170 results about "Wavefront aberration" patented technology

The invention provides a subjective optometry prediction method combining wavefront aberration and optical signals. According to the method, eyeball wavefront aberration data are measured through a wavefront sensor, cornea, crystal and retina biological parameters are obtained by combining multi-view-field scanning of a galvanometer system, and after high-credibility data points are screened, a gradient refractive index eyeball three-dimensional model is constructed by adopting an NURBS algorithm; using finite element analysis to optimize cornea stress distribution, iteratively correcting the model through a deformation energy function, and dynamically compensating eyeball motion errors based on eye movement tracking data; and generating a multi-field-angle visual chart image through ray tracing simulation, and predicting a subjective optometry result in combination with an image quality evaluation algorithm. According to the method, high-precision modeling, dynamic error suppression and intelligent simulation technologies are fused, the optometry prediction accuracy, the personalized adaptation degree and the dynamic scene adaptability are remarkably improved, and an efficient and reliable solution is provided for refraction correction.

The invention relates to the technical field of space telescope image processing, and particularly provides a large-view-field spliced space telescope image high-precision restoration method, which comprises the following steps of: constructing a distribution relation of wavefront aberrations with different frequencies along with a view field according to optical parameters of a telescope; based on the relation between the intensity two-dimensional matrix of any field-of-view image plane PSF image and the wave aberration of the corresponding field-of-view, an image plane PSF image of a specific field-of-view is actually measured through a wavefront sensor arranged on the telescope, and the wave aberration of the specific field-of-view is calculated based on the actually measured image plane PSF image; the PSF of any view field is derived according to the distribution rule of wavefront aberrations with different frequencies along with the view field and the relation between the intensity two-dimensional matrix of the image plane PSF image and the wave aberration, and the PSF of any view field derived from the actually measured PSF is utilized to realize the high-precision restoration of the spliced space telescope image through an image block restoration method. According to the method, the actually-measured PSF is adopted for image restoration, the defect that estimation PSF is adopted during traditional non-blind deconvolution is overcome, and the restoration precision is improved.

The invention discloses an optical performance-oriented key geometric error identification method for a large aspheric element multi-axis numerical control machine tool. According to the method, a tool setting point is used as a key node to establish a surface shape error model, geometric errors and surface shape errors of a machine tool are accurately associated, multi-error coupling analysis is simplified, and targeted compensation, online monitoring and real-time correction are achieved. On the basis, a machine tool space error model is constructed in combination with a multi-body system theory, a mapping relation between a surface shape error and wavefront aberration is established by utilizing a ray tracing theory, the wavefront aberration is fitted through a Zernike polynomial, and the contribution degree of each geometric error to the aberration is quantified by means of principal component analysis, so that a key geometric error is identified and compensation is implemented. According to the method, the machining error and the final optical performance are directly associated, and the machining precision and the performance quality of the large aspheric element can be improved. The method is suitable for the manufacturing field of large complex optical elements machined by a multi-axis numerical control machine tool.

The invention relates to a multi-spectral wavefront aberration restoration method and system based on double roof prisms, and the method comprises the following steps: taking a sub-pupil image as the input of a classification model, obtaining classification feature data, and carrying out the data expansion of the classification feature data, the sub pupil image is obtained by inputting incident wavefront aberration into a simulation light path of the double-ridge prism wavefront sensor, the double-ridge prism wavefront sensor comprises two groups of double-ridge prisms, each group of double-ridge prisms comprises two ridge prisms which are vertically and oppositely arranged, the characteristics of the ridge prisms are equal, and the characteristics of the double-ridge prisms are equal. The two groups of double-roof prisms are made of a material combination for eliminating chromatic aberration; splicing the sub pupil images and the classification feature data after data expansion to serve as input of a regression model, and obtaining a Zernike coefficient matrix corresponding to incident wavefront aberration; and according to the Zernike coefficient matrix corresponding to the incident wavefront aberration and the Zernike polynomial, obtaining a recovered wavefront aberration. Compared with the prior art, the method has the advantage that the wavefront aberration recovery accuracy is improved.

The invention relates to the technical field of coupling alignment of single-mode optical fibers, in particular to an optical fiber coupling alignment method and system based on wavefront aberration and a sensitivity matrix. The system comprises an optical measurement module, a processing and control module and a multi-axis precision adjustment platform, and the alignment method comprises the steps that firstly, an interference fringe image is obtained and processed through an interference light path, continuous wavefront is recovered through Fourier transform and phase unwrapping, and a Zernike coefficient for quantizing wavefront distortion is obtained through Zernike polynomial fitting. A sensitivity matrix representing the linear relation between the degree-of-freedom adjustment amount and Zernike coefficient changes is established and serves as a physical guide item to introduce a speed updating formula of a particle swarm optimization algorithm, an SG-PSO algorithm is formed, a particle swarm is guided to conduct directional intelligent search and rapidly output the optimal adjustment amount, and finally a multi-axis precision adjustment platform is driven to complete alignment. According to the method, optimization of wavefront sensing and physical model guiding is effectively fused, and the convergence speed, the alignment precision and the global search capability are remarkably improved.

The invention discloses a wavefront distortion correction method based on a dynamic adaptive MESSA algorithm and a coherent free space optical communication system. The problems that an existing method is prone to falling into a local optimal solution, the correction effect is poor under dynamic turbulence, and the adaptive capacity is weak are solved. According to the method, an individual position is initialized through a Circle chaotic mapping method, iterative optimization is carried out in combination with a Levy flight strategy and a variable spiral search strategy, and a step size control parameter, a safety threshold, spiral strength and a spiral adjustment coefficient are dynamically adjusted through a double-discrimination dynamic adaptive parameter adjustor. And reducing the population scale according to a nonlinear population reduction strategy, finally outputting an optimal individual position, and driving the deformable mirror to perform wavefront correction according to a control voltage vector corresponding to the optimal individual position. According to the invention, the dynamic adjustment of the algorithm parameters and the population structure is realized, and the adaptability, convergence speed and stability of the wavefront distortion correction method in the dynamic turbulence environment are enhanced.

The invention provides a slit-type spectral imaging method based on filtering phase reconstruction and a grating spectrometer. The method comprises the following steps: measuring wavefront aberration of a slit-type grating imaging spectrometer before slit filtering by using a wavefront sensor; based on a slit filtering principle, reconstructing a phase function after slit filtering by using wavefront aberration before slit filtering; and capturing a slit image, and reconstructing the slit image by using the reconstructed filtered phase function of the slit to obtain a final reconstructed image. According to the method, effective recovery of the slit imaging data of the grating spectrometer based on the slit is realized, the influence of optical aberration and image noise on the spectrum and spatial resolution of the spectrometer is effectively eliminated, and the slit imaging quality is remarkably improved and is close to the diffraction limit.

The application discloses a kind of low-quality image super-resolution reconstruction methods based on adversarial generative network, including, with the generation dynamic point diffusion function of differentiable optical diffraction calculation layer, and based on the function, wavefront aberration dynamic compensation mechanism is established, wavefront aberration is predicted and compensated, and the low-resolution input feature of optimization is obtained;According to the optimization feature, generator and discriminator are trained using physical constraint adversarial training strategy, and high-resolution image conforming to optical physical law is generated;The diffraction characteristics of high-resolution image are optimized through multi-scale diffraction consistency verification module, to ensure the physical authenticity and consistency of image under different resolutions;The application can effectively handle the complex degradation characteristics of low-quality image, improve the detail quality and optical rationality of generated image.

The utility model discloses a wavefront debugging and detecting device for a laser beam-expanding lens, which is used for debugging and detecting a laser beam-expanding lens to be detected and comprises a laser light source part, a standard laser beam-expanding lens, a pinhole diaphragm and a shearing interferometer which are sequentially arranged and are coaxial at equal height, and the laser beam-expanding lens to be detected is arranged between the pinhole diaphragm and the shearing interferometer. The laser light source part is used as a standard laser light source, the standard laser beam expanding lens is used for expanding the standard laser light source to an entrance pupil size matched with that of the laser beam expanding lens to be measured, and the small-hole diaphragm is used for limiting the spot diameter of the standard laser light source entering the laser beam expanding lens to be measured; and the shearing interferometer is used for testing the wavefront of the standard laser light source after passing through the to-be-tested laser beam expanding lens. According to the utility model, the laser light source piece, the standard lens and the shearing interferometer are utilized, the wavefront debugging precision is improved, and the wavefront aberration is reduced by observing interference fringes in real time and finely adjusting the lens and guiding lens installation and stress release, so that the problem that the beam expanding multiple is reduced is solved.

The invention discloses a method for obtaining human eye wavefront aberration and a human eye aberration measuring device, and relates to the technical field of optical instruments.The method for obtaining the human eye wavefront aberration is applied to a Hartmann sensor and comprises the steps that an actual slope matrix is obtained through calculation according to a wavefront light spot diagram obtained by the Hartmann sensor; multiplying the generalized inverse matrix of the standard slope matrix by the actual slope matrix to obtain a Zernike coefficient matrix; subtracting the actual slope matrix from the product of the standard slope matrix and the Zernike coefficient matrix to obtain a residual matrix; and updating the Zernike coefficient matrix according to the residual matrix until the residual matrix of the updated Zernike coefficient matrix is smaller than or equal to a preset value. Wherein the standard slope matrix is a matrix formed by wavefront slope of Zernike polynomial full-term superposition. According to the technical scheme provided by the invention, the accuracy of obtaining the wavefront aberration of the human eye can be improved.

The invention discloses a low-quality image super-resolution reconstruction method based on a generative adversarial network, and the method comprises the steps: generating a dynamic point spread function through a differentiable optical diffraction calculation layer, building a wavefront aberration dynamic compensation mechanism based on the dynamic point spread function, predicting and compensating wavefront aberration, and obtaining optimized low-resolution input features; according to the optimization features, training a generator and a discriminator by adopting a physical constraint adversarial training strategy, and generating a high-resolution image conforming to an optical physical rule; the diffraction characteristic of a high-resolution image is optimized through a multi-scale diffraction consistency verification module, and the physical authenticity and consistency of the image under different resolutions are ensured; according to the invention, the complex degradation characteristic of the low-quality image can be effectively processed, and the detail quality and optical rationality of the generated image are improved.

The invention provides an optical test function high and low temperature test box control system for electronic components, relates to the technical field of optical test, and provides an optical test function high and low temperature test box control system for electronic components through innovative technologies such as a double-target real-time sensing module, core temperature feed-forward compensation, window distortion active compensation, data validity discrimination and adaptive scheduling. The real junction temperature of an electronic component in a high and low temperature test box is highly consistent with the ambient temperature, the wavefront aberration of an observation window is counteracted in real time, abnormal data are automatically discriminated and remeasured, the temperature control precision is improved to + / -0.1 DEG C and the wavefront distortion residual error is reduced to lambda / 20 through dynamic temperature point selection based on gauss process regression and thermal inertia model game, and the temperature control precision is improved to + / -0.1 DEG C and the thermal inertia model game. The test period is shortened by more than 30%, the data misjudgment rate is lower than 1%, and the test precision, fidelity and efficiency are remarkably improved.

Open view smart eyewear is combined with a wavefront aberrometer module. The smart eyewear serves as an open view eyewear form factor and house the wavefront aberrometer module among other digital processing components and corresponding software. Alternatively, the wavefront aberrometer module is removably coupled to the smart eyewear. The wavefront aberrometer module calibrates a tunable optical element according to detected optical needs of the user. The wavefront aberrometer module automatically adjusts the wearer-user's effective visual acuity (at least refractive power) viewing through the smart eyewear. The smart eyewear apparatus can also provide clinical-quality optical measurements of wearer-users for electronic communication or transmission to an eye care professional. Alignment of open view smart eyewear, the wavefront aberrometer module, and user's eyes (line of sight) can be facilitated. Iris biometric identification can be used to associate the user-specific calibration parameters and measurements with the smart eyewear.

The invention discloses a contact lens defocusing amount optimization method and system, electronic equipment and a medium, and relates to the technical field of data processing. The method comprises the following steps: acquiring reference eye optical data of a tested eye through a wavefront aberration instrument, wherein the reference eye optical data comprises the eye axis length, the corneal curvature radius and the reference value of the lens equivalent refractive power; establishing a correlation model of the eye axis length and the corneal curvature and a correlation model of the eye axis length and the lens equivalent refractive power, and determining a change threshold value of the eye axis length. Acquiring an eye axis length acquisition value through an ultrasonic measuring instrument, and calculating the variable quantity of the eye axis length acquisition value and a reference value; and when the variable quantity exceeds a threshold value, substituting the variable quantity into the correlation model to calculate the estimated values of the curvature radius of the cornea surface and the equivalent refractive power of the crystalline lens, and constructing an optical state parameter set of the eye. And finally, based on the parameter set, calculating defocusing amount values of the contact lens at a plurality of radial positions through a ray tracing algorithm. By implementing the technical scheme provided by the invention, the defocusing amount accuracy of the contact lens can be improved.

The invention discloses a phase measurement system and a super-lens detection method, and belongs to the technical field of super-lens wavefront detection method.The phase measurement system comprises a light source, a spectroscope, a beam compressor, a beam splitter, a detection optical assembly and an image acquisition device.The beam splitter is used for dividing detection light passing through the beam compressor into a reference light beam and a detection light beam; the detection optical assembly comprises an objective lens and a detection platform, the detection platform is used for supporting a to-be-detected optical element or a reference element, and the image acquisition device is used for generating a first aberration signal according to the first detection light beam and the reference light beam and generating a second aberration signal according to the second detection light beam and the reference light beam; the wavefront aberration of the super lens can be obtained through the difference between the first aberration signal and the second aberration signal, so that the interference problem of the objective lens aberration in the detection process can be effectively solved, the high-precision measurement of the wave aberration of the super lens is realized, and the performance evaluation of the imaging quality of the super lens can be carried out.

An aberration regulation method of a reflective double-beam interference exposure system, comprising: constructing a reflective double-beam interference exposure system, dividing a light beam output by a laser into two double beams with the same intensity, and forming an interference exposure field; constructing an aberration regulation system, testing and recording the aberration of the double-beam light path by using a spherical interferometer, and regulating the wavefront of any light beam in the double beam by using a deformable mirror, so that the aberration of the light beam matches the aberration of the other light beam, and the regulation of the aberration of the interference exposure field is completed. The present application solves the problems of precise assembly and adjustment, wavefront aberration control and the like of the reflective double-beam interference exposure system based on a large-aperture off-axis parabolic mirror, and provides a new solution for the preparation of a meter-level large-aperture, low-aberration diffraction grating.

The invention belongs to the field of atmospheric turbulence wavefront aberration detection, and discloses an atmospheric turbulence wavefront reconstruction method based on an attention-learnable activation cooperation mechanism. The objective of the invention is to solve the problems that the modeling of a full connection layer is difficult due to phase high-order nonlinear coupling of an existing end-to-end neural network in wavefront phase reconstruction, the feature extraction capability of a traditional convolution architecture is insufficient, and the reconstruction error of a Zernike coefficient is unbalanced. The method provided by the invention comprises the steps of collecting in-focus and out-of-focus images of light spots and corresponding distortion phases to construct a training data set, constructing high-precision mapping of high-order aberration characteristics based on an attention encoder and a Colmogorov-Anodel network through a learnable activation function, and performing high-precision mapping on the high-order aberration characteristics through a learning activation function. And optimizing network parameters by using an error weighted root mean square loss function, and finally deploying the neural network which is completely trained to realize high-speed reasoning. The method provided by the invention provides a high-precision and high-speed scheme for atmospheric turbulence distortion wavefront aberration detection.

The present invention discloses a wave aberration reconstruction method, apparatus, electronic device, and storage medium, relating to the technical field of optical detection. The wave aberration reconstruction method includes: obtaining a corresponding initial Zernike coefficient set based on a pre-acquired actual point spread function image and a first training network; optimizing the initial Zernike coefficient set by using a second training network based on the principle that the target point spread function image is the same as the actual point spread function image to obtain a corresponding target Zernike coefficient set; and obtaining a corresponding target wave aberration based on the target Zernike coefficient set and a pre-configured optical system basis function. The present invention solves the problems that wave aberration reconstruction requires multiple measurements and calibrations, resulting in inconvenient operation and low accuracy in the prior art, thereby simply and conveniently completing the process of wave aberration reconstruction, saving manpower and time, and improving the reconstruction accuracy.

The present invention discloses an aberration compensation method and device, the method comprising: step S1, compensating and superimposing a conjugate wavefront aberration phase on an initial input phase to obtain a pre-compensated phase; step S2, superimposing the pre-compensated phase through the wavefront aberration phase distortion of an optical element itself to obtain a compensated phase, and subjecting the compensated phase to Fourier transformation to obtain aberration-compensated Fourier surface intensity; the aberration-compensated Fourier surface intensity information has a low bit error rate and a good reconstruction effect; it is a numerical compensation method without the need to add additional optical components; thereby reducing the number of optical elements used in an optical system and reducing the complexity of the optical system, providing good technical support for aberration compensation in, for example, the field of holographic storage, and having good application prospects in, for example, the field of holographic data storage research; it can be applied to the fields of holographic storage, biomedical image processing, digital holographic microscopy, etc.

The invention relates to the technical field of optical fiber sensing and optical fiber device manufacturing, and discloses a femtosecond laser-inscribing polarization-maintaining fiber grating method and system for vector sensing, and the method comprises the following steps: obtaining a stress region image of a polarization-maintaining fiber through a CCD camera, recognizing the slow axis direction of the fiber through image processing, rotating the fiber, and obtaining the stress region image of the polarization-maintaining fiber; an included angle of 45 degrees is formed between the slow axis direction and a preset incident plane of the femtosecond laser; calculating a conjugate phase of wavefront aberration generated when femtosecond laser penetrates through a fiber coating layer and a cladding and is focused to a fiber core, and generating a phase diagram for loading a spatial light modulator; after being modulated by the spatial light modulator, a light beam emitted by the femtosecond laser enters and is focused on the fiber core along the direction of an included angle of 45 degrees, and a grating structure is formed by combining axial scanning and inscribing. Accurate automatic alignment in the fast and slow axis direction and active compensation of transmission aberration are achieved, refractive index modulation birefringence forming a specific included angle with the inherent birefringence axis of the optical fiber can be effectively induced, and therefore the polarization-maintaining fiber grating with the highly controllable reflection spectrum and the asymmetric double-peak characteristic is engraved.

A method of bonding glass to a material includes contacting a first surface of a glass substrate with a first surface of a layer to form a contact location between the glass substrate and the layer; disposing an optical element optically upstream of the glass substrate; and performing a welding step by directing a laser beam onto the optical element such that the laser beam contacts the optical element, passes through the glass substrate at an oblique angle with respect to the glass substrate, and contacts the contact location to bond the glass substrate with the layer. Directing the laser beam onto the optical element imparts a wavefront aberration effect to the optical element. The laser beam is passed through the glass substrate to impart a wavefront aberration effect to the substrate. The wavefront aberration effect of the optical element counteracts the wavefront aberration effect of the substrate.

A medical observation device includes: a light source that emits at least spatially incoherent light; an image sensor that acquires an image of the light emitted from the light source and reflected by a subject; and a signal processing unit that corrects a signal level obtained from first image data acquired by the image sensor, based on a wavefront aberration of the light reflected by the subject.

This invention discloses a method for field-of-view deconvolution image restoration of an imaging system based on wavefront aberration reconstruction, belonging to the field of wavefront aberration measurement and computational imaging technology. The method includes: measuring the wavefront aberration of the optical system under test in an imaging system containing detection markers; setting the measured wavefront aberration as the wavefront aberration of the optical system under test in an imaging system containing pinhole arrays, and simulating and generating point spread functions corresponding to different field-of-view blocks; replacing the detection markers with imaging samples, and acquiring the actual image of the imaging samples through the optical system under test as the image to be restored; dividing the image to be restored into field-of-view partitions, performing deconvolution restoration on each block using the corresponding point spread function, and then stitching the restored block images together to obtain a complete restored image. This invention decouples wavefront aberration measurement from image restoration, achieving effective correction of spatially varying aberrations in a large field of view without increasing hardware complexity, significantly improving the restoration accuracy, efficiency, and consistency of the entire field-of-view image.

The application discloses a kind of illumination system and exposure equipment based on plane wave, comprising: first mirror, wavefront aberration detection module is inclined relative to light incidence direction, first mirror is used to receive light from light source and reflect light;Second mirror, for receiving the light reflected by first mirror and expanding the beam of light;Third mirror, for receiving the light reflected by second mirror and collimating the light back to the target object and reflecting light.The application realizes light path folding through the reflection path of first mirror, second mirror and third mirror, significantly shortens the axial length of illumination system, and significantly saves space.The number of structures of the three mirrors is much less than that of the conventional multi-lens group, and the positioning accuracy requirement of the mirrors is lower than the coaxiality requirement of the multi-lens, which simplifies the overall structure design and assembly process of the illumination system, and reduces the system complexity and use cost.

The present invention discloses a laser amplifier based on wavefront aberration correction, which relates to the technical field of lasers. It includes a laser source, a gain medium, a wavefront sensor, an adaptive optical wavefront correction module, and a feedback control system. The laser source is connected to the gain medium through a first optical coupler. The laser beam amplified by the gain medium is output through a second optical coupler. The wavefront sensor is connected to the output end of the gain medium. The feedback control system is connected to the wavefront sensor and the adaptive optical wavefront correction module through a data bus, and automatically generates a correction signal according to the wavefront aberration data. By installing the feedback control system, the present invention realizes the function of real-time adjusting correction parameters based on wavefront aberration, solves the problem that traditional laser amplifiers are difficult to monitor and correct wavefront aberration caused by optical system errors or environmental disturbances in real time, improves the focusing performance and transmission efficiency of the laser beam, and maintains stable and high-quality beam output.

The present application belongs to the technical field of wavefront distortion measurement, and particularly relates to a wavefront distortion measurement system and method caused by light field waist spot mismatch in a cavity enhancement system. In order to accurately capture the wavefront distortion signal caused by light field waist spot mismatch, an electro-optic modulator (EOM), a convex lens, a three-mirror ring cavity, a plane mirror, a multi-quadrant detector (MPD) and a frequency mixer are sequentially arranged on the outgoing light path of the laser. Through light field modulation, resonance amplification, phase-locked demodulation and quantitative calculation, an error signal reflecting the distortion degree of two types is extracted, the minimum measurable waist spot size and position change are derived, accurate feedback is provided for long-term stable locking of the optical cavity, additional distortion interference caused by the thermal effect of the laser is compensated, and the measurement accuracy and stability of the system are improved.

The invention relates to the technical field of optical system design, in particular to a design method of a multi-scale convolutional network and single-plane diffraction element optical number cooperation system, and aims to solve the problems that an existing diffraction calculation imaging technology is poor in restoration real-time performance and low in restoration precision, the method comprises the following steps: step 1, designing a single-plane diffraction element; 2, constructing a multi-scale convolutional network image restoration module; and step 3, constructing an image restoration loss function. According to the invention, a high-quality color image is obtained while a unit piece system is extremely simplified. An MSE loss function considering full-view-field wavefront aberration and diffraction efficiency weight of RGB three channels is constructed, and the restoration effect of the design method is improved by 80% compared with the average PSNR of an image before restoration; compared with a traditional PSF deconvolution image restoration algorithm, the average PSNR is improved by 30%, and a new thought is provided for miniaturization development of an optical system in the future.

The present invention discloses a wavefront aberration compensation method based on a nonlinear response cascade model, which uses the frequency reconstruction technology in the process of establishing a Bouc-Wen hysteresis model of a fast steering mirror (FSM). The frequency reconstruction technology can overcome the zero-point drift characteristics of piezoelectric ceramic materials and improve the accuracy and robustness of Bouc-Wen hysteresis modeling. Subsequently, the present invention uses the hysteresis model of FSM for a wavefront corrector with a cascade structure of FSM and a deformable mirror (DM), and proposes a wavefront closed-loop compensation method based on absolute phase distortion based on the model structure of the nonlinear response cascade of the wavefront corrector. Taking absolute phase distortion as the fitting target avoids the accumulation of model errors and hardware noise, so that the wavefront corrector of the FSM and DM cascade can complete the correction of the wavefront with only one closed-loop feedback, thereby improving the compensation capability range, accuracy and efficiency.

The invention discloses a micro-structure array optical element multi-dimensional information measuring device and method based on a digital holographic system. The device comprises a laser, a collimating and beam expanding module, two beam splitting prisms, a rectangular prism, an axially movable lens, a reference mirror, a piezoelectric displacement driver and a camera. The beam expanding and collimating module is arranged to be of a Galileo structure, efficient transmission of light energy is achieved, object light only passes through the system once through the right-angle prism, the wavefront aberration problem introduced by secondary diffraction is avoided, the position of the lens capable of moving axially is adjusted, and the light energy transmission efficiency is improved. Focusing light spot characteristic analysis and light field spectrum characteristic evaluation of the microstructure array optical element are achieved, the position of the reference mirror is moved to enable object light to interfere with reference light, and three-dimensional shape measurement of the microstructure array optical element is achieved. The method has the advantages of high precision, wide applicability, strong compatibility and the like.

The invention discloses a plane wave-based illumination system and exposure equipment, and the system comprises a first reflector, a wavefront aberration detection module is inclined relative to a light incident direction, and the first reflector is used for receiving light from a light source and reflecting the light; the second reflecting mirror is used for receiving the light rays reflected by the first reflecting mirror and expanding the light rays; and the third reflecting mirror is used for receiving the light reflected by the second reflecting mirror, collimating the light and then reflecting the light to a target object. Through reflection paths of the first reflector, the second reflector and the third reflector, light path folding is achieved, the axial length of the illumination system is greatly shortened, and space is remarkably saved. The number of the structures of the three reflectors is far smaller than that of a traditional multi-lens group, the positioning precision requirement of the reflectors is lower than the coaxiality requirement of multiple lenses, the overall structural design and assembly process of the lighting system are simplified, and the system complexity and the use cost are reduced.