35 results about "Pupil shape" patented technology

An illumination system for a microlithography projection exposure installation is used to illuminate an illumination field with the light from a primary light source (11). The illumination system has a light distribution device (25) which receives light from the primary light source and, from this light, produces a two-dimensional intensity distribution which can be set variably in a pupil-shaping surface (31) of the illumination system. The light distribution device has at least one optical modulation device (20) having a two-dimensional array of individual elements (21) that can be controlled individually in order to change the angular distribution of the light incident on the optical modulation device. The device permits the variable setting of extremely different illuminating modes without replacing optical components.

An illumination system for a microlithography projection exposure installation is used to illuminate an illumination field with the light from a primary light source (11). The illumination system has a light distribution device (25) which receives light from the primary light source and, from this light, produces a two-dimensional intensity distribution which can be set variably in a pupil-shaping surface (31) of the illumination system. The light distribution device has at least one optical modulation device (20) having a two-dimensional array of individual elements (21) that can be controlled individually in order to change the angular distribution of the light incident on the optical modulation device. The device permits the variable setting of extremely different illuminating modes without replacing optical components.

An aperture diaphragm plate is provided to define a light flux on a pupil plane of an optical system or a plane or surface disposed in the vicinity of the pupil plane. An aperture, which is formed in the aperture diaphragm plate, has a three-dimensional shape corresponding to an optimum pupil shape of the optical system. It is possible to improve the imaging characteristic brought about by the optical system by providing the optimum pupil shape of the optical system.

The invention provides a photoetching lighting system for semiconductor photoetching machine, comprising a light source, a pupil shaping module, a lenticule array module and a light condenser, wherein, the light source is used to generate lighting beam; the pupil shaping module is used to receive the lighting beam generated by the light source and form the lighting beam into cross section with specified shape; the lenticule array module is used to receive the lighting beam from the pupil shaping module and form the lighting beam with one-dimensional trapezoid light intensity distribution lighting beam; the light condenser is used to receive the lighting beam from the lenticule array module and project the converged lighting into a lighting field; the lenticule array module comprises at least two lenticule arrays and two pairs of edge arrays. The invention has the advantages of simple structure, high transmittance, ability to generate trapezoid light intensity distribution lighting field, and applicability to photoetching machine with the wavelength of 248nm, 193nm or other wavelengths.

The invention discloses a pupil shaping unit structure of a lithography machine and a design method for a diffraction optical element of the pupil shaping unit structure. The pupil shaping unit structure comprises a cascade diffraction optical element and a varifocal collimating lens group, wherein the cascade diffraction optical element comprises a first diffraction optical element and a second diffraction optical element; the light transmittance surfaces of the two diffraction optical elements are perpendicular to the optical axis of a lighting system; the two diffraction optical elements are pure phase elements. The design method for the cascade diffraction optical element comprises the following steps of calculating a period of a phase unit; enabling a light beam to be incident, determining the light intensity distribution of the required optical beam and performing discretization processing; entitling initial phase matrixes of the first diffraction optical element and the second diffraction optical element; performing quantification processing through an iteration algorithm to obtain quantified phase matrixes of the first diffraction optical element and the second diffraction optical element; evaluating a design result.

A head mounted display (HMD) comprises an eye tracking system configured to enable eye tracking using light. The eye tracking system comprises two or more illumination sources positioned relative to one another and an optical detector for each eye. The optical detector is configured to capture images of the illumination sources using reflections from the eye. The system gathers data as the user views various objects in the HMD. The system determines a shape of the eye by determining one or more of a pupil shape, a foveal offset, and a corneal radius in three-dimensional space. The shape of theeye is used determine a three-dimensional position of the user's eye as well as a gaze direction.

A system for multiple mode imaging is disclosed. The catadioptric system has an NA greater than 0.65, and preferably greater than 0.9, highly corrected for low and high order monochromatic aberrations. The system employs unique illumination entrances and optics to collect reflected, diffracted, and scattered light over a range of angles. Multiple imaging modes are possible by varying the illumination geometry and apertures at the pupil plane. Illumination can enter the catadioptric optical sytems using an auxiliary beamsplitter or mirror, or through the catadioptric elements at any angle from 0 to 85 degrees from vertical. The system may employ a relayed pupil plane, used to select different imaging modes, provide simultaneous operation of different imaging modes, Fourier filtering, and other pupil shaping operations.

The invention discloses an artificial vision prosthetic device with a wireless energy transmission function. A wireless energy transmission module is used for wirelessly transmitting energy to eyes, and an image acquisition module is used for converting acquired analog signals into digital signals; a micro Bluetooth module is used for wirelessly sending the acquired digital signals to an in vitro image information processor and receiving in vitro transmitted control instructions, and a built-in controller is used for calling a micro rechargeable battery to supply power to each device in the eyes when the wireless energy is cut off; the transmitting terminal of the wireless energy transmission module is arranged on a spectacle frame body, and an external power supply is arranged in a spectacle leg and is used for providing a wireless energy transmission emitting terminal power supply. The artificial vision prosthetic device provided by the invention adopts wireless energy transmission and micro rechargeable battery to supply power, so that the supply of energy of each device in the eyes is ensured; and the wireless energy receiving terminal adopts an annular design which conforms to the human pupil shape, and can be applied to visual prostheses of all types.

Illumination system for a lithographic projection exposure step-and-scan apparatus comprising a light source, a pupil shaping unit, a field defining unit, a first lens array, a first slit array, a second lens array, a third lens array, a second slit array, a fourth lens array, a condenser lens, and a scanning drive unit sequentially arranged along the light beam propagation direction. The illumination system reduces requirements on lens processing, slit scanning speed, and slit scanning precision, therefore may be implemented more easily.

An exposure apparatus with optimum illumination conditions without dependence on the directionality of the fine pattern on a reticle comprises an illumination optical system for illuminating a reticle having a pattern to be transferred and a projection optical system for projecting and transforming the reticle pattern on a substrate. The illumination optical system has pupil shape forming unit for forming four substantially planar light sources on the plane in the vicinity of its pupil, wherein the four planar light sources are arranged at each substantial vertices of a narrow rectangle whose barycenter is located on the optical axis so as to adjust a resist pattern to be transferred or a substrate pattern formed via a process to a predetermined size and a predetermined shape.

The embodiment of the present application discloses a method of line-of-sight estimation, a device and a system. The method comprises: analyzing the pupil shape information used for describing the geometrical parameters of the elliptical pupil image from the current human eye image by real-time collecting the current human eye image, calculating the plane normal direction of the pupil in the three-dimensional world coordinate system by using the two-dimensional pupil shape information analyzed by the pupil image, and marking it as the human eye axis direction; a human eye visual axis directionbeing obtained by compensating the human eye visual axis direction with a preset compensation angle, and the fixation direction and/or fixation point corresponding to the current human eye image being determined according to the human eye visual axis direction. Thus, by quantifying the pupil shape information in the current human eye image, calculating and compensating to determine the fixation direction and/or fixation point of the human eye, the real-time and accurate detection of the fixation direction and/or fixation point of the human eye can be realized in a wider range.

The invention relates to the technical field of medical treatment, in particular to a multifunctional medical detection system, comprising a detection terminal. The detection terminal comprises an identification tag and a plurality of display screens different in size; the display screens are in pupil shape; the actual size of the identification tag is stored in the detection terminal; when identifying the identification tag and pupils, the detection terminal acquires images of the pupils and an image of the identification tag; the detection terminal calculates actual sizes of the pupils in the acquired images of the pupils according to size of the acquired image of the identification tag and actual size of the identification tag, and displays on the display screens, the images of the pupils scaled to sizes identical with the real sizes of the pupils; the detection terminal matches the display screen having the smallest size error relative to the scaled images of the pupils, and marks the display screen. Therefore, the problem of inaccurate pupil measurement is solved. The multifunctional medical detection system is applied mainly to medical institutions.

The invention relates to a pupil shaping device for photoetching illumination. The pupil shaping device for the photoetching illumination is characterized in by comprising a rotating disc mechanism, a continuous zoom lens group and a controller, wherein the rotating disc mechanism is circumferentially uniformly provided with a plurality of diffractive optical elements; the diffractive optical elements of the rotating disc mechanism and the continuous zoom lens group are sequentially arranged along the direction of square incident light beams generated by a photoetching machine illuminating system; the diffractive optical elements are positioned on the front focal plane of the continuous zoom lens group and are perpendicular to the optical axis of the pupil shaping device; the controller accurately controls the rotation of the rotating disc mechanism and the movement of the diffractive optical elements through an encoder; and the focal distance of the continuous zoom lens group is regulated, and needed illuminating pupil distribution is formed on the image space focal plane, namely a pupil plane, of the continuous zoom lens group. The pupil shaping device disclosed by the invention has the advantages of simple optical system and high optical transmission rate, and can be used for solving the problem of pupil degradation, which is caused by a tapered lens group, of the existing pupil shaping device.

Disclosed are an intelligence device and a method of selecting a user of the intelligence device. According to an embodiment of the disclosure, the intelligence device may analyze the eye blinks and pupil shapes of persons and select the person gazing at the intelligence device as a user. According to an embodiment, the intelligence device may be related to artificial intelligence (AI) modules, robots, augmented reality (AR) devices, virtual reality (VR) devices, and 5G service-related devices.

The embodiment of the invention discloses a self-adaptive adjustment method and device for a hyperbaric oxygen eye therapeutic apparatus. The method comprises the following steps: acquiring physical examination data information corresponding to the current user; according to the physical examination data information, determining initial treatment data in a preset medical scheme library, and according to the initial treatment data, adjusting the initial working state of a hyperbaric oxygen eye treatment instrument; based on an image acquisition device, acquiring an eye image of a current user in real time; determining an eye state value corresponding to the eye image, wherein the eye state numerical value at least comprises one of a pupil shape numerical value, an iris shape numerical value and a sclera shape numerical value; and under the condition that the eye state numerical value meets an eye reference data value, according to treatment data corresponding to the eye reference data value, adjusting the working state of the hyperbaric oxygen eye treatment instrument again. Through the method, the treatment effect is improved.

Various embodiments use in-line illumination to determine pupil features (e.g., perimeter location, pupil shape, pupil diameter, pupil center, etc.). Coaxial illumination involves generating light from a light source substantially coaxial with an image sensor configured to capture reflections of the light from the light source from the eye. Light from the light source may enter the eye through the pupil and reflect from the retina to produce a bright pupil-type light pattern in data obtained by the image sensor. The light may be pulsed at a frequency such that frequency segmentation may be used to distinguish reflections through the pupil out of the retina from reflections of light from other light sources. In some embodiments, the image sensor is an event camera that detects an event. Pupil features may be evaluated by evaluating events that occur repeatedly in a given area at a given frequency.