation path planning based on curvature characteristics; calculating operation parameters according to the normal vector and curvature characteristics; a self-adaptive impedance control algorithm is adopted, the polishing force is monitored in real time through a force sensor, and the rigidity and damping parameters of the robot are dynamically adjusted; and performing defect identification on the surface image of the processed workpiece by using the deep learning model, and when defects are identified, re-planning the operation path. According to the method, self-adaptive grinding of the complex curved surface workpiece is achieved, and the grinding efficiency and quality of the complex curved surface can be improved.

The invention relates to the technical field of optical engineering, in particular to an AI silicon carbide lens-oriented aspheric laser polishing precision online detection and feedback system. Comprising a detection module; the data processing module is electrically connected with the detection module and used for constructing a lens surface three-dimensional model and calculating polishing precision parameters; the feedback control module is electrically connected with the data processing module, is used for generating a feedback control strategy and comprises a strategy generation unit and a parameter optimization unit; an execution module; and an intelligent learning module. According to the design, a laser measuring head, an energy sensor array and an environment sensor are integrated through the detection module, synchronous acquisition of multi-dimensional data such as surface profile, laser energy distribution and environment parameters is realized, and three-dimensional point cloud data with consistent time and space are generated through multi-modal fusion processing (time domain synchronization, space registration and feature enhancement) of the data preprocessing unit; the physical essence of the polishing process is completely represented, and the detection comprehensiveness and the data relevance are improved.

The invention discloses a metal grinding machine tool grinding wheel wear compensation type intelligent control system, and relates to the technical field of mechanical manufacturing automation, and the system comprises a contact type reference detection module which is used for obtaining the initial contour and reference wear loss of a grinding wheel through discrete point measurement in a non-machining state; the multi-parameter non-contact real-time detection module is used for collecting acoustic emission, vibration and spindle current signals in the grinding process through three types of sensors; the grinding environment sensing module collects the temperature of a grinding area and the cutting fluid concentration; the intelligent control unit receives reference data and an environment signal, performs deep learning on a wear loss prediction model after multi-source data fusion, performs periodic reference calibration, analyzes the dynamic wear loss, and synchronously transmits the data to the data storage and tracing module; the executing mechanism adjusts grinding wheel feed amount compensation according to the dynamic abrasion loss; and the data storage and tracing module stores full-process data in real time. According to the system, high-precision and real-time wear compensation is achieved, the machining precision and consistency are improved, and high-end manufacturing requirements are met.

The invention discloses an automatic dovetail welding seam grinding control method based on robot visual positioning, and relates to the technical field of visual positioning. The method comprises the steps that after welding is completed, a dovetail welding seam image is collected and converted into a three-dimensional coordinate through a vision algorithm, and a three-dimensional point cloud is generated; smooth interpolation is performed on the three-dimensional point cloud through a B spline curve method to obtain a parameterized curve, and a control point set is optimized through a genetic algorithm to generate a global optimal polishing path; the polishing robot executes a task according to a path, a tail end sensor collects a real-time path and calculates a deviation value with a global path, and when the deviation value exceeds a preset threshold value, inverse kinematics is triggered to solve and correct the path; the hardness of the dovetail weld is measured through laser-induced breakdown spectroscopy, a comprehensive hardness value is obtained in combination with a matrix hardness database, meanwhile, a visual sensor collects the surface state, and polishing process parameters are dynamically adjusted according to the surface state; after the task is completed, the welding seam angle and flatness are detected. According to the method, the optimal path is generated through visual positioning, and automatic grinding of the dovetail welding seam is achieved.

The invention provides a grinding control method, device and equipment for a transmission gear and a storage medium, and the method comprises the steps that a three-dimensional digital model of the transmission gear to be ground is constructed according to multi-dimensional physical parameters and material parameters collected by the transmission gear to be ground; a multi-stage grinding process parameter set is generated according to the three-dimensional digital model and a process parameter database; determining grinding track data of the transmission gear to be ground according to the multi-stage grinding process parameter set and the three-dimensional digital model; performing dynamic simulation on the grinding track data, and optimizing the grinding track data based on simulation feedback; and grinding the transmission gear to be ground according to the optimized grinding track data. A personalized three-dimensional digital model is constructed by collecting multi-dimensional physical and material parameters, accurate generation and optimal control of a grinding track are achieved based on the model and a multi-stage process parameter set, and the machining precision of the gear grinding process is effectively improved.

The invention relates to the technical field of machining, in particular to an intelligent control system and method for sapphire substrate polishing, and the method comprises the following steps: S1, surface topography data acquisition: collecting surface roughness data and a three-dimensional topography distribution diagram of a sapphire substrate in real time; s2, generating characteristic parameters: extracting the surface waviness, the local recess depth, the bulge density, the lattice distortion index and the residual stress distribution gradient as the characteristic parameters; s3, dynamic parameter adjustment: generating a dynamic adjustment instruction of the polishing pressure, the rotating speed of the polishing disk and the supply rate of the polishing solution; s4, distribution optimization of the polishing solution: realizing uniform coverage of the polishing solution on the surface of the substrate; s5, stress real-time monitoring: generating a stress abnormity early warning signal; s6, outputting a closed-loop control instruction: feeding back a stress abnormity early warning signal to the adaptive control model, and iteratively correcting the dynamic adjustment instruction; according to the method, the risks of stress concentration and fatigue damage can be reflected in real time, and the safety and high efficiency of the polishing process are ensured.

The invention relates to the technical field of optical manufacturing and processing control, in particular to an intelligent control system of lens processing equipment, which comprises a process relationship pre-storage module, a pressure distribution acquisition module, a surface shape error prediction module, a pressure compensation decision module, an actuator control module and a processing effect verification module. Wherein the process relation pre-storage module is used for establishing a pressure-removal rate relation mapping table; the pressure distribution acquisition module is used for acquiring pressure distribution data; the surface shape error prediction module is used for predicting surface shape error data generated by the lens; the pressure compensation decision module is used for generating a regionalized pressure compensation amount; and the actuator control module is used for dynamically adjusting the pressure applied to different areas of the lens by the polishing head. According to the method, by constructing the pressure-removal rate mapping and closed-loop self-calibration mechanism, intelligent pressure regulation and control and surface shape error dynamic correction in the lens polishing process are achieved, and the machining precision and stability are remarkably improved.

The invention particularly relates to a grinding force closed-loop control and flutter suppression system for crankshaft variable stiffness machining, and aims to solve the problems of unstable grinding force, flutter and surface defects caused by time-varying stiffness characteristics of a crankshaft due to a multi-crank throw and cantilever supporting structure. The system comprises a grinding force detection module, a control module and an execution module. The grinding force detection module is arranged in a grinding wheel and crankshaft contact area and collects grinding force signals in real time. The control module receives an actual grinding force signal, compares the actual grinding force signal with a target value, and outputs a compensation instruction and a suppression instruction; the compensation instruction is generated by adopting a self-adaptive PID or fuzzy PID algorithm based on force deviation, and the grinding wheel feeding speed or the main shaft rotating speed is dynamically adjusted to stabilize the grinding force; and extracting a high-frequency component of the force signal as a flutter feature, identifying a flutter bud through time-frequency analysis, and generating an anti-phase displacement instruction to suppress flutter. The execution module adjusts feeding or rotating speed according to the compensation instruction and adjusts radial displacement of the crankshaft or the grinding wheel according to the suppression instruction.

The invention belongs to the field of robot polishing and metal material processing and manufacturing, and discloses a steel plate surface defect detection and self-adaptive polishing system and method, and the system comprises a surface defect detection system, a three-dimensional contour detection system, a roller bed control system, a robot polishing system and a server; the surface defect detection system is used for acquiring types and position information of defects; the three-dimensional contour detection system is used for accurately measuring depth information of the defect; the roller bed control system is used for controlling the movement of the roller bed to transfer the steel plate; the server is used for data interaction and storage among the surface defect detection system, the three-dimensional contour detection system, the roller bed control system and the robot grinding system; and the robot polishing system accurately polishes the surface defects of the steel plate according to the defect position and depth data in the server. The full-process intelligent operation of steel plate surface defect detection, defect three-dimensional contour scanning and robot self-adaptive grinding is achieved, and the automation level and the production efficiency of a production line are effectively improved.

The invention provides a wafer thinning equipment control method and device, electronic equipment and a storage medium, and relates to the technical field of wafer thinning. The method comprises the following steps: monitoring spreading and thinning behaviors of a spin-coating liquid film in real time and generating a residual layer distribution diagram; according to an area indicated by the residual layer distribution map, obtaining local thickness information by analyzing a fluorescence signal received from the area; after a laser beam is used for scanning the surface of the wafer, micro-vibration signals are recognized and extracted by analyzing reflected light signals; dividing the surface of the wafer into a plurality of grid areas; and the risk of generating cracks in each grid area is evaluated, and a wafer surface risk thermodynamic diagram used for controlling the grinding head and the grinding fluid is generated. The method aims at solving a series of problems caused by a microcosmic residual layer on the surface of the wafer or surface energy difference in the wafer thinning process, early and accurate sensing of microcosmic abnormity on the surface of the wafer is achieved, and a control system is guided to conduct regional and self-adaptive grinding parameter adjustment.

The invention belongs to the technical field of metallurgical engineering, and relates to an intelligent guide grinding system and method for the surface of a casting blank. By arranging the parameter initialization module, the parameter compensation module and the deviation correction module, the problem of unstable grinding quality caused by grinding force fluctuation, temperature change and material difference in the casting blank surface grinding process is solved. The method specifically comprises the steps that the feeding speed is dynamically adjusted by collecting grinding force data in real time, thermal deformation compensation is conducted according to the casting blank temperature and the steel grade characteristics, the upper limit value is determined based on quantitative analysis of surface state parameters and historical standard samples, and adaptive adjustment of the next round of coping parameters is achieved. According to the method, the consistency of the grinding depth is effectively improved, the over-grinding risk in the high-temperature casting blank grinding process is prevented, closed-loop optimization and continuous improvement of the grinding process are achieved, the stability and reliability of the casting blank surface grinding quality are improved, and it is ensured that the product quality cannot be affected by surface defects in the subsequent rolling process of the casting blank.

The present invention discloses a quartz boat polishing device, which belongs to the field of quartz automatic polishing technology, comprising: a hanger, a cross bar fixedly installed on the upper surface of the hanger, a cross sliding mechanism slidably installed on the outer surface of the cross bar, and a polishing mechanism fixedly installed on the lower surface of the cross sliding mechanism, so that the cross sliding mechanism can push the polishing mechanism jacket to the outer surface of the quartz boat, so that the polishing mechanism performs a horizontal pushing type polishing of the outer surface of the quartz boat. The present application uses the design of the polishing mechanism to automatically adapt to the protrusions and depressions on the outer surface of the quartz boat when polishing the quartz boat. This feature makes the polishing process more precise. No matter how complex the surface shape of the quartz boat is, it can ensure that the polishing mechanism maintains a suitable polishing pressure and contact state with the surface of the quartz boat, effectively avoiding the problem of over-polishing or under-polishing, and greatly improving the polishing accuracy and the quality of the finished product of the quartz boat.

The invention discloses a part polishing track generation method and device, electronic equipment and a storage medium. The method comprises the steps that contour features corresponding to a first contour presented by a to-be-polished part under a first visual angle are determined; matching in a template library based on the contour features, and determining a target part template; a plurality of candidate part templates are stored in the template library; different second contours exist between the candidate part templates, and at least part of the second contours in the candidate part templates are used for indicating the edge position information of the part needing to be polished; the second contour is a contour under the first visual angle; and based on the first polishing track associated with the target part template, a second polishing track corresponding to the to-be-polished part under the first visual angle is determined. According to the scheme, the proper part template can be matched based on the contour features of the to-be-polished part, so that the to-be-polished part can be quickly recognized, and the polishing track can be quickly determined.

The invention relates to the technical field of precision machining, discloses a double-shaft DFG grinding machine Z1-Z2 linkage removal amount control and grinding wheel loss optimization method and system, and aims to solve the problems of unreasonable Z1-Z2 removal amount distribution, inaccurate grinding wheel loss control and poor wafer surface damage adaptability of existing DFG grinding. According to the method and system, Z1 rough grinding parameters are determined and adjusted through multi-objective optimization and self-adaptive control by means of the initial morphology and material characteristics of a wafer; in combination with a Z1 result, a deep learning model is utilized to intelligently distribute Z2 accurate grinding removal amount and parameters, and adaptive adjustment and abnormal Air Cut are realized; and meanwhile, the grinding parameters are continuously optimized by adopting the grinding wheel loss prediction model. By adopting the technical scheme, the grinding efficiency and precision can be remarkably improved, the service life of the grinding wheel is prolonged, the cost is reduced, and the problems of removal amount distribution, grinding wheel loss and wafer damage are solved.

The utility model discloses a self-adaptive track sanding device for a complex curved surface. The device comprises a flange seat, a universal cross arranged at the front end of the flange seat, a motor body arranged in the universal cross, a brake ring and a polishing disc, wherein the brake ring and the polishing disc are arranged at the output end of the motor body; the universal cross is of a circular ring structure and is rotationally connected with the front end of the flange base through a first pin shaft, the upper portion of the motor body penetrates through the universal cross, and the motor body and the universal cross are rotationally connected through a second pin shaft. Connecting lines respectively formed by the first pin shaft and the second pin shaft are crossed, and the motor body realizes two-degree-of-freedom rotation through the first pin shaft and the second pin shaft. The motor body rotates through the universal cross to adjust the binding face between the grinding disc and the to-be-ground curved surface to achieve self-adaption to the to-be-ground curved surface, it can be guaranteed that the normal of the grinding disc coincides with the normal of the curved surface without precisely adjusting the posture and the positioning precision of a robot, and therefore the good grinding effect is obtained.

The invention relates to the technical field of material polishing, and discloses a PEEK material composite polishing method and system based on multi-process collaboration.The method comprises the steps that surface detection is conducted on a PEEK material, and crystallinity gradient distribution information is obtained; according to the crystallinity gradient distribution information, process parameter calculation is conducted on the crystalline area and the amorphous area, and a polishing process parameter combination is obtained; inputting the polishing process parameter combination into multi-process collaborative composite polishing equipment, and carrying out gradient interface strengthening polishing on the PEEK material to obtain an interface strengthening polishing semi-finished product; and dynamically adjusting the process parameters of the semi-finished interface strengthening and polishing product to obtain the finished interface strengthening and polishing product, so that accurate division of a crystallization area and an amorphous area of the PEEK material and differential process parameter calculation are realized, and the composite polishing precision of the PEEK material is improved.

The embodiment of the invention provides a cleaning and polishing control system and method for a track axle box, which is applied to automatic axle box cleaning and polishing equipment and comprises the following steps: generating an optimal cleaning path and an optimal polishing path according to an axle box three-dimensional model or visual scanning data; pressure and rotating speed parameters are dynamically adjusted according to sensor feedback, operation parameters and fault logs are recorded, and quality tracing and time sequence optimization of cleaning and polishing are supported; the axle box is fixed to a station through a conveying belt or a mechanical arm, and a visual system scans and positions the surface state; large-particle dirt is removed through high-pressure spraying, grease is dissolved through a chemical cleaning agent, and waste water is recycled through a filtering system; the mechanical arm preliminarily polishes the rusted and burr areas according to a preset path; the pressure and rotating speed of the grinding head are adjusted according to feedback of the sensor to realize uniform surface polishing; the cleaning efficiency is improved, the production efficiency is improved, the labor intensity is reduced, the production cost is reduced, customized solutions are adapted according to different production environments and production modes, and an automatic smart factory is built.

The utility model relates to the field of automatic cutting equipment, in particular to quenching pipe automatic feeding and cutting equipment, which comprises a control system, a feeding device, a cutting device and a cut-off detection mechanism, and the feeding device, the cutting device and the cut-off detection mechanism are respectively in control connection with the control system. A cut-off detection mechanism is arranged to replace a correlation type photoelectric sensor in the prior art, and the cut-off detection mechanism specifically comprises a driven detection pressing wheel, a detection block and a proximity switch; a detection block and a proximity switch in the cut-off detection mechanism can be arranged far away from the cutting cavity or can be isolated from the cutting cavity, so that dust, water or other cooling liquid, sand and other impurities generated in the quenching pipe cutting process cannot affect detection of the proximity switch, and the accuracy of cut-off detection of the quenching pipe is guaranteed; automatic feeding and cutting of the quenching pipe are achieved, the production efficiency is improved, and the labor cost is saved.

The invention is suitable for the technical field of pipe outer circle grinding, and provides a PE pipe outer circle grinding device which comprises a workbench, a grinding mechanism used for grinding a pipe is arranged on the workbench, a supporting frame is horizontally and slidably connected with a moving seat, and the supporting frame is fixedly connected with a second motor. An output shaft of the second motor is in threaded connection with a moving seat, the moving seat is fixedly connected with an electric lifting seat, and the telescopic end of the electric lifting seat is fixedly connected with a guide sleeve; the pipe polishing machine further comprises a feeding speed optimization system which can regulate and control the extension speed of the electric lifting seat by comprehensively evaluating the polishing state of the abrasive belt, the clamping state of the clamping mechanism and the stable state of the pipe, and then the feeding speed during pipe polishing is optimized. The feeding speed self-adaptive adjustment under the interference of multiple factors such as abrasive belt abrasion, pipe temperature change and clamping force fluctuation is achieved.

The invention belongs to the technical field of precision machining and in-situ measurement, and discloses an in-situ measurement and bidirectional tool setting integrated system and method for an internal thread grinding machine. Various system errors and random errors are effectively eliminated through a non-hardware error compensation model and a high-fidelity data processing algorithm, in-situ measurement of the internal thread is completed in a modularized mode, and high-precision and high-efficiency in-situ automatic measurement of key parameters such as the pitch diameter, the thread pitch and the thread angle of the thread is achieved. The system can be directly integrated on the internal thread grinding machine, measurement is rapidly completed after machining or between procedures, workpieces do not need to be disassembled, secondary clamping errors are effectively avoided, and the detection efficiency and consistency are greatly improved.

The invention provides a model training method, a silicon wafer processing method, a silicon wafer processing device, a storage medium and equipment. The model training method comprises the following steps: acquiring initial state information and target state information of a silicon wafer to be processed; through an action decision model, according to the initial state information and the target state information, machining action information for the machining machine table is generated; determining an award parameter corresponding to the processing action information, wherein the award parameter represents the processing quality and efficiency when the processing machine processes the to-be-processed silicon wafer based on the processing action information; if the reward parameter is not more than the preset condition, updating the initial action decision model according to the reward parameter to obtain an updated action decision model; and based on the updated action decision model, returning to execute the step of generating the processing action information through the action decision model according to the initial state information and the target state information until the reward parameter is greater than the preset condition, and obtaining a target action decision model. According to the invention, the processing machine table can be accurately adjusted.

The invention discloses a numerical control machine tool autonomous tool setting method based on 3D visual guidance. The method comprises the following steps: firstly, acquiring three-dimensional point cloud data of a cutter and a workpiece by using a 3D visual sensor and preprocessing; then, segmenting the point clouds through a region growing algorithm, realizing the separation of the tool point clouds and the workpiece point clouds, and extracting the point clouds of each cylindrical section of the workpiece; thirdly, based on a cylinder fitting algorithm, cylinder model fitting is conducted on the segmented tool and workpiece point cloud, and geometric parameters such as the axis direction, the radius and the center coordinate are obtained; calculating a relative position relation between the tool and the workpiece according to the geometric parameters, generating a tool setting path and converting the tool setting path into an NC code; and finally, the NC code is transmitted to a grinding machine control system through a grinding machine communication module, and tool setting operation is completed. The automatic tool setting device has the advantages that the relative position relation between the workpiece and the tool can be automatically measured in the machining process, automatic and rapid tool setting is completed, and the machining quality and efficiency are guaranteed.

The invention discloses an integrated tile-shaped magnet outer circle grinding device and method based on artificial intelligence, and belongs to the technical field of grinding machining. The integrated tile-shaped magnet outer circle grinding device comprises a feeding device, a grinding device and a visual detection device; the feeding device comprises a feeding conveying belt, a guide groove, a spring bin, a material blocking barrel, a feeding barrel, a magnetic suction cup, an electromagnetic push rod, a cooperative mechanical arm, a reset spring and a discharging conveying belt. The visual detection device comprises a magnetic shoe counting camera, an annular light source, a counting camera bracket, a measuring camera bracket, a backlight plate, an outer contour measuring camera, a positioning camera and a positioning camera bracket; integrated automatic operation of feeding, grinding, detection and discharging is achieved, the production efficiency is greatly improved, automatic counting, precision detection and discharging are completed through cooperation of visual detection and the conveying belt, the manual operation intensity is effectively reduced, production interruption caused by personal errors is avoided, and the productivity in unit time is remarkably improved.

The invention belongs to the technical field of wafer processing, and particularly discloses an ultrasonic displacement vision cooperation wafer detection and edge grinding system. According to the invention, the control module coordinates the grinding mechanism, the wafer carrying table and the assembly integrated with displacement and visual detection, so that cooperative detection and edge grinding are realized. Specifically, the displacement detection module obtains the distance between the wafer and the grinding mechanism in real time, and an accurate physical reference is provided for compensation control; and the visual detection module captures continuous images during rotation of the wafer, so that the control module can extract micro texture features to identify the deviation state of the wafer. The combination of the two realizes the comprehensive real-time perception of the grinding working condition, and overcomes the limitation of insufficient perception. And finally, the control module fuses the displacement and offset information to generate an edge grinding instruction, and dynamically controls the grinding mechanism and the wafer carrying table to carry out linked rigid body transformation, so that real-time sensing information is directly converted into compensation action, and the problem of uneven grinding caused by insufficient dynamic compensation capability is effectively solved.

The invention belongs to the technical field of threaded pipe machining, and particularly relates to an intelligent control method, device and equipment for self-adaptive force control of a grinding device and a medium. Comprising the following steps that real-time data of a polishing device in the polishing process are collected; real-time data in the polishing process are analyzed, and control data of preset polishing force Fd are obtained; based on the control data of the preset polishing force, the polishing device is controlled in real time to reach the preset polishing force; by acquiring the polishing force data in real time and analyzing and acquiring the control data of the preset polishing force, the polishing quality of the pipeline is accurately controlled, so that the actual polishing force quickly and accurately approaches the preset polishing force, and the polishing effect on the threaded pipe is optimized.

The invention provides a visual guidance numerical control grinding and polishing surface quality real-time regulation and control method and system, and the method comprises the following steps: starting numerical control grinding and polishing equipment, checking a power supply, air pressure and the operation state of a robot, switching the equipment to an automatic operation mode, carrying out the registration of an industrial camera and a robot coordinate system through a calibration plate, and carrying out the real-time regulation and control of the robot. And establishing a mapping relationship between the image and the physical size. Workpiece surface images are collected in real time through linkage of a visual sensor and robot IO signals, characteristic parameters are analyzed through a convolutional neural network model, quality scores are generated, grinding and polishing parameters (the rotating speed of a main shaft is + / -500 RPM, the thrust of a bit force shaft is + / -10 N, and the adjustment amplitude is smaller than or equal to 20%) are dynamically adjusted in combination with a parameter optimization rule base and a PID algorithm, and the grinding and polishing precision is improved. A'detection-evaluation-regulation 'closed-loop control process is formed, the problem of material waste caused by the fact that the quality state cannot be fed back in real time in traditional offline detection is solved, self-adaptive response to surface topography changes is achieved by replacing experience preset parameters, and machining consistency is improved.

The invention discloses a self-adaptive grinding control method and system for a rigid contact network, and belongs to the technical field of maintenance of rail transit power supply equipment. The method comprises the following steps: acquiring pantograph-catenary action historical data of each position of the contact network along a busbar direction, and constructing a contact line damage index distribution curve; identifying a high damage interval based on the damage index, extracting roughness, ripple amplitude and oxidation thickness parameters, constructing a damage intensity vector, and calculating a damage grade score of each position by adopting a fuzzy comprehensive evaluation method; a preset polishing strategy library is matched according to the scoring result, a corresponding polishing wheel combination, the rotating speed and the contact pressure are determined, and a control parameter set is generated; the grinding device dynamically adjusts the working state according to the control parameters in the advancing process. The method achieves full-process self-adaptive closed-loop control of state recognition, strategy decision, execution control and quality feedback of contact line grinding operation.

The invention discloses precise honing equipment for a planetary reducer sun gear, and particularly relates to the field of sun gear finish machining, the precise honing equipment comprises a honing shell and an operation table fixedly connected in the honing shell, an angle adjusting assembly is installed on the operation table, and the output end of the angle adjusting assembly is connected with a first motor; the angle adjusting assembly is used for driving the first motor to move in the preset direction, the output end of the first motor is fixedly connected with a telescopic rod, the first motor is used for driving the telescopic rod to rotate, the telescopic rod is fixedly connected with a honing wheel, and the two sides of the operation table are fixedly connected with a first positioning support and a second positioning support correspondingly. Uniform radial expansion clamping is carried out from the inner hole of the sun gear through a conical rod-expansion block mechanism, centering clamping with the inner hole of a workpiece as the standard is achieved, clamping deformation is greatly reduced, the original precision of the workpiece is ensured, a reliable standard is laid for subsequent high-precision honing, and the yield is increased.

The invention provides a system and method for inhibiting wafer scratching in double-sided polishing and double-sided polishing equipment. The system comprises: a shunt manifold valve group, which shunts a polishing liquid main flow path into at least three independent branches respectively corresponding to the inner, middle and outer areas of a polishing pad; the at least three online heating units are respectively arranged on each branch to independently heat the polishing solution; the temperature monitoring device comprises at least three temperature sensors which are arranged in different areas and is used for monitoring the temperature of the three areas in real time; and the control system independently regulates and controls the power of each heating unit based on temperature feedback, a preset non-uniform radial temperature gradient is established and maintained on the polishing pad, and the gradient is configured that the temperature of the middle area is not lower than that of the inner area, and the temperature of the inner area is higher than that of the outer area. Thermal deformation of the polishing pad is optimized through partitioned independent temperature control, and wafer scratching is effectively restrained.

The invention relates to the technical field of machining, in particular to a grinding wheel polishing process monitoring system. The device specifically comprises the following modules: a grinding wheel polisher is used for polishing the surface of a workpiece; the data acquisition module is used for acquiring operation parameters in the grinding wheel polishing process in real time; the data processing and analyzing module is used for processing and analyzing the acquired operation parameters; the visual monitoring module is used for carrying out visual display on the analyzed information; the intelligent adjusting module automatically adjusts operation parameters of the grinding wheel polisher according to the analysis result; and the fault detection alarm module is used for detecting abnormal conditions in the grinding process and sending out an alarm signal. The novel grinding wheel polishing process monitoring system provided by the invention has the functions of comprehensive data acquisition, real-time data processing and analysis, intelligent fault detection and alarm, friendly user interaction interface and remote monitoring and alarm, and has important practical significance for improving the efficiency, quality and safety of the polishing process.