The utility model discloses a
wafer non-contact positioning platform device, which comprises a bottom plate, a first vertical plate, a second vertical plate, a first transverse plate and a second transverse plate, a centering platform is rotatably connected above the first transverse plate, a motor is connected below the middle of the centering platform, a lifting mechanism is arranged on the bottom plate, and a
laser displacement sensor is arranged on the second vertical plate; the centering platform comprises a base plate, a first connecting plate, a first positioning block, a second connecting plate and a second positioning block, and the ends, away from the base plate, of the first positioning block and the second positioning block are each of a step-shaped structure. The beneficial effects of the utility model are that edge searching or V-Notch port detection of the
wafer can be realized, the orientation of the
wafer can be rapidly determined, and the position of the wafer can be rapidly positioned; the positioning platform device is only in contact with the edge of the wafer in the orientation process and is not in direct contact with a wafer
chip, so that the scratch and abrasion risks of the wafer
chip can be effectively reduced, the wafer is not physically damaged, and the orientation quality of the wafer is ensured.