303 results about "Piezoelectric cantilever" patented technology

An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.

A piezoelectric cantilever with a non-piezoelectric, or piezoelectric tip useful as mass and viscosity sensors. The change in the cantilever mass can be accurately quantified by monitoring a resonance frequency shift of the cantilever. For bio-detection, antibodies or other specific receptors of target antigens may be immobilized on the cantilever surface, preferably on the non-piezoelectric tip. For chemical detection, high surface-area selective absorbent materials are coated on the cantilever tip. Binding of the target antigens or analytes to the cantilever surface increases the cantilever mass. Detection of target antigens or analytes is achieved by monitoring the cantilever's resonance frequency and determining the resonance frequency shift that is due to the mass of the adsorbed target antigens on the cantilever surface. The use of a piezoelectric unimorph cantilever allows both electrical actuation and electrical sensing. Incorporating a non-piezoelectric tip (14) enhances the sensitivity of the sensor. In addition, the piezoelectric cantilever can withstand damping in highly viscous liquids and can be used as a viscosity sensor in wide viscosity range.

Quantification of a target analyte is performed using a single sample to which amounts of the target analyte are added. Calibration is performed as part of quantification on the same sample. The target analyte is detectable and quantifiable using label free reagents and requiring no sample preparation. Target analytes include biomarkers such as cancer biomarkers, pathogenic Escherichia coli, single stranded DNA, and staphylococcal enterotoxin. The quantification process includes determining a sensor response of a sensor exposed to the sample and configured to detect the target analyte. Sensor responses are determined after sequential additions of the target analyte to the sample. The amount of target analyte detected by the sensor when first exposed to the sample is determined in accordance with the multiple sensor responses.

The invention discloses a bistable composite cantilever beam piezoelectric power generating device. The bistable composite cantilever beam piezoelectric power generating device comprises a casing, wherein a cylindrical clamp is fixed at the center in the casing; eight bistable piezoelectric cantilever oscillator structures are uniformly distributed on the clamp and are of an annular array; each bistable piezoelectric cantilever oscillator structure comprises a twin crystal bistable piezoelectric cantilever beam fixed on the clamp, a first piezoelectric layer, a second piezoelectric layer, a first permanent magnet and a second permanent magnet, wherein the first pieoelectric layer and the second pieoeelctric layer are respectively attached to the upper surface and the lower surface of the twin crystal bistable piezoelectric cantilever beam; the first permanent magnet is arranged at a free end of the twin crystal bistable piezoelectric cantilever beam; the second permanent magnet is arranged opposite to the first permanent magnet on the inner wall of the casing on the same side of the beam; electrodes are respectively arranged on the upper surfaces and the lower surfaces of the first piezoelectric layer and the second piezoelectric layer; eight bistable piezoelectric cantilever oscillator structures are arranged in two-to-two symmetrical way; and parameters of two mutually-symmetrical bistable piezoelectric cantilever oscillator structures are consistent. The work frequency domain width, the power generation efficiency and the power generation amount in unit time of the bistable composite cantilever beam piezoelectric power generating device are remarkably improved compared with a single piezoelectric cantilever beam structure and an array linear voltage cantilever beam structure.

An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from an end of said mirror; a support surrounding said mirror; a first piezoelectric element, one end of said first piezoelectric element being connected to said torsion bar, the other end of the first piezoelectric element being connected to and supported by said support, said first piezoelectric element having at least one piezoelectric cantilever, the cantilever including a supporting body and a piezoelectric body formed on the supporting body to exhibit bending deformation due to piezoelectricity when a driving voltage is applied to the piezoelectric body, said piezoelectric element rotarily driving said mirror through said torsion bar when said driving voltage is applied; and a second piezoelectric element, one end of said second piezoelectric element being connected to said torsion bar, the other end of the second piezoelectric element being connected to and supported by said mirror.

The invention discloses a bistable and double cantilever beam piezoelectric power generating device. A clamp is fixed in a casing; two bistable piezoelectric cantilever oscillator structures are respectively arranged at two ends of the clamp and the inner wall of the casing at the same side of the clamp; each bistable piezoelectric cantilever oscillator structure comprises a twin crystal bistable piezoelectric cantilever beam fixed with the clamp; a first permanent magnet is arranged at the free end of the twin crystal bistable piezoelectric cantilever beam; a second permanent magnet is fixed on the inner wall of the casing of the same side of the clamp and positioned at the same horizontal position of the first permanent magnet; two permanent magnets are oppositely arranged according to magnetic poles; the twin crystal bistable piezoelectric cantilever beam comprises an elastic beam and piezoelectric layers which are attached to an upper surface and a lower surface of the elastic beam; the elastic beam is respectively equal to the piezoelectric layers in width and length; and electrodes are respectively arranged on the upper surface and the lower surface of each piezoelectric layer. According to the coherent nonlinear characteristic of the bistable and double cantilever beam piezoelectric power generating device disclosed by the invention, the great motion under wide-narrow frequency excitation can be realized, environment vibration can be effectively utilized for generating power and the power generating efficiency is increased. Two groups of piezoelectric cantilever beams are combined so as to effectively increase the power generation amount of the device in unit time.

Embodiments of the invention couple a non-linear force to a vibration element such as a piezoelectric cantilever to introduce chaotic, i.e., non-resonant vibration in the vibration element and thereby improve the non-resonant response of the vibration element. By doing so, the vibration element is responsive to a wider frequency range of vibrations and thus may be more efficient in scavenging energy in environments where the vibration frequency is not constant, e.g., in environment subject to multi-mode or random vibration sources.

The invention belongs to the technical field of renewable energy sources and power generation, and especially relates to a wind-induced vibration piezoelectric generator which is suitable for low-power-consumption electronic devices, such as microsensors, micro-performers, minisize signal processors and emitters and the like, which need to obtain energy from external environment to carry out energy supplement. The piezoelectric generator is formed by three piezoelectric cantilever beams, a quality block, a fluid-stopping body, permanent magnets, a clamping plate, a support and a bridge rectifier circuit. According to the piezoelectric generator, the principle of galloping of the wind-induced fluid-stopping body and the piezoelectric effect are utilized to enable the wind energy to be converted into electric energy, and the converted electric energy is then stored in an energy storage component through a bridge rectifier. The coupling effect between the inner beam and the outer beam is utilized to enable the vibration energy of the outer energy to be transmitted to the inner beam, thereby not only preventing the outer beam from causing rupture damage due to large deformation, but also improving the output voltage of the inner beam. The piezoelectric generator is simple in structure, low in cost, high in power density, and is suitable for auxiliary power supply of the wireless sensors and low-power-consumption devices.

The invention discloses a bistable piezoelectric cantilever beam vibrator device, which consists of a pedestal, piezoelectric ceramic, an elastic substrate, an electrode, a mass block and a pair of permanent magnets, wherein the piezoelectric ceramic is adhered to the elastic substrate; the electrode is plated on the piezoelectric ceramic; the mass block and a first permanent magnet are fixed at the free end of the elastic substrate; a second permanent magnet is arranged at a position, corresponding to the first permanent magnet, on the pedestal; and the first and second permanent magnets arearranged in a way that the same polarities are opposite. In the device provided by the invention, a piezoelectric cantilever beam vibrator can form a nonlinear bistable system by utilizing a nonlinear repulsive force between the permanent magnets, and can produce stochastic resonance phenomena under certain conditions to remarkably improve piezoelectric vibration generation efficiency in a broadband low-frequency vibration environment; and the device is particularly suitable for highly-efficiently capturing broadband, low-frequency and low-amplitude vibration energy.

The invention discloses a bistable piezoelectric cantilever beam vibration energy collector. The structure of the bistable piezoelectric cantilever beam vibration energy collector is that an internal magnet is installed in a free end of a cantilever beam; a fixed end is installed on a vertical face of a right-angle base; a spring is installed on a horizontal face of the right-angle base; an external magnet is arranged on the upper end of the spring; the external magnet and the internal magnet are arranged in a manner that poles with opposite polarities are disposed face to face; and a piezoelectric plate is adhered on the fixed end of the cantilever beam, 2-3mm away from the vertical face of the right-angle base. Vibration of the cantilever beam enables the piezoelectric plate to produce electric energy. The piezoelectric plate is connected with a lead used for outputting the electric energy. As to dynamic environmental stochastic excitation vibration, electric energy conversion can be realized effectively by adopting the bistable piezoelectric cantilever beam vibration energy collector in a condition with fixed structural parameters. However, real-time adjustment of magnet intervals according to changes of environmental excitation intensity is needed constantly for a rigid support external magnet system. By arranging the bistable piezoelectric cantilever beam vibration energy collector on roadsides or in occasions with vibration excitation backgrounds, vibration energy can be converted to electric energy.

A piezoelectric bimorph cantilever is used for determining physical parameters in a gaseous or liquid environment. The sensor works as a driven and damped oscillator. Contrary to common cantilever sensor systems, the piezoelectric film of the bimorph cantilever acts as both a sensor and an actuator. Using at least two resonance mode of the bimorph cantilever, at least two physical parameters can be measured simultaneously in a gas or a liquid. An optimized piezoelectric cantilever and a method to produce the cantilever are also described.

The invention discloses a cylindrical vortex-induced vibration generation device with a built-in piezoelectric beam, and relates to a generation device which is an electromechanical conversion device used for converting flow-induced vibration generated by fluid flowing around a bluff body into electric energy. The generation device comprises a cylinder, piezoelectric wafers, a metal sheet and a support structure, wherein the piezoelectric wafers are pasted on the two surfaces of the metal sheet to form a double-wafer piezoelectric beam arranged inside the cylinder, the plane piezoelectric beam is parallel to the axial direction of the cylinder and the direction of incoming flow, the piezoelectric cantilever beam is driven to vibrate by the periodic vibration of the cylinder due to vortex shedding formed by the fluid flowing around the cylinder, the base can be fixed at the bottom of sea and river or on the pipe wall of water flow pipeline and air flow pipeline, so that the kinetic energy of the fluid can be converted into the electric energy. The device is simple in structure and can start at a low flow rate.

The invention discloses a piezoelectric cantilever vibration energy harvester and a preparation method thereof, belonging to the technical field of micro electro mechanical system (MEM). The harvester comprises an upper cantilever, a lower cantilever, a mass block and a fixing device, wherein the mass block is arranged at one end of the lower cantilever, and the fixing device is fixed at the other end of the lower cantilever; the upper cantilever is arranged on the mass block and the fixing device and is symmetrical with the lower cantilever; the mass block and the fixing device are respectively and fixedly connected with the upper cantilever; distance from the fixing device to the mass block is L; the upper cantilever comprises a first support layer, a first lower electrode layer, a first upper electrode layer and a first PZT layer; the lower cantilever comprises a second support layer, a second layer electrode layer, a second upper electrode layer and a second PTZ layer; and the support layer comprises a first SiO2 layer, an Si layer and a second SiO2 layer. The invention improves mechanical transformation ability, can collect more electrical energy from mechanical vibration, has controllable preparation method and improves the production success rate of the devices.

A wearable tactile display device is disclosed wherein vibrating stimulation pins are located close to each other by means of underlying vibratory actuation piezoelectric bending elements arranged in a cantilever configuration partially overlapping over each other. Optionally, the plane in which the tips of stimulation pins protrude may be a curved surface providing with the ability to comply with a curved human body part such as a finger. Vibratory stimulation can be achieved at close spatial resolution by advantageously reducing the space between adjacent stimulation pins through their ability to engage with different adjacent piezoelectric cantilever bending elements when they are placed at different planes and at additional closer spatial resolution when they are placed at an angle to each other. The programmable controller employed in order to program the pattern of stimulation pin vibrations can be used for generating different amplitudes and frequencies of vibration.

A piezoelectric cantilever sensor includes a piezoelectric layer and a non-piezoelectric layer, a portion of which is attached to the piezoelectric layer. In one embodiment, one end of the non-piezoelectric layer extends beyond the end of piezoelectric layer to provide an overhang. The overhang piezoelectric cantilever sensor enables increased sensitivity allowing application of the device in more viscous environments, such as liquid media, as well as application in liquid media at higher flow rates than conventional piezoelectric cantilevers. In another embodiment, the sensor includes first and second bases and at least one of the piezoelectric layer and the non-piezoelectric layer is affixed to each of the first and second bases to form the piezoelectric cantilever sensor. In this embodiment, the sensor is robust and exhibits excellent sensing characteristics in both gaseous and liquid media, even when subjected to relatively high flow rates.

The invention discloses a single pendulum and piezoelectric effect-based composite energy collection-type human power generation device. An electric energy processing part is arranged at the upper part of the device and a shell and a rotor are arranged at the lower part of the device; a coil winding is fixed in the middle of the shell; and piezoelectric cantilever beams are fixed at two sides of the shell. A fixed part is arranged at the junction of the shell and the electric energy processing part; a bearing is fixed on the fixed part; a rotating shaft on the rotor sleeves inside the bearing; and the rotor can rotate in a plane parallel to the shell through coordination of the rotating shaft and the bearing. The rotor only swings on a vertical plane in the energy collection process, and does not need to carry out circular motion; and the remaining energy when the rotor moves to the boundaries of two sides is absorbed by the piezoelectric cantilever beams, and maximization of energy collection is facilitated.

The present invention relates to an energy harvester device comprising an elongate resonator beam extending between first and second ends. A base connected to the resonator beam at the first end with the second end being freely extending from the base as a cantilever. A mass is attached to the second end of the elongate resonator beam. The elongate resonator beam comprises either: (1) a first oxide layer on a first piezoelectric stack layer over a cantilever layer on a second oxide layer over a second piezoelectric stack layer on a third oxide layer or (2) a first oxide layer on a first piezoelectric stack layer over a second oxide layer on a cantilever layer over a third oxide layer on a second piezoelectric stack over a fourth oxide layer. Also disclosed is a system comprising an electrically powered apparatus and the energy harvester device, as well as methods of making and using the energy harvester.

The invention discloses a piezoelectric speaker based on a piezoelectric cantilever beam, belonging to the technical filed of piezoelectricity. The piezoelectric speaker is structured by bonding an upper layer piezoelectric ceramic piece and a lower layer piezoelectric ceramic piece of opposite polarization directions at both sides of a middle layer fiber sheet, thereby forming a piezoelectric cantilever beam; one end of the piezoelectric cantilever beam is fixed with an external frame so as to form a fixed end from which electrodes are led out; the movable end of the piezoelectric cantilever beam is connected with a vibration sheet by a link block with a damp function; and the vibration sheet is bonded to the external frame through a vibration film. The vibration sheet can serve as the main medium for driving air around the speaker and also the counter weight of the speaker, can reduce the first-order resonance frequency of the speaker effectively, and improve the effect of low pitch replay. The piezoelectric speaker provided by the invention has the characteristics of low resonance frequency, simple vibration mode and large vibration range and the like, and has the advantages of good low pitch performance, stable sound pressure output and high sound output and the like compared with a conventional surface mount type piezoelectric speaker.

The invention discloses a multi-frequency-band piezoelectric vibration energy collector which comprises a piezoelectric element, a cover plate, a dynamic absorber, an energy collecting circuit and a lateral wall, wherein the piezoelectric element is composed of a piezoelectric cantilever beam structure and a second piezoelectric stack; the piezoelectric cantilever beam structure consists of a piezoelectric sheet and a cantilever beam; the second piezoelectric stack is adhered to the lateral wall; the second piezoelectric stack is provided with the cover plate; the dynamic absorber comprises a mass block and an elastic element with the damping ratio less than 0.3, wherein the mass block and the elastic element are connected; and the elastic element comprises a fifth support, a sixth support and the cantilever beam. According to the invention, the working frequency can be designed in multiple frequency bands, and the collection of easily applied and efficient vibration energy can be realized.

In an optical deflector including a mirror, a movable frame supporting the mirror, a first piezoelectric actuator for rocking the mirror with respect to a first axis of the mirror, a support body supporting the movable frame, and a second piezoelectric actuator for rocking the mirror through the movable frame with respect to a second axis of the mirror, at least one piezoelectric sensor is provided for sensing rocking vibrations of the mirror caused by the first and second piezoelectric actuators. The second piezoelectric actuator includes a pair of meander-type pieoelectric actuators opposite to each other with respect to the first axis. Each of the second meander-type piezoelectric actuators includes a plurality of piezoelectric cantilevers folded at every cantilever and connected from the support body to the movable frame in parallel with the first axis. The piezoelectric sensor is incorporated into an outermost one of the piezoelectric cantilevers.

The invention provides a mini-type combined type energy collector based on PVDF (Poly Vinyli Dene Fluoride) and a preparation method. A cantilever structure is prepared by using a flexible polymer piezoelectric material PVDF, resonance is generated through the PVDF piezoelectric cantilever, and vibration is converted into electric energy by using a piezoelectric effect; and meanwhile, a PDMS (Poly Di Methyl Siloxane) mass block containing nanometer particles, which is fixedly connected with the mini-type combined type energy collector, vibrates with the vibration of the PVDF piezoelectric cantilever, so that the magnetic flux of passing through a plane spiral coil electrically plated on a substrate can be varied, and sensing electromotive force is generated. Therefore, output power is externally loaded. The mini-type combined type energy collector provided by the invention uses a polymer piezoelectric material PVDF to replace a traditional piezoelectric material PZT (Piezoelectric Transducer), and energy collection can be carried out through a piezoelectric manner and an electromagnetic manner, so that the output power and the efficiency of the energy collector can be obviously improved, and the mini-type combined type energy collector is biologically compatible.

The invention relates to a wide-frequency-band wind-induced vibration piezoelectric power generation device. The wide-frequency-band wind-induced vibration piezoelectric power generation device is composed of a base, a support, wind wheels, rotary shafts, a belt drive, crank sliding block mechanisms, piezoelectric cantilever beams and the like. The wind wheels and the crank sliding block mechanisms are symmetrically arranged on the rotary shafts of the wind wheels and the crank sliding block mechanisms, the belt drive is a round belt drive, the crank sliding block mechanisms are positive biascrank sliding block mechanisms and composed of cranks, connecting rods and sliding blocks, a guiding rail where the sliding blocks move in a reciprocating mode is a composite guiding rail which is combined by a cylindrical surface and a plane, permanent magnets with the same magnetism are bonded on the sliding blocks and the free ends of the cantilever beams correspondingly, and the magnetizationdirection is the vertical direction. Under the effect of the wind force, the sliding blocks are driven to move in a reciprocating mode, the repulsive force among the permanent magnets enables the cantilever beams to vibrate violently, further piezoelectric patches on the cantilever beams deform, and electric energy is generated. According to the wide-frequency-band wind-induced vibration piezoelectric power generation device, by utilizing low-frequency vibration under the low-wind-speed environment, the vibration frequency band is wide, the wind energy collecting efficiency is obviously improved and the electric energy production is obviously increased, meanwhile, the mechanical structure is simple, the manufacturing cost is low, and the service life is long.

The invention discloses a low-frequency piezoelectric vibration energy collector based on Helmholtz effect and a manufacture process thereof, which belongs to the technical field of renewable resources. The energy collector comprises the components of an upper glass cover, a lower glass cover and an energy conversion unit. The upper glass cover and the lower glass cover are vertically combined for forming a Helmholtz resonant chamber. The energy conversion unit is mounted in the Helmholtz resonant chamber. The end of the upper glass cover and the end of the lower glass cover are respectively provided with an opening. The energy conversion unit comprises a piezoelectric cantilever beam, a mass, piezoelectric material, an upper electrode and a lower electrode. When the low-frequency piezoelectric vibration energy collector operates, an eddy current resonance is formed in the Helmholtz resonant chamber, so that the mass in the resonant chamber drives the cantilever beam to deform. Under a piezoelectric effect, an electric potential different is generated, thereby converting an energy in another form to electric energy. The energy collector has advantages of low frequency, wide frequency band, etc. The energy collector can be widely used for a wireless sensing network node, a portable electronic product, a miniature electronic device, etc. The low-frequency piezoelectric vibration energy collector realizes high-efficiency conversion from environment vibration energy to the electric energy.

A method of fabricating a microelectronic device comprising providing a substrate comprising a first bottom surface, providing a mold comprising a first top surface with first projections, and punching the first projections through the first bottom surface to define anchors, pre-cantilevers, and cavities in the substrate. A piezoelectric cantilever actuator system array prepared by a process comprising the steps of providing a substrate comprising a first bottom surface, providing a mold comprising a first top surface with first projections, and punching the first projections through the first bottom surface to define anchors, pre-cantilevers, and cavities in the substrate. A microelectronic device comprising a base, a first anchor coupled to the base, and a first cantilever coupled to the first anchor, wherein the base, the first anchor, and the first cantilever are an integral structure formed from the same substrate material.

The invention relates to the field of vibration application and electric power technology, and particularly to a right-angled piezoelectric cantilever beam vibration energy harvester. The right-angled piezoelectric cantilever beam vibration energy harvester comprises a supporting base and a horizontal metal substrate which is mounted on the supporting base. The horizontal metal substrate is provided with a piezoelectric ceramic wafer at the end which is next to the supporting base. A vertical metal substrate is adhered to the other end of the horizontal metal substrate. The horizontal metal substrate is perpendicular with a vertical metal substrate, thereby forming a right-angled cantilever beam structure. The other end of the vertical metal substrate is provided with a mass block. According to the right-angled piezoelectric cantilever beam vibration energy harvester, the right-angled cantilever beam is formed through adding an auxiliary cantilever beam at the end of the horizontal cantilever beam. Through controlling the structural dimensions of the horizontal cantilever beam and the vertical cantilever beam and the mass of the mass block, controlling for an interval between two front stages of modal frequencies is realized, thereby forming a relatively wide operation frequency band and realizing high-efficiency acquisition and conversion for environment vibration energy.

The invention relates to an MEMS micro-lens driven by three piezoelectric cantilever beams and a manufacturing method thereof and belongs to the technical field of piezoelectric MEMS appliance designs and integrated manufacturing. The MEMS micro-lens comprises a micro-reflecting mirror surface, the piezoelectric cantilever beams and arched bent elastic narrow beams, wherein each of the piezoelectric cantilever beams is formed by fixing a PZT driving membrane with more than 2 mu m thickness on the surface of a silicon cantilever beam; the three piezoelectric cantilever beams are connected with the micro-lens micro-reflecting mirror surface through three arched bent elastic narrow beams respectively; and the piezoelectric cantilever beams are distributed in a way that an included angle of 120 degrees is formed between every two piezoelectric cantilever beams. The manufacturing method comprises the following steps of: firstly, preparing a piezoelectric thick membrane on a substrate and etching piezoelectric cantilever beam patterns on the piezoelectric thick membrane; secondly, preparing a Au / Cr two-layer metal top electrode and a micro micro-reflecting mirror surface pattern on the PZT piezoelectric thick membrane; and finally, etching a Si substrate on the front and back faces so as to form the MEMS micro-lens driven by the three piezoelectric cantilever beams. The MEMS micro-lens has the advantages of many deflecting directions, strong driving force of the PZT thick membrane and low optical loss. The manufacturing process is compatible with the MEMS process, so that the MEMS micro-lens has the potential of mass production and can be widely applied in the field of optical communication.