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Swing-style and high signal-to-noise ratio demodulation devices and corresponding demodulation method for the measurement of low coherence interference displacement

This invention provides a swing-style and high signal-to-noise ratio low coherence interference demodulation devices and the corresponding demodulation method for the measurement of displacement. In the displacement sensing method, the optical path difference, which is built by the light reflections from the reference surface and the test object, varies with the displacement of the test object. When the reflected signal lights is sent to a low coherence polarization interference system, the birefringent wedge formulates a spatial distribution of optical path difference, from which the optical path difference of the reflection signals thus can be demodulated. In the displacement scanning method, the reflected signal lights are collimated and transferred to a time scanner consisting of a rotating mirror and a f-θ lens, to perform thin light beam scanning along the longitudinal direction of a birefringent wedge. This innovation provides two demodulation devices that are both applicable for the measurement methods. One uses a linear camera array and the other uses a linear micropore array and single PIN photoelectric detector, to receive interference fringes. Since the energy of the scanning beam is highly concentrated, the signal-to-noise ratio for low coherence interference signal is significantly higher than that of the traditional devices. In addition, the accuracy of these demodulation devices is significantly improved, because the linear camera array and the linear micropore array maintain a consistent spatial position of the received light spot.
Owner:TIANJIN UNIV
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