Precise assembling and adjusting device and method for detector chip of imaging system

Abstract

The invention discloses precise assembling and adjusting device and method for a detector chip of an imaging system. The assembling and adjusting device comprises a movement control system, a detection system, an accessory structure and a computer; the movement control system is composed of a translation stage, a revolving stage and a tilting table and used for adjusting the spatial positions of a device to be detected and the detection system; the detection system is composed of an autocollimation and a telecentric digital microimaging system and used for measuring the angle and positional deviation of the device to be detected; and the compute is able to control the movement of the translation stage and record the position coordinates and can also be used for acquiring an image of the device to be detected from the telecentric digital microimaging system and analyzing and calculating. The assembling and adjusting method includes the assembling and adjusting of a reference mirror, the transmission of the angle and position of the detector chip, and the assembling and adjusting of the detector chip; the measurement precision of the angle and position respectively reaches second level and micro dimension during the assembling and adjusting; and the deviation of angle and position of the detector chip can be respectively less than 1 and 0.02mm after the assembling and adjusting.

Description

technical field [0001] The invention relates to an optical assembly and adjustment device, which can realize the mutual alignment among the optical lens, the detector chip and its auxiliary installation structure, thereby realizing the high-precision assembly and measurement of the imaging system. Background technique [0002] The two core components of the imaging system are the optical lens and the detector chip. In order to ensure the precise assembly between the optical lens and the detector chip, an auxiliary mounting structure is usually required, which is called the main structure. The main structure includes three high-precision processing surfaces perpendicular to each other, which will provide a mechanical reference for the assembly of the imaging system. But usually, for convenience, these mechanical datums will be transferred to a strictly vertical glass cube with all sides mounted on the main structure, called the datum mirror. [0003] The practical applicati...

AI Technical Summary

Problems solved by technology

However, there is currently no equipment dedicated to high-precision assembly between the components of the imaging system

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