Low-frequency piezoelectric vibration energy collector based on Helmholtz effect and manufacture process thereof

Abstract

The invention discloses a low-frequency piezoelectric vibration energy collector based on Helmholtz effect and a manufacture process thereof, which belongs to the technical field of renewable resources. The energy collector comprises the components of an upper glass cover, a lower glass cover and an energy conversion unit. The upper glass cover and the lower glass cover are vertically combined for forming a Helmholtz resonant chamber. The energy conversion unit is mounted in the Helmholtz resonant chamber. The end of the upper glass cover and the end of the lower glass cover are respectively provided with an opening. The energy conversion unit comprises a piezoelectric cantilever beam, a mass, piezoelectric material, an upper electrode and a lower electrode. When the low-frequency piezoelectric vibration energy collector operates, an eddy current resonance is formed in the Helmholtz resonant chamber, so that the mass in the resonant chamber drives the cantilever beam to deform. Under a piezoelectric effect, an electric potential different is generated, thereby converting an energy in another form to electric energy. The energy collector has advantages of low frequency, wide frequency band, etc. The energy collector can be widely used for a wireless sensing network node, a portable electronic product, a miniature electronic device, etc. The low-frequency piezoelectric vibration energy collector realizes high-efficiency conversion from environment vibration energy to the electric energy.

Description

technical field [0001] The invention belongs to the technical field of renewable resources, and relates to a low-frequency piezoelectric vibration energy harvester based on the Helmholtz effect and a manufacturing process thereof. Background technique [0002] Piezoelectric vibration energy harvester is a device that uses the piezoelectric effect of materials to convert a large amount of vibration energy in the environment into electrical energy. Combined with the current MEMS technology, it not only has small size, long life, easy integration and is compatible with IC technology Compatibility and other advantages, it has significant advantages in weight, life, energy density, supply speed, reliability, cost, etc. It has become an effective way to solve the energy supply problem of microelectronic devices, and it is also one of the hot spots in the field of international micro energy research. . [0003] Our country has a vast territory and a vast sea area. Electronic borde...

AI Technical Summary

Problems solved by technology

[0004] Conventional MEMS piezoelectric vibration energy harvesters rely on vibrating piezoelectric cantilevers or micro-electrets, which can only work effectively in a narrow or specific frequency band. This limitation makes these concepts have to be abandoned in most practical environments.

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