Combination zeroing laser large working distance auto-collimation device and method
A technology of working distance and self-collimation, which is applied in the field of precision measurement and optical engineering, and can solve the problems that self-collimation and micro-angle measurement cannot be realized, the range cannot be too large, and the reflected beam deviates from the entrance pupil, etc.
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specific Embodiment 1
[0088] An embodiment of the combined zeroing laser large working distance autocollimation device of this embodiment.
[0089] The combined zero-adjustment laser large working distance self-collimation device in this embodiment has a structural schematic diagram as shown in figure 2 shown. The self-collimation device includes a light source 1, a transmissive collimator mirror 21, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; After the straight mirror 21 is collimated into a parallel light beam, it is reflected by the reflector 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the reflective mirror 3 and collected by the feedback imaging system 6 imaging;
[0090] The feedback imaging system 6 includes an image sensor imaging system and a four-quadrant detector imaging system;
[0091] The image sensor imagin...
specific Embodiment 2
[0098] An embodiment of the combined zeroing laser large working distance autocollimation device of this embodiment.
[0099] The difference between the combined zeroing laser large working distance self-collimation device of this embodiment and the specific embodiment 1 lies in the structure of the feedback imaging system 6; the structure of the feedback imaging system 6 of this embodiment is one of the following two forms:
[0100] First, the feedback imaging system 6 includes a first feedback beam splitter 61, and an image sensor 65 and a four-quadrant detector 66 carried by a guide rail 68, such as Figure 8 As shown; the guide rail 68 has two pause positions, one pause position makes the image sensor 65 image plane center correspond to the focus position of the transmissive collimator mirror 21, and the other pause position makes the four-quadrant detector 66 image plane center correspond to the transmission type The focus position of collimating mirror 21;
[0101] Seco...
specific Embodiment 3
[0103] An embodiment of the combined zeroing laser large working distance autocollimation device of this embodiment.
[0104] The combined zero-adjustment laser large working distance self-collimation device in this embodiment has a structural schematic diagram as shown in Figure 10 shown. On the basis of the specific embodiment 1, the combined zeroing laser large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;
[0105] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path...
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