Infrared spectrum monitoring system based on MEMS optical grating optical modulator linear array

A light modulator and infrared spectroscopy technology, applied in the field of instrument analysis, can solve the problems of low efficiency of light energy utilization

Inactive Publication Date: 2009-08-12
CHONGQING UNIV
View PDF0 Cites 25 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The grating light modulator, the core optical component of the instrument, uses four crab-shaped leg-shaped support beams to support the movable grating on the upper layer. It

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Infrared spectrum monitoring system based on MEMS optical grating optical modulator linear array
  • Infrared spectrum monitoring system based on MEMS optical grating optical modulator linear array
  • Infrared spectrum monitoring system based on MEMS optical grating optical modulator linear array

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0054] Such as figure 1 As shown, the light emitted by the light source 1 with a slit is collimated into parallel light by the collimating mirror 2, and then irradiates the fixed reflection grating 3, and the light of different wavelengths propagates in different directions of diffraction angles, and after being dispersed After passing through the imaging lens 4, the light of each color is incident on the line array 5 of the grating light modulator in parallel. Each pixel on the grating light modulator corresponds to a specific wavelength band. The zero-order reflected light corresponding to each pixel is incident on the reflective grating 3 after passing through the imaging lens again. After the light is synthesized by the grating, it passes through the infrared long-pass filter 6 and enters the single-point infrared detector 7 . By programming the linear array 5 of the grating light modulator, the infrared spectrum information of the substance can be obtained from the time-...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses an infrared spectrum monitoring system based on an MEMS grating light modulator linear array, which comprises a light source, a dispersion element, a grating light modulator linear array, a probe and the like. The light emitted by the light source is incident onto a grating through a collimation system; the light with different wavelengths has different diffraction angles; diffraction light with various wavelengths passes through an imaging system and then is incident onto the programmable grating light modulator linear array; the grating light modulator linear array is operated by applying the voltage to ensure that the grating light modulator linear array has a function of controlling the diffraction states of the light with different wavelengths; and the single point probe arranged on the test surface can orderly acquire the intensity of the light with various wavelengths or the synthetic light intensity of the light with several wavelengths, thereby the infrared spectrum monitoring on detected substances is realized. The system adopts a novel light path system, does not use an expensive infrared detection array, only needs the single point infrared probe, and has the advantages of low cost, small volume, quick response speed, high precision, low power consumption, portable use and the like.

Description

technical field [0001] The invention relates to the technical field of instrument analysis; more specifically, the invention relates to a MEMS-based micro programmable infrared spectrum monitoring system, which can be used in the fields of environmental monitoring, food safety detection and the like. Background technique [0002] Due to the strong absorption characteristic spectra of hydrogen-containing groups and carbon compounds in the near-infrared and mid-infrared spectral regions, infrared spectrometers can use this property to measure the composition of substances. The detection time is short, the analysis sample does not need to be pre-treated during the spectral measurement, other materials are not consumed or the sample is damaged during the analysis process, the instrument itself has no pollution, the analysis reproducibility is good, and the cost is low. It is very economical and fast for frequent quality control. Existing infrared spectrometers mainly include fi...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01N21/35G01J3/32
CPCG01J3/02G01J3/0229
Inventor 陈伟民韦玮王宁张洁朱永
Owner CHONGQING UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap