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49 results about "Catadioptric system" patented technology

A catadioptric optical system is one where refraction and reflection are combined in an optical system, usually via lenses (dioptrics) and curved mirrors (catoptrics). Catadioptric combinations are used in focusing systems such as searchlights, headlamps, early lighthouse focusing systems, optical telescopes, microscopes, and telephoto lenses. Other optical systems that use lenses and mirrors are also referred to as "catadioptric", such as surveillance catadioptric sensors.

Universal compensation mirror based on deformable mirror and design method

The invention relates to a universal compensation mirror based on a deformable mirror and a design method, aims to detect surface morphology of a free curved surface through laser interference and belongs to the photoelectric detection field. The compensation mirror comprises a first level compensator and a second level compensator. Through the design method, low-order aberration of the detected free curved surface is calculated by firstly utilizing a primary Seidel aberration formula, parameters of the first level compensator are acquired through employing an aberration matching and paraxial formula algorithm; a catadioptric system is established by utilizing software, and residual high-order aberration can be compensated as much as possible by utilizing the second level compensator. According to the compensation mirror and the design method, the deformable mirror is taken as the second level compensator and is for surface morphology detection on the free curved surface, so one compensator can be utilized to detect free curved surfaces in multiple types, design difficulty and processing fee of compensators can be reduced to a maximum degree, moreover, through the compensation detection method, the structure is simple, introduced error sources are reduced, early-stage calibration adjustment is easy, and instantaneous and high precision surface morphology measurement can be realized.
Owner:BEIJING INSTITUTE OF TECHNOLOGYGY

High NA system for multiple mode imaging

A system for multiple mode imaging is disclosed herein. The system is a catadioptric system preferably having an NA greater than 0.9, highly corrected for low and high order monochromatic aberrations. This system uses unique illumination entrances and can collect reflected, diffracted, and scattered light over a range of angles. The system includes a catadioptric group, focusing optics group, and tube lens group. The catadioptric group includes a focusing mirror and a refractive lens / mirror element. The focusing optics group is proximate to an intermediate image, and corrects for aberrations from the catadioptric group, especially high order spherical aberration and coma. The tube lens group forms the magnified image. Different tube lens groups can be used to obtain different magnifications, such as a varifocal tube lens group to continuously change magnifications from 20 to 200×. Multiple imaging modes are possible by varying the illumination geometry and apertures at the pupil plane. Imaging modes include bright-field, full sky, ring dark-field, inverted ring dark-field, directional dark-field, double dark-field, Manhattan geometry, confocal bright-field, confocal dark-field, conoscopic, etc. Illumination can enter the catadioptric optical system using an auxiliary beamsplitter or mirror, or through the catadioptric group at any angle from 0 to 85 degrees from vertical. Multiple beams at multiple angles may be used for illumination. The high NA catadioptric system can also have a relayed pupil plane, used to select different imaging modes, providing simultaneous operation of different imaging modes, Fourier filtering, and other pupil shaping operations.
Owner:KLA CORP

Beam-splitter optics design that maintains an unflipped (unmirrored) image for a catadioptric lithographic system

The present invention is a catadioptric system having a reticle optical group, a beam splitter, an aspheric mirror, a baffle plate, a folding mirror and a semiconductor wafer optical group. The reticle optical group, the beam splitter and the semiconductor wafer optical group are placed on the same beam axis, different from aspheric mirror and folding mirror axis. The light passes through an image pattern on the reticle and is reflected by the beam splitter onto the aspheric mirror. The aspheric mirror reflects the light back through the beam splitter onto the folding mirror. The folding mirror reflects the light back to the beam splitter. The beam splitter reflects the light onto the semiconductor wafer optical group. A plurality of quarter wave plates can be placed in optical paths between optical elements of the present invention to change polarization of an incoming light. Before light passes through the semiconductor wafer optical group, it passes through the baffle plate, which prevents any background scattered light caused by internal reflections within the beam splitter from entering the semiconductor wafer optical group. In another embodiment, a spacer plate is inserted into the beam splitter. The spacer plate creates an offset between reticle optical group beam axis and semiconductor wafer optical group beam axis. This reduces direct passage of light from reticle optical group to semiconductor wafer optical group.
Owner:ASML HLDG NV

A quasi-universal compensating mirror based on deformable mirror and its design method

The invention relates to a universal compensation mirror based on a deformable mirror and a design method, aims to detect surface morphology of a free curved surface through laser interference and belongs to the photoelectric detection field. The compensation mirror comprises a first level compensator and a second level compensator. Through the design method, low-order aberration of the detected free curved surface is calculated by firstly utilizing a primary Seidel aberration formula, parameters of the first level compensator are acquired through employing an aberration matching and paraxial formula algorithm; a catadioptric system is established by utilizing software, and residual high-order aberration can be compensated as much as possible by utilizing the second level compensator. According to the compensation mirror and the design method, the deformable mirror is taken as the second level compensator and is for surface morphology detection on the free curved surface, so one compensator can be utilized to detect free curved surfaces in multiple types, design difficulty and processing fee of compensators can be reduced to a maximum degree, moreover, through the compensation detection method, the structure is simple, introduced error sources are reduced, early-stage calibration adjustment is easy, and instantaneous and high precision surface morphology measurement can be realized.
Owner:BEIJING INSTITUTE OF TECHNOLOGYGY
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