High quality epitaxial
layers of monocrystalline materials can be grown overlying monocrystalline substrates such as large
silicon wafers by forming a
compliant substrate for growing the monocrystalline
layers. An accommodating buffer layer comprises a layer of monocrystalline
oxide spaced apart from a
silicon wafer by an amorphous
interface layer of
silicon oxide. The amorphous
interface layer dissipates strain and permits the growth of a high quality monocrystalline
oxide accommodating buffer layer. The accommodating buffer layer is lattice matched to both the underlying silicon
wafer and the overlying monocrystalline material layer. Any
lattice mismatch between the accommodating buffer layer and the underlying silicon substrate is taken care of by the amorphous
interface layer. In addition, formation of a
compliant substrate may include utilizing surfactant enhanced
epitaxy, epitaxial growth of
single crystal silicon onto
single crystal oxide, and epitaxial growth of Zintl phase materials. A high quality layer of
compound semiconductor material is used to form a source component and a
receiver component that are interconnected with an antenna and each other within a
semiconductor structure that can detect a parameter, such as the speed, of an object.