34results about How to "Improve axial resolution" patented technology

The invention belongs to the technical field of optical precision measurement, relating to super-resolution laser polarization differential confocal imaging method and device. The method improves the transverse resolution power by combining a radial polarized light and a pupil filtering technology, improves the axial resolution power by using a differential subtraction detection technology of an axial-offset dual-detector system and remarkably improves the spatial resolution power and tomography ability of the system. The device comprises a laser source as well as a beam expander, a polarization state modulation system, a pupil filter and a spectroscope which are sequentially arranged at a transmitting end of the laser source, an objective and a sample which are arranged in the transmitted light direction of the spectroscope in turn, and a differential confocal system in the opposite direction of the reflected light direction of the spectroscope. The invention combines the radial polarized light resolution technology with the pupil filtering technology and improves the transverse resolution power of the system; moreover, the differential work mode of the invention can remarkably improve the axial imaging ability of the system and is applicable to the high-precision detection and metering of nanometer-level geometrical parameters in the nanometer manufacturing field.

The invention relates to a method for fixing a focus and measuring a curvature radius by confocal interference, and belongs to the technical field of optical precision measurement. The method comprises the following steps of: introducing interfering reference light based on a confocal light path; precisely positioning an apex of the surface of a tested spherical element and a location of the centre of a sphere by using the maximum value of a confocal interference response curve to obtain the curvature radius of the surface of the tested spherical element; and maximumly sharpening a main lobe of the confocal response curve. By the invention, the traditional confocal interference microscopy imaging technique is first applied to improvement on the fixed-focus precision of an optical measuring system, so that the optical measuring system has a higher axial resolution and a simple structure, and the research and development costs of the system device are reduced.

The invention discloses a material non-destructive inspection method and a material non-destructive inspection device based on nonlinear acoustics. The material non-destructive inspection method comprises the following steps that a Gaussian envelope is used for carrying out windowing on base frequency signals to form emitting signals; all subharmonic components in receiving signals are respectively subjected to filtering by a corresponding band-pass filter at the receiving end for realizing the separation of components at different frequencies; and in addition, all separated subharmonic components are subjected to corresponding matched filtering treatment for realizing the optimal detection of all harmonic components. The nonlinear acoustic detection method provided by the invention has the advantages that the frequency domain aliasing among all subharmonic components in signals is small, the nonlinear detection capability is high, and meanwhile, higher axial resolution capability is realized.

The invention belongs to the technical field of optical imaging and detection and relates to a bilateral fitting confocal measuring method. According to the method, curve equations are respectively fit by respectively utilizing two sections of data at both sides of a confocal system characteristic curve and differential subtraction is carried out to obtain a new curve equation; by solving the new curve equation, the position of an extreme point of the confocal system characteristic curve is obtained. According to the bilateral fitting confocal measuring method, two sections of data, which are close to the half-width position of the confocal system characteristic curve and are very sensitive for the axial displacement, are utilized to carry out fitting, and thus, compared with flexibility obtained by an existing confocal characteristic curve top fitting method, the flexibility of the position, which is calculated by the data sections, of the extreme point of the confocal system characteristic curve is greatly improved and the bilateral fitting confocal measuring method is more suitable for processing the asymmetric confocal characteristic curve in the actual measurement. The invention provides a bran-new measurement processing method for the field of confocal imaging/detection.

The invention belongs to the technical field of optical precise measurement and relates to a super-resolution double-shaft differential confocal measuring method and a super-resolution double-shaft differential confocal measuring device. In the method and the device, pupil filtering technology is fused in a double-shaft confocal measuring structure, and a differential treatment method is used for receiving a measured light beam and carrying out treatment, thereby achieving the aims of improving resolution, expanding working distance, improving anti-interference capability and improving linear range. The invention can be used for precise measurement in such fields as micro-electronics, materials, industrial precise detection, biomedicine, etc.

The invention provides a tri-differential confocal microscope imaging method with high axial resolution and an imaging device. The axial resolution of the original confocal microscope is improved by tri-differential detection. In the optical path of a system, the axial position of a pinhole at the optical detecting position of the confocal microscope can be changed by a pinhole axial micro-displacement device, thus realizing tri-differential detection of signals. The imaging method and the imaging device have the advantages of ensuring the stability of the displacement of the pinhole and simultaneously improving the resolving power, and being simple to realize.

The invention relates to a reflection type spectral pupil differential confocal-photoacoustic microimaging device and method, and belongs to the field of confocal microimaging technologies and photoacoustic microimaging technologies. The structures and the functions of a spectral pupil differential confocal microimaging system and a photoacoustic imaging system are organically combined; the spectral pupil differential confocal microimaging system is used for detecting spatial structure information of a biological sample, and the photoacoustic microimaging system is used for detecting functional information of the biological sample, so that simultaneous detection of the spatial structure information and the functional information of the biological sample can be realized, and in-situ and noninvasive real-time imaging of a biological living body is expected to be realized. By adoption of a spectral pupil differential confocal imaging technology, the axial resolution and the working distance of the spectral pupil differential confocal-photoacoustic microimaging device can be effectively compatible, so that interference of stray light on a focal surface can be suppressed; the signal-to-noise ratio of the system is high; therefore, integrated and handheld design of the spectral pupil differential confocal-photoacoustic microimaging device can be facilitated.

The invention discloses a pulse lie-detection method based on linear frequency modulation and a device thereof, according to the invention, a sensor adopts a non-array ultrasonic probe to emit linearfrequency modulation continuous signals, and the linear frequency modulation signals have the advantages of accuracy, multipath resistance and artifact removal. In combination with pre-distortion processing, pulse compression and a layered inversion echo algorithm, the position (depth) of each reflection surface is obtained through time delay between reflection echoes; the amplitudes of the transmitting signal and the echo signal in each reflecting layer can be inverted in an iterative manner by utilizing an attenuation function of the ultrasonic wave in the body, and a reflection coefficientof each reflecting surface is calculated; the reflection coefficient can determine the tissue composition of each reflection layer, and multi-dimensional pulse information such as pulse depth, frequency and amplitude is obtained, so that multi-dimensional reference can be provided for judgment of a lie detection result.