72 results about "Autocollimation" patented technology

The invention discloses an autocollimator noise error compensation method based on a Retinex theory, and belongs to the field of optical measuring instruments. The method comprises the following steps of: 1, combining a Retinex theoretical model with an auto-collimation measurement system, and correspondingly analyzing light source emergent light, system measurement light beams and background noise light of an auto-collimator and an input image, a reflection image and a brightness image of the Retinex theory from the angle of identifying a detection image by a photoelectric detector in an auto-collimation system structure; 2, performing gray processing and logarithmic processing on the acquired input image and the brightness image, and obtaining a difference value to obtain a reflection gray image with image information of the object; and 3, a contrast test is designed for the input image and the reflection image before and after the noise suppression scheme is adopted, the displacement of the diaphragm image in the two images is detected and identified, the error compensation method is analyzed to effectively suppress the interference of background noise on imaging, and the measurement precision and the measurement stability of the autocollimator are improved.

The invention relates to the technical field of optical systems, and provides a full-automatic collimation method and system for an optical system, a medium and equipment, and the method comprises the steps: extracting pulse features of a pulse sequence, calculating pulse interval jitter, an energy fluctuation rate and a deviation between a pulse repetition rate and a theoretical value, and judging a mode locking state; for the output laser, reconstructing a spectral curve of the output laser, and extracting spectral features; obtaining a mode locking stability score through a deep learning model; the basic parameters of the laser cavity are optimized by maximizing the power and the collimation degree of the output laser; basic parameters of the laser cavity are used as priori, and parameters of all optical elements of the resonant cavity are adjusted by maximizing a mode locking stability score and a target pulse width score; and on the premise of the adjusted parameters of the optical elements of the resonant cavity, the pose of the lens is adjusted by maximizing the power and the collimation of the output laser. High-efficiency and progressive optimization of optical system parameters is realized, and the collimation degree is improved.

The invention belongs to the field of neutron optical devices, and relates to a neutron conduit waviness measuring method. The method comprises the following steps: S1, defining a waviness parameter sigma as an index for measuring the flatness of a reflecting surface, and calculating through a specific formula; s2, a total station is used for being matched with an auto-collimation eyepiece, in an auto-collimation mode, light beams of the total station irradiate the reflection surface, the normal incidence state is determined, and the angle is recorded; s3, mounting the total station on a high-precision guide rail, sliding along the guide rail, repeating the step S2 at a plurality of positions at equal intervals, recording a current instrument angle, and transmitting the current instrument angle to a computer; s4, processing the data by using a spreadsheet template, and calculating waviness according to the geometrical shape; and S5, evaluating the waviness value and the normal accuracy of the side wall of the multi-section conduit, and analyzing the influence of the waviness value and the normal accuracy on neutron reflection. The neutron reflection quality and the multi-section guide rail butt joint integration quality can be evaluated more accurately, the method is suitable for guide pipes in various geometrical shapes, design and manufacturing can be guided, the production efficiency can be improved, and support is provided for device improvement.

The invention discloses an intelligent laser collimation system, which realizes automatic collimation of a laser beam through cooperative control of double reflectors, a high-precision electric actuator and an SAC reinforcement learning algorithm, adopts a cage type integrated structure design of double reflectors and a coaxial connecting rod, realizes rigid constraint and rapid alignment of a light path, and improves the accuracy of laser collimation. A reflector double-axis precise automatic adjusting mechanism based on a miniature electric actuator is developed, an SAC reinforcement learning algorithm is applied to an optical collimation system for the first time, a dynamic reward function design based on light spot offset is proposed, a double-reflector cooperative control model, a light spot offset real-time feedback mechanism and a self-adaptive parameter adjusting strategy are creatively adopted, and the optical collimation system is optimized. Alignment and collimation of laser beams are achieved, a geometric parametric modeling method based on a reflector is developed, related offset can be obtained through theoretical calculation without additional detection through geometric parametric modeling, the adjustment precision is improved to the micron order, and the operation complexity is remarkably reduced.

A technique of the present disclosure includes: capturing a first image when a scanning mirror is in a first position; rotating the scanning mirror by a first angle from the first position to a second position in a rotational direction of a rotation shaft; capturing a second image at the second position; obtaining rotation center coordinates of the second image with respect to the first image using the first image, the second image, and the first angle measured by an angle measuring sensor, and generating a corrected image, in which rotation of the second image and displacement about the rotation shaft are corrected, based on the rotation center coordinates, the first angle, and the second image.

The application provides a dual-wavelength coaxial aiming system capable of automatic collimation, which is used for attitude adjustment and target positioning aiming of a picosecond terminal optical path cone target of inertial confinement fusion (ICF). The system comprises automatic collimation optical paths and aiming optical paths of different working wavelengths; the automatic collimation optical paths comprise a light source, a light splitting prism, a secondary mirror, a reflecting mirror and a CCD detector; the aiming optical paths are composed of a primary mirror, a secondary mirror, a lens group, a light splitting prism and a CCD detector group, and each optical element is coaxial; the system multiplexes the secondary mirror, and realizes automatic collimation and positioning aiming through different wavelength transmission and reflection respectively; the system adopts combination of flint and crown glasses to correct chromatic aberration of different wavelengths; the image planes of the dual-wavelength optical paths are located at the same position; and the system adopts a coaxial two-mirror structure, and is compact in structure and small in size.

The application provides a high-precision auxiliary alignment device and an alignment method for an optoelectronic autocollimator, and aims at solving the problem of low aiming accuracy in the existing laser coarse aiming auxiliary alignment method. The auxiliary alignment device comprises a rhombic prism, a corner cube mirror, a laser, a first light splitting prism and a second light splitting prism. The auxiliary alignment method is as follows: the translational position alignment of the optoelectronic autocollimator to be aligned to the aiming target is realized; the collimated light is divided into first reflected light and first transmitted light; the first reflected light is reflected by the corner cube mirror and then returns to the rhombic prism to form a reference image point; the first transmitted light is transmitted by the first light splitting prism to the surface of the aiming target, is reflected by the surface of the aiming target, and then is reflected by the second light splitting prism, and finally is reflected by the rhombic prism to form a measurement image point. The azimuth angle of the optoelectronic autocollimator to be aligned is adjusted until the measurement image point coincides with the reference image point, and the alignment is completed.

A method for aligning two surveying instruments in a common space in a process that uses an autocollimation of a collimated light beam transmitted by a first surveying instrument and reflected by a second surveying instrument. In the alignment process, the first surveying instrument may emit a collimated light beam towards the second the surveying instrument and receive a reflection of the collimated light beam from the second surveying instrument in an autocollimator. The reflection may be generated for example by a mirror at the second surveying instrument. When the light beam is reflected such that autocollimation of the collimated light beam is achieved at the first surveying instrument, the first and second surveying instruments are in a predetermined positional relation with respect to one another. With a known predetermined positional relation between the reflecting mirror and the line of sight of the second surveying instrument, measurements by both surveying instruments can be made in a common coordinate system.

The invention discloses a low-repetition-frequency laser pointing stability improving device and method, and belongs to the field of lasers. According to the invention, the seed laser pulse of the MHz magnitude is used as the reference light to adjust the directivity of the light path, and compared with the main laser repetition frequency of the Hz magnitude, the sampling frequency of the subsequent directivity adjustment is greatly improved, so that the laser auto-collimation precision is improved. The use of the first shutter, the second shutter and the third shutter ensures the safety of the first detector and the second detector in the transmission process of the main laser when the energy difference between the main laser and the reference light is 9 orders of magnitude. The first detector images the first grating of the compressor to ensure that the positions of laser entering the compressor are the same, so that the consistency of laser pulse width and directivity can be ensured to a great extent, the second detector images the acting target to ensure that the acting positions are the same, and the stability of a subsequent radiation source is ensured. The laser directivity correction method is applied to laser directivity correction of hundred TW-level and PW-level lasers.

A measurement system for detecting deep-hole surface topography based on low-coherence interferometry (LCI) can include a detection part and an autocollimation system. The detection part includes a white light interferometric system, which specifically includes a 1550 nm amplified spontaneous emission (ASE) broadband light source, a first reflector, a first beam splitting prism, a second reflector, and a reference reflector that are arranged in sequence, where a to-be-measured deep-hole and a near-infrared camera are respectively arranged at two sides of the first beam splitting prism, and a conical prism is disposed inside the to-be-measured deep-hole. The autocollimation system is disposed between the to-be-measured deep-hole and the first beam-splitting prism. The autocollimation system includes a 630 nm light source, a dichroic prism, a second beam-splitting prism, a third reflector, and a quadrant detector that are arranged in sequence.

This invention proposes a micro-nano arc-scale three-dimensional angle inspection device and method. The device comprises a ribbed worktable, a worktable shaft, a worktable support, a drive unit, a base, a plane mirror, an autocollimator, a drive module circuit board, a main control module circuit board, a display input module circuit board, and a turntable. The method uses the drive unit to induce a three-dimensional angle deflection in the worktable, employs two sets of autocollimation systems to measure this deflection, and establishes closed-loop feedback control for the worktable. Because the two angle measurement devices are orthogonally arranged, the three-dimensional angle deflection of the worktable can be measured. Using an autocollimation system as the angle measurement device greatly improves the angle measurement resolution. The combined drive method of a lead screw and piezoelectric ceramic further enhances the resolution of the worktable angle, thus solving the problems of small-angle inspection instruments being unable to perform three-dimensional angle inspection and having low angle resolution.

An optical system has a source-detector unit (SDU) and an optical arrangement. The SDU has a detector arrangement and an illumination arrangement that provides a point source that defines an output sub-region of a planar output-input region of the SDU. The optical arrangement is deployed between the SDU and an at least partially reflective surface. The point source outputs illumination from the output sub-region toward the at least partially reflective surface via at least one optical component of the optical arrangement. The detector arrangement forms an image from illumination from the point source that is reflected from the at least partially reflective surface and received at an input sub-region of the output-input region via at least one optical component of the optical arrangement. A component of the optical system is provided with an optical decenter in relation to a datum axis of the optical system.

The invention relates to the technical field of precision optical detection, and discloses a laser auto-collimation peak alignment angle measuring method and device, and the device comprises a point light source, a first spectroscope located in the emergent direction of the point light source, and a collimating mirror and a measured prism element which are sequentially arranged along the reflection direction of the first spectroscope; the rotating table bears the prism element to be measured, and the rotating table is connected with an angle measuring module for measuring the rotating angle of the prism element; the detection unit comprises a slit plate and a photoelectric detector which are sequentially arranged in the direction opposite to the reflection direction of the first spectroscope, and the slit plate is provided with a slit; and the controller is respectively connected with the point light source, the rotary table, the angle measurement module and the photoelectric detector, and finally high-resolution and high-precision measurement and the like of the included angle of the measured prism element are realized.

The invention relates to the technical field of optical equipment, and discloses a calibration method for enabling an optical axis of a collimator to be perpendicular to a datum plane, which comprises the following steps of: sequentially placing a first theodolite and a second theodolite on an optical platform from front to back and leveling; horizontally arranging a collimator and an optical hexahedron on the right sides of the first theodolite and the second theodolite, and rotating the first theodolite and the second theodolite by 90 degrees to be parallel to the optical axis direction of the collimator; alignment of the first theodolite and the collimator in the horizontal direction is completed, the auto-collimation function of the second theodolite is started, and the bottom end of the optical flat mounting base is repaired and ground through auto-collimation image deviation until auto-collimation images coincide; the collimator mounting seat is turned by 90 degrees, so that the optical axis of the collimator is upward, the second theodolite aims at the optical flat reflecting surface, and the bottom end of the collimator mounting seat is repaired and ground according to the pitch angle data, so that the optical axis is vertically calibrated. According to the method, the calibration angle deviation can be controlled to be 0.3 ''or below through repeated iteration repair and grinding, and sub-arc-second-level vertical calibration of the optical axis of the collimator is achieved.

The utility model relates to an automatic focusing three-dimensional five-axis laser cutting head which comprises an optical fiber QBH automatic collimation assembly, a C-axis rotating assembly, an A-axis rotating assembly, a light path reflection assembly and a cutting assembly, and has the advantages that the structure is compact, focusing is accurate, the optical fiber QBH automatic collimation assembly and an automatic focusing lens assembly are adopted, the center position and the focal length of a light beam can be accurately adjusted, and the cutting efficiency is improved. Stable and consistent cutting quality is guaranteed, and cutting precision is improved. The protection assembly is internally provided with pressurized gas to prevent dust pollution, and the service life of the optical element is prolonged; the anti-collision assembly is in magnetic attraction connection with an annular magnet through a contact type sensor, the cutting head is effectively protected against collision damage, the equipment reliability is improved, and the service life is prolonged. The laser machining device is high in adaptability, can adapt to various types of lasers, meets different machining requirements, has good universality and flexibility, and expands the application range. The automatic focusing function reduces manual intervention, accelerates the cutting speed, improves the production efficiency and reduces the production cost.

The utility model relates to a right-angle prism gluing detection device, which comprises a base, a prism camera, a loading platform, an auto-collimation front lens and an optical axis parallelism error detection assembly, the prism camera is arranged on the base, the loading platform is arranged on the base and is provided with two clamping stations, the auto-collimation front lens is arranged on the base, and the optical axis parallelism error detection assembly is arranged on the loading platform. The optical axis parallelism error detection assembly is mounted on the base and is provided with a reflected image receiving end; firstly, the prism camera and the auto-collimation front lens are calibrated to enable the cross of the prism camera and the cross of the auto-collimation front lens to coincide, then the glued prism is placed on the clamping station of the object carrying platform, whether the image inclination of the prism meets the requirement or not can be judged according to the position relation between the cross of the prism camera and the cross of the auto-collimation front lens, and meanwhile, the image inclination of the prism can be judged. The reflection cross center of the glued prism is adjusted to be aligned with and coincide with the division cross center of the auto-collimation front lens, the optical axis parallelism error can be obtained by reading the distance grid value between reflection images, and therefore the detection process is completed.

This invention discloses a three-degree-of-freedom autocollimation angle measurement device and method based on a crosshair reticle, comprising a probe system, a target mirror system, and a calculation system. The probe system emits a collimated beam containing crosshair image information into the target mirror system. The target mirror system separates the collimated beam containing crosshair image information into two reflected beams parallel to the optical axis, each reflecting beam containing crosshair image information. The probe system also receives the two reflected beams parallel to the optical axis and images the crosshair images corresponding to the two reflected beams. The calculation system calculates the pitch and yaw angles of the target based on the initial and current coordinates of the crosshair image corresponding to one reflected beam parallel to the optical axis, and calculates the roll angle of the target based on the initial and current tilt angles of the crosshair image corresponding to the other reflected beam parallel to the optical axis. This invention enables rapid and high-precision three-degree-of-freedom angle measurement of distant targets.

The invention discloses a large-scale complex optical-mechanical system integrated space pose positioning method and system, which are used for solving the problems of poor initial positioning precision and low efficiency caused by a built-in optical element and no exposed measurement basis in a modularized optical system. The method comprises the following steps: measuring a reference surface of an optical machine main body through a laser tracker to establish a global space coordinate system, and aiming through at least two auto-collimation theodolites and establishing a global angle coordinate system according to a global accurate measurement mirror; the method comprises the following steps: arranging a plurality of cooperative target seats and accurate measurement mirrors on a target module, and respectively acquiring actual spatial positions and angle postures of the target module under a global coordinate system; and comparing the actually measured pose with the theoretically designed pose, and manually adjusting the target module by using a six-degree-of-freedom adjusting mechanism until the pose deviation meets the tolerance requirement, thereby finally realizing rapid and accurate initial positioning. The method does not depend on an exposed optical surface of the module, and the installation and adjustment efficiency and reliability are remarkably improved.

The invention relates to an optical calibration system (30), comprising: - a support (32), - an imaging device (34) mounted on the support (32), the imaging device (34) comprising: • a camera comprising an image generation unit and an objective, • a collimation unit suitable to emit a collimated beam convoying an image of a so-called collimation object, the imaging device (34) being selectively switchable between two modes of operation among: • an autocollimation mode in which both the image generation unit and the collimation unit are activated, and • an imagery mode in which only the image generation unit is activated.

The application discloses a combined measurement method for initial assembly and adjustment of an optical machine system, and relates to the technical field of optical machine system assembly and adjustment.The combined measurement method is applied to a combined measurement system.The combined measurement system comprises a laser tracker, three theodolites and a PSM assembly and adjustment microscope.The combined measurement method comprises the following steps: placing a target module at a theoretical position according to mechanical positioning; establishing a global coordinate system through the laser tracker, and determining the spatial coordinates of the curvature center of the target module in the global coordinate system; placing a cooperative target ball of the laser tracker at the spatial coordinates position of the curvature center of the target module; adjusting the PSM assembly and adjustment microscope to be autocollimation with the cooperative target ball of the laser tracker; adjusting the position of the target module based on a global measurement network formed by the three theodolites and the laser tracker, so that the curvature center of the target module coincides with the focal point of the objective lens of the PSM assembly and adjustment microscope, and the final position of the target module is determined.The application improves the initial assembly and adjustment efficiency.

The present invention relates to the field of optical measurement technology, and discloses a collimator calibration method and system based on diffraction effect. The method includes: selecting and determining a point light source and a fishbone plate; installing the fishbone plate at the light outlet of the collimator to be calibrated and aligning it with the imaging system; calibrating the resolution of the area array detector and placing the area array detector on the focal plane of the collimator to be calibrated; analyzing the diffraction pattern set and determining the initial optimal focus position based on the analysis result; collecting the image sharpness and clarity of the diffraction pattern corresponding to the initial optimal focus position, and judging whether the imaging system is defocused according to the image sharpness and clarity; measuring the offset of the central starburst and determining the defocus degree according to the offset; performing secondary adjustment on the focal length according to the defocus degree and obtaining the final optimal focus position; verifying the final optimal focus position of the collimator to be calibrated by using the autocollimation method. The present invention effectively improves the calibration accuracy and efficiency.

The invention relates to a high-information-entropy bar coding slit determination method and a high-precision autocollimator based on a slit and a stripe signal processing algorithm thereof, and the determination method comprises the steps: obtaining a plurality of initial light-transmitting slit patterns according to a preset bar coding mode; determining a model by utilizing a preset information entropy, and obtaining the uncertainty degree of each initial light-transmitting slit pattern, the redundancy degree of each initial light-transmitting slit pattern and the random degree of each initial light-transmitting slit pattern; based on the uncertainty degree, the redundancy degree and the random degree, obtaining information entropies corresponding to the initial light-transmitting slit styles; and taking the initial light-transmitting slit pattern corresponding to the maximum information entropy as a target light-transmitting slit pattern of the autocollimator. Thus, the image of the target light-transmitting slit output by the autocollimator can be processed through a cross-correlation-based template matching method and curved surface fitting, more accurate sub-pixel-level image positioning precision is obtained, and then the high-precision angle deflection amount is obtained in combination with an autocollimation measurement formula.

The application discloses a fiber type horizontal angle indicating device based on a self-collimation principle and a method thereof, and relates to the technical field of horizontal angle indication.The device comprises a light source, a fiber weight module, a light intensity receiving module and a frame.The light source emits a space light which is coupled into the fiber weight module.The fiber weight module converts the direction of the incident light into a vertical downward direction and emits the light to a measured object.The measured object reversely couples the incident light into the fiber weight module.The fiber weight module emits the incident light to the light intensity receiving module.The light intensity receiving module converts the incident light into an electric signal.The frame is used for suspending the fiber weight module.The application is suitable for the installation and debugging process of high-end manufacturing equipment, measuring instruments and scientific test equipment, and provides high-sensitivity horizontal angle indication for the adjustment requirement of the spatial posture of a sensitive element and the high-precision level of the ground.

The invention discloses an optical instrument mirror surface perpendicularity detection method and device, and belongs to the technical field of optical instrument detection.The method comprises the steps that S1, a first detection unit and a second detection unit are coaxially arranged on an optical platform in the correlation direction, and the zero points of the first detection unit and the zero points of the second detection unit are calibrated through mutual correlation of the first detection unit and the second detection unit; s2, an optical instrument to be detected is arranged on the optical platform and located between the first detection unit and the second detection unit, parallel light is emitted to the mirror surface of the optical instrument through the first detection unit and the second detection unit in sequence, and a first pitch angle and a second pitch angle of the mirror surface are recorded through an auto-collimation method; and S3, calculating the perpendicularity deviation of the mirror surface relative to the reference surface according to the first pitch angle and the second pitch angle. According to the invention, errors caused by the precision of the optical platform and the precision of the 90-degree reference mirror can be eliminated, and random errors caused by measurement are reduced, so that the precision of a detection result is improved, and errors of the detection result are reduced.

The application claims a liquid refractive index high-precision measurement method based on optical autocollimation, and belongs to the field of optical measurement instruments, and the steps comprise: step 1, according to the angle measurement principle of a traditional autocollimator, a liquid loading reflector with a trapezoidal slope cavity structure characteristic is preliminarily designed, and the cavity is used to replace an external plane reflection target mirror for transmitting an angle value of a traditional autocollimator system, so that a solution refractive index measurement system in the cavity is formed; step 2, according to the original angle measurement performance of the autocollimator system, combined with the change range of the solution refractive index to be measured, a cavity reflector structure geometric parameter calculation and a design method derivation are performed; and step 3, according to the cavity geometric structure parameters, combined with an autocollimator angle measurement formula, a relationship formula between the autocollimation measurement value and the solution refractive index is established. The system structure is relatively simple and convenient to operate, and therefore is more conducive to the popularization and application in the solution refractive index measurement field.

The application discloses a ground space pointing precision testing method for a large-defocus two-dimensional tracking and detecting system, and solves the technical problem that the existing space pointing precision testing method for a two-dimensional tracking and detecting system is not applicable to the space pointing precision testing of a large-defocus two-dimensional tracking and detecting system, and comprises the following steps: adjusting the azimuth angle and the elevation angle of the large-defocus two-dimensional tracking and detecting system to be 0 degrees, aiming at the large-defocus two-dimensional tracking and detecting system by using a first autocollimation theodolite, adjusting the position of a second autocollimation theodolite, aiming at the large-defocus two-dimensional tracking and detecting system, then mutually aiming at each other by the first autocollimation theodolite and the second autocollimation theodolite, and finally calculating the space pointing azimuth error and the elevation error of the large-defocus two-dimensional tracking and detecting system according to the measured azimuth angle and the elevation angle.

Three-waveband off-axis reflective optical system with field of view switching and focusing detection function. It belongs to the field of optoelectronic technology. Multi-waveband common aperture imaging is realized by adopting off-axis two-mirror optical path form, imaging information can be obtained uninterruptedly day and night, laser emission and receiving ability is considered, and functions such as positioning and aiming, laser guiding are possessed. Large and small field of view switching imaging is realized by cutting in and out of the secondary mirror, and the ability of fast searching in large field of view range and accurate identification and tracking in small field of view range is possessed. Optical system autocollimation focusing is realized by switching the position of focusing detection mirror and setting focusing detection system, and clear imaging under different atmospheric pressure, temperature change and photographic distance is ensured, and the system is suitable for accurate aiming and detection of targets in various complex and harsh working conditions. The all-reflective optical system has no chromatic aberration, no obstruction, compact structure and high system integration, and meets the diversified functional requirements of optoelectronic system.

The present invention relates to the technical field of optical-mechanical system alignment, and in particular to a Kuder optical path reverse alignment method, comprising: S1, calibrating the pitch axis using a theodolite and a pitch axis reference mirror; S2, mounting a first reflector on a pitch frame, and adjusting the tilt angle of the first reflector so that the autocollimation image of the theodolite is located at the center of a graticule; S3, mounting the azimuth axis reference mirror on the azimuth frame; S4, mounting a second reflector on the azimuth frame; S5, aligning the theodolite with the incident light axis reference mirror so that the autocollimation image of the theodolite is located at the center of the graticule; S6, mounting a fifth reflector on a base; and S7, reinstalling an optical terminal on an incident reference mounting surface. The present invention utilizes a single theodolite to achieve alignment of reflectors at different positions, and has the advantages of high alignment accuracy, ease of operation, and a wide range of applications.

The invention provides a double-linear-array high-speed auto-collimation small-angle measurement system. The double-linear-array high-speed auto-collimation small-angle measurement system comprises a shell cover plate, a light path supporting structure, a base and a sleeve. The shell cover plate is used for protecting main devices; the light path supporting structure is installed in the shell cover plate and used for installing and fixing various optical devices. The light path supporting structure is provided with a hardware circuit and a beam splitter prism; the hardware circuit comprises a power supply / communication circuit, a device driving circuit and a signal conditioning / acquisition circuit; the device driving circuit comprises a device driving circuit board and two charge couplers; the two charge couplers, the device driving circuit board and the signal conditioning / acquisition circuit are mounted on the upper cover plate; the light path supporting structure is provided with an LED lamp, a power supply / communication circuit and a beam splitter prism; one end of the sleeve is connected with the housing cover plate through the pedestal, and the other end is provided with the spherical objective lens. According to the invention, not only can a static large-range measurement task be completed, but also high-speed dynamic measurement can be completed.

This invention belongs to the field of three-degree-of-freedom pose measurement technology, and relates to a single-beam three-degree-of-freedom pose measurement method and device based on heterodyne interferometry and self-collimation. The measurement method includes the following steps: Step 1: A laser beam is split into two beams with a certain frequency difference; Step 2: In the self-collimation module, the laser is split into a first reference beam and a first beam; the first beam is modulated, reflected, and then modulated again to split into a first measurement beam and a second beam; the second beam is modulated to a first photoelectric detection module; Step 3: In the heterodyne interferometry optical path, the laser is split into a second reference beam and a third beam; the third beam is modulated, reflected, and then split into a second measurement beam and a fourth beam; the two reference beams are merged to form a first interference beam, and the two measurement beams are merged to form a second interference beam; Step 4: A circuit module acquires the angle and displacement; The measurement device includes an optomechanical module, a target under test, and a circuit module. Using the above scheme, displacement and angle are measured simultaneously.