Piezoelectric cantilever vibration energy harvester and preparation method thereof
A vibration energy harvesting, cantilever beam technology, applied in the directions of piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric effect/electrostrictive or magnetostrictive motors, etc. It can solve the problems of difficult control, difficulty in ensuring the surface flatness of the structure, affecting the success rate of the device, etc., to achieve the effects of improving controllability, increasing type variables, and improving the success rate
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[0036] Such as figure 1 As shown, the piezoelectric cantilever beam vibration energy harvester involved in this embodiment includes: an upper cantilever, a lower cantilever, a mass and a fixing device, wherein: the mass is located at one end of the lower cantilever, and the fixing device is fixed on the other end of the lower cantilever. At one end, the upper cantilever is arranged on the mass block and the fixing device and is symmetrical to the lower cantilever. The mass block and the fixing device are fixedly connected to the upper cantilever respectively. The distance between the fixing device and the mass block is 2400 microns.
[0037] The mass block is a cuboid with a height of 600 microns, a length of 600 microns and a width of 500 microns.
[0038] The fixture is a cuboid with a height of 600 microns, a length of 600 microns and a width of 500 microns.
[0039]The upper cantilever includes: a first support layer, a first lower electrode layer, a first upper electrode...
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