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140results about "Converting sensor ouput using wave/particle radiation" patented technology

Cascade cooperative measurement method of electromagnetic ultrasonic thickness measurement module

The invention discloses a cascade cooperative measurement method for electromagnetic ultrasonic thickness measurement modules, which is characterized by comprising the following steps of: (1) forming a cascade measurement system by adopting a plurality of electromagnetic ultrasonic thickness measurement modules, and connecting the modules through cascade interfaces, the electromagnetic ultrasonic thickness measuring modules are sequentially defined as a first channel module, a second channel module,..., and an nth channel module along a cascade sequence; (2) the channel modules are sequentially staggered to enter an ultrasonic transmitting and receiving work cycle; and (3) transmitting trigger pulse signals at intervals by each channel module in a mode of gradually increasing interval time in an ultrasonic transmitting and receiving work period, and performing ultrasonic transmitting and receiving work. According to the cascade cooperative measurement method, cooperative measurement of multiple channel modules can be realized, the overall measurement efficiency can be improved while mutual interference of the channel modules can be avoided, and the cascade cooperative measurement method is adaptive to the multi-measurement-point high-speed scanning requirement of a large component.
Owner:GUANGDONG GOWORLD

Wireless passive three-signal sensor and preparation method thereof

The invention relates to a wireless passive three-signal sensor and a preparation method, and belongs to the technical field of sensor manufacturing, the wireless passive three-signal sensor comprises a piezoelectric substrate, the piezoelectric substrate is provided with a hydrogen sensitive film, a temperature sensitive film, a strain sensitive film, an IDT and a reflecting grating, the hydrogen sensitive film, the temperature sensitive film and the strain sensitive film are located on the surface of the piezoelectric substrate at intervals, and the IDT and the reflecting grating pass through the surfaces of the hydrogen sensitive film, the temperature sensitive film and the strain sensitive film and correspondingly adopt different IDT center frequencies and interdigital periods. According to the invention, synchronous monitoring of three parameters of temperature, strain and hydrogen can be realized in a wireless passive mode, and the system can be applied to various scenes requiring multi-parameter monitoring, thereby providing reliable technical support for monitoring in related fields.
Owner:SHANGHAI SPECIAL EQUIPMENT SUPERVISION & INSPECTION TECHNOLOGY RESEARCH INSTITUTE CO LTD +1

A method for manufacturing a flexible ultrasound probe

The application discloses a manufacturing method of a flexible ultrasonic probe and belongs to the technical field of sensors for agricultural machinery. The flexible ultrasonic probe comprises a lower substrate layer, a lower electrode layer, a lower adhesive layer B, a transducer layer, an upper adhesive layer A, an upper electrode layer and an upper substrate layer which are sequentially stacked. The manufacturing method comprises electrode layer manufacturing and transducer layer manufacturing. The electrode layer adopts a laser cutting plus one-time transfer technology, and compared with the magnetron sputtering plus two-time transfer technology of the prior art, the electrode layer processing speed is faster, and the cost is lower. The transducer layer also adopts a laser cutting technology, and compared with the diamond wire cutting of the prior art, the operation is simple, and the processing precision is high. The flexible ultrasonic probe manufactured by the application can detect the seed arranging state in a seed arranging tube and can also be applied to other material flow detection. Compared with the infrared detection of the prior art, the flexible ultrasonic probe has strong anti-interference ability, high detection precision and low total cost.
Owner:SANYA INSTITUTE OF NANJING AGRICULTURAL UNIVERSITY

Electronic device and method for fabricating a transducer in the electronic device

An electronic device is provided. The electronic device includes multiple transducer pixels. Each of the transducer pixels includes a sonic transducer, a demultiplexer electrically connected to the sonic transducer, a driving line electrically connected to the sonic transducer, a switching line electrically connected to the demultiplexer, and a reading line electrically connected to the demultiplexer. The driving line is used to provide a driving signal to the sonic transducer to emit sonic waves. The switching line is used to turn on the demultiplexer to output the sensing signal received by the sonic transducer to the reading line.
Owner:INNOLUX CORP

A device for indicating orientation of an object

Present disclosure discloses a device (100) for indicating orientation of an object (101). The device (100) includes a housing (1) configured to contain a fluid (2), which may be homogenously distributed along and / or across an internal volume of the housing (1). Further, the device (100) includes a source (3) configured to generate an electron beam to travel along and / or across a portion of the fluid (2) in the housing (1). The device (100) includes a control unit (5) coupled to the receiver (4) and one or more networking devices, to determine deflection of the electron beam from a normal condition to a deflected condition under presence of a magnetic field, and to hence determine displacement of the object (101) about the pitch / roll / yaw axes based on the deflected condition. With such configuration, the device (100) aids to reduce or eliminate complex techniques for determining orientation of object (101) at low cost.
Owner:SRINIVASAN TILAK

Flexible capacitive micromachined ultrasonic transducer arrays

An apparatus comprising an array of polymer-based capacitive micromachined ultrasonic transducers positioned on a substrate. The substrate may be at least substantially transparent to ionizing radiation, be flexible, and / or have walls positioned thereon to protect the transducers.
Owner:THE UNIV OF BRITISH COLUMBIA

Integrated system for driving and location recognition of mobile magnetic substances

The present disclosure relates to an integrated system for driving a magnetic body and recognizing the position thereof. The system includes a magnetic field generating unit having four electromagnetic coils radially spaced apart from each other by the same distance and a coil frame to which the electromagnetic coils are connected, an RF coil unit disposed in a through-hole included in the center of the coil frame, a driving unit orthogonal to the coil frame and connected to allow the coil frame to slide in one axial direction, and a processing unit configured to generate movement path information of the coil frame and desired current information of each of the electromagnetic coils.
Owner:KOREA INST OF MEDICAL MICROROBOTICS

Method for obtaining graphitized in-situ antenna by ablating diamond surface and application thereof

The application discloses a method for obtaining a graphitized in-situ antenna by ablation of a diamond surface and application thereof, and aims at solving problems of a current microwave antenna, such as great interference from external factors and poor system integration. The method for obtaining the graphitized in-situ antenna comprises the following steps: firstly, cleaning a diamond substrate; secondly, spin-coating a photoresist on the surface of the cleaned diamond substrate, performing photoetching according to an antenna pattern, and then immersing the photoresist in a developing solution to form a mask; opening a radio frequency power supply to input energy of 50-100 W to ignite plasma, and then opening a baffle to deposit a transition metal film; and finally, placing the diamond substrate into a quartz glass tube to perform vacuum sealing, and performing high-temperature heating treatment. The application further relates to a method for obtaining a graphitized in-situ antenna by laser ablation. The application obtains a graphitized antenna pattern by using a transition metal high-temperature catalytic etching or laser ablation on the surface of the diamond, and the antenna can better reduce interference from external factors and improve integration.
Owner:HARBIN INST OF TECH

Lens configuration for radar sensor assembly in hydraulic cylinders

A hydraulic cylinder assembly includes a cylinder body, a piston configured to slide within an interior of the cylinder body, and a cylinder head coupled to the cylinder body. The cylinder head includes a cavity, and a bore that extends between the cavity and the interior of the cylinder body. The hydraulic cylinder assembly includes a radar sensing unit disposed within the cavity. The radar sensing unit includes a radar signal emitter and a radar signal detector oriented respectively to emit and detect radar signals through the bore into the interior of the cylinder body. The hydraulic cylinder assembly includes a dielectric lens between the radar sensing unit and the interior of the cylinder body, the dielectric lens having a convex side facing the radar sensing unit and a planar side opposite the convex side facing the interior of the cylinder body.
Owner:PACOMA GMBH

Surface acoustic wave sensor working at constant temperature and preparation method thereof

The invention belongs to the technical field of sensors, and particularly relates to a surface acoustic wave sensor working at constant temperature and a preparation method thereof. The sensor comprises a heat dissipation layer, a thermoelectric refrigeration layer and a sensing layer, the heat dissipation layer serves as a base of the whole surface acoustic wave sensor and has high heat conduction performance; the thermoelectric refrigeration layer adopts a semiconductor refrigerator, the upper surface of the thermoelectric refrigeration layer is connected with the heat dissipation layer through heat-conducting silicone grease or in a welding manner, and the lower surface of the thermoelectric refrigeration layer is connected with the sensing layer through heat-conducting silicone grease or in a welding manner; the sensing layer comprises a composite functional substrate, and an SAW sensing unit and a temperature sensing unit which are integrated on the composite functional substrate; the device is compact in structure, high in integration level, high in temperature control precision, fast in thermal response and uniform in temperature field, and has a good application prospect.
Owner:CHINA ELECTRONICS TECH GRP NO 26 RES INST

Microwave sensor based on SSPP and movable resonator and measuring method thereof

The invention discloses a microwave sensor based on SSPP and a movable resonator and a measuring method of the microwave sensor. The microwave sensor is used for simultaneously and independently measuring the dielectric constant and biaxial linear displacement of a material. The sensor adopts a double-layer PCB structure; the lower layer PCB is integrated with an SSPP structure to form a low-pass filter, and the cut-off frequency of the low-pass filter is sensitive to the dielectric constant of a material to be detected; the upper PCB serves as a pure dielectric layer, limits two displacement areas and guides the two sliding blocks embedded with the independent ring resonators to slide. The two ring resonators generate two independent notch frequencies in a passband of the filter, and the reflection phases of the two ring resonators are in linear relation with the displacement of the corresponding sliding blocks respectively. The core of the invention lies in that material sensing and double-displacement sensing are completely decoupled in electromagnetic response and do not interfere with each other, and multi-parameter synchronous measurement on a single compact device is realized; the device can effectively achieve the measurement of the dielectric constant and two independent linear displacements of the material at the same time, achieves the complete decoupling of a sensing signal, and avoids the problems in the aspects of cross sensitivity and the like.
Owner:LIXIN TECH CO LTD

Coating thickness and elastic modulus synchronous measurement method based on double-frequency surface acoustic wave frequency characteristics

The invention discloses a coating thickness and elastic modulus synchronous measurement method based on double-frequency surface acoustic wave frequency characteristics, and belongs to the technical field of measurement. A coating thickness-elastic modulus parameter space is constructed in a reasonable measurement range; for each point in the parameter space, generating a theoretical frequency characteristic distribution map of the parameter space; the surface acoustic wave on the surface of the coating is excited through the linear array slit grating, and a synthetic error function is constructed; traversing the parameter space to finally generate a matching error distribution diagram of the parameter space; the minimum value point of the error function in the distribution diagram corresponds to the optimal coating thickness and elastic modulus inversion result. The method is used for solving the problems that in the prior art, a narrowband method is single in parameter, and a broadband method needs multi-point scanning.
Owner:HARBIN INST OF TECH

Matrix array detector having multiple groups of driver modules and method for implementing the same

To provide a matrix array detector capable of reading out consecutive pixel rows or reading out a group of a plurality of pixel rows, and a usage method thereof.SOLUTION: A pixel array is matrixed along the rows and columns to generate a signal. Row conductors L(i), L(i+1), L(i+2), and L(i+3) each drive one row of pixels. Each driver module (SR_A) of a first group (A) sends a selection signal (Out_A) to one of the row conductors of the first group. Each driver module (SR_B) of a second group (B) sends a selection signal (Out_B) to one of the row conductors of the second group. The row conductors of the first and second groups are interlaced.SELECTED DRAWING: Figure 3
Owner:トリクセル

Multi-mode microwave waveguide blade sensing system

A multi-mode microwave waveguide blade sensing system (500) includes a transceiver, a waveguide (174b), and a probe sensor (176). The transceiver generates a microwave energy signal having a first waveguide mode and a different second waveguide mode. The waveguide (174b) includes a first end that receives the microwave energy signal. The probe sensor (176) includes a proximate end (178a) that receives the microwave energy signal from the transceiver and a distal end (178b) including an aperture that outputs the microwave energy signal. The probe sensor (176) directs the microwave energy signal at a first direction based on the first waveguide mode and a different second direction different based on the second waveguide mode. The probe sensor (176) receives different levels of reflected microwave energy based at least in part on a location at which the at least one microwave energy signal is reflected from the machine.
Owner:RTX CORP

Ultrasonic multivariable process transmitter

An ultrasonic multivariable process transmitter (4) includes an ultrasonic transmitter (68) configured to transmit an input ultrasonic vibration pulse into a proximal surface (24) of a wall. The pulse propagates through the wall and reflects from a distal surface (32) to form a reflected output ultrasonic vibration pulse. An ultrasonic receiver (70) receives an ultrasonic vibration pulse at the proximal surface (24). Processing circuitry (62) correlates the received reflected output ultrasonic vibration pulses with a change in the surface of the wall. The received pulse is further a function of a process variable of a process related to a process fluid contacting a surface of the wall. An output indicative of the process variable of the process is provided.
Owner:ROSEMOUNT INC

Position measuring system for a movable element using RFID

PCT designated stageWO2026052352A1Converting sensor ouput using wave/particle radiationAltering/correcting law of variationTelecommunicationsRemote sensing
The invention relates to a method for determining a position of a first element relative to a second element, the two elements moving relative to one another. In this method, the position is determined in situ with the aid of an RFID system using an in situ RFID reading device on the first element and a number of activatable transponders on the second element. The transponders are each calibrated separately beforehand by the in situ RFID reading device or an ex situ RFID reading device with their respective positions on the second element, and the position data are linked to their identification data. The transponders run through a receiving and reading region of the in situ RFID reader and transmit their identification and position data after being activated. An algorithm for controlling the RFID system and for determining the positions in situ is programmed in a control device. The transmitted identification data and position data are used to determine the position of the in situ RFID reader on the first element relative to the second element by means of a calculation rule contained in the algorithm.
Owner:ZF CV SYST GLOBAL GMBH

A transceiver integrated optical fiber full-optical ultrasonic probe and a preparation method thereof

This invention belongs to the field of ultrasonic transducer technology and discloses a transceiver integrated fiber optic all-optical ultrasonic probe and its fabrication method. The probe includes an optical fiber (1), a capillary tube (2), a plano-concave diaphragm (4), and a photoacoustic conversion layer (5). One end of the plano-concave diaphragm is concave, and the other end is planar, forming a closed FP cavity (3) with the optical fiber and capillary tube. The photoacoustic conversion layer can absorb the laser beam energy of the excitation light and convert it into ultrasonic waves, which are then emitted outwards to realize ultrasonic wave transmission. At the same time, the photoacoustic conversion layer can receive ultrasonic wave echoes and deform the plano-concave diaphragm according to the strength of the ultrasonic wave echoes, causing the cavity length of the FP cavity to change, thereby realizing the function of receiving and detecting sound waves. This invention utilizes a capillary tube and forms a plano-concave diaphragm at the end of the capillary tube, which on the one hand facilitates the miniaturization of the probe, and on the other hand significantly improves the reflection contrast of the FP cavity, thereby enhancing the detection performance.
Owner:HUAZHONG UNIV OF SCI & TECH

Bulk acoustic wave sensor and method of manufacturing the same

The application provides a bulk acoustic wave sensor manufacturing method, comprising the following steps: providing a substrate and forming a first Bragg reflection layer on the substrate; sequentially forming a lower electrode, a piezoelectric layer and an upper electrode on the first Bragg reflection layer, the upper electrode, the piezoelectric layer, the lower electrode and the first Bragg reflection layer form an overlapping area in the sensor thickness direction, the lower electrode comprises a lower electrode main body part and a lower electrode frame part, the lower electrode frame part is formed on the lower electrode main body part and located at the edge of the overlapping area, wherein the lower electrode frame part comprises a first protruding part and / or a first recessed part; forming a second Bragg reflection layer on the upper electrode. The application also provides a bulk acoustic wave sensor. The application can improve the Q value, sensitivity of the device and simplify the manufacturing process.
Owner:SUZHOU HUNTERSUN ELECTRONICS CO LTD

Hybrid displacement sensor

A hybrid displacement sensor (100) includes a waveguide (106), a target magnet (110) and a pickup (108). The waveguide includes a longitudinal axis (111), an input end (138) and a return end (134). The target magnet is configured to move along the longitudinal axis relative to the waveguide. The pickup includes a magnetostrictive sensing element (120A) located adjacent to the input end, and a plurality of Hall-effect sensing elements (120B) distributed along the longitudinal axis.
Owner:TEMPOSONICS LLC

A method for preparing a surface acoustic wave sensor with improved adhesion of the gate electrode

The application belongs to the technical field of electrical sensors, and particularly relates to a preparation method of a surface acoustic wave sensor for improving the binding force of a gate electrode, comprising the following steps: cleaning a lithium niobate substrate, drying the lithium niobate substrate to obtain a pretreated lithium niobate substrate; spin-coating 3510T photoresist on the pretreated lithium niobate substrate, and then performing a pre-baking treatment at 100-120 DEG C; performing photoetching on the photoresist of the substrate after the pre-baking treatment, and then performing exposure and development treatment; performing post-baking treatment on the substrate after the development treatment at 120-140 DEG C; spin-coating photoresist on one side of the substrate after the post-baking treatment, and magnetron sputtering a platinum-gold layer; slowly heating the substrate after the magnetron sputtering treatment to 450-500 DEG C to perform heat treatment; removing the photoresist in the substrate after the heat treatment to form a platinum-gold gate electrode, and obtaining the surface acoustic wave sensor. The application reduces the cost and improves the stability of electrode material adhesion, and has a wide application prospect.
Owner:XI AN JIAOTONG UNIV

Piezoelectric stack drive of a vibration limit switch with end-face mounting

Vibration sensor (100) with a diaphragm (90) that can be set into vibration and a mounting arrangement (10) for connecting the diaphragm (90) to a drive unit (11) such that vibrations of the drive unit (11) are transmitted to the diaphragm (90) and vibrations of the diaphragm (90) to the drive unit (11), wherein the mounting arrangement (10) is designed as a cylindrical sleeve which is attached at one end indirectly or directly to the diaphragm (90) or to an element connected to the diaphragm (90) and has at the other end an insertion opening (14) for the drive unit (11) characterized in that the diaphragm (90) is attached circumferentially to a process connection (80) and the mounting arrangement (10) engages the process connection (80) at least section by section in the radial direction (R) in the circumferential direction.
Owner:VEGA GRIESHABER GMBH & CO

Detection system and sensing device thereof

The invention discloses a detection system and a sensing device thereof, and is applied to the technical field of sensors. The sending module is used for sending the excitation signal output by the processor to the delayed surface acoustic wave sensor; the identification module is used for receiving an echo signal which is fed back by the delay type surface acoustic wave sensor and corresponds to the excitation signal; the delay processing module is used for generating an output signal of the delay processing module when the processor outputs the trigger signal, and closing the output signal of the delay processing module when receiving the echo signal output by the identification module; the processor is used for outputting a trigger signal after the excitation signal is output and when the timing duration reaches a preset first duration; and the processor is also used for determining the duration of the output signal of the delay processing module and determining the detection value of the delayed surface acoustic wave sensor based on the duration. By applying the scheme of the invention, the resolution can be improved, and the detection error can be reduced.
Owner:TANGZHI SCI & TECH HUNAN DEV CO LTD +1

Device for determining the position of two elements moving telescopically relative to one another

The invention relates to a device for determining the position of a rod-shaped or tubular first element in relation to a second element which surrounds the first element in the manner of a tube or sleeve, the two elements moving telescopically relative to one another in the longitudinal direction thereof, wherein the position is determined with the aid of an RFID system. In the RFID system, a number of transponders are provided on the first element and an RFID reader in the form of a transceiver with a reader antenna is provided on the second element, each of the transponders having a transponder antenna, and the transponder antennas and the reader antenna being designed for a communication between the RFID reader and the transponders. During the telescoping movement, the transponders pass through the receiving and reading range of the RFID reader and can be activated. An algorithm is stored in a programmable control device which communicates with the RFID reader or is integrated therein, the algorithm determining the position of the RFID reader on the second element relative to the first element from the identification data / position data of the respective activated transponder on the first element. The reader antenna provided on the second element is situated transversely to the telescoping movement and extends at least partly over the circumference of the second element.
Owner:ZF CV SYST GLOBAL GMBH

Novel vibrating wire acquisition terminal

The utility model discloses a novel vibrating wire acquisition terminal in the technical field of vibrating wire acquisition, which comprises a shell of the vibrating wire acquisition terminal, a cover plate is mounted at the top of the shell through a mounting piece, an antenna for enhancing signals is mounted on one side of the shell in a penetrating manner, a battery piece is mounted on the inner side of the shell through a fixing piece, and the battery piece is connected with the vibrating wire acquisition terminal. The fixing piece is used for installing, fixing, disassembling and overhauling the battery piece, the cover plate and the top of the shell are closed or separated in a sliding mode, then the cover plate is locked and fixed through the installing piece, other tools are not needed, and an operator can conveniently disassemble, overhaul or replace electronic components and the battery piece in the shell. The battery piece is clamped and fixed through the fixing piece in the shell, and the battery piece can be detached to be taken out for overhaul or replacement by unlocking the fixing piece.
Owner:SICHUAN HUIKANG ZHIGAN TECHNOLOGY CO LTD

Polyaniline-based multi-mode thermoelectric sensor for monitoring environmental hazards and vital signs

The invention discloses a polyaniline-based multi-mode thermoelectric sensor for monitoring environmental hazards and vital signs. The sensor comprises a composite thermoelectric functional layer composed of polyaniline and a carbon material, the carbon material is used as a flexible conductive substrate, and polyaniline grows in situ on the carbon material in an electrochemical deposition mode to form a stable polyaniline / carbon composite structure. Based on the Seebeck effect of the composite material, the self-powered temperature sensing of the environment temperature difference is realized; meanwhile, the high specific surface area of the carbon material and the resistance change characteristic caused by stress of the carbon material are utilized to realize a pressure sensing function; the reversible doping / dedoping behavior of polyaniline is further combined, so that the detection of gas and pH environment is realized. The sensor realizes cooperative monitoring of multiple parameters such as temperature, pressure and chemical environment in a single material system, has the characteristics of simple structure, good flexibility and self power supply, and is suitable for the fields of complex environment monitoring and vital sign perception.
Owner:NANJING TECH UNIV

Ultrasonic probe self-adaptive clamping detection device based on adsorption type workpiece and detection method of ultrasonic probe self-adaptive clamping detection device

The invention discloses an ultrasonic probe self-adaptive clamping detection device based on an adsorption type workpiece, the ultrasonic probe self-adaptive clamping detection device comprises an ultrasonic detector, an ultrasonic probe and a probe clamping mechanism, the probe clamping mechanism comprises a clamp for clamping the probe and a tool shell, and the clamp is clamped on the circumferential outer side of the ultrasonic probe; the tool shell is arranged on the outer side of the clamp and can slide up and down relative to the clamp, a magnetic attraction wheel is arranged on the tool shell so that the tool shell can be attracted to the surface of a workpiece to be detected, the clamp is provided with a fixing mechanism, and an ultrasonic probe is clamped on the inner side of the clamp through the fixing mechanism. According to the device and the method disclosed by the invention, the technical problems of poor stability, non-uniform attaching force, single applicability, complex operation and the like in the traditional ultrasonic probe clamping process are solved.
Owner:HARBIN ELECTRIC CORP QINHUANGDAO HEAVY EQUIP

Device for determining the position of two elements moving telescoping relative to each other

In a device for determining the position of a rod- or tube-shaped first element relative to a second element that surrounds the first element in a tube- or sleeve-like manner, wherein both elements move telescopically relative to each other in their longitudinal direction, the position is determined using an RFID system. The RFID system includes a number of transponders on the first element and an RFID reader, configured as a transmitter-receiver with a reader antenna, on the second element. Each transponder has its own antenna, and both the transponder antenna and the reader antenna are configured for communication between the RFID reader and the transponders. During their telescoping movement, the transponders pass through the reception and read range of the RFID reader and can be activated.A programmable control unit, communicating with or integrated into the RFID reader, contains an algorithm that uses the identification / position data of the respective activated transponder on the first element to determine the relative position of the RFID reader on the second element. The reader antenna on the second element is positioned perpendicular to its telescoping movement and extends at least partially around the circumference of the second element.
Owner:ZF CV SYST GLOBAL GMBH

FPC (Flexible Printed Circuit) wire rod and ultrasonic sensor applying same

The utility model relates to an FPC wire rod and an ultrasonic sensor using the same, and relates to the sensor technology field, the FPC wire rod comprises a flat FPC wire rod body, the FPC wire rod body comprises at least one first wire rod body, each first wire rod body is provided with a first welding spot and a second welding spot which are arranged at intervals, and the first welding spot and the second welding spot are arranged at intervals. The first welding spot can be welded with a positive electrode or a negative electrode of a piezoelectric ceramic vibrator, the second welding spot is located at one end of the first wire body, and a conductive section capable of enabling the first welding spot and the second welding spot to be electrically connected is arranged between the first welding spot and the second welding spot. Therefore, the constraint on the piezoelectric ceramic vibrator is reduced, the overall thickness of the piezoelectric ceramic vibrator is reduced, and the sensitivity upper limit of the sensor is improved.
Owner:中山市高灵科技有限公司

Apparatus including a chamber and a sensor and a method of using the apparatus

An apparatus can include a chamber, a sensor, and a controller. The chamber can include a processing zone, wherein the chamber is adapted to support a workpiece along a substrate support plane. The sensor can be adapted to receive a radiation beam adapted to pass through the processing zone and generate a signal in response to receiving the radiation beam. The radiation beam can propagate along a line that is at an acute angle relative to the substrate support plane, and the sensor is outside the processing zone. The controller can be adapted to receive the signal and determine information regarding a position of the workpiece in response to receiving the signal. A method of manufacturing an electronic device can use the apparatus to ensure a workpiece is properly positioned while the workpiece is within a processing chamber.
Owner:CANON KK

Flexible surface acoustic wave sensor preparation method and flexible surface acoustic wave sensor

The invention discloses a flexible surface acoustic wave sensor preparation method and a flexible surface acoustic wave sensor, and the method comprises the steps: obtaining three substrate layers, and forming a cavity which penetrates through a second substrate layer in the thickness direction of the second substrate layer in the second substrate layer; the first substrate layer and the second substrate layer are stacked on the two sides of the second substrate layer respectively, and the cavity is filled with a heat volatilization material; the first substrate layer, the second substrate layer and the third substrate layer are laminated, and the high-temperature-resistant flexible substrate is obtained; depositing a piezoelectric film on the first surface of the high-temperature-resistant flexible substrate; and preparing the surface acoustic wave sensor on the piezoelectric film, and heating the high-temperature-resistant flexible substrate to volatilize the thermal volatilization material in the cavity. The flexible surface acoustic wave sensor is a sensing device prepared by the method. According to the invention, the high-temperature test requirement of the special-shaped component can be met, and the processing quality is ensured.
Owner:ZHONGBEI UNIV