The invention provides a bright-field
microscopic imaging quality detection
system, which belongs to the field of
imaging quality detection and comprises an imaging
optical module, a bright-field illumination
optical module, a carrier and an
image quality detection nano-point mechanism. The imaging
optical module is arranged above the carrying table, and the imaging optical module collects an image of the
image quality detection nano-point mechanism on the carrying table to realize
image quality detection; the image quality detection
nanodot mechanism comprises a
nanostructure scatterer and a substrate. According to the invention, by designing the illumination
pupil and the
nanodot mechanism, a P polarized light Brewster angle illumination mode is realized, the
adverse effect of the secondary reflected light of the substrate on the
signal-to-
noise ratio of the image is filtered out, the serious influence of the reflected light of the substrate on the
signal-to-
noise ratio of the image in the
point spread function measurement based on
nanostructure imaging is reduced, and the measurement accuracy is improved. And the
signal-to-
noise ratio of online image quality detection is improved. The
system can be popularized and applied in the fields requiring on-line image quality detection, such as
microscopic imaging, nanoscale
semiconductor quantity detection,
overlay quantity detection and the like.