Patents
Literature
Patsnap Eureka AI that helps you search prior art, draft patents, and assess FTO risks, powered by patent and scientific literature data.

502results about "Semiconductor laser structural details" patented technology

Semiconductor laser driving apparatus, electronic equipment, and manufacturing method of semiconductor laser driving apparatus

To reduce the wiring inductance when establishing electrical connection between a semiconductor laser and a laser driver in a semiconductor laser driving apparatus. A semiconductor laser driving apparatus includes a substrate, a laser driver, and a semiconductor laser. The substrate incorporates the laser driver. The semiconductor laser is mounted on one surface of the substrate. Connection wiring electrically connects the laser driver and the semiconductor laser to each other with a wiring inductance of 0.5 nanohenries or less. A shield suppresses flow of electromagnetic waves to / from an outside of the semiconductor laser driving apparatus for at least one of the semiconductor laser and the laser driver.
Owner:SONY SEMICON SOLUTIONS CORP

Hybrid silicon photonic integrated circuit for an FMCW lidar device and manufacturing method

A hybrid silicon photonic integrated circuit (48) for an FMCW LIDAR device (14), comprises a first SOI substrate (70) having a trench (80), a first optical waveguide (76) monolithically formed on or in the first SOI substrate (70) and abutting the trench (80), and a heterogeneously integrated laser chip (50) received upside down in the trench (80). A free-space coupler (36) is monolithically formed on or in the first SOI substrate (70), connected to the laser chip (50) via the first optical waveguide (76) and emits the light generated by the laser chip (50) into free space. A detector (32) is detects a superposition of reflected light, which was emitted by the free-space coupler (36) and reflected at an object (12) to which a range shall be measured, and reference light, which was not reflected at the object (12).
Owner:SCANTINEL GMBH

GaN SUBSTRATE

A GaN substrate includes a main surface 1 inclined by 0° to 10° from a (0001) crystal plane which is a Ga-polar plane, and including a Si-doped GaN layer on at least a surface of the main surface 1, in which the Si-doped GaN layer has a Si concentration of 1×1018 atoms / cm3 or more, and a total of bottom areas of recessed defects on a surface of the Si-doped GaN layer is 15% or less of an area of the entire surface of the Si-doped GaN layer.
Owner:MITSUBISHI CHEM CORP

Optical Transmitter

An optical transmitter includes a distributed feedback (DFB) laser having an active region formed as a multiple quantum well (MQW) and a diffraction grating, an electro-absorption (EA) modulator having an absorption region formed as a MQW having a composition different from a composition of the DFB laser, a semiconductor amplifier (SOA) having an active region having a same composition as the composition of the DFB laser, a bent waveguide that rotates a light propagation direction, and a passive waveguide connected to the SOA and including a core having a band gap wavelength shorter than an oscillation wavelength of the DFB laser. A tapered region of the passive waveguide converts a width W1 of the passive waveguide connected to the SOA into a width W2 of a narrow waveguide region of the passive waveguide, and the passive waveguide is in contact with the end surface of the substrate.
Owner:NT T INC

Photoelectric chip co-packaging piece, optical communication module and preparation method

The invention provides a photoelectric chip common packaging piece, an optical communication module and a preparation method, the photoelectric chip common packaging piece comprises a carrier plate, an optical chip and an electric chip, one side of the carrier plate is provided with a mounting surface, the mounting surface is provided with an electric interconnection structure, the carrier plate is internally provided with a conductive through hole and an optical interconnection structure, and the conductive through hole is electrically connected with the electric interconnection structure; the optical chip and the electric chip are both arranged on the mounting surface of the carrier plate, the optical chip is electrically connected to the electric chip through an electric interconnection structure, one side, facing the mounting surface, of the optical chip comprises an optical device, and an optical signal emitted by the optical device penetrates through the carrier plate through the optical interconnection structure. Compared with the prior art, efficient conversion and transmission of optical signals and electric signals are achieved, the interconnection distance between chips is shortened to a large extent, signal transmission loss and delay are reduced, signal integrity is improved, and therefore reliable transmission of high-frequency signals is achieved.
Owner:SHANGHAI TURING INTELLIGENT COMPUTING QUANTUM TECHNOLOGY CO LTD +1

Laser chip capable of inhibiting in-plane amplified spontaneous emission

According to the laser chip capable of inhibiting in-plane amplified spontaneous emission, the first inclined edge and the second inclined edge are designed, opposite edges parallel to the first cleavage edge and the second cleavage edge respectively are damaged, a first parasitic cavity and a second parasitic cavity existing in a natural cleavage laser chip are eliminated, and the laser chip can inhibit in-plane amplified spontaneous emission. Therefore, the formation of in-plane amplified spontaneous emission of the laser chip is remarkably inhibited, meaningless consumption of carriers in a laser emission layer in the laser chip is prevented, the luminous efficiency of the laser chip on laser wavelength can be improved, the light-light conversion efficiency of the laser from pump light to emission laser is improved, and the output power of the laser is finally improved. And secondly, due to the suppression of amplified spontaneous radiation in a laser chip plane and the improvement of the light-light conversion efficiency of the laser, the power consumption of the laser can be obviously reduced under the condition of certain output power, the operation cost of the laser is reduced to a certain extent, and the cost performance of the laser is improved.
Owner:ELITE OPTOELECTRONICS CO LTD

Compact LIDAR system

An FM LIDAR system is described that includes a frequency modulated LIDAR system that incorporates a laser source that is optically coupled to a whispering gallery mode optical resonator. Light from the laser that is coupled into the whispering gallery mode optical resonator is coupled back out as a returning counterpropagating wave having a frequency characteristic of a whispering gallery mode of the optical resonator. This returning wave is used to reduce the linewidth of the source laser by optical injection. Modulation of the optical properties of the whispering gallery mode optical resonator results in modulation of the frequency of the frequencies supported by whispering gallery modes of the resonator, and provides a method for producing highly linear and reproducible optical chirps that are highly suited for use in a LIDAR system. Methods of using such an FM LIDAR system and vehicle assisting systems that incorporate such FM LIDAR systems are also described.
Owner:GM GLOBAL TECHNOLOGY OPERATIONS LLC

Light outlet control device applied to laser and laser

The utility model discloses a light outlet control device applied to a laser and the laser, and relates to the technical field of lasers. The device comprises a shell, a driving motor, a shading plate and a connecting arm. Wherein a containing space capable of containing the light shielding plate is arranged in the shell, the containing space is divided into a light shielding area and a working area, the light shielding plate can move between the working area and the light shielding area, and when the light shielding plate completely moves to the light shielding area, laser emitted by the laser can be prevented from being emitted from the light outlet. The two ends of the connecting arm are connected with the driving motor and the shading plate correspondingly, and the driving motor can drive the shading plate to reciprocate between the working area and the shading area through the connecting arm. Therefore, whether the light shielding plate moves to the light shielding area capable of shielding laser emission or not can be controlled by controlling operation of the motor, and whether the light shielding plate shields laser emission or not is remotely controlled through the motor under the condition that the laser continuously generates the laser.
Owner:GRACE LASER TECH CO LTD

Growth method for reducing laser Ith through N grating burying

The invention belongs to the field of lasers, and discloses a growth method for reducing laser Ith through N grating burying, which subversively adopts an N-type grating structure, uses a built-in P-N junction formed by the N-type grating structure and a subsequent P-type buried layer as a natural and efficient current blocking layer, and structurally eliminates a current leakage path. Afterwards, in the heating stage, trace arsine is introduced to carry out atomic-scale protection on the sensitive grating morphology, at the optimal mass transport temperature, the high mobility characteristic of indium atoms is utilized to carry out shape-preserving filling on grating grooves, flawless preliminary planarization is achieved, and through variable-temperature thickening growth and high-temperature annealing in the pure phosphorus atmosphere, the high-temperature-resistant grating is obtained. And performing quality optimization and defect repair on the buried layer and the key interface. The series of linked steps ensure that the indium phosphide buried layer with flat atomic scale and complete crystal lattice can grow on the fragile N-type grating, and ensure that a high-quality covering layer and an active region grow on the N-type grating.
Owner:杭州泽达半导体有限公司

OPTOELECTRONIC DEVICE

An optoelectronic device (10) comprises a laser light-emitting component (100) and an optical component (200) with an optical waveguide (201). The laser light-emitting component (100) has a light-exit surface (120) for emitting the laser light and at least one first alignment structure (130) on a first end face (110). The optical component (200) has a light-entry surface (220) on a second end face (210) where the laser light can be coupled into the optical waveguide (201), and at least one second alignment structure (230).The first and second alignment structures (130, 230) are designed to be complementary to each other in order to align the laser light emitting component (100) to the optical component (200) in such a way that the light exit surface (120) and the light entry surface (220) are opposite each other, whereby the laser light is coupled into the optical waveguide (201) in the case of emission of laser light by the laser light emitting component (100).
Owner:AMS OSRAM INT GMBH

Laser white light device for laser display and illumination and preparation method thereof

The invention belongs to the technical field of laser diode illumination and display, and particularly relates to a laser white light device for laser display and illumination and a preparation method thereof. Comprising a laser emission module and a fluorescence conversion module. The fluorescence conversion module comprises a pixelated transparent substrate, a green fluorescent powder unit and a red fluorescent powder unit; groove array structures which are arranged in a staggered mode are distributed on the upper side and the lower side of the pixelated transparent substrate respectively. The green fluorescent powder unit is arranged in the lower side groove array structure, and the red fluorescent powder unit is arranged in the upper side groove array structure; the laser emitting module emits laser from the lower portion of the pixelated transparent substrate to the upper portion, and the green fluorescent powder unit and the red fluorescent powder unit are excited to emit green light and red light respectively and then are fused to form white light. According to the invention, the heat dissipation performance of the fluorescence conversion module is improved, the reabsorption between red and green fluorescent powder is weakened, the luminous efficiency is improved, and a white light LD device with high brightness and high color rendering can be realized.
Owner:HUAZHONG UNIV OF SCI & TECH

Surface Emitting Laser, Method for Fabricating Surface Emitting Laser

A vertical cavity surface emitting laser includes an oxide substrate having a first face and a second face at an opposite side from the first face; a semiconductor section disposed on the first face; a dielectric filter layer disposed between the semiconductor section and the first face and having a reflective spectrum configured to provide an optical window; a first DBR mirror; and a second DBR mirror disposed at a curved surface of the second face. The first DBR mirror, the semiconductor section, the dielectric filter layer, the oxide substrate, and the second DBR mirror are arranged in a first axial direction to form an extended cavity. The semiconductor section is disposed between the dielectric filter layer and the first DBR mirror, and includes a p-type III nitride region, an n-type III nitride region, and a III nitride active region between the p-type and n-type III nitride regions.
Owner:SANOH IND CO LTD

Multi-layer composite heat dissipation substrate

A multi-layer composite heat dissipation substrate includes a substrate body, a first insulation layer, a first electrode layer, a second electrode layer, and a solder layer. The substrate body has a first surface and a second surface. The first insulating layer is formed on the first surface of the substrate body. The first insulating layer is made of an insulating material selected from the group consisting of: nitride, oxide, and oxynitride. The first electrode layer is formed on a top surface of the first insulating layer. The second electrode layer is located below the substrate body. The solder layer is formed on a top surface of the first electrode layer.
Owner:TONG HSING ELECTRONICS IND LTD

Manufacturing process for LIDAR system with individualized semiconductor optical amplifier dies

The present disclosure is directed to a manufacturing process for a LIDAR system with individualized semiconductor optical amplifier (SOA) dies including: (a) forming a plurality of SOA regions on a semiconductor wafer; (b) dicing the semiconductor wafer to produce a plurality of individualized SOA dies, the plurality of individualized SOA dies respectively including the plurality of SOA regions; (c) aligning the plurality of individualized SOA dies with one or more array inputs, the one or more array inputs configured to provide a beam from a light source to the plurality of individualized SOA dies; and (d) aligning the plurality of individualized SOA dies with one or more array outputs, the one or more array outputs configured to provide the beam from the plurality of individual SOA dies to an emitter.
Owner:AURORA OPERATIONS INC

Systems and methods for microdisk and multiplet laser particles

A first layer, a first spacer layer, and a second layer of a semiconductor wafer can be etched to produce a plurality of columnar structures extending from the substrate layer and including a first optical cavity situated about the first gain medium, a second optical cavity situated about the second gain medium, and a first spacer region contacting the first gain medium and the second gain medium. Also, a photonic microparticle formed from a layered semiconductor wafer and of a columnar structure having a first optical cavity situated about a first gain medium, a second optical cavity situated about a second gain medium, and a first spacer region contacting the first gain medium and the second gain medium. The first optical cavity and the second optical cavity in the photonic microparticle are each capable of generating laser light with a distinct spectral peak when energetically excited.
Owner:THE GENERAL HOSPITAL CORP +1

Ultra-thin strain-relieving si1-xgex layers enabling iii-v epitaxy on si

Example methods, compositions and structures are presented whereby sub-10-nm-thick strain-relieving Si1-xGex layers can be realized by Ge ion implantation, into, and selective oxidation of, Si(111) wafers. The resulting Ge-rich layers are fully strain relaxed via a network of misfit dislocations at the Si / Si1-xGe, interface, which do not propagate through the Si1-xGex film. The dislocation network has been found to coincide with a periodic variation in the composition at the Si / Si1-xGex interface and is believed to result from the defect-medicated diffusion of Si atoms from the Si substrate through the Si1-xGex layer to the above SiO2 layer. The epitaxial growth of GaAs on such ultra-thin substrates is demonstrated, presenting a promising approach for solving the long-standing challenge of local, monolithic integration of III-V optoelectronics on the Si platform.
Owner:MCMASTER UNIV

Laser element manufacturing method and manufacturing apparatus, laser element, and electronic device

A method for manufacturing a laser element includes: a step of preparing a semiconductor substrate (10) having a base substrate (BK), a first growth-inhibiting part (5F) and a second growth-inhibiting part (5S) adjacent to each other across an opening (K), and a first semiconductor part (S1) having a longitudinal shape located above the first growth-inhibiting part (5F) and the second growth-inhibiting part (5S) from the opening (K); a step of forming over the first semiconductor part (S1) a second semiconductor part (S2) including ridges (RJ) located above the first growth-inhibiting part (5F); and a step of scribing a portion of a first laminate (LB1), which includes the first semiconductor part (S1) and the second semiconductor part (S2), on the side where the ridges (RJ) are located.
Owner:KYOCERA CORP

Silicon-based indium phosphide laser and preparation method thereof

The invention discloses a silicon-based indium phosphide laser and a preparation method thereof, and relates to the technical field of semiconductor devices, the silicon-based indium phosphide laser comprises a silicon substrate, a composite insulating layer, a Van der Waals buffer layer and an indium phosphide epitaxial structure which are stacked in sequence; the indium phosphide epitaxial structure comprises a first epitaxial structure stacked on the Van der Waals buffer layer and a second epitaxial structure stacked on the first epitaxial structure; the first epitaxial structure at least comprises a lower cladding layer, a lower limiting layer, a lower waveguide layer, a spacing layer, a multi-quantum well active region, an upper limiting layer, an etching stop layer, an upper waveguide layer and an upper cladding layer which are sequentially stacked, a Bragg grating is manufactured in the upper waveguide layer, and the second epitaxial structure comprises a regrowth cladding layer and a contact layer which are sequentially stacked; the Van der Waals buffer layer is a two-dimensional material film, and the problems of lattice mismatch, thermal expansion coefficient mismatch and polarity structure difference of integration of the silicon substrate and the InP epitaxial layer are thoroughly solved from a physical mechanism by introducing the single-layer two-dimensional material Van der Waals buffer layer.
Owner:JIANGXI ZHAOCHI INTEGRATED TECHNOLOGY CO LTD +1

Source wafer and method of preparation thereof

A source wafer for use in a micro-transfer printing process. The source wafer comprises: a substrate; a device coupon (110), including an optoelectronic device; and a breakable tether securing the device coupon to the substrate. The breakable tether includes one or more breaking regions which connect the breakable tether to the substrate.
Owner:ROCKLEY PHOTONICS LTD

A laser chip with improved reliability and a preparation process thereof

The application provides a laser chip with improved reliability and a preparation process thereof, and aims to solve the technical problem that an edge-emitting laser is prone to end face failure.The laser chip comprises a substrate, the back surface of the substrate is provided with an N electrode, the front surface of the substrate is provided with an epitaxial material, the top layer of the epitaxial material is an ohmic contact layer, the epitaxial material is provided with a waveguide, and the vicinity of the waveguide is a waveguide region; an insulating medium layer is arranged on the surface of the epitaxial material, the waveguide region and the insulating medium layer are provided with a P electrode, but the ohmic contact layer in the waveguide region is not provided with the insulating medium layer, and the P electrode is in contact with the ohmic contact layer; the end surface of the laser chip is provided with an electrode-free area, and the electrode-free area is not provided with the insulating medium layer and the P electrode above the electrode-free area.The application further comprises a preparation method of the laser chip.The electrode-free area is arranged on the end surface of the laser, and the electrode-free area can improve the COD threshold level and improve the reliability.
Owner:HENAN SHIJIA PHOTONS TECH

Rectangular optical system and rectangular laser transmitter

The utility model relates to a rectangular optical system and a rectangular laser transmitter. The rectangular optical system comprises a laser source used for emitting laser; the laser collimation piece is arranged at the laser emitting end of the laser source so as to focus the laser into collimated laser, and the laser collimation piece at least comprises a first plano-convex lens and a second plano-convex lens which are sequentially arranged on a laser path; and the rectangular array mirror is arranged at the laser emitting end of the laser collimation piece so as to emit the incident collimation laser into a rectangular light spot. According to the utility model, laser is collimated and emitted into rectangular light spots, light focusing and overall uniform emission are realized, the accuracy and the stability of laser irradiation are improved, and the device is suitable for multiple fields of medical treatment, manufacturing and the like, and has relatively high practicability and economical efficiency.
Owner:北京镭志威光电技术有限公司

A dry etching method for indium-containing III-V compound semiconductor materials

A dry etching method for indium-containing III-V compound semiconductor materials, relating to the field of semiconductor laser processing technology, solves the problem of volatile InCl during etching of indium-containing compound semiconductor laser materials in existing technologies. x Deposition leads to decreased etching rates, cavity contamination, and high-temperature assisted etching causes mask loss, morphology degradation, and process instability. This invention addresses these issues by setting a cycle program that alternates between etching and rinsing pulses. During the etching stage, H2 is introduced to suppress the formation of non-volatile InCl3 products and simultaneously convert InCl3 products into InCl2, effectively inhibiting byproduct formation and improving etching efficiency. During the physical rinsing stage, Ar is used to effectively remove non-volatile InCl3 adhering to the surface of the etched material. x The product exposes the semiconductor substrate, promoting chemical pulses to carry out chemical reactions to etch the substrate, effectively preventing cavity contamination and a decrease in etching uniformity, and significantly improving the controllability and repeatability of the etching morphology.
Owner:CHANGCHUN UNIV OF SCI & TECH +1

High-speed communication vertical cavity surface emitting laser and preparation method thereof

The invention relates to the technical field of semiconductor lasers, in particular to a high-speed communication vertical-cavity surface-emitting laser and a preparation method thereof.The high-speed communication vertical-cavity surface-emitting laser comprises a substrate, an epitaxial structure is arranged on the substrate and comprises an active area, a transition DBR layer is arranged on the active area, and a tunnel junction is arranged in the center of the transition DBR layer; the tunnel junction comprises a P-type high-concentration C doping layer and an N-type high-concentration Te doping layer, and a top DBR layer is arranged on the transition DBR layer. The tunnel junction is used for replacing an oxide layer of a traditional oxidizing VCSEL and is used for providing current limitation and optical limitation. According to a traditional oxide layer, the oxidation depth is controlled by oxidizing Al0. 98Ga0. 02As to achieve current and optical limitation of the oxidation caliber, Al interface oxidation can be avoided by replacing the traditional oxide layer with a tunnel junction structure, and the problem of further growth of defects can be prevented. An oxide layer is replaced by a tunnel junction limiting structure, higher emission uniformity and higher repeatability manufacturing can be achieved, the size of an oxidation aperture can be accurately defined, and the stability of a mode can be controlled.
Owner:WUXI HUACHEN XINGUANG SEMICON TECH CO LTD

Quantum cascade laser

To provide a quantum cascade laser capable of simplifying a structure and improving a strength.SOLUTION: A quantum cascade laser 1 includes: a semiconductor substrate 2 having a first surface 2a and a second surface 2b; a semiconductor stacked body 3 that includes an active layer 31 having a cascade structure and is formed on the first surface 2a of the semiconductor substrate 2; a first electrode 4 formed on a surface 3b of the semiconductor stacked body 3; and a second electrode 5 formed on the second surface 2b of the semiconductor substrate 2. The semiconductor substrate 2 is an InP substrate with a carrier density of 1×1017 cm-3 or less. A concave portion 21 that passes through the semiconductor substrate 2 and reaches the semiconductor stacked body 3 is formed in the second surface 2b of the semiconductor substrate 2. The second electrode 5 is continuously formed on the second surface 2b of the semiconductor substrate 2, on side surfaces 22 of the concave portion 21, and on an exposed surface 3a of the semiconductor stacked body 3 which is exposed from the semiconductor substrate 2 at a bottom 21a of the concave portion 21.SELECTED DRAWING: Figure 2
Owner:HAMAMATSU PHOTONICS KK

Laser source, LIDAR system and method for controlling a laser source

A laser source may include a laser diode, a modulation device, and a feedback device. The modulation device may include an electric power source and may be suitable for modifying a current intensity applied to the laser diode, which may modify an emission frequency of the laser diode. The feedback device may be suitable for modifying a current intensity applied to the laser diode by the electric power source as a function of the electromagnetic radiation emitted by the laser diode.
Owner:AMS OSRAM INT GMBH

Optical chip structure and manufacturing method therefor

The present application relates to an optical chip structure and a manufacturing method therefor. The method comprises: providing a base and a semi-finished chip, wherein the base comprises a first substrate, an isolation dielectric layer formed on the first substrate, a first semiconductor optical device, and a first waveguide, the semi-finished chip comprises a second substrate and a semi-finished thin-film layer located on one side of the second substrate, the semi-finished thin-film layer and the first waveguide are made of different materials, the first substrate comprises a silicon substrate; forming a recess in the isolation dielectric layer, wherein the first waveguide is at least partially located between the recess and the first substrate; bonding the semi-finished chip in the recess by means of the semi-finished thin-film layer, so that the semi-finished thin-film layer is optically coupled to the first waveguide; removing the second substrate of the semi-finished chip to form a second semiconductor optical device; and carrying out metallization to form an electrode structure separately connected to the first semiconductor optical device and the second semiconductor optical device.
Owner:INNOLIGHT TECHNOLOGY (SUZHOU) LTD

A method for packaging a laser light source based on silicon nitride ceramics

The application discloses a laser light source packaging method based on silicon nitride ceramics and relates to the technical field of laser light source packaging.The laser light source packaging method is composed of silicon nitride ceramics, a laser chip, silver powder resin glue, aluminum oxide, epoxy resin and N-methyl pyrrolidone raw materials.The light source packaging steps are as follows: firstly, the position of the center point of the laser in the laser cavity of the silicon nitride ceramics is measured by using a screw micrometer; the laser light source packaging method based on silicon nitride ceramics measures the position of the center point of the silicon nitride ceramic circuit plate by using a screw micrometer, marks the position by using silver powder resin glue, and stabilizes the light spot line by using laser light source projection technology, so that the laser pad plate of the silicon nitride ceramics is aligned and packaged with the envelope frame, the laser light cannot be offset, the quality of the laser light source packaging based on silicon nitride ceramics is high, the packaging effect is good, cost is saved, and the market use is widened.
Owner:FUJIAN ZHENJING NEW MATERIAL TECH CO LTD

Heterogeneous integrated silicon photonic semiconductor optical amplifier

A semiconductor optical amplifier having a III-V semiconductor structure above a silicon structure. The III-V semiconductor structure forms a p-i-n junction with a first portion having a first width and a second portion having a wider second width. The silicon structure includes a silicon waveguide optically coupled to the III-V semiconductor structure and having a central silicon rib extending between two wide trenches. The central silicon rib includes a first tapered portion located under the first portion of the III-V semiconductor structure, the first tapered portion decreasing in width as the first tapered portion extends in a longitudinal direction, and a second tapered portion located under the second portion of the III-V semiconductor structure, the second tapered portion increasing in width as the second tapered portion extends in the longitudinal direction.
Owner:OPENLIGHT PHOTONICS INC

Laser chip stripping system

The invention relates to the technical field of chip stripping, in particular to a laser chip stripping system which comprises a base, and a chip carrying table is arranged on the base and used for placing a chip; the template fixing frame is positioned above the slide holder; the stripping template is positioned on the template fixing frame and is opposite to the slide holder, and a stripping groove corresponding to a stripping area on the chip is formed in the stripping template; and the laser module is located above the stripping template, and a laser focus lens is arranged at a light outlet of the laser module. The chip is placed on the slide holder, the stripping template is installed, and the stripping groove is right opposite to the stripping area on the chip. And the laser module emits laser to penetrate through the stripping groove to be hit on the metal of the chip. In the state, kinetic energy conversion is carried out on laser photons and metal molecules, so that the kinetic energy of the metal molecules irradiated by the laser is rapidly improved, the metal molecules escape from the surface of the material, and the metal stripping effect is achieved. The chip is subjected to metal stripping by adopting laser, the stripping effect is good, the process is simple and convenient, and the use is convenient.
Owner:HUACHEN XINGUANG (WUXI) SEMICONDUCTOR CO LTD