1173results about "Abrasive surface conditioning devices" patented technology

A method comprises planarizing a substrate material with a functionalized chemical planarization pad. The functionalized chemical planarization pad includes a plurality of functional groups bonded to a material of the pad. The functional groups are configured to chemically react with the substrate material such that a portion of substrate material bonds to the functional groups. The pad is regenerated by applying a regeneration solution configured to break bonds between the functional groups and substrate material bonded to the functional groups to form removed material. The removed material is complexed in a dissolved complexing agent to form dissolved material in an effluent phase.

The invention relates to the technical field of semiconductor manufacturing, and provides wafer thinning equipment and a wafer thinning process. The wafer thinning equipment comprises a plurality of grinding discs, a functional assembly and a slicking assembly; two functional assemblies are correspondingly arranged on the grinding face of each grinding disc, and two grinding areas are formed between the two functional assemblies. The functional assembly is used for cleaning the grinding area and spraying grinding fluid; the slicking assembly penetrates through the grinding areas of the multiple grinding discs and is used for dispersing grinding fluid. The functional assembly is arranged corresponding to the grinding disc, the grinding fluid in the grinding area of the grinding disc can be cleaned, and the grinding fluid is sprayed again, so that wafer grinding particles can be cleaned, and the purity of the grinding fluid is ensured; and meanwhile, by arranging the slicking assembly, the grinding fluid can be uniformly dispersed before the grinding fluid is in contact with the wafer, so that local aggregation of the grinding fluid is avoided, the stress concentration problem is prevented, the wafer cannot be scratched, and the grinding precision is guaranteed.

The utility model belongs to the technical field of polishing machining, and particularly relates to horizontal polishing machining equipment for an edge grinding type box transformer substation shell, which comprises a working table, a polishing device is arranged at the top of the working table, and the polishing device comprises a feeding unit, a polishing unit, a dust removal unit and an impurity removal unit. According to the horizontal polishing machining equipment for the edge grinding type box transformer substation shell, the feeding unit is arranged, the edge grinding type box transformer substation shell to be polished is placed on the top of the containing table, a second telescopic piece is started to push clamping plates to abut against the front side and the rear side of the shell, the shell is clamped, and then a first telescopic piece is started to push a connecting block to drive the containing table to move rightwards; according to the shell polishing and feeding device, polishing and feeding of the shell are achieved, the shell is prevented from shaking during polishing by fixing the shell, the polishing quality is improved, and the problems that in the background technology, the shell is directly placed on a conveying belt in the using process, due to the lack of a fixing device, when a polishing roller makes contact with the shell, the shell shakes, and the polishing quality is affected are solved.

The invention relates to the technical field of grinding tool machining, and discloses a grinding wheel dressing device for a grinding machine, which comprises a U-shaped seat, a coating shell is rotatably connected between the two ends of the U-shaped seat, the top end of the coating shell is rotatably connected with a mounting shaft seat in a penetrating manner, a diamond pen is inserted into the top end of the mounting shaft seat, and an angle adjusting part is arranged between the coating shell and the U-shaped seat; the outer side of the mounting shaft seat is slidably connected with a rotation transmission part, and a rotation driving part is arranged under the rotation transmission part. The self-rotation transmission part and the self-rotation driving part are wrapped by the wrapping shell, so that chippings generated during grinding of the grinding wheel are prevented from entering the space between the self-rotation transmission part and the self-rotation driving part; and through the blocking effect of the right blocking cover and the left blocking cover, chippings are prevented from entering the gear set between the adjusting knob and the right supporting shaft, and the chippings are prevented from entering the position between the friction disc and the left supporting shaft, so that the inclination angle of the diamond pen can be adjusted, and the diamond pen can be driven to rotate stably.

The invention discloses a screen display glass edge grinding device which comprises a grinding seat and grinding wheels, a glass inlet is formed in the grinding seat, the grinding seat comprises a seat body, an air knife seat body and a water knife seat body which form a grinding cavity, and the grinding wheels are vertically inserted into the grinding cavity. The air knife seat body comprises an upper air knife and a lower air knife which blow the grinding wheel and are distributed in an arc shape around the circle center of the grinding wheel; the water jet cutter seat body comprises a water jet cutter and a waste collecting module. On one hand, the closed grinding section is formed between the upper and lower arc-shaped air knives and the grinding wheel, fluid is flushed out through the water jet cutter, waste generated by grinding is flushed out of the grinding section along with rotation of the grinding wheel, the probability that fine dust escapes outwards and is secondarily attached to the surface of glass is effectively reduced, and the collection rate of the waste is improved; and on the other hand, based on cooperation of the main collecting branch and the auxiliary collecting branch, waste rushed out of the second end is shunted and gently collected, the splashing and accumulation phenomena generated when the waste impacts the inner wall of the grinding cavity are effectively reduced, the cleaning frequency is remarkably reduced, and the grinding efficiency is improved.

To provide a grinding tool capable of improving grinding accuracy and a manufacturing method thereof. [Solution] The grinding tool 1 comprises a plurality of diamond abrasive grains 2 made of synthetic diamond, and a substrate 3 to which the plurality of diamond abrasive grains 2 are fixed. The plurality of diamond abrasive grains 2 are fixed in a single layer to the surface 31 of the substrate 3. The surface of each of the plurality of diamond abrasive grains 2 has a plurality of flat surfaces 21 which are crystal faces, and corners 22 connecting the flat surfaces 21. When the grinding tool 1 is used to grind an object to be ground, the portion of the diamond abrasive grains 2 that comes into contact with the object to be ground is defined as the contact portion 11. The grinding tool 1 has more diamond abrasive grains 2 whose contact portions 11 are corners 22 than diamond abrasive grains 2 whose contact portions 11 are flat surfaces 21.

The invention discloses a flexible dressing method for a grinding wheel with a complex profile, which comprises the following steps: S1, acquiring a grinding wheel profile, and acquiring a continuous fine dressing curve by adopting an equidistant line method according to the grinding wheel profile; s2, extracting entity segment data information of the continuous fine finishing curve to obtain fine finishing track information; s3, presetting a theoretical single cutting depth, discretizing the continuous fine finishing curve to obtain fine finishing discrete points, and creating a fine finishing discrete track according to the fine finishing discrete points; s4, constructing a profiling allowance distribution model; comprising the steps that a rough finishing boundary and a tool retracting position boundary are established based on fine finishing discrete points according to preset profiling allowance, and a rough finishing track is established according to the rough finishing boundary and the tool retracting position boundary; and S5, the grinding wheel is trimmed according to the rough trimming discrete track and the fine trimming discrete track in sequence. According to the method, the continuous fine dressing curve is automatically dispersed, and the dressing path under the condition of profiling allowance is designed, so that the grinding wheel dressing flexibility degree and the dressing accuracy and universality are improved.

The present invention provides a method for shaping a grinding wheel (16), which is used in a wafer (W) chamfering device for rough machining, performs shaping at a high speed by using a rough grinding dresser (10-1) so that the grinding wheel (16) becomes a rough-grinding target shape, leaving a machining allowance for shaping, and when the grinding wheel (16) reaches a permissible range of the rough-grinding target shape, performs shaping at a high speed by using the rough grinding dresser (10-1). The present invention relates to a method for shaping and dressing a grinding wheel having a complex groove shape, in which the grinding wheel is shaped and dressed into a target shape for fine grinding using a fine grinding dresser (10-2) having a larger grinding wheel particle size number than a coarse grinding dresser (10-1) as a fine grinding, whereby not only the molding of the grinding wheel having a complex groove shape can be performed with high precision and high quality, but also the time required for shaping and dressing a difficult-to-machine material can be shortened.

The invention relates to the technical field of semiconductor manufacturing, in particular to a photo-assisted catalytic diamond chemical mechanical polishing device, which solves the problems of low photocatalytic efficiency and low processing efficiency in the prior art, and comprises a bracket, a rotating platform and a working turntable for loading diamond wafers are arranged on the bracket, and an annular baffle plate is arranged on the outer side of the rotating platform. The rotating platform and the annular baffle are matched to form a containing groove, an annular polishing pad and a middle ultraviolet light source are arranged on the rotating platform, the middle ultraviolet light source is located in the center of the annular polishing pad, a side edge ultraviolet light source is arranged on the inner side of the annular baffle, and the annular polishing pad and the middle ultraviolet light source both correspond to the working rotary table in position; the containing groove is filled with polishing liquid, and the annular polishing pad, the side edge ultraviolet light sources and the middle ultraviolet light source are all immersed in the polishing liquid. The device has the beneficial effects that the design that the middle ultraviolet light source and the side ultraviolet light sources cooperatively irradiate is adopted, and the promoting effect of photocatalysis on the chemical reaction on the surface of the diamond is enhanced.

The invention discloses a steel structure butt welding adjusting device which comprises a supporting plate and supporting rods fixed to the four corners of the bottom of the supporting plate. A grinding part is arranged in the butt joint mechanism, in the butt joint process of the two steel structure bodies, the grinding part can make contact with the steel structure bodies along with continuous movement of a driving part, the grinding part comprises a coarse grinding plate, a fine grinding plate and a polishing plate, in the grinding process, a sliding plate slides on the top of a supporting plate along with a mounting plate driven by the driving part to move, and the grinding plate is in contact with the grinding part. The rough grinding plate firstly makes contact with the rotating steel structure main body and conducts comprehensive rough grinding on the end face of the steel structure main body through rotation of the steel structure main body, and due to the fact that a second gear at the bottom of a lead screw is meshed with a second rack at the bottom of a mounting shell, the lead screw can rotate, and therefore when a grinding piece moves to a certain degree, the grinding piece can rotate. And the rough grinding plate, the fine grinding plate and the polishing plate can sequentially treat the steel structure body and then move downwards into the second mounting frame.

The invention relates to the technical field of hardware product polishing, and provides a grinding wheel-free polishing device for hardware product polishing, which comprises a shell, the interior of the shell is connected with an abrasive belt for hardware product polishing through a tightening wheel set, and the tightening wheel set is driven by a motor to drive the abrasive belt to perform high-speed displacement; the bottom frame is fixedly connected to the bottom side of the shell, sealing shells are fixedly connected to the left end and the right end of the top side of the bottom frame, rotating discs are rotationally connected to the sides, close to the shell, of the sealing shells, and the rotating discs on the two sides are in mirror symmetry. Metal scraps on the surface of the abrasive belt can be cleaned through the brush, the brush completes telescopic movement under a spring reset mechanism, the scraps attached to the brush are effectively scraped away, the problems that the abrasive belt slips and workpieces are scratched due to scrap accumulation are solved, the brush attached with too many metal scraps is prevented from scratching the abrasive belt, and the abrasive belt is prevented from being scratched by the brush. And the effective grinding surface of the abrasive belt is continuously kept in the optimal working state.

The invention discloses a sampling needle outer wall self-adaptive polishing method and system, a product and a medium, and relates to the field of edge calculation. The method comprises the following steps: acquiring force and vibration signals to calculate an energy dissipation index; judging a cutting edge area, a sound window area or a transition area according to the index gradient; in the cutting edge area, a force signal is stabilized by controlling the feeding speed, and the rotating speed of a main shaft is adjusted, so that the kurtosis value tends to be minimum; in the sound window area, the feeding speed is controlled to stabilize the kurtosis target value; and in the transition area, the feeding rotation speed is synchronously adjusted according to the relative position, so that the force and the kurtosis track the dynamically changing target. By implementing the technical scheme provided by the invention, the polishing precision of the sampling needle is improved.

A method for conditioning a polishing pad of a polishing system is provided. The method comprises performing an in-situ pad conditioning process and an ex-situ pad conditioning process outside of a polishing operation. The in-situ pad conditioning process comprises causing a pad conditioner to contact the polishing pad during the polishing operation. The ex-situ pad conditioning process comprises causing the pad conditioner to contact the polishing pad while a cleaning agent is applied to the polishing pad.

The utility model relates to the technical field of dressers, in particular to a servo arc grinding wheel dresser which is provided with a U-shaped supporting seat, rotation units are rotatably arranged on the two sides of the U-shaped supporting seat and connected with a driving unit through a transmission unit, a swing support is arranged on the rotation units, and a dressing unit is arranged in the middle of the swing support. A diamond pen in the trimming unit directly trims the grinding wheel, the diamond pen is arranged on a threaded rod, the position of the diamond pen is adjusted by rotating a scale sleeve, and accurate control and rapid adjustment of the position of the diamond pen are achieved; a plurality of compression springs arranged side by side provide stable pre-tightening force for the scale sleeve and the threaded rod, so that a thread gap is eliminated, and the moving precision of the diamond pen is improved; the multiple compression springs arranged side by side can ensure that pressure is uniformly distributed in the circumferential direction of the scale sleeve and the threaded rod, so that the stress is uniform, and the operation stability of equipment is ensured.

Provided are a grinding performance determination device and grinding performance determination method that enable grinding performance to be accurately determined. The grinding performance determination method includes: an extraction step in which an AE signal output from an AE sensor (104) provided on a grinder (100) is acquired, the AE signal is processed, and a micro feature amount of the AE signal is extracted; and a determination step in which the micro feature amount extracted in the extraction step is input to an AI model, which has been trained by inputting a micro feature amount of an AE signal for training, and information indicating the grinding performance of the grinder is output.

The finishing tool comprises a honing rod finishing unit and a thrust regulation and control unit, a thrust regulation knob in the thrust regulation and control unit is rotated to push a push piece seat to drive a push piece to move in the axial direction along a guide groove of a dresser mandrel sleeve in the honing rod finishing unit, and the honing rod finishing unit is driven to finish finishing of the honing rod. The pushing piece moves in the radial direction of the dresser core shaft sleeve to apply pushing force, and the to-be-dressed honing rod is tightly held by the dressing strip under the radial pushing force effect of the pushing piece; the honing machine is started to control the to-be-finished honing rod to do rotary motion and reciprocating linear motion relative to the precise finishing device of the honing rod, and finishing of the honing rod is completed; by means of the finishing method, dependence on skills of operators in the machining process is reduced, precise finishing of the honing rod can be conveniently and rapidly achieved, the finishing efficiency of the honing rod is improved, the service life is long, and automatic finishing of the honing rod is easy to achieve.

An integrated cleaning and liquid supply device and online cleaning method for polyurethane polishing pads are disclosed. The device includes a base, a rotating seat, a swing arm, an independent liquid supply pipeline system and cleaning pipeline, a high-pressure nozzle array, and a positioning sensor assembly. During the polishing stage, polishing liquid is dripped through the liquid supply outlet. During the cleaning stage, the swing arm moves centripetally to a preset position aligned with the center of the polishing pad. The positioning sensor triggers a high-pressure pump, causing pure water to be sprayed as an atomized jet along the diameter of the pad surface through the high-pressure nozzle array. Simultaneously, the polishing pad rotates at a low speed, utilizing the synergistic effect of centrifugal force and high-pressure water flow to thoroughly remove residual contaminants within the micropores of the polyurethane. This invention integrates liquid supply and deep cleaning functions into the same motion mechanism, eliminating the need for machine shutdown or manual intervention. It offers advantages such as non-contact, non-destructive, thorough cleaning, and high automation, extending the life of the polishing pad and improving the stability of the CMP process.

The utility model discloses an automatic trimming module for a grinding wheel of a grinding machine, which relates to the technical field of grinding machines, has the advantage of automatically trimming the grinding wheel on the grinding machine, and is characterized in that the automatic trimming module comprises a working table, a vertical plate is vertically arranged at the top end of the working table, and a grinding assembly for grinding a workpiece is arranged on the vertical plate; the top end of the workbench is horizontally and slidably connected with a machining base used for containing a workpiece through a moving part, and two diamond grinding bowls used for grinding a grinding wheel in the grinding assembly are arranged on the portion, on one side of the machining base, of the workbench.

The invention relates to the technical field of polishing devices, in particular to a petroleum sucker rod body polisher device and method in the intelligent manufacturing equipment industry. Comprising a mounting frame and a servo motor, the output shaft end of the servo motor is provided with a horizontal variable-stroke part, the horizontal variable-stroke part is connected with a horizontal sliding frame which is variable in stroke and horizontally reciprocates, the horizontal sliding frame is connected with a vertical pressurizing frame in a sliding mode, and a vertical variable-stroke part which drives the vertical pressurizing frame to reciprocate in a variable-stroke mode is fixedly mounted on the horizontal sliding frame. Two winding rollers are rotationally mounted on the vertical pressurizing frame, a reciprocating driving system for driving the two winding rollers to synchronously rotate in a reciprocating manner is arranged on the vertical pressurizing frame, a polishing abrasive belt is wound between the two winding rollers, and a liquid distribution cleaning system for synchronously and rotationally brushing the polishing abrasive belt and cooling the polishing abrasive belt in a water cooling manner is arranged on the vertical pressurizing frame. By means of the linkage design of the horizontal stroke changing piece and the vertical stroke changing piece, the grinding limitation of fixed pressure and fixed stroke in the prior art is broken through, and a cooperative control mechanism dynamically matched with the stroke and the pressure is constructed.

The invention discloses a polishing device for automobile part mold production, and relates to the technical field of chemical mechanical polishing, the polishing device comprises a case, a cavity penetrating through the upper end of the front face of the case, a case door is movably connected to the front face of the case and located on one side of the cavity through a hinge, and a polishing mechanism is installed in the cavity. A pretreatment mechanism, a scraping mechanism and a driving mechanism are arranged on the rear portion of the upper portion of the polishing mechanism, the pretreatment mechanism is used for intercepting and filtering polishing liquid obtained after polishing, large-particle-size impurities mixed in the polishing liquid due to polishing are removed, and the scraping mechanism is used for scraping the large-particle-size impurities attached to the pretreatment mechanism. Large-particle-size impurities in waste liquid can be filtered out, the large-particle-size impurities are prevented from flowing into the bottom of the trimmer, the treatment pressure of the trimmer is relieved, retention impurities and gelatinized slurry can be cleared away, and automobile part dies are prevented from being scratched by the residual impurities.

To provide a conditioning method of a polishing tool which enables reduction of time for conditioning of the polishing tool, and to provide a substrate processing method and a substrate processing device.SOLUTION: A conditioning method of a polishing tool 89 includes: a substrate rotation step in which a silicon dummy substrate DW having a major surface in a non-mirror state is held in a horizontal attitude and rotated around a vertical axis AX5; and a conditioning performing step in which the polishing tool 89 having a resin body in which abrasive grains are dispersed is placed in contact with the major surface of the rotating dummy substrate DW to perform conditioning of the polishing tool 89.SELECTED DRAWING: Figure 6

Information processing device that includes: an information acquisition unit that acquires reliability degradation factor state information in a chemical mechanical polishing process of a substrate performed by a substrate processing device, the reliability degradation factor state information including at least one of wear state information indicating a wear state of components of the substrate processing device and processing state information indicating a processing state during polishing; and a state prediction unit that predicts reliability information of a polishing endpoint detection function for the reliability degradation factor state information by inputting the reliability degradation factor state information acquired by the information acquisition unit into a learning model that has been trained through machine learning to learn a correlation between the reliability degradation factor state information and reliability information of the polishing endpoint detection function that indicates reliability of an endpoint detection function that detects that the chemical mechanical polishing process has reached an endpoint.

The invention provides a grinding wheel dressing contour monitoring method based on a monocular vision sensor. The grinding wheel dressing contour monitoring method comprises the following steps that a standard contour image of a grinding wheel is imported; collecting a contour image of the to-be-trimmed grinding wheel; carrying out image segmentation processing, comparing the image with a standard contour image, and calculating a position coordinate and an angle of contour out-of-tolerance; the grinding wheel dressing controller carries out feeding compensation; the executing mechanism adjusts feeding of the dressing grinding wheel, and dressing is completed after adjustment; and the step 2 to the step 5 are repeated until the deviation between the contour of the grinding wheel to be trimmed and the standard contour meets the contour tolerance threshold value range. According to the method, monocular vision is combined with a multi-stage image processing algorithm, the detection precision is improved, errors are reduced, and through combined control of the contour recognition calculator and the grinding wheel dressing controller, the technological precision such as the size precision and the contour precision of grinding wheel dressing is guaranteed.

The invention relates to the technical field of repairing devices, and discloses a diamond grinding wheel repairing device which comprises a bottom plate table, repairing tables are symmetrically arranged above the bottom plate table, a driving sliding column is fixedly installed above the bottom plate table, a lifting support is slidably connected to the inner wall of the driving sliding column, and a control box is fixedly connected to the top of the lifting support. A manipulator is fixedly connected to the lower portion of the control box, a diamond pen is fixedly connected to the lower portion of the manipulator, a clamping and overturning assembly is arranged on the surface of each repairing table, an inclined assembly is arranged at the bottom of each repairing table, and the inclined assemblies can drive one ends of the two repairing tables to incline downwards. The driving device can drive the ends, close to each other, of the two repairing tables to incline downwards to form an inverted V shape, an inclined face is provided for scrap cleaning, scraps generated by polishing and repairing the surfaces of the repairing tables smoothly fall off along the inclined face, and the working environment is kept clean.

The invention relates to the technical field of grinding devices, in particular to a cylindrical injection molding part grinding device which comprises a grinding platform and a lower grinding disc installed at the top of the grinding platform, an upper grinding disc is installed at the top of the lower grinding disc, a cleaning structure is arranged at the top of the grinding platform, and a plurality of positioning plates for supporting workpieces are installed at the top of the lower grinding disc. By adopting the composite design of the slidable and rotatable cleaning cylinder, the peripheral cleaning brush and the internal negative pressure cavity, the cleaning brush is made of a flexible wear-resistant material, can rotate and slide along with the cleaning cylinder, goes deep into microcosmic lines and blind areas of a grinding disc, and mechanically peels off stubborn grinding dust, and meanwhile, the dust suction pump works to form negative pressure in the cleaning cylinder, so that the cleaning effect is improved. Scraped abrasive dust and grinding liquid are sucked synchronously through the peripheral dust suction holes, secondary attachment of the abrasive dust is avoided, the cleaning efficiency is improved, the secondary scratch rate of workpieces is reduced, the grinding and cleaning procedures are automatic, and all-region dead-corner-free cleaning of the abrasive dust is achieved.

The invention relates to the technical field of grinding machines, in particular to a workpiece polishing grinding machine capable of automatically correcting, which comprises a base, an XY double-axis linkage machining machine and a side frame are fixedly connected to the top of the base, a grinding wheel body is rotatably connected to one end of the side frame, and a pressure sensor is arranged at the shaft end of the grinding wheel body; and one end of the side frame is fixedly connected with a laser range finder for detecting the diameter change of the grinding wheel body. Through cooperative use of the pressure sensor and the laser range finder, a double-stage correction mechanism of active finishing and passive finishing can be set according to different states of rough grinding and accurate grinding, and before machining, the controller drives the motor to be linked, so that the diamond finishing device conducts finishing according to the preset feeding amount of the corresponding stage, and the sliding resistor feeds back displacement; the grinding wheel cutting edge requirement is rapidly matched, then when it is judged that the grinding wheel is passivated in the machining process, workpiece feeding is suspended, corresponding finishing actions are repeated, frequent shutdown is avoided, excessive consumption of the grinding wheel is prevented, and the machining efficiency and applicability of equipment are effectively improved.

The invention relates to the technical field of chemical mechanical polishing, and discloses a control method and device of a finisher, polishing equipment, a medium and a product, the method is applied to a controller of chemical mechanical polishing equipment, the chemical mechanical polishing equipment comprises the controller, the finisher, a polishing pad, a metal chuck and a distance measuring sensor, and the polishing pad is arranged on the metal chuck; the trimmer comprises a trimming disc located on the polishing pad and a swing arm driving the trimming disc to move, the distance measuring sensor is connected with the controller, and the method comprises the steps that in the chemical mechanical polishing process, the thickness attenuation amount of the polishing pad is determined according to the current distance, obtained from the distance measuring sensor, between the swing arm and the metal chuck; when the thickness attenuation amount is smaller than the first preset thickness, according to the thickness attenuation amount, target downward pressure of the finishing disc is determined; and the finishing disc is controlled to finish the polishing pad according to the target downward pressure. According to the method, the accuracy of the determined thickness attenuation can be improved, so that the dresser down force determined according to the thickness attenuation is optimized.

An abrasive tool for a floor grinder, wherein the tool extends along a wear direction (D) from a grinding surface (G) to a mounting surface (M), wherein the abrasive tool comprises at least two sections (410, 420, 430) separated by a surface (P) transversal to the wear direction (D), where the at least two sections comprise respective abrasive materials associated with different grit sizes, where the section located closer to the grinding surface (G) is associated with a larger grit size compared to the section located closer to the mounting surface (M).

An apparatus for synchronous laser-conformal and mechanical dressing of a forming surface of a diamond grinding tool, relating to the field of grinding tool dressing. The apparatus comprises Y-direction, X-direction, and Z-direction motion platforms configured to slide relative to one another. A laser head rotation shaft is vertically slidably arranged on the Z-direction motion platform, and a laser head is mounted on the laser head rotation shaft. A grinding tool rotation shaft is arranged on the Y-direction motion platform, a diamond grinding tool is arranged on the grinding tool rotation shaft, and a mechanical dressing mechanism is arranged on the Y-direction motion platform. The dressing method comprises: mounting the diamond grinding tool on the grinding tool rotation shaft, and adjusting the initial angle and position of the laser head; fine-tuning the relative position between the laser head and a forming surface of the diamond grinding tool and performing laser dressing; after the diamond grinding tool has rotated half a revolution, adjusting the position of a mechanical dressing wheel to begin mechanical dressing; and dressing the two sides of the forming surface of the diamond grinding tool respectively by means of mechanical dressing and laser dressing. The present invention achieves uniform removal and effective compensation for a concave-surface profile by laser, thereby improving the dressing accuracy and dressing efficiency of concave-surface diamond grinding tools.

The present invention relates to diamond abrasive grains and a manufacturing method thereof, and provides tetradecahedral diamond abrasive grains with uniform size and shape. The manufacturing method of diamond abrasive grains according to the present invention allows for shape control and minimizes impurities and crystal defects, thereby manufacturing diamond abrasive grains for ultra-precision grinding in chemical mechanical planarization (CMP) processes.