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56 results about "Piezoelectric speaker" patented technology

A piezoelectric speaker (also known as a piezo bender due to its mode of operation, and sometimes colloquially called a "piezo", buzzer, crystal loudspeaker or beep speaker) is a loudspeaker that uses the piezoelectric effect for generating sound. The initial mechanical motion is created by applying a voltage to a piezoelectric material, and this motion is typically converted into audible sound using diaphragms and resonators. Compared to other speaker designs piezoelectric speakers are relatively easy to drive; for example they can be connected directly to TTL outputs, although more complex drivers can give greater sound intensity. Typically they operate well in the range of 1-5 kHz and up to 100 kHz in ultrasound applications.

Frequency mixing MEMS piezoelectric loudspeaker and manufacturing method thereof

The invention provides a frequency mixing MEMS piezoelectric loudspeaker and a manufacturing method thereof, the frequency mixing MEMS piezoelectric loudspeaker comprises a plurality of MEMS piezoelectric sound production units, the structure of a vibrating diaphragm of each unit is a cantilever beam structure, a bridge type structure or a periphery reinforcing structure, if the sizes of cavities of all the MEMS piezoelectric sound production units are the same, the structures of the vibrating diaphragms of at least two MEMS piezoelectric sound production units are different, and if the sizes of the cavities of all the MEMS piezoelectric sound production units are the same, the structures of the vibrating diaphragms of all the MEMS piezoelectric sound production units are different. If the size of the cavity of at least one MEMS piezoelectric sound production unit is different from the size of the cavity of the other MEMS piezoelectric sound production unit, the structures of the vibrating diaphragms of the plurality of MEMS piezoelectric sound production units are the same or different, and the sizes of the cavities and the structures of the vibrating diaphragms are related to the resonant frequency of the MEMS piezoelectric sound production units. According to the loudspeaker, the plurality of MEMS piezoelectric sounding units have different diaphragm structures and / or have different cavity sizes, so that the output sound pressure level SPL of the loudspeaker can be improved, and the audio frequency response range is widened.
Owner:HUBEI JIUFENGSHAN LAB

Piezoelectric loudspeaker and manufacturing method thereof

A piezoelectric speaker includes a diaphragm and a piezoelectric layer disposed over the diaphragm. The thickness of the piezoelectric layer may be in the range of 20 microns to 120 microns. A width of the piezoelectric layer may be 50 mm or more, and a length of the piezoelectric layer may be 100 mm or more. The piezoelectric layer may also include a pair of electrodes in electrical contact with the piezoelectric layer and configured to drive the piezoelectric layer. A method of manufacturing a piezoelectric speaker includes attaching a single piezoelectric layer and a pair of electrodes to a diaphragm using an adhesive.
Owner:CORNING INC

Voice interaction method and system based on intelligent doll

The invention discloses a voice interaction method and system based on an intelligent doll, and relates to the technical field of intelligent acoustic interaction, and the method comprises the steps: carrying out the time-frequency analysis processing of a vibration feature matrix, and generating a modal parameter set of vocal cord vibration through biomechanical modeling in combination with the human neck tissue density features; inputting the modal parameter set of vocal cord vibration into the vibration-acoustic model to generate a sound source excitation field, performing environmental noise compensation on the sound source excitation field by using the acoustic characteristic matrix, and generating a time domain pure voice signal through an acoustic wave equation; and collecting real-time position coordinates of the user, calculating and driving a piezoelectric loudspeaker array of the intelligent doll to adjust the phase according to the frequency spectrum characteristics of the time domain pure voice signal, forming a directional focusing sound field, recording user physiological feedback, and generating a user physiological feedback matrix. According to the method, the vocal cord displacement modal function vector is solved through the nonlinear integral and augmented Lagrange algorithm, so that the acquisition precision and the anti-noise capability of the voice signal are improved from the source.
Owner:XINGFUQUAN (BEIJING) INTERNATIONAL ARTIFICIAL INTELLIGENCE TECHNOLOGY CO LTD

Fixed end beam-cantilever beam type piezoelectric MEMS loudspeaker and preparation method and application thereof

The invention discloses a fixed end beam-cantilever beam type piezoelectric MEMS loudspeaker and a preparation method and application thereof. The piezoelectric MEMS loudspeaker comprises a substrate, an upper electrode, a piezoelectric layer, a lower electrode and a vibrating membrane, the upper electrode, the piezoelectric layer and the lower electrode are sequentially arranged on the substrate, and the vibrating membrane and an etching gap surrounding the vibrating membrane are formed on the upper electrode, the piezoelectric layer and the lower electrode in an etching mode; the vibration displacement of the fixed end beam-cantilever beam type piezoelectric MEMS loudspeaker is very large, and is mainly attributed to the superposition of the vibration displacement of the fixed end beam and the vibration displacement of the cantilever beam.
Owner:TIANJIN UNIVERSITY OF TECHNOLOGY +1

Polymer-based piezoelectric composite material, piezoelectric film, piezoelectric speaker, and flexible display

The present invention provides a polymer-based piezoelectric composite material from which a piezoelectric film capable of outputting a higher sound pressure and exhibiting excellent flexibility even in a low-temperature environment is obtained in a case of using a piezoelectric speaker, a piezoelectric film formed of the polymer-based piezoelectric composite material, and a piezoelectric speaker and a flexible display which are formed of the piezoelectric film. The polymer-based piezoelectric composite material of the present invention is a polymer-based piezoelectric composite material including a polymer matrix which contains a polymer containing a group represented by Formula (1), and piezoelectric particles.*-L1-(CR1R2)n—CN  Formula (1)In Formula (1), L1 represents a divalent linking group excluding a urethane group. R1 and R2 each independently represent a hydrogen atom, an alkyl group, or an aryl group. n represents an integer of 3 or greater. * represents a bonding position with respect to the main chain of a polymer.
Owner:FUJIFILM CORP

Piezoelectric MEMS loudspeaker based on folding ring between movable firmware and application of piezoelectric MEMS loudspeaker

The invention discloses a piezoelectric MEMS loudspeaker based on a folding ring between movable and fixed parts and application thereof, and belongs to the technical field of loudspeakers, the piezoelectric MEMS loudspeaker comprises a piezoelectric actuating assembly, a fixed assembly and a folding ring; the piezoelectric actuating assembly comprises a piezoelectric actuating composite layer, the piezoelectric actuating composite layer at least comprises a piezoelectric material layer, and the piezoelectric actuating composite layer generates mechanical displacement by applying voltage to drive the piezoelectric actuating assembly to vibrate so as to generate sound pressure; the fixing component can be a single structural component or a component with a plurality of structural components; the fixing assembly can be used for fixedly supporting the fixed supporting part of the piezoelectric actuating assembly, so that the non-fixed supporting part of the piezoelectric actuating assembly can freely move or vibrate; according to the invention, through the innovative design based on the folding ring between the moving part and the fixed part, the low-frequency vibration displacement of the vibrating diaphragm is remarkably improved, the problem that the low-frequency sound pressure of a traditional piezoelectric MEMS loudspeaker is insufficient is effectively solved, and the vibrating diaphragm can push air with a larger volume in a low-frequency band, so that a fuller low-frequency sound effect is obtained.
Owner:IMOVE INTELLIGENT TECHNOLOGIES (DONGGUAN) CO LTD

Signal transmission device; Electronic device; Method for reversibly connecting an electronic device; Method for changing different devices

A signal transmission device, an electronic device, a method for reversibly connecting an electronic device, and a method for changing different devices are proposed, in which, in particular, a conducted (e.g., wired) loudspeaker, especially a piezo loudspeaker (2), which is attached to the eardrum (3) and excites it to vibrate, is used, wherein the ear canal (4) generally remains open and the natural acoustic transparency of the outer ear is maintained, since the signal transmission from the electronic device to the loudspeaker and the necessary otoplastic measures are generally placed at least partially outside the ear canal (4).
Owner:BOCK FRIEDRICH

Sounding component and piezoelectric speaker

The embodiments of the present disclosure disclose a sounding component and a piezoelectric speaker, wherein the sounding component comprises at least one layer of conductive bracket and multiple layers of piezoelectric vibration unit. Each layer of conductive bracket is formed with at least one notch, and a layer of conductive bracket is connected between adjacent two layers of piezoelectric vibration unit so that the sounding component may emit sound through the notch. Thus, by setting conductive brackets with notches to determine the sound direction, it helps to meet the design requirements of piezoelectric speaker side sound output.
Owner:MERRY ELECTRONICS (SUZHOU) CO LTD

A piezoelectric MEMS loudspeaker

A piezoelectric MEMS loudspeaker. The application discloses a MEMS structure, comprising: a substrate comprising an inner ring body and an outer ring body connected by a connecting rod, having a first cavity between the inner ring body and the outer ring body, and having a second cavity in the inner ring body; a piezoelectric composite vibration layer formed above the substrate, comprising an edge portion formed above the outer ring body and a center portion formed above the inner ring body, having a partition gap between the edge portion and the center portion. In summary, the piezoelectric MEMS loudspeaker provided by the application comprises an edge portion and a center portion, wherein the edge portion is used to generate a high-frequency sound pressure level, and the center portion is used to generate a low-frequency sound pressure level. The combination of the edge portion and the center portion makes the piezoelectric MEMS loudspeaker have a relatively flat sound pressure level frequency response curve with a wider range, thereby improving the auditory effect in the entire frequency band.
Owner:ANHUI ORINFIN ACOUSTIC SCI&TECH CO LTD

MEMS Piezoelectric Speaker

The present invention provides a MEMS piezoelectric speaker including a substrate with a back cavity, a diaphragm, a capacitive system and a flexible film. The diaphragm includes a fixed end, a suspended end. Adjacent suspended ends are at least partially spaced to form a slit. The suspended end includes a support section and a piezoelectric section. Along the thickness direction of the MEMS piezoelectric speaker, a flexible film is at least partially spaced from the diaphragm and the flexible film is spaced from the substrate. This design can improve the sound pressure level of the MEMS piezoelectric speaker in the middle and high frequency, and improve the acoustic performance of the MEMS piezoelectric speaker.
Owner:AAC KAITAI TECHNOLOGIES (WUHAN) CO LTD

Audio processing methods, electronic devices and computer-readable media

This application provides an audio processing method, an electronic device, and a computer-readable medium. The method includes detecting that a first frequency of a first audio signal to be processed belongs to a first frequency range; adjusting the amplitude of the first audio signal based on a first target amplitude corresponding to the first frequency to obtain a second audio signal; and providing the second audio signal to a piezoelectric loudspeaker to drive the piezoelectric loudspeaker to emit sound, wherein the current generated by the second audio signal input to the piezoelectric loudspeaker is lower than the critical current of overcurrent protection. This application can prevent the operating circuit of the piezoelectric loudspeaker from triggering overcurrent protection due to playing high-frequency audio signals.
Owner:HONOR DEVICE CO LTD

A piezoelectric MEMS loudspeaker and a performance improvement method thereof

The application discloses a piezoelectric MEMS loudspeaker and a performance improvement method thereof, and belongs to the field of MEMS loudspeakers. The application first proposes a cantilever beam structure with a fixed support end perforation, and the structure can change the resonant frequency of the device. Further, based on the structure, the piezoelectric MEMS loudspeaker proposed in the application is composed of a plurality of triangular cantilever beams with different fixed support end perforations. Since the displacement of the triangular cantilever beam at the resonant frequency will be phase-inverted, the driving voltages of various triangular cantilever beams at both sides of the respective resonant frequencies should be opposite. Through the optimization design of the cantilever beam structure, compared with the traditional piezoelectric MEMS loudspeaker, the application can improve the sound pressure level output at the design frequency band without additional process difficulty, make the sound pressure level spectrum curve in the human ear hearing threshold frequency band relatively flat, realize compact layout, and has a good application prospect.
Owner:HUAZHONG UNIV OF SCI & TECH

A piezoelectric MEMS speaker and a method for manufacturing the same

The present invention relates to the field of speaker technology, and in particular to a piezoelectric MEMS speaker and a method for preparing the same, wherein the piezoelectric MEMS speaker comprises: a body, wherein a cavity region is formed on the body; a vibration film, which is disposed above the cavity region and connected to the upper surface of the body; and a plurality of cantilever beam spring structures, wherein the plurality of cantilever beam spring structures are sequentially connected and disposed circumferentially along the upper surface of the body; the cantilever beam spring structure comprises a fixed end and a free end. In the present application, a first piezoelectric composite structure is disposed on the vibration film, and a second piezoelectric composite structure is disposed on the cantilever beam spring. According to the polarization directions of the first piezoelectric composite structure and the second piezoelectric composite structure, the first piezoelectric composite structure and the second piezoelectric composite structure are connected in series or in parallel, thereby improving the driving force and mechanical characteristics of the MEMS speaker, so that the MEMS speaker can obtain a greater sound pressure level output.
Owner:HUBEI JIUFENGSHAN LAB

Piezoelectric speaker and method for manufacturing the same

The present invention provides a piezoelectric speaker, including: a frame; a cantilever plate actuator disposed on the frame; a spring connected to the frame and the cantilever plate actuator; and a central diaphragm connected to the spring, wherein when the cantilever plate actuator vibrates, the central diaphragm vibrates with the spring.
Owner:NATIONAL TSING HUA UNIVERSITY

Nested array piezoelectric MEMS loudspeaker

PendingCN120568267AMicrophonesLoudspeakersDiaphragm structureNested arrays
The invention discloses a nested array piezoelectric MEMS loudspeaker, which is formed by arranging, nesting and combining a plurality of piezoelectric MEMS loudspeaker units together, a unit vibrating diaphragm is composed of a central vibrating diaphragm and extended rectangular vibrating diaphragms, the four edges of the central vibrating diaphragm are respectively provided with one extended rectangular vibrating diaphragm, the outer edges of the extended rectangular vibrating diaphragms are connected with a supporting base, and the supporting base is connected with the piezoelectric MEMS loudspeaker units. The actuator units are mutually nested and arranged through partially extending diaphragm structures, and in order to avoid crosstalk, the actuator units are mutually isolated through supporting substrates and air gaps. The array actuator has the beneficial effects that the actuator unit adopts a cross-shaped vibrating diaphragm design, so that the effective vibration area and out-of-plane displacement are improved, and the sound pressure level output of each part of array actuator unit under the fixed substrate size is improved; by modulating the difference of excitation signal phases of each part of array units under different voltages and different frequencies and coordinating with the vibration synthesis design realized by combining the array units, the programmable application requirements of the enhanced hearing aid can be met.
Owner:BEIJING INST OF TECH

Piezoelectric loudspeaker

The present invention relates to a piezoelectric speaker. A piezoelectric speaker (10) has a piezoelectric film (35), a first bonding layer (51), and an intermediate layer (40). The piezoelectric film (35) includes a first electrode (61), a second electrode (62), and a piezoelectric body (30) sandwiched between the first electrode (61) and the second electrode (62). The first bonding layer (51) is an adhesive or cohesive layer. The intermediate layer (40) is disposed between the piezoelectric film (35) and the first bonding layer (51). The entire main surface of both main surfaces of the piezoelectric film (35) vibrates up and down.
Owner:NITTO DENKO CORP

Piezoelectric loudspeaker

The invention belongs to the technical field of sound production devices, and discloses a piezoelectric loudspeaker, which comprises a support frame, a circuit assembly, a first diaphragm assembly, a second diaphragm assembly and a vibration assembly, and is characterized in that the periphery of the first diaphragm assembly is fixedly connected to the support frame, and the periphery of the second diaphragm assembly is fixedly connected to the support frame; the vibration assembly is arranged in the cavity, is located between the first vibrating diaphragm assembly and the second vibrating diaphragm assembly and comprises a first piezoelectric structure and a second piezoelectric structure which are arranged on the supporting frame in the same layer, and the first piezoelectric structure is fixedly connected to the first vibrating diaphragm assembly and used for driving the first vibrating diaphragm assembly to vibrate in the first direction; the second piezoelectric structure is fixedly connected to the second vibrating diaphragm assembly and is used for driving the second vibrating diaphragm assembly to vibrate along the first direction. The piezoelectric loudspeaker provided by the invention is small in thickness and lighter and thinner.
Owner:MERRY ELECTRONICS (SUZHOU) CO LTD

Flexible electronic device and method for adjusting sound output thereof

A flexible electronic device includes: a sensor; a flexible display; a piezoelectric speaker including N piezoelectric films attached to the flexible display; and a processor configured to: detect a change of a state of the flexible display through the sensor; based on the change of the state of the flexible display, determine locations of a number of piezoelectric films through which sound is to be output, among the N piezoelectric films; and output sound through the number of piezoelectric films by controlling the piezoelectric films to be activated, based on the determined locations of the number of piezoelectric films.
Owner:SAMSUNG ELECTRONICS CO LTD

Polymer composite piezoelectrics, piezoelectric films, piezoelectric speakers, flexible displays

The present invention provides a polymer composite piezoelectric body capable of obtaining a piezoelectric film that can output a higher sound pressure when used in a piezoelectric speaker, a piezoelectric film using the polymer composite piezoelectric body, and a piezoelectric speaker and a flexible display using the piezoelectric film. The polymer composite piezoelectric body of the present invention includes a polymer matrix and piezoelectric particles, and the polymer matrix includes a polymer having a group represented by formula (1). Formula (1) *-L<supgt;1< / supgt>-CR<supgt;1< / supgt;R<supgt;2< / supgt>-CN, in formula (1), L<supgt;1< / supgt> represents a divalent linking group other than a divalent aliphatic hydrocarbon group. R<supgt;1< / supgt> and R<supgt;2< / supgt> each independently represent a hydrogen atom, an alkyl group, or an aryl group.
Owner:FUJIFILM CORP

Three-drive ultrathin broadband piezoelectric loudspeaker

The invention discloses a three-drive ultrathin broadband piezoelectric loudspeaker, and the loudspeaker comprises a voice diaphragm vibration system which comprises a steel sheet; the first piezoelectric ceramic piece is attached to the steel piece; the first coupling piece is provided with a first bonding end and a first connecting end which are opposite, and the first bonding end is bonded with the steel sheet; the second coupling piece is provided with a second bonding end and a second connecting end which are opposite, and the second bonding end is bonded with the steel sheet; the first FPC flat cable is connected with the first piezoelectric ceramic piece; the second piezoelectric ceramic piece is connected with the first connecting end; the third piezoelectric ceramic piece is connected with the second connecting end; the second FPC flat cable is connected with the second piezoelectric ceramic piece; the third FPC flat cable is connected with the third piezoelectric ceramic piece; the loudspeaker frame is provided with a mounting cavity, and the voice diaphragm vibration system is arranged in the mounting cavity; and the dual suspension system is arranged on the loudspeaker frame and is provided with a first vibration cantilever and a second vibration cantilever which are respectively connected with the first vibration cantilever and the second vibration cantilever.
Owner:JIANGSU WAVE VELOCITY SENSOR CO LTD

A MEMS piezoelectric loudspeaker and acoustic device

This application relates to the field of semiconductor technology, specifically to a MEMS piezoelectric loudspeaker and acoustic device, including a substrate and a piezoelectric stack disposed on the substrate; the piezoelectric stack has multiple tangents extending from the geometric center of the piezoelectric stack to the edge of the piezoelectric stack, forming multiple cantilever beams arranged rotationally symmetrically about the geometric center; each cantilever beam has a fixed edge away from the geometric center; at least two of the cantilever beams have trench structures on the substrate, the trench structures being located close to the fixed edge of the cantilever beam. This application can reduce peaks at resonant frequencies and effectively expand the frequency bandwidth, improving overall audio performance; in addition, this application can also reduce diaphragm stiffness, thereby significantly enhancing its low-frequency deformation capability and optimizing the low-frequency sound pressure level curve.
Owner:WUHAN MEMSONICS TECH CO LTD

Intelligent doll-based voice interaction method and system

The application discloses a voice interaction method and system based on an intelligent doll, relates to the technical field of intelligent acoustic interaction, and comprises the following steps: performing time-frequency analysis and processing on a vibration feature matrix, combining with the density characteristics of human neck tissues, and generating a modal parameter set of vocal cord vibration through biomechanical modeling; inputting the modal parameter set of vocal cord vibration into a vibration-acoustic model to generate a sound source excitation field, compensating the sound source excitation field for environmental noise by using an acoustic feature matrix, and generating a time-domain pure speech signal through a sound wave equation; collecting real-time position coordinates of a user, calculating and driving a piezoelectric loudspeaker array of the intelligent doll to adjust a phase according to the spectral characteristics of the time-domain pure speech signal, forming a directional focused sound field, recording physiological feedback of the user, and generating a user physiological feedback matrix. The application solves a vocal cord displacement modal function vector by using a nonlinear integral and an augmented Lagrange algorithm, so that the collection accuracy and the noise resistance of a speech signal are improved at the source.
Owner:XINGFUQUAN (BEIJING) INTERNATIONAL ARTIFICIAL INTELLIGENCE TECHNOLOGY CO LTD

Piezoelectric loudspeaker

The invention relates to the field of loudspeakers, in particular to a piezoelectric loudspeaker which comprises a shell and a piezoelectric module. The piezoelectric module comprises a piezoelectric motor, a first vibrating diaphragm assembly, a second vibrating diaphragm assembly, a first conduction assembly and a second conduction assembly. The first vibrating diaphragm assembly and the second vibrating diaphragm assembly are arranged on the two sides of the piezoelectric motor respectively, and the first conduction assembly is arranged between the piezoelectric motor and the first vibrating diaphragm assembly; the second conduction assembly is arranged between the piezoelectric motor and the second diaphragm assembly; a first cavity is formed between the first vibrating diaphragm assembly and the inner wall of the shell, a second cavity is formed between the first vibrating diaphragm assembly and the second vibrating diaphragm assembly, and a third cavity is formed between the second vibrating diaphragm assembly and the inner wall of the shell; a separation structure is arranged in the second cavity, so that the second cavity is divided into a first cavity part and a second cavity part which are independent from each other; the housing is provided with a sound outlet hole. The loudspeaker has the advantage of high sensitivity.
Owner:HUAQIN TECH CO LTD

Polymer-based piezoelectric composite material, piezoelectric film, piezoelectric speaker, and flexible display

The present invention provides a polymer-based piezoelectric composite material from which a piezoelectric film capable of outputting a higher sound pressure is obtained in a case of using a piezoelectric speaker, a piezoelectric film formed of the polymer-based piezoelectric composite material, and a piezoelectric speaker and a flexible display which are formed of the piezoelectric film. The polymer-based piezoelectric composite material of the present invention is a polymer-based piezoelectric composite material including a polymer matrix which contains a polymer containing a group represented by Formula (1), and piezoelectric particles.*-L1-CR1R2—CN  Formula (1)In Formula (1), L1 represents a divalent linking group excluding a divalent aliphatic hydrocarbon group. R1 and R2 each independently represent a hydrogen atom, an alkyl group, or an aryl group.
Owner:FUJIFILM CORP

MEMS piezoelectric speaker

The present invention provides a MEMS piezoelectric speaker including a substrate with a back cavity, a diaphragm, a capacitive system and a flexible film. The diaphragm includes a fixed end, a suspended end. Adjacent suspended ends are at least partially spaced to form a slit. The suspended end includes a support section and a piezoelectric section. Along the thickness direction of the MEMS piezoelectric speaker, a flexible film is at least partially spaced from the diaphragm and the flexible film is spaced from the substrate. This design can improve the sound pressure level of the MEMS piezoelectric speaker in the middle and high frequency, and improve the acoustic performance of the MEMS piezoelectric speaker.
Owner:AAC KAITAI TECHNOLOGIES (WUHAN) CO LTD

Piezoelectric MEMS loudspeaker, manufacturing method thereof and electronic equipment

The invention relates to the field of semiconductor devices, and provides a piezoelectric MEMS loudspeaker, a manufacturing method thereof and electronic equipment. The piezoelectric MEMS loudspeaker comprises a substrate and a vibrating diaphragm located on the upper side of the substrate in the thickness direction, the vibrating diaphragm comprises an electrode layer and a piezoelectric layer which are stacked in the thickness direction, and the piezoelectric layer is located on the upper side of the substrate in the thickness direction. The resonant frequency f of the piezoelectric MEMS loudspeaker, the effective area S of the vibrating diaphragm and the total thickness t of the piezoelectric layer meet a predetermined relational expression and predetermined constraint conditions. Therefore, by making the resonant frequency of the loudspeaker, the effective area of the vibrating diaphragm and the total thickness of the piezoelectric layer meet the preset relational expression and constraint conditions, the size, the output sound pressure, the resonant frequency, the energy consumption efficiency and other performance parameters of the loudspeaker can be more balanced, and the high-performance piezoelectric MEMS loudspeaker is obtained.
Owner:TIANJIN UNIV

Center bound type piezoelectric MEMS loudspeaker and preparation method and application thereof

The invention discloses a center bound type piezoelectric MEMS loudspeaker and a preparation method and application thereof. The preparation method comprises the following steps: preparing a lower electrode, a piezoelectric layer and an upper electrode on a substrate in sequence; etching the upper electrode, the piezoelectric layer and the lower electrode in sequence to obtain a patterned upper electrode, a patterned piezoelectric layer and a patterned lower electrode to form a patterned vibrating diaphragm unit; the graphical vibrating diaphragm unit is of a central bound type cantilever beam unit structure; etching the upper surface of the substrate to form a patterned vibrating diaphragm edge groove; and etching the lower surface of the substrate to form a back cavity and a center bound type support frame structure. Different from an edge constraint type structure of a traditional piezoelectric MEMS loudspeaker, the piezoelectric MEMS loudspeaker has the characteristics of a center constraint type structure, has the advantage of increasing the area of a large vibration displacement area and also has the advantage of increasing vibration displacement.
Owner:TIANJIN UNIVERSITY OF TECHNOLOGY

Piezoelectric sounder

To reproduce a wide frequency band at a high sound pressure.SOLUTION: A piezoelectric sounder 10 of the present disclosure includes a plate-shaped piezoelectric ceramic 20 having one surface and the other surface, a metal plate 30 having an inner peripheral part 31 bonded to one surface of the piezoelectric ceramic 20 and an outer peripheral part 32 located on the outer peripheral side of the inner peripheral part 31, a vibration plate 40 having a covering part 43 covering the metal plate 30 from the side opposite to the piezoelectric ceramic 20 in which an opening edge part 42 of an opening 41 of the covering part 43 that opens toward the metal plate 30 extends toward the outer peripheral part 32 and a part of the covering part 43 is bonded to the metal plate 30, and a fixing part 50 that fixes the other surface of the piezoelectric ceramic 20. According to such a configuration, a diaphragm 40 can be driven by the outer peripheral part 32 of the metal plate 30. Since the diaphragm 40 is driven by bending of the metal plate 30 and the change in a radial direction, a sound in a wide band can be generated with a high sound pressure. In addition to characteristics of the piezoelectric sounder 10 itself, arbitrary acoustic characteristics can be obtained depending on the material and shape of the diaphragm 40.SELECTED DRAWING: Figure 2
Owner:NITERRA CO LTD

Head coil and nuclear magnetic resonance spectrometer

The utility model relates to the field of medical equipment, and provides a head coil and a nuclear magnetic resonance spectrometer, the head coil comprises a housing, a coil assembly and a piezoelectric loudspeaker, the housing comprises an accommodating area used for placing the head of a human body; the coil assembly is arranged in the shell; the piezoelectric loudspeaker is arranged in the shell; wherein the shell is provided with a vibration part, and the piezoelectric loudspeaker is attached to the vibration part so as to transmit sound waves through the vibration part. The piezoelectric loudspeaker is directly integrated in the head coil, so that a patient can receive a voice instruction of an operator without additionally wearing an earphone, meanwhile, the vibration part on the shell is used for transmitting sound, and the shape of the original head coil of the nuclear magnetic resonance spectrometer can be kept unchanged without opening a hole in the shell and adding other parts.
Owner:SIEMENS SHENZHEN MAGNETIC RESONANCE