50 results about "Surface acoustic wave sensor" patented technology

A method for fabricating a sensor device that includes an integrated sensor assembly having a surface acoustic wave (SAW) sensor disposed on a piezoelectric substrate. The SAW sensor is adapted to measure an environmental condition of an environment in response to an RF signal. The SAW sensor includes an interdigitated transducer (IDT) formed on a substrate having at least a layer of a piezoelectric material. The SAW sensor includes either one or more SAW reflectors of a second IDT formed on the piezoelectric material. The SAW sensor further includes an RF antenna, a matching circuit and a waveguide are formed on the piezoelectric material. The SAW sensor and the RF antenna are integrated with one another on the piezoelectric material.

The invention relates to an environment-friendly switch vacuum arc-extinguishing chamber contact temperature monitoring method and system based on surface acoustic wave array sensing and inversion, and belongs to the field of electrical monitoring. In order to solve the problem that in the prior art, non-intrusive and high-reliability monitoring of the contact temperature of the vacuum arc-extinguishing chamber is difficult to realize due to vacuum sealing and metal shielding, the technical scheme of the invention is as follows: an acoustic surface wave sensor array comprising three or more sensing nodes is constructed on the outer wall of the vacuum arc-extinguishing chamber, and the longitudinal temperature gradient distribution of the outer wall is captured in a lossless manner. A narrow-band flat-plate reader antenna is adopted to realize array signal parallel transmission with a high signal-to-noise ratio, and the steady-state temperature of an internal contact is accurately inverted through a pre-trained physical information neural network (PINN) model by utilizing multi-source data fusion and array characteristics. According to the method, a non-intrusive monitoring function from external sensing to internal deduction is realized, the problem that the temperature of the contact cannot be measured in a high-voltage closed environment is solved, and a key technical support is provided for safe operation of environment-friendly switch equipment.

This invention relates to the field of equipment condition monitoring technology, and in particular to a health status monitoring system and method for heating station equipment. The method includes the following steps: acquiring structural data of the heating station equipment; performing topological analysis on the heating station based on the structural data to generate topological data of the heating station equipment; using the topological data to perform virtual simulation modeling on the structural data of the heating station equipment to generate a three-dimensional model of the heating station equipment; extracting the heat exchanger region from the three-dimensional model of the heating station equipment and performing heat exchange pipeline path analysis on the heat exchanger region to generate heat exchange flow data; and acquiring surface acoustic wave sensor data based on the heat exchanger region to obtain surface acoustic wave group velocity change data. This invention comprehensively improves the accuracy of monitoring and risk warning capabilities for the health status of heating station equipment through structural topology modeling, refined heat exchange region monitoring, dynamic damage accumulation analysis, and closed-loop operation optimization.

The present application belongs to the technical field of magnetic suspension motor, and discloses a magnetic suspension bearing gap online measurement device and a compensation method. The method comprises the following steps: deploying a quantum and eddy current sensor array on the inner wall of a magnetic suspension bearing stator, and correspondingly arranging a surface acoustic wave sensor inside the stator. A scanning signal is injected into the eddy current array, real-time complex impedance is collected, and a differential signal with a baseline is calculated. Real-time characteristic fingerprints are obtained by analysis, and phase changes are determined by comparing a phase change fingerprint library. When the phase changes, a quantum sensor is used to calculate a reference deviation, generate a local space correction field, and obtain a correction amount of each eddy current sensor by interpolation. The surface acoustic wave sensor collects signals to analyze stress and temperature gradient, establishes a feedforward compensation model to calculate a gap compensation amount, and obtains a corrected gap value in combination with the correction amount. The present application realizes the real-time, accuracy and stability of gap data under dynamic operation, avoids rotor instability, equipment vibration intensification and bearing wear caused by inaccurate gap monitoring, and ensures long-term reliable operation of the magnetic suspension bearing.

The utility model discloses a fan gearbox planet wheel bearing temperature measuring device based on a surface acoustic wave sensor, which comprises a box body, a pin shaft, a surface acoustic wave sensor, an antenna and a signal processing unit, and is characterized in that at least two first mounting grooves for mounting the surface acoustic wave sensor are formed in the peripheral surface of the pin shaft; each surface acoustic wave sensor is mounted in the corresponding first mounting groove, the temperature measuring surface of each surface acoustic wave sensor is in direct contact with a bearing inner ring of the gearbox, a second mounting groove for mounting an antenna is formed in the pin shaft, and the second mounting groove is communicated with the first mounting grooves; the antenna is arranged on the box body and electrically connected with each surface acoustic wave sensor, each surface acoustic wave sensor communicates with the signal processing unit through the antenna, and the signal processing unit is arranged on the box body and electrically connected with a monitoring system of the fan. The planet wheel bearing temperature measuring device can effectively solve the problems that an existing planet wheel bearing temperature measuring device is complex in installation, greatly affected by the environment, low in measuring precision and the like.

The invention belongs to the technical field of sensors, and particularly relates to a surface acoustic wave sensor working at constant temperature and a preparation method thereof. The sensor comprises a heat dissipation layer, a thermoelectric refrigeration layer and a sensing layer, the heat dissipation layer serves as a base of the whole surface acoustic wave sensor and has high heat conduction performance; the thermoelectric refrigeration layer adopts a semiconductor refrigerator, the upper surface of the thermoelectric refrigeration layer is connected with the heat dissipation layer through heat-conducting silicone grease or in a welding manner, and the lower surface of the thermoelectric refrigeration layer is connected with the sensing layer through heat-conducting silicone grease or in a welding manner; the sensing layer comprises a composite functional substrate, and an SAW sensing unit and a temperature sensing unit which are integrated on the composite functional substrate; the device is compact in structure, high in integration level, high in temperature control precision, fast in thermal response and uniform in temperature field, and has a good application prospect.

An acoustic wave sensor device comprises a first interdigitated transducer, a first reflection structure, a second reflection structure, a first resonance cavity comprising a first upper surface and formed between the first interdigitated transducer and the first reflection structure, and a second resonance cavity comprising a second upper surface and formed between the first interdigitated transducer and the second reflection structure. At least one of the first and second upper surfaces is covered at least partly by a metalization layer or a passivation layer. The present invention relates also to an acoustic wave sensor assembly.

The application discloses a kind of micro material analysis method and the multi-band surface acoustic wave sensor used therein.The micro material analysis method includes the following steps: one, the material to be measured is placed in the accommodating cavity.Two, a modulated signal is applied to one of the interdigital electrodes.The modulated signal is obtained by superimposing n sinusoidal signals with different frequencies;the receiving signal of the other interdigital electrode is collected.The phase difference between the modulated signal and the receiving signal is extracted respectively.Three, the n phase differences obtained in step two are substituted into the phase difference-Young's modulus relationship curve corresponding to different frequencies respectively, and n Young's modulus estimates are obtained.According to the n Young's modulus estimates, the deformation resistance of the material to be measured is determined.The application introduces a surface wave sensor into the measurement of Young's modulus of micro materials, and uses the phase difference corresponding to different frequencies between two interdigital electrodes to realize quantitative analysis of micro materials.

The application belongs to the technical field of electrical sensors, and particularly relates to a preparation method of a surface acoustic wave sensor for improving the binding force of a gate electrode, comprising the following steps: cleaning a lithium niobate substrate, drying the lithium niobate substrate to obtain a pretreated lithium niobate substrate; spin-coating 3510T photoresist on the pretreated lithium niobate substrate, and then performing a pre-baking treatment at 100-120 DEG C; performing photoetching on the photoresist of the substrate after the pre-baking treatment, and then performing exposure and development treatment; performing post-baking treatment on the substrate after the development treatment at 120-140 DEG C; spin-coating photoresist on one side of the substrate after the post-baking treatment, and magnetron sputtering a platinum-gold layer; slowly heating the substrate after the magnetron sputtering treatment to 450-500 DEG C to perform heat treatment; removing the photoresist in the substrate after the heat treatment to form a platinum-gold gate electrode, and obtaining the surface acoustic wave sensor. The application reduces the cost and improves the stability of electrode material adhesion, and has a wide application prospect.

The invention discloses equipment and a method for monitoring air environment pollution of factories damaged by occupational diseases, belongs to the technical field of air environment monitoring, and solves the problems that the toxicity of composite pollutants formed by quenching oil mist and metal dust in heat treatment and fine grinding workshops of bearing manufacturers is multiplied, sampling distortion is caused by oil mist interference detection and workshop pollutant retention areas, and the detection accuracy is low. And finally, the detection report reaches the standard falsely. Comprising a sensor array module and a data processing module, and the sensor array module comprises a quartz crystal microbalance array module, a multi-wavelength optical sensor array module, a broadband impedance sensor array module and a surface acoustic wave sensor array module. According to the invention, through synchronous acquisition of multi-modal sensor data, real-time analysis and processing, quantification of pollutant carrier effect, fusion of multi-source information, accurate identification of pollutant components, assessment of health risk level and automatic generation of early warning signals, comprehensive and accurate monitoring and risk early warning of composite pollutants in a factory environment are realized.

The invention discloses a detection system and a sensing device thereof, and is applied to the technical field of sensors. The sending module is used for sending the excitation signal output by the processor to the delayed surface acoustic wave sensor; the identification module is used for receiving an echo signal which is fed back by the delay type surface acoustic wave sensor and corresponds to the excitation signal; the delay processing module is used for generating an output signal of the delay processing module when the processor outputs the trigger signal, and closing the output signal of the delay processing module when receiving the echo signal output by the identification module; the processor is used for outputting a trigger signal after the excitation signal is output and when the timing duration reaches a preset first duration; and the processor is also used for determining the duration of the output signal of the delay processing module and determining the detection value of the delayed surface acoustic wave sensor based on the duration. By applying the scheme of the invention, the resolution can be improved, and the detection error can be reduced.

The invention discloses a flexible surface acoustic wave sensor preparation method and a flexible surface acoustic wave sensor, and the method comprises the steps: obtaining three substrate layers, and forming a cavity which penetrates through a second substrate layer in the thickness direction of the second substrate layer in the second substrate layer; the first substrate layer and the second substrate layer are stacked on the two sides of the second substrate layer respectively, and the cavity is filled with a heat volatilization material; the first substrate layer, the second substrate layer and the third substrate layer are laminated, and the high-temperature-resistant flexible substrate is obtained; depositing a piezoelectric film on the first surface of the high-temperature-resistant flexible substrate; and preparing the surface acoustic wave sensor on the piezoelectric film, and heating the high-temperature-resistant flexible substrate to volatilize the thermal volatilization material in the cavity. The flexible surface acoustic wave sensor is a sensing device prepared by the method. According to the invention, the high-temperature test requirement of the special-shaped component can be met, and the processing quality is ensured.

The application provides a surface acoustic wave sensor rapid query method and system. The method comprises: generating a query signal covering a preset query frequency band; sending the query signal to a surface acoustic wave sensor and receiving a primary echo output by the surface acoustic wave sensor after being excited by the linear frequency modulation query signal; performing time reversal processing on the primary echo to construct a secondary transmission signal; sending the secondary transmission signal to the surface acoustic wave sensor and receiving a secondary echo output by the surface acoustic wave sensor after being excited by the secondary transmission signal; and performing frequency domain processing on the secondary echo to obtain a resonance frequency estimation value of the surface acoustic wave sensor. The application effectively solves the technical problems of frequency mismatch, echo weakening and the need for multi-frequency point repeated scanning when the resonance frequency is unknown or drifts in the prior art, realizes wideband rapid query, and still maintains full-band effective coverage under the condition of uncertain resonance frequency.

The application discloses a wireless wafer temperature measuring system and a temperature measuring method, and relates to the technical field of semiconductor manufacturing. The wireless wafer temperature measuring system comprises a temperature measuring device and a signal control and processing device. The temperature measuring device comprises two wafers, an array of surface acoustic wave sensors and a first antenna. The signal control and processing device comprises a second antenna, an output unit, a radio frequency signal generator and a signal demodulator. The radio frequency signal generator is used for sequentially transmitting excitation signals with different frequencies to each surface acoustic wave sensor through the antenna. The signal demodulator is used for sequentially receiving echo signals of each surface acoustic wave sensor through the antenna, and determining the temperature of the position corresponding to each surface acoustic wave sensor according to the frequency difference between the echo signals and the excitation signals and the mapping relationship between the preset frequency difference and the temperature. The output unit is used for generating a temperature field image according to the temperature of the position corresponding to each surface acoustic wave sensor and displaying the temperature field image. The system can continuously and real-timely measure the temperature, and greatly improves the production efficiency.

The present application relates to battery detection technical field, disclose a kind of patch type battery bulge monitoring device, method and battery structure, comprising: flexible substrate, passive wireless type surface acoustic wave sensor and electrical lead structure;The side of the flexible substrate is used to adhere on the surface of the metal shell of the battery to be measured;The other side of the flexible substrate is closely attached with the passive wireless type surface acoustic wave sensor;The electrical lead structure is located at the side of the passive wireless type surface acoustic wave sensor away from the flexible substrate, and the electrical lead structure is used to feedback the monitoring result of the passive wireless type surface acoustic wave sensor to the outside world;It can realize the real-time accurate monitoring of passive wireless stress-strain information generated by battery bulge.

The invention discloses a method for determining the resonant frequency of a surface acoustic wave temperature sensor, and the method comprises the following steps: selecting a plurality of different frequency points in a working frequency range of the surface acoustic wave temperature sensor to transmit excitation signals, and obtaining difference frequency signals processed by a circuit, the difference frequency signal frequency value is the difference value between the excitation signal frequency value and the resonant frequency at the current temperature; screening the difference frequency signal, and reserving a signal with high and stable signal strength as a screened difference frequency signal; independently calculating the screened difference frequency signals to respectively obtain corresponding resonant frequencies at the current temperature; and averaging the resonant frequency, wherein the average value is the target resonant frequency at the current temperature. According to the resonant frequency obtained by the method and the device, the randomness and instability of measurement of a single frequency point are avoided, the influence of unstable signals and weak signals is eliminated, and the stability of the target resonant frequency is improved.

The invention provides a multi-parameter surface acoustic wave sensor based on microstructure regulation and control, and relates to the technical field of surface acoustic wave sensors, the sensor comprises a gradient nano-composite structure, a periodic microporous structure, a multi-parameter sensing unit and antenna integrated module, and components and orientation gradient structures of a gradient nano-composite layer, the high temperature resistance and acoustic performance of the material are improved; the periodic microporous structure disperses thermal stress, regulates and controls the sound field, and reduces the propagation attenuation of the surface acoustic wave. The multi-parameter sensing unit integrates a temperature sensing unit, a pressure sensing unit and a strain sensing unit, accurate monitoring and decoupling are achieved, and the measurement error is small. The flexible substrate is matched with the curved surface of the special-shaped component for installation, the antenna integrated module is high in signal transmission efficiency and good in stability at high temperature after being optimized, the manufacturing method adopts mature MEMS processes such as photoetching and etching, compatibility is high, batch production is easy, the problem of multi-parameter monitoring of the special-shaped component in the severe environment is effectively solved, and wide application prospects are achieved.

The invention discloses a frequency-adjustable bandwidth micro flexible surface acoustic wave sensor and a design and preparation method thereof. Structural design parameters and a structural design range are selected according to structural characteristics of an SAW sensor; structural design parameters, a substrate material and an electrode material are used as optimization objects, eigenvalue quality factors corresponding to all step length nodes of to-be-optimized parameters are obtained through finite element simulation calculation, a proper function fitting method is selected, function fitting is conducted on quality factors corresponding to the to-be-optimized parameters, and the quality factors corresponding to the to-be-optimized parameters are obtained; obtaining a fitting function of the to-be-optimized parameters; and optimizing the fitting function of the plurality of to-be-optimized parameters based on a multi-parameter particle swarm optimization algorithm to obtain optimized structural design parameters of the SAW sensor. A flexible substrate structure is prepared by adopting a high-precision electric field driven spray deposition 3D printing technology, and the whole SAW sensor structure is prepared by utilizing a high-precision photoetching technology. The problems that an existing SAW sensor is narrow in signal resonant frequency, large in size and poor in flexibility are solved, the stability of the SAW sensor in a complex environment is improved, and the measurement range of the SAW sensor in the complex environment is widened.

The invention discloses an impact vibration resistant temperature compensation type surface acoustic wave sensor, and relates to the field of information detection, and the impact vibration resistant temperature compensation type surface acoustic wave sensor comprises a housing which is used for employing a double-layer structure, forming double protection, and effectively resisting external impact; the buffer layer is used for absorbing impact vibration and protecting the core sensing unit assembly; the core sensing unit assembly is used for generating surface acoustic waves; compared with the prior art, the dual-layer alternating complementary interdigital transducer has the beneficial effects that the dual-layer alternating complementary interdigital transducer can effectively disperse and absorb vibration energy, and the influence of impact on the interdigital transducer and the piezoelectric substrate is reduced; the temperature compensation layer is designed, so that temperature compensation is realized, and meanwhile, the temperature compensation layer can be matched with the buffer structure to jointly play a role in resisting impact vibration; due to the fact that the shells, the buffer layers, the vibration absorption layers and the like are designed, the core sensing unit can reduce interference, and the sensitivity and precision of the surface acoustic wave sensor are guaranteed.

An integrated circuit assembly and method are provided. The integrated circuit assembly includes a first die having a first sensor portion coupled to first metal connections on the first die; a second die has a second die sensor portion coupled to second metal connections on the second bottom die and a bond interface electromechanically couples the first metal connections and the second metal connections to couple the first and the second sensor portions. The first and the second sensor portions when electromechanically coupled through the bond interface operate together to produce signals used to determine conditions of the bond interface.

The invention discloses a volatile condensate detection method based on a surface acoustic wave technology and a detection instrument thereof. The detection method comprises the following steps: detecting the accumulation, fusion and dripping processes of an object to be detected on the surface of the surface acoustic wave sensor through the surface acoustic wave sensor arranged at a position to be detected, judging the liquid drop state according to the peak change of a response curve, and triggering an alarm when the change of a rising edge exceeds a threshold value. The instrument comprises a surface acoustic wave sensor, a loss measurement module and a data processing module, and can analyze the accumulation, fusion and dripping states of the condensate and convert the change into a loss signal; the system further comprises a microcontroller, a high-precision acquisition unit, a data acquisition and processing unit and a coaxial cable, and remote signal transmission and remote monitoring are achieved. The system and the method can realize real-time monitoring of volatile condensates in dangerous places, and have the advantages of high sensitivity, fast response, good safety and support of remote multi-point detection.

The invention discloses an impact vibration compensation type surface acoustic wave sensor system, and relates to the field of information acquisition, the impact vibration compensation type surface acoustic wave sensor system comprises a surface acoustic wave sensing unit used for using a surface acoustic wave sensor as a sensitive element to sense a physical quantity to be measured and outputting a first signal to a data processing unit; and the impact vibration detection unit is used for acquiring an external impact vibration signal in real time and performing frequency domain analysis. The beneficial effects of the invention are that the mechanical execution unit can carry out mechanical correction and displacement compensation on the surface acoustic wave sensor according to a third signal of the data processing module on the premise of not influencing the normal work of the system, thereby achieving the software and hardware coordination compensation of an impact vibration signal; the first interdigital electrode of the surface acoustic wave sensor is arranged in an embedded mode, the electrode can be protected while the displacement amplitude of the surface acoustic wave is improved, and performance optimization and reliability improvement are achieved.

The invention provides a surface acoustic wave OPSM sensing device design method and an application system, belongs to the field of indoor environment monitoring, solves the problem of carbon dioxide detection, and adopts the technical scheme that the method comprises the following steps: S10, giving parameters of a surface acoustic wave OPSM sensing device; and S20, generating k groups of initial finger sequences and calculating a frequency response point set and a total evaluation value of each group of fingers. And S30, calculating a total result value for the finger sequence with the minimum total evaluation value, ending circulation when the total result value is 0, otherwise, modifying the finger sequence and calculating the total evaluation value. The method has the beneficial effects that the design cost of the surface acoustic wave OPSM sensing device is reduced, the carbon dioxide gas detection efficiency is improved, and the method is easy to popularize to other surface acoustic wave devices.

The invention provides a surface acoustic wave sensor and a packaging structure thereof, based on a POI piezoelectric substrate and a multifunctional reflecting grating layout, temperature, pressure and acceleration sensing units are highly integrated on a single chip, and in order to realize decoupling of multiple sensing quantities, two reference gates located on two sides of a uniform interdigital transducer are respectively designed, so that the sensor can be used for realizing multi-sensing-quantity decoupling. The two reference gates are used for differential time delay measurement of sensitive quantities, the temperature measurement reflecting gate is arranged close to the reference gates, it is effectively guaranteed that temperature measurement is not affected by other sensing quantities, and environmental noise interference is effectively restrained; efficient separation and synchronous detection of temperature, pressure and acceleration multi-parameter signals are achieved, and the electromagnetic coupling problem of a traditional multi-interdigital transducer structure is avoided; the packaging structure of the surface acoustic wave sensor adopts an SMD packaging structure, the overall structure of the device is compact, and the installation difficulty and the system maintenance cost in a complex environment are greatly reduced.

The application provides a surface acoustic wave OPSM sensor device design method and application system, belongs to the field of indoor environment monitoring, solves the problem of carbon dioxide detection, and has the technical scheme that comprises the following steps: S10, giving the parameters of the surface acoustic wave OPSM sensor device; S20, generating k groups of initial finger sequences and calculating the frequency response point set and total evaluation value of each group of fingers; S30, calculating the total result value of the finger sequence with the minimum total evaluation value; if the total result value is 0, the cycle is ended; otherwise, the finger sequence is modified and the total evaluation value is calculated. The application has the beneficial effects that the design cost of the surface acoustic wave OPSM sensor device is reduced, the carbon dioxide gas detection efficiency is improved, and the application can be easily popularized to other surface acoustic wave devices.

The application discloses a surface acoustic wave sensor for monitoring high-voltage GIS equipment, which comprises a surface acoustic wave sensor delay line, a surface acoustic wave sensor antenna, an air inlet duct, an air outlet duct, a magnetostrictive sensor, a signal transmitting end and a signal receiving end; the surface acoustic wave sensor delay line is connected with the surface acoustic wave sensor antenna and is in communication connection with the signal transmitting end and the signal receiving end through the surface acoustic wave sensor antenna to realize signal transmission; the air inlet duct and the air outlet duct are both connected with the surface acoustic wave sensor delay line; the magnetostrictive sensors are sleeved outside the air inlet duct and the air outlet duct, and the hollow coils of the magnetostrictive sensors arranged at two ends of the surface acoustic wave sensor delay line are oppositely wound and are arranged in a repelling manner with the magnets, so that the sound waves on the magnetostrictive sensors can be mutually offset on the surface acoustic wave sensor under normal circumstances, and the propagation of the sound wave signals loaded with information on the surface acoustic wave sensor is not affected.

The invention discloses a power distribution network side binding type bolt insulation wire clamp in the technical field of power transmission line equipment electric power fittings, which comprises a wire clamp body, a bolt connection pair and a surface acoustic wave sensor, and is characterized in that the wire clamp body comprises a middle insulator fixing ring and wire fixing rings on two sides which are made of composite ethylene propylene diene monomer; the insulator fixing ring comprises a middle annular open binding hoop part and connecting parts on the two sides, the cross section of the wire fixing ring is of an open horseshoe-shaped structure, the open horseshoe-shaped structure comprises a bent part and linear parts on the two sides, and the insulator fixing ring is connected with the linear parts of the wire fixing ring through the connecting parts in a bonding mode. The bolt connecting pair penetrates through the bolt hole to fix the wire in the bending part of the wire fixing ring, the top surface is provided with an inclined surface hydrophobic structure, and the scheme solves the safety problem existing in the prior art in which a binding wire is adopted, and achieves the beneficial effects of being convenient to install, improving the construction efficiency, and improving the self-cleaning capability and the safety of the wire clamp.

The invention provides a surface acoustic wave sensor for carbon dioxide detection. The sensor comprises a piezoelectric substrate, an interdigital transducer and a composite gas-sensitive film, the composite gas sensitive film is composed of a SnO2 bottom layer and a CuO surface layer, the SnO2 bottom layer is deposited on the piezoelectric substrate, the CuO surface layer is deposited on the SnO2 bottom layer, and the CuO surface layer and the SnO2 bottom layer jointly form a p-n heterojunction interface. The sensor provided by the invention can work in a room temperature environment without external heating; in addition, the response and recovery speed is high, and the CO2 concentration can be rapidly monitored in real time. In addition, the sensor provided by the invention has strong selectivity on CO2, and can effectively avoid the interference of common interference gas on the detection result; the detection range is wide, and the CO2 detection requirements from low concentration (1000 ppm) to high concentration (40000 ppm) can be met at the same time.

Provided are an assembly and method to form an integrated circuit assembly including a first die having a first sensor portion coupled to first metal connections on the first die. A second die has a second die sensor portion coupled to second metal connections on the second bottom die. A bond interface electromechanically couples the first metal connections and the second metal connections to couple the first and the second sensor portions. The first and the second sensor portions when electromechanically coupled through the bond interface operate together to produce signals used to determine conditions of the bond interface.