Infrared spectrum monitoring system based on MEMS optical grating optical modulator linear array

Abstract

The invention discloses an infrared spectrum monitoring system based on an MEMS grating light modulator linear array, which comprises a light source, a dispersion element, a grating light modulator linear array, a probe and the like. The light emitted by the light source is incident onto a grating through a collimation system; the light with different wavelengths has different diffraction angles; diffraction light with various wavelengths passes through an imaging system and then is incident onto the programmable grating light modulator linear array; the grating light modulator linear array is operated by applying the voltage to ensure that the grating light modulator linear array has a function of controlling the diffraction states of the light with different wavelengths; and the single point probe arranged on the test surface can orderly acquire the intensity of the light with various wavelengths or the synthetic light intensity of the light with several wavelengths, thereby the infrared spectrum monitoring on detected substances is realized. The system adopts a novel light path system, does not use an expensive infrared detection array, only needs the single point infrared probe, and has the advantages of low cost, small volume, quick response speed, high precision, low power consumption, portable use and the like.

Description

technical field [0001] The invention relates to the technical field of instrument analysis; more specifically, the invention relates to a MEMS-based micro programmable infrared spectrum monitoring system, which can be used in the fields of environmental monitoring, food safety detection and the like. Background technique [0002] Due to the strong absorption characteristic spectra of hydrogen-containing groups and carbon compounds in the near-infrared and mid-infrared spectral regions, infrared spectrometers can use this property to measure the composition of substances. The detection time is short, the analysis sample does not need to be pre-treated during the spectral measurement, other materials are not consumed or the sample is damaged during the analysis process, the instrument itself has no pollution, the analysis reproducibility is good, and the cost is low. It is very economical and fast for frequent quality control. Existing infrared spectrometers mainly include fi...

AI Technical Summary

Problems solved by technology

The grating light modulator, the core optical component of the instrument, uses four crab-shaped leg-shaped support beams to support the movable grating on the upper layer. It mainly works in the near-infrared band that can be used for food safety monitoring. At present, there are still problems with low light energy utilization efficiency. question

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