Piezoelectric cantilever vibration energy harvester and preparation method thereof

Abstract

The invention discloses a piezoelectric cantilever vibration energy harvester and a preparation method thereof, belonging to the technical field of micro electro mechanical system (MEM). The harvester comprises an upper cantilever, a lower cantilever, a mass block and a fixing device, wherein the mass block is arranged at one end of the lower cantilever, and the fixing device is fixed at the other end of the lower cantilever; the upper cantilever is arranged on the mass block and the fixing device and is symmetrical with the lower cantilever; the mass block and the fixing device are respectively and fixedly connected with the upper cantilever; distance from the fixing device to the mass block is L; the upper cantilever comprises a first support layer, a first lower electrode layer, a first upper electrode layer and a first PZT layer; the lower cantilever comprises a second support layer, a second layer electrode layer, a second upper electrode layer and a second PTZ layer; and the support layer comprises a first SiO2 layer, an Si layer and a second SiO2 layer. The invention improves mechanical transformation ability, can collect more electrical energy from mechanical vibration, has controllable preparation method and improves the production success rate of the devices.

Description

technical field [0001] The invention relates to a device in the field of micro-electromechanical technology and a preparation method thereof, in particular to a piezoelectric cantilever beam vibration energy harvester and a preparation method thereof. Background technique [0002] Energy harvesting technology is a key technology that can effectively solve the problem of energy supply for wireless sensor devices. As a vibration energy harvesting device, piezoelectric cantilever beams have the characteristics of simple structure, long-lasting energy supply time, and no need for replacement. Combined to achieve mass production. The mechanical vibration in the environment causes the deformation of the piezoelectric layer in the cantilever beam structure. Under the action of stress, the piezoelectric layer generates an electrical signal due to the piezoelectric effect, enabling the device to realize the conversion of mechanical energy to electrical energy. The electrical signal ...

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Problems solved by technology

This process can be used to produce piezoelectric cantilever micro-energy harvesters with composite structures, but the process steps are aimed at the cantilever structure of a single piezoelectric layer, and the wet etching process involved in the process is difficult to control, and it is difficult to ensure that the engraved The flatness of the surface of the post-etch structure affects the success rate of device production

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