307results about How to "Long working distance" patented technology

A high performance objective having very small central obscuration, an external pupil for apertureing and Fourier filtering, loose manufacturing tolerances, large numerical aperture, long working distance, and a large field of view is presented. The objective is preferably telecentric. The design is ideally suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths in the UV to VUV spectral range.

A catadioptric system includes: a first image forming optical system that includes at least two reflecting mirrors and forms a first intermediate image of a first plane with light originating from the first plane; a second image forming optical system that includes at least two reflecting mirrors and forms a second intermediate image of the first plane with light having traveled via the first image forming optical system; and a refractive type of third image forming optical system that forms a final image of the first plane onto a second plane with light having traveled via the second image forming optical system, and optical members constituting the first image forming optical system, the second image forming optical system and the third image forming optical system are all disposed along a single linear optical axis.

Catadioptric projection systems are disclosed for projecting an illuminated region of a reticle onto a corresponding region on a substrate. The systems are preferably used with ultraviolet light sources (e.g., 193 nm). The systems comprise a first imaging system, a concave mirror, and a second imaging system. The first imaging system comprises a single-pass lens group and a double-pass lens group. The single-pass lens group comprises a first negative subgroup, a positive subgroup, and a second negative subgroup. Light from the illuminated region of the reticle passes through the single-pass lens group and the double-pass lens group, and reflects from the concave mirror to pass back through the double-pass lens group to form an intermediate image of the illuminated region of the reticle. The light is then directed to the second imaging system that re-images the illuminated region of the reticle on the substrate. Alternatively, light from the single-pass lens group is reflected by a turning mirror to the double-pass lens group, wherein the light returning through the double-pass lens group continues directly to the second imaging system.

An OCT probe has a sheath to be inserted into a subject; and an optical system within the sheath, for changing the direction of light which propagates from a light source through an optical fiber to irradiate the light onto the subject through a transparent portion of the sheath, and for reflecting the light beam, which is reflected by the subject, to guide the light into the optical fiber. A light output surface, for causing the light to be output from the reflecting surface in a direction obliquely inclined with respect to the inner surface of the sheath, and a reflected light sheath entrance preventing portion, for preventing light reflected by the inner surface of the sheath from entering the optical fiber, are provided in the optical system. The reflected light sheath entrance preventing portion may be formed by providing a cut planar surface portion on the lens.

A compact, inexpensive and rugged fiber collimating lens and lens array achieve large beam diameters and provide long working distances. A special single-mode fiber is inserted between a standard single-mode input fiber and a GRIN fiber lens, typically quarter-pitch or slightly longer. The specialty fiber condenses the mode field diameter (MFD) of the beam in the input fiber into its smaller MFD. As a result, the fiber collimating lens provides greater beam expansion due to the larger divergence angle of the specialty fiber, which in turn provides longer working distances.

The invention discloses a novel ultra wide angle lens. The novel ultra wide angle lens comprises a lens shell. Pieces of optical glass sequentially arranged from the object space to the image space inside the lens shell include a first lens, a second lens, a third lens, a fourth lens, a diaphragm component, a fifth lens, a sixth lens, a seventh lens and an eighth lens, wherein the first lens is a strawhat-type lens with the negative focal power, the second lens is a biconcave lens or a plane concave lens with the negative focal power, the third lens is a falcate lens or a biconvex lens with the positive focal power, the fourth lens is a falcate lens or a biconvex lens with the positive focal power, the fifth lens is a falcate lens or a biconvex lens with the positive focal power, the sixth lens is a biconvex lens with the positive focal power, the seventh lens is a falcate lens with the negative focal power, the eighth lens is a biconvex lens with the positive focal power, and the eighth lens is connected with a color filter. The visible light wave band and the near-infrared wave band guided in by the lens are focused in the same focal plane, so that the novel ultra wide angle lens can conduct clear imaging in the day and night modes.

The invention relates to an orthogonal light path two-dimensional micro-focus collimation and three-dimensional coordinate sensor, belonging to a sensor. A first to a seventh connecting frames are arranged on an assembly platform in sequence; a four-dimensional adjusting frame, a spectroscope, a refracting-reflecting type long-focus system A, a refracting-reflecting type long-focus system B, a photoelectric receiver B and a photoelectric receiver A are respectively assembled on the first to the seventh connecting frame; a laser source is assembled on the four-dimensional adjusting frame; an optical fiber probe measuring bar provided with an optical fiber probe measuring head is arranged on a five-dimensional adjusting frame; and the photoelectric receiver A and the photoelectric receiver B are respectively connected with a data acquisition processor through data transmission lines. The orthogonal light path two-dimensional micro-focus collimation and three-dimensional coordinate sensor has the characteristics of zero coupling of two-dimensional sensing information, capability of carrying out detection in the two-dimensional direction, small measuring force, easy minimization, large measured ratio of pit-depth to pit-diameter, good real-time property and easy application, and has remarkable advantages in implementation of rapid and ultra-precise measurement and calibration on micro inside dimensional and three-dimensional coordinates.

A three dimensional pixel super-resolution microscopic imaging method is characterized by comprising the following steps: carrying out space vector scanning on a sample, wherein the scanning vector can form a non-right-angle spacial deflection angle with the plane horizontal direction X and vertical direction Y of an image collection device sensor or a Z axis direction of a microscope, so as to make that two neighbored image slices can be scanned by a step size of a sub pixel displacement along the X, Y, and Z directions; collecting the original three dimensional image sequence A by the image collecting device, cutting the original image sequence A into a plurality of groups of three dimensional image sequences Bi according to the lossless sampling principle, carrying out a super-resolution treatment on Bi to generate a three dimensional high resolution image E, and carrying out a deblurring treatment on E so as to obtain a clear high resolution image F. The spacial reflection angles formed by the scanning vector with the horizontal direction X, the vertical direction Y, and the Z axis of the microscope can be identical or different.

The invention provides a symmetrical double telecentric projection optical system, for imaging a graph in object plane into image plane. And it is a total refraction projection optical system, comprising front set and rear set, using aperture diaphragm as symmetrical surface, where the front set comprises first-fourth lens sets, the first lens set and the third lens set have negative focal power, and the second lens set and the fourth lens set have positive focal power, and the first and second lens sets and the third and fourth lens sets respectively compose retrofocus structure; the rear set comprises in turn fifth-eighth lens sets along the optical axis, respectively symmetrical with the fourth-first lens sets with respect to the aperture diaphragm; and it does not comprise nonspherical lens. And it can effectively correct aberration, enlarge operating focus length and improve imaging quality; and it is relatively simple to machine and detect, able to largely reduce the manufacturing cost.

A design for inspecting specimens, such as photomasks, for unwanted particles and features such as pattern defects is provided. The system provides no central obscuration, an external pupil for aperturing and Fourier filtering, and relatively relaxed manufacturing tolerances, and is suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths below 365 nm. In many instances, the lenses used may be fashioned or fabricated using a single material. Multiple embodiments of the objective lensing arrangement are disclosed, all including at least one small fold mirror and a Mangin mirror. The system is implemented off axis such that the returning second image is displaced laterally from the first image so that the lateral separation permits optical receipt and manipulation of each image separately. The objective designs presented have the optical axis of the Mangin mirror image relay at ninety degrees to the optical axis defined by the focusing lenses, or an in-line or straight objective having one ninety degree bend of light rays.

The invention discloses an infrared spectrum monitoring system based on an MEMS grating light modulator linear array, which comprises a light source, a dispersion element, a grating light modulator linear array, a probe and the like. The light emitted by the light source is incident onto a grating through a collimation system; the light with different wavelengths has different diffraction angles; diffraction light with various wavelengths passes through an imaging system and then is incident onto the programmable grating light modulator linear array; the grating light modulator linear array is operated by applying the voltage to ensure that the grating light modulator linear array has a function of controlling the diffraction states of the light with different wavelengths; and the single point probe arranged on the test surface can orderly acquire the intensity of the light with various wavelengths or the synthetic light intensity of the light with several wavelengths, thereby the infrared spectrum monitoring on detected substances is realized. The system adopts a novel light path system, does not use an expensive infrared detection array, only needs the single point infrared probe, and has the advantages of low cost, small volume, quick response speed, high precision, low power consumption, portable use and the like.

The invention belongs to the technical field of optical precise measurement, in particular to a method and a device for measuring the axial gaps of a differential confocal lens set. The method comprises the following steps of: firstly, positioning the surfaces of various lens in the lens set with high precision by a differential confocal focusing principle to acquire position coordinates of a differential confocal measuring head in various positioning points; and then, sequentially calculating various axial gaps in the lens set by utilizing a beam track recurrence formula. Meanwhile, a circular pupil is introduced in a measuring light path to shield paraxial beams a hollow measuring light cone is formed so as to eliminate the influence of image difference on the measuring result. The invention realizes the non-contact high-precision positioning of the surfaces of the lens in the lens set by using the differential confocal light cone, has the advantages of long working distance, high measuring speed without dismounting the tested lens set in the measuring process, and the like, and can be used for the non-contact high-precision measurement of the axial gaps in the lens set.

The invention belongs to the technical field of optical precision measurement, relating to a method and a device for measuring the central thickness of a differential confocal lens. The method comprises the steps of: firstly, respectively determining the positions of a vertex at the front surface and a vertex at the rear surface of a lens to be measured through a differential confocal and fixed-focal principle and obtaining position coordinates positioned two times by a differential confocal measuring head; and then calculating the central thickness of the lens by utilizing a ray tracing formula. Meanwhile, an annular pupil is introduced into a measuring optical path to shade a paraxial ray and form a hollow measuring light cone, which lightens the influence of aberration on a measuring result. The device comprises a beam splitting system, an objective lens, a differential confocal system, a length measuring system and a mobile guide rail; wherein the beam splitting system, the objective lens and the lens to be measured are sequentially placed in an emergent ray direction of a collimation light source and the differential confocal system is placed in the reflecting direction of the beam splitting system. By utilizing the differential confocal light cone to accurately position the surface of the lens, the invention realizes the non-contact high precision measurement of the central thickness of the lens.

The utility model relates to a fluid chip detection system and detection method of micro-nano rise system, which is characterized in comprising an incident light generation system, a dual focal fluorescence collection system, a collecting light processing system, a circulation flowing stereo temperature control stage, and a microfluid chip; wherein the incident light generation system comprises at least a light source and a condenser arranged on the output of the light; the dual focal fluorescence collection system comprises a front imaging lens group and a rear imaging lens group and a detector arranged on the output of the post lens group; the collecting light processing system comprises an A / D acquisition card connected with the output of the detector, and a computer connected with the output of the A / D acquisition card; the temperature control stage comprises a motion platform bearing the microfluid chip, the heat transfer media around the motion platform, a heater arranged around the heat transfer media and a heat insulation device arranged outside the heater, the computer is connected with the motion platform through a motion controller, and connected with the heater and a temperature transmitter through a temperature feedback circuit. The utility model has the advantages of simple structure, low cost, high fluorescence efficiency collection and high detection sensitivity, convenient use and easy for promotion and popularization.

The invention discloses a large-view-field off-axis three-mirror optical system. The system comprises a first mirror with the negative lens power, a second mirror with the negative lens power, a third mirror and a detector with the positive lens power, wherein the first mirror is opposite to a target light beam incident port, the second mirror is arranged on the reflection optical path of the first mirror, and an aperture diaphragm is arranged on the surface of the second mirror; the third mirror is arranged on the reflection optical path of the second mirror; the detector is used for receiving reflection light of the third mirror. The negative-negative-positive anti-far-distance mode is adopted to the structure of the large-view-field off-axis three-mirror optical system, off-axis light large in view field firstly passes the mirrors with the negative lens power and is diverged, the view field of emitted light is reduced relative to the mirror with the positive lens power, that is, more off-axis light larger in view field can enter the mirror with the positive lens power and is received by the detector, and accordingly the aim of enlarging the view field is achieved.

An optical pickup lens for focusing a light beam from a laser light source on an optical information recording medium is a single lens. The optical pickup lens has two surfaces, and a surface R2 opposite to a surface R1 closer to the laser light source has a continuous shape. When the surface R2 has radii h1, h2 and h3 (h1<h2<h3) from an optical axis to a lens periphery, and where sags in the radii h1, h2 and h3 are sag1, sag2 and sag3, and differentials in the sags are Δsag1, Δsag2 and Δsag3, respectively, 0>Δsag1>Δsag2 and Δsag2<Δsag3 are satisfied.

The invention provides a microscope objective optical system for video imaging, which is formed by sequentially arranging a first lens set, a second lens set, a light splitting prism, a third lens set, a fourth lens set, a fifth lens set, a sixth lens set, a seventh lens set, an eighth lens set and a ninth lens set along an optical axis from left to right, wherein a pre-positioned objective set of the system is formed by the first lens set and the second lens set; a main objective set of the system is formed by the third lens set, the fourth lens set, the fifth lens set, the sixth lens set, the seventh lens set, the eighth lens set and the ninth lens set; the focal length of the third lens se is fU3, the focal length of the fourth lens set is fU4 and the focal length of the main objective set is fE2; and a relation of the fU3, the fU4 and the fE2 is as follows: the absolute value of fU3 / fU4 is more than 0.46 and less than 0.68, and absolute value of fU3 / fE2 is more than 6.23 and less than 7.53. The microscope objective optical system disclosed by the invention has the characteristics of large-numerical-value hole diameter, large view field, long working distance, small relative distortion and high amplification factor in a waveband range of 360-550nm, and the imaging quality of the system reaches to the diffraction limit.

A solid immersion lens (SIL) near-field system including: a radially polarized beam generator to generate a radially polarized beam; an SIL; an objective lens to focus the radially polarized beam on a bottom surface of the SIL; and a mask to shield a center portion of the radially polarized beam, the center portion being about an optical axis of the radially polarized beam.

A system for real-time visualization of subdermal structures of a mammal, using near-infrared (nIR) illumination source, a support structure with independently articulating arms for attaching a camera and a visual display screen, a controller for the camera and nIR illumination source. The camera includes a zoom lens that provides a detection field of view at a long working distance to avoid the camera obstructing the view of the medical personnel when performing a medical procedure on the mammalian body part. A targeting system indicates a focus location of the zoom lens and a center of detection field of view. An nIR bandpass filter and image processor convert the captured and filtered trans-illuminating nIR light to an image signal. An interfaced computer can operate on a commercial or proprietary operating systems and operates image enhancement software and image archival, distribution and display.

The invention relates to a vision measurement system and method based on combination of global feature and local feature. The vision measurement system comprises a platform type binocular camera, a mechanical arm, a mechanical arm hand-eye camera and an on-board computer. The platform type binocular camera is mounted at a permanent position of a satellite body; the mechanical arm hand-eye camera is mounted at the front end of the mechanical arm, and is fixed to a permanent position of the satellite body before the mechanical arm is unfolded; and a diffuse-reflection cooperative target point is adhered to the back end of the mechanical arm hand-eye camera. Besides, the on-board computer is mounted on the satellite body and capable of controlling movement of the satellite body, is connected with the platform type binocular camera and the mechanical arm hand-eye camera through electronic circuits, and is connected with the mechanic arm through an electronic circuit so as to control movement of the mechanical arm. The vision measurement system and method can cover working distance no matter the distance is far, near or super-near, thereby realizing high-precision vision measurement to non-cooperative satellite targets.

The invention belongs to the technical field of precision measurement and the field of optical engineering and specifically relates to a combination zeroing laser large working distance auto-collimation device and method. The device consists of a light source, a collimating mirror, a reflecting mirror and a feedback imaging system; according to the method, via adjustment of the reflecting mirror, a reflected light beam is enabled to return to a center of an image plane of the feedback imaging system; an angular deflection measurement device on the reflecting mirror is used for obtaining angular variation of a surface of an object being tested. Because the reflecting mirror is added in a traditional auto-collimation angle measurement system, a problem that measurement cannot be realized when light reflected by the object being tested is deviated from a measurement system can be prevented; an auto-collimation working scope can be expanded while working distance remains the same or working distance is increased while the auto-collimation working scope remains the same; via specific design of the collimating mirror, the feedback imaging system, the reflecting mirror and the like, the combination zeroing laser large working distance auto-collimation device is enabled to be simple in structure and low in manufacture cost; measurement operation can be conducted even in unstable measurement environments, and a technical advantage of rapid measurement can be gained.

The invention relates to a head-mounted display device and an optical lens system thereof. The optical lens system comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens and a sixth lens which are arranged in sequence from a light inlet side to a light outlet side along an optical axis, wherein each lens is a spherical lens with an refractive index, the first lens is a negative focal power lens, the second lens is a positive focal power lens, the third lens is a positive focal power lens, the fourth lens is a positive focal power lens, the fifth lens is a positive focal power lens, and the sixth lens is a negative focal power lens. The head-mounted display device provided by the invention comprises a machine shell and a display module which is installed in the machine shell, wherein the display module comprises at least one optical lens system disclosed in the invention and at least one display screen which is arranged on an optical axis, facing the light inlet side, of a second surface of the sixth lens. The head-mounted display device and the optical lens system thereof ensure angle of field of view, ensure good imaging quality, and have the advantages of short focal length and long working distance.

The invention discloses a space rope net capturing system based on recombining rope system formation flying. The space rope net capturing system comprises a recombining mechanism, a flexible plane rope net and closing-in ropes. The recombining mechanism is composed of four sub-mechanisms the same in structure. Each sub-mechanism comprises a launching-butt joint part and a tied rope control part. After one end of the corresponding closing-in rope enters a shell from a conical barrel center hole outside a shell and sequentially passes through a tension pretensioner, a rope length measuring wheel, a tension measuring wheel and an auxiliary guide wheel of each tied rope control part, the closing-in rope is fixed to the inner wall position of a rope rolling barrel, and the other end of the closing-in rope is connected with the middle portion of a conical rod of the adjacent sub-mechanism. Rope rings are evenly distributed on the periphery of the flexible plane rope net, the closing-in ropes of the four sub-mechanisms are sleeved with the rope rings in a clearance manner correspondingly, and folding and unfolding of the flexible plane rope net are achieved through collecting and releasing of the closing-in ropes. The space rope net capturing system has the beneficial effects that the fault tolerance is good, the operating distance is long and the capturing efficiency is high; and rope net unfolding and folding are conducted through recombining rope system formation flying, rope net capturing reliability can be improved, and control complexity is reduced.

A substrate processing apparatus includes: a holding unit holding a substrate; a rotation driving unit rotating the substrate held on the holding unit; a moving mechanism moving the holding unit between a delivery position and an edge exposure position; an exposure unit provided on the edge exposure position side and exposing an edge portion of a coating film above the substrate held on the holding unit; an image capturing unit provided on the edge exposure position side and above the exposure unit and capturing an image of the substrate held on the holding unit; and a direction change unit changing a direction of an optical path formed between the substrate held on the holding unit and the image capturing unit. The direction change unit includes a first reflecting mirror, a second reflecting mirror, and a third reflecting mirror.

The invention discloses a multifunctional delivery process of cigarette finished products. A warehouse management system WMS is used for judging whether to carry out direct delivery from a warehousing system or not according to the inventory situation, when the inventory is insufficient, the delivery can be directly carried out from a workshop, when the inventory is sufficient, the direct whole tray ex-warehouse delivery or the delivery after unstacking can be selected according to the actual demands of ex-warehouse cigarette pieces. A bar code recognizer and an RFID reader and writer are arranged on a conveying line, thereby respectively carrying out information reading on the cigarette pieces and a tray and then conveying to different working positions. The multifunctional delivery process re-integrates the robot technology, the radio frequency identification technology and the cigarette piece carton confluence sorting technology, thereby effectively upgrading the flexibility of an automatic ex-warehouse system, increasing the delivery channel of the ex-warehouse system and carrying out direct delivery without warehousing. The delivery operation takes the whole tray as a unit for carrying out the automatic ex-warehouse delivery, thereby greatly increasing the efficiency of the logistics of the cigarette finished products. The multifunctional delivery process can further integrate the functions in the similar logistics field in the limited geographical space, thereby being more in line with the requirements on economy, simplification and efficiency.

The invention relates to a spectrophotometric pupil confocal-photoacoustic microimaging device and method. The device and the method are based on a spectrophotometric pupil confocal microimaging system with long working distance, high axial resolution and stray light interference resistance, structures and functions of the spectrophotometric pupil differential confocal microimaging system and a photoacoustic imaging system are organically combined, the spectrophotometric pupil confocal microimaging system is utilized to detect spatial structure information of a biological sample, the photoacoustic imaging system is utilized to detect function information of the biological sample, and then simultaneous detection for the spatial structure information and the function information of the biological sample is realized, so that in-site and non-invasive imaging is performed on a living biological body in real time. With the adoption of the spectrophotometric pupil confocal technology, the axial resolution and the working distance of the spectrophotometric pupil confocal-photoacoustic microimaging device are effectively considered, interference of stray light of a high scattering sample focal plane on the imaging quality can be retrained, the system signal noise ratio is high, and the integrated design of the spectrophotometric pupil confocal-photoacoustic microimaging device is facilitated.

An objective lens OL includes, in order from an object, a first lens group G1 having positive refractive power, a second lens group G2 having positive refractive power, a diffractive optical element GD forming a diffractive optical surface D thereon, and a third lens group G3 having negative refractive power. The first lens group G1 includes at least one cemented lens and the most object side surface thereof forms a concave surface facing the object. The second lens group G2 includes at least one cemented lens. The third lens group G3 includes at least one cemented negative lens. In the objective lens OL, a principal ray crosses an optical axis between the second lens group G2 and the third lens group G3, and in the diffractive optical element GD, the diffractive optical surface D is disposed in the vicinity of the position where the principal ray crosses the optical axis.

The invention relates to a non-marking far-field super-resolution microscopic system and method based on non-diffraction super-resolution beam illumination, which comprises a non-diffraction super-resolution beam illumination module, a sample two-dimensional scanning module, a microscopic optical module, and a super-resolution imaging module. The illumination light source adopts the non-diffraction super-resolution beam, and has the advantages that the working distance is large, the illumination beam propagation distance is far, the illumination beam penetration is strong, and the light beam transverse half-height full-width is smaller than the diffraction limit; a confocal mode is adopted to realize the far-field super-resolution imaging system and method without marking; and can realizethe three-dimensional tomographic imaging of the transparent sample, the transverse resolution is smaller than the diffraction limit, and is better than lambada / 5. The method can be applied to non-marking super-resolution microscopic imaging of biological samples and can also be applied to the fields of industrial related super-resolution microscopic detection and the like.

The inventive coupling device enables a high interconnection density of single mode optical fiber in active and passive devises used in a fiber optic telecommunication system. The coupling device comprise a micro-lens formed by terminating a single mode optical fibers with an optimized gradient index fiber, thus avoiding a significant increase in fiber diameter. The gradient index is optimized to provide a long working distance to the minimum spot size so that efficient coupling can be achieved in a free space interconnection between either multiple single mode fibers or a single mode fiber to a transmitting or receiving device.

A compact, inexpensive and rugged fiber collimating lens and lens array achieve large beam diameters and provide long working distances. A special single-mode fiber is inserted between a standard single-mode input fiber and a GRIN fiber lens, typically quarter-pitch or slightly longer. The specialty fiber condenses the mode field diameter (MFD) of the beam in the input fiber into its smaller MFD. As a result, the fiber collimating lens provides greater beam expansion due to the larger divergence angle of the specialty fiber, which in turn provides longer working distances.