Novel apparatus used for film engraving and dotting of thin-film solar cell

Abstract

The invention relates to a new device used for scribing and pointing of a thin film solar cell. The device comprises a laser, a support pedestal, an automatic focusing control subsystem, an automatic photographing positioning subsystem, an optical platform, an industrial control computer, a power supply and a dynamic galvanometric scanning subsystem. The device is characterized in that a feeding mechanism is arranged on the optical platform, wherein, the support pedestal, the automatic focusing control subsystem and the automatic photographing positioning subsystem are arranged on one side surface of the optical platform. An X-Y-axis galvanometric scanning unit, a Z-axis front focusing unit and the laser are arranged in a beam of the support pedestal. The industrial control computer is respectively connected with the laser, the X-Y-axis galvanometric scanning unit, the Z-axis front focusing unit and the power supply by cables. The invention has the advantages of simple structure, standard process, low production cost, easy mass production, wide scanning range, small focusing spot, good consistency, automatic and accurate positioning, high working efficiency, and the like, thereby being capable of being widely applied in scribing, pointing and other production fields of amorphous silicon solar cells.

Description

technical field [0001] The invention relates to a laser marking device, in particular to a new device for film marking and dotting of thin-film solar cells. Background technique [0002] At present, laser processing technology has been widely used in the production process of amorphous silicon thin-film solar cells to achieve film engraving and dotting of cells. China Patent No. ZL200710072812 solar cell laser marking equipment uses an XY vibrating mirror and a special large-format X---Y table to mark cells. Although this method has a certain improvement in marking speed compared with the original one, and can mark solar thin film cells with large format and special graphics, it still needs the substrate of solar thin film cells to move on the mobile workbench, and the speed is bound to be limited by the large format. The movement speed of the worktable is limited, and due to the vibration of the worktable during the movement process, the engraved film and the dotted line w...

AI Technical Summary

Problems solved by technology

Although this method has a certain improvement in marking speed compared with the original one, and can mark solar thin film cells with large format and special graphics, it still needs the substrate of solar thin film cells to move on the mobile workbench, and the speed is bound to be limited by the large format. The movement speed of the worktable is limited, and due to the vibration of the worktable during the movement process, the engraved film and the dotted line will be uneven and unstable, and the large-format precision X---Y mobile workbench is in the whole marking equipment The cost will account for more than half of the cost, resulting in a high cost of marking a single substrate. In the large-format working state, the marking must be completed in blocks, and there will inevitably be problems of repeated lines and points. At the same time, the overall structure is relatively still complicated

However, if the normal focusing method is still used—that is, the focusing mirror is placed under (behind) the scanning lens, no zoom processing is performed. Due to the limitation of the diameter of the focusing mirror, at present, the maximum format can only be guaranteed to be 300mm*300mm. It is far lower than the requirements for the format of the engraved substrate, and because it cannot be processed by zooming, the marking quality of the position of the far angle and the position of the near point is inconsistent, and there are differences in laser power and spot size.

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