This invention belongs to the field of ultrasonic
transducer technology and discloses a
transceiver integrated
fiber optic all-optical ultrasonic probe and its fabrication method. The probe includes an
optical fiber (1), a capillary tube (2), a plano-concave diaphragm (4), and a photoacoustic conversion layer (5). One end of the plano-concave diaphragm is concave, and the other end is planar, forming a closed FP cavity (3) with the
optical fiber and capillary tube. The photoacoustic conversion layer can absorb the
laser beam energy of the excitation light and convert it into ultrasonic
waves, which are then emitted outwards to realize ultrasonic
wave transmission. At the same time, the photoacoustic conversion layer can receive ultrasonic wave echoes and deform the plano-concave diaphragm according to the strength of the ultrasonic wave echoes, causing the cavity length of the FP cavity to change, thereby realizing the function of receiving and detecting sound
waves. This invention utilizes a capillary tube and forms a plano-concave diaphragm at the end of the capillary tube, which on the one hand facilitates the
miniaturization of the probe, and on the other hand significantly improves the reflection contrast of the FP cavity, thereby enhancing the
detection performance.