The invention discloses a GaN-based blue-
green light LED epitaxial
wafer based on a Zn-doped gradient composite buffer layer and a preparation method of the GaN-based blue-
green light LED epitaxial
wafer. The epitaxial
wafer comprises a substrate, a
zinc-doped gradient composite buffer layer and a
gallium nitride-based epitaxial laminated structure, and the
zinc element concentration is in gradient distribution along the growth direction, preferably, the
zinc element concentration is gradually reduced from the side close to the substrate to the side far away from the substrate. And the buffer layer comprises at least two of a Zn3N2 layer, a
constant component ZnGaN layer or a component gradient ZnGaN layer. During preparation, the buffer layer is grown at the temperature of 400-850 DEG C,
concentration gradient is realized by adjusting the
flow ratio of zinc-containing and
gallium-containing precursors, and forced
doping is realized by adopting a 10-50-time high-flow
compensation strategy in a high-temperature interval. According to the invention,
lattice constant soft landing is realized by
supercell matching of Zn3N2 and GaN, and
nitrogen vacancy point defects are passivated in situ by using Zn atoms. Experiments prove that the luminous efficiency of the
chip can be improved by about 0.81%, the ESD (Electro-Static
Discharge) 4000V yield is improved to more than 98.2%, and the
crystal quality and the reliability of the device are obviously enhanced.