The invention discloses a desktop type installation and adjustment platform for an
extreme ultraviolet coaxial optical
system and a method of the desktop type installation and adjustment platform, and belongs to the field of optical
system precision installation and adjustment devices.The installation and adjustment platform comprises a photoelectric auto-
collimator, an electric rotary table, an
image acquisition module, a
light source and a lens set adjustment mechanism, and the
optical axis of the photoelectric auto-
collimator coincides with the rotating shaft of the electric rotary table; the optical platform is fixed on the base and serves as a reference axis of the adjustment platform, the electric rotary table is fixed on the optical platform, the plane reflector is fixed on the surface of the electric rotary table, the photoelectric auto-
collimator is arranged on one side of the plane reflector, and the
image acquisition module is arranged between the plane reflector and the photoelectric auto-collimator. The traditional installation and adjustment scheme is limited in applicable optical
system and lacks flexibility and integration, but the installation and adjustment platform is an independent system with complete functions, integrates
optical path calibration, attitude regulation and control and
image analysis units, does not need external auxiliary equipment, can be flexibly arranged according to the relation between the aperture and the object image of the optical system to be installed and adjusted, and is convenient to install and adjust. And rapid adaptive precision adjustment is realized.