Combination zeroing laser large working distance auto-collimation device and method

A technology of working distance and self-collimation, which is applied in the field of precision measurement and optical engineering, and can solve the problems that self-collimation and micro-angle measurement cannot be realized, the range cannot be too large, and the reflected beam deviates from the entrance pupil, etc.

Active Publication Date: 2017-01-11
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;
[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the...

Method used

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  • Combination zeroing laser large working distance auto-collimation device and method
  • Combination zeroing laser large working distance auto-collimation device and method
  • Combination zeroing laser large working distance auto-collimation device and method

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specific Embodiment 1

[0088] An embodiment of the combined zeroing laser large working distance autocollimation device of this embodiment.

[0089] The combined zero-adjustment laser large working distance self-collimation device in this embodiment has a structural schematic diagram as shown in figure 2 shown. The self-collimation device includes a light source 1, a transmissive collimator mirror 21, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; After the straight mirror 21 is collimated into a parallel light beam, it is reflected by the reflector 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the reflective mirror 3 and collected by the feedback imaging system 6 imaging;

[0090] The feedback imaging system 6 includes an image sensor imaging system and a four-quadrant detector imaging system;

[0091] The image sensor imagin...

specific Embodiment 2

[0098] An embodiment of the combined zeroing laser large working distance autocollimation device of this embodiment.

[0099] The difference between the combined zeroing laser large working distance self-collimation device of this embodiment and the specific embodiment 1 lies in the structure of the feedback imaging system 6; the structure of the feedback imaging system 6 of this embodiment is one of the following two forms:

[0100] First, the feedback imaging system 6 includes a first feedback beam splitter 61, and an image sensor 65 and a four-quadrant detector 66 carried by a guide rail 68, such as Figure 8 As shown; the guide rail 68 has two pause positions, one pause position makes the image sensor 65 image plane center correspond to the focus position of the transmissive collimator mirror 21, and the other pause position makes the four-quadrant detector 66 image plane center correspond to the transmission type The focus position of collimating mirror 21;

[0101] Seco...

specific Embodiment 3

[0103] An embodiment of the combined zeroing laser large working distance autocollimation device of this embodiment.

[0104] The combined zero-adjustment laser large working distance self-collimation device in this embodiment has a structural schematic diagram as shown in Figure 10 shown. On the basis of the specific embodiment 1, the combined zeroing laser large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0105] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path...

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Abstract

The invention belongs to the technical field of precision measurement and the field of optical engineering and specifically relates to a combination zeroing laser large working distance auto-collimation device and method. The device consists of a light source, a collimating mirror, a reflecting mirror and a feedback imaging system; according to the method, via adjustment of the reflecting mirror, a reflected light beam is enabled to return to a center of an image plane of the feedback imaging system; an angular deflection measurement device on the reflecting mirror is used for obtaining angular variation of a surface of an object being tested. Because the reflecting mirror is added in a traditional auto-collimation angle measurement system, a problem that measurement cannot be realized when light reflected by the object being tested is deviated from a measurement system can be prevented; an auto-collimation working scope can be expanded while working distance remains the same or working distance is increased while the auto-collimation working scope remains the same; via specific design of the collimating mirror, the feedback imaging system, the reflecting mirror and the like, the combination zeroing laser large working distance auto-collimation device is enabled to be simple in structure and low in manufacture cost; measurement operation can be conducted even in unstable measurement environments, and a technical advantage of rapid measurement can be gained.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, and in particular relates to a self-collimation device and method for combined zeroing laser with large working distance. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundr...

Claims

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Application Information

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IPC IPC(8): G01B11/26G01C1/00G02B27/30
CPCG01B11/26G01C1/00G02B27/30
Inventor 谭欣然朱凡王超谭久彬
Owner HARBIN INST OF TECH
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