632 results about "Automatic focus" patented technology

The invention provides a three-dimensional automatic focusing method and device based on multi-modal data fusion and Kalman filtering and a readable storage medium, and high-precision real-time focusing is realized through multiple steps: collecting sample three-dimensional phase information and different focal plane image data by using a phase and image sensor, and calculating phase depth and definition; constructing a multi-plane Kalman filtering cluster, modeling the focus state of each focal plane, and predicting the focus by fusing the neighborhood coupling influence; the focus state is updated and corrected in combination with the image definition and the phase gradient, and the optimal three-dimensional focus position is determined by means of a collaborative optimization decision maker; dynamically adjusting the noise matrix and the coupling coefficient, and controlling the objective lens to complete focusing. According to the method, through multi-modal fusion and multi-plane cooperation, the problems of focus drifting and jumping are effectively solved, the focusing precision and stability of an imaging system in a complex sample and a dynamic environment are remarkably improved, and the method is suitable for equipment such as a biomedical full-automatic microscope and a digital pathological section scanner.

An ophthalmic imaging system provides an automatic focus mechanism based on the difference of consecutive scan lines. The system also provides of user selection of a focus point within a fundus image. A neural network automatically identifies the optic nerve head in an FA or ICGA image, which may be used to determine fixation angle. The system also provides additional scan tables for multiple imaging modalities to accommodate photophobia patients and multi-spectrum imaging options.

The present invention provides an automatic focusing method, an electronic device, and a readable storage medium. The automatic focusing method comprises: using a target detection model to detect a target object in an image frame acquired at an initial focal length by an optical imaging device to be focused, so as to acquire a target object detection result; on the basis of the target object detection result, determining whether a target object is present in the image frame; if yes, determining an actual object distance on the basis of the target object detection result and the initial focal length, and on the basis of the actual object distance and a mapping relationship between the object distance and an optimal imaging focal length, determining the optimal imaging focal length; and if not, using a preset search algorithm to search for a focal length until an image having the highest definition value is found, and using a focal length corresponding to the image having the highest definition value as the optimal imaging focal length. The present invention primarily employs a deep learning-based automatic focusing method, supplemented by an image definition evaluation method. Compared with traditional passive focusing methods, the present invention greatly improves the focusing efficiency. Compared with traditional active focusing methods, the present invention eliminates a need for adding an additional optical ranging component, ensuring that the imaging device has a simple structure and a low cost.

The invention provides a light spot position detection method, an automatic focusing method, a related system and a storage medium. A first light source is controlled to emit a first light beam to irradiate a to-be-detected sample, and a focusing sensor is controlled to receive the first light beam reflected from the to-be-detected sample; acquiring pixel data generated when the focusing sensor senses a light spot, formed on the focusing sensor, of the first light beam, and determining the center pixel position of the light spot based on the pixel data so as to determine the position of the light spot. According to the invention, the position of the light spot can be determined, so that the automatic focusing system can perform automatic focusing based on the position of the light spot, and the image definition is improved. Besides, in the invention, the light spot position is determined by using the central pixel position in the pixel data sensed by the focusing sensor, and the central pixel position can represent the central position of the light spot, so that the light spot position determination accuracy can be relatively high by determining the light spot position based on the central pixel position; therefore, the accuracy of automatic focusing and the image definition are improved.

The invention relates to the technical field of automatic focusing, and discloses a narrow space imaging automatic focusing method and system based on depth-of-field analysis, and the method comprises the steps: obtaining original image data, and carrying out the refraction correction according to the original image data, and obtaining an initial depth-of-field distribution diagram; carrying out scattering interference analysis according to the initial depth-of-field distribution diagram to obtain interference intensity distribution; performing focus analysis according to the interference intensity distribution to obtain a candidate focus set; performing exposure optimization according to the candidate focus set to obtain an optimized focus set; performing locking threshold calculation according to the optimized focus set to obtain a locking threshold of the optimal imaging position; and when the distance between the target position and the optimal imaging position is smaller than the locking threshold value, triggering focus locking, performing scattering compensation, and outputting a high-precision imaging result. The method has the following effect that the accuracy of automatic focusing of imaging in a narrow space can be improved.

The invention provides an automatic focusing method and an imaging method for a digital pathological section scanner, and the focusing method comprises the steps: carrying out the fine focusing of a pre-focusing point of a visual field of a reference position of a specimen slide, and enabling the pre-focusing point to serve as a reference focal plane position of the specimen slide; traversing other pre-focusing points, and shooting an image at the position of the reference focal plane; inputting the image into an out-of-focus distance prediction model, and predicting an out-of-focus offset distance; obtaining ideal focal plane positions of other pre-focusing points based on the out-of-focus offset distance and the reference focal plane position; and performing curved surface fitting according to the ideal focal plane positions of the plurality of visual fields to obtain the ideal focal plane positions of all the visual fields of the specimen slide. According to the invention, the ideal focal plane positions of a plurality of pre-focusing points can be obtained by only performing fine focusing on the pre-focusing points of one visual field and combining with the out-of-focus distance prediction model, so that the focusing time is reduced and the focusing speed of the whole specimen slide is improved compared with the conventional method of performing fine focusing on a plurality of pre-focusing points.

The invention provides a focusing method, device and equipment. The method comprises the following steps: determining pixel offset between a red channel image and a green channel image of a tissue slice; the red channel image and the green channel image are a red channel image and a green channel image of a tissue slice in a ghosting image captured by the color image sensor when a red light filter, a green light filter and double optical wedges in the focusing module are modulated at the same time; determining an out-of-focus distance according to the pixel offset and a preset corresponding relation; the preset corresponding relation is the corresponding relation between the pixel offset and the defocus distance; and focusing according to the out-of-focus distance. According to the method provided by the embodiment of the invention, the problem that positive and negative defocusing directions cannot be distinguished through a single-frame image in a phase shift detection automatic focusing technology based on image monochromatic double-hole modulation is solved, and the problem of time waste caused by high-speed switching of an illumination light source in an automatic focusing technology based on red-green double-LED illumination is solved; and meanwhile, the problem that a phase shift detection automatic focusing technology based on pupil segmentation images is relatively small in focusing range is solved.

The invention discloses a real-time automatic focusing hyperspectral acquisition method and a real-time automatic focusing hyperspectral acquisition device. The real-time automatic focusing hyperspectral acquisition method comprises the following steps: step 1, acquiring dark background pixel signals; 2, automatic focusing is carried out; 3, repeating the step 2 until the requirement is met, recording automatic focusing data, and performing spectrum acquisition to obtain original spectrum data; step 4, calculating a full-width object distance matrix of the original spectral data based on the phase difference finally obtained in the step 3; 5, correcting the original spectral data based on the full-width object distance matrix to obtain corrected spectral data; and step 6, calculating the corrected reference plate spectral data based on the corrected spectral data and the dark background pixel signal, calculating the reflectivity of the target object to be measured, and realizing real-time automatic focusing hyperspectral acquisition. The method innovates a phase difference analysis method, and efficiently processes light change and target offset in a dynamic scene; the combination of the two improves the focusing precision and stability, effectively solves the problem that the scanning target in the dynamic scene is liable to defocus, and achieves the efficient adaptation of the dynamic scene.

The invention discloses a Raman spectrum automatic focusing system and method for detecting a pathological tissue sample, and the system comprises a light source module which is used for generating laser with a preset wavelength so as to irradiate the pathological tissue sample; the automatic focusing module integrates a mechanical structure and an image recognition algorithm, and performs automatic focusing on the surface of the sample through a low-pass spectroscope, an objective lens, a focusing camera, a controller and a focusing execution mechanism; the spectrum analysis module is used for collecting and analyzing Raman scattering light generated by interaction of the focused exciting light and the pathological tissue sample on the basis of a Raman spectrum analyzer, and by integrating the stable light source, the automatic focusing module, the spectrum analysis module and the data processing module, rapid, accurate and automatic detection of the pathological tissue sample is achieved; the method has the advantages of simplicity and convenience in operation, high detection speed, high resolution, high automation degree and the like, is widely applied to the fields of clinical pathological detection, biomedical research and the like, and provides powerful support for disease diagnosis.

The invention belongs to the technical field of optical imaging equipment, and particularly relates to a lens driving device which comprises a base and a motor mechanism, the motor mechanism comprises a frame which is arranged on the base, an AF coil is arranged on the side wall of one side of the frame, and the AF coil and an AF magnet arranged on the side wall of the base are oppositely arranged so that the frame can move in the third direction relative to the base; the OIS coil plate is arranged in the frame, and an OIS coil is arranged in the OIS coil plate; the carrier is arranged in the frame, the OIS coil plate is located between the carrier and the frame, an OIS magnet is arranged at the bottom end of the carrier, and the OIS magnet and the OIS coil are oppositely arranged so that the carrier can move in the first direction and the second direction relative to the frame. Through an innovative position design mode, magnets adopted by AF zoom operation and anti-shake operation are independent and do not interfere with each other, and the stability of automatic focusing and optical anti-shake control is ensured.

The invention relates to the technical field of industrial automation and machine vision, and discloses an automatic debugging calibration system and method. The method comprises the following steps: establishing standard parameters, recording hardware installation parameters and software process parameters of reference laser processing equipment, and establishing a standard parameter library; preparing to-be-debugged equipment, and completing basic hardware installation and program import of the to-be-debugged equipment according to the standard parameter library; starting a VAC automatic debugging process, and sequentially executing automatic focusing confirmation, photographing position confirmation, light source intensity confirmation and pixel equivalent confirmation; coordinate system calibration of the laser and the camera is executed, and the coordinate transformation relation of the laser and the camera is established; static and dynamic repeatability verification is carried out, and precision and stability are evaluated; the optimized debugging parameters are stored, and parameters of other devices are migrated; through the automatic VAC process, manual debugging of several hours or even several days is shortened to the minute level, the machine difference caused by human factors is eliminated, and efficiency and consistency are greatly improved.

The invention relates to the technical field of microimaging automatic focusing, in particular to an automatic cell focusing method and system capable of resisting interference of fluorescent microspheres in hydrogel. The method comprises the following steps: acquiring hydrogel cell image sets containing fluorescent microspheres on different focal planes, calculating cell region weights and weighted gradient processing according to the hydrogel cell image sets containing fluorescent microspheres on different focal planes, and storing the cell region weights and weighted gradient processing to a preset definition list; and traversing the definition list, performing definition scoring on the hydrogel cell images containing the fluorescent microspheres on different focal planes in the definition list to obtain the hydrogel cell image containing the fluorescent microspheres with the highest definition score and the corresponding Z-axis coordinate, and controlling a preset motor to realize automatic focusing by using the Z-axis coordinate. The method can adapt to various fluorescent microsphere densities, is not influenced by the densities, and has wide applicability; the algorithm considers the existence of all cells in the visual field, the focusing is more integral, and the focusing accuracy is improved.

The invention relates to the technical field of image processing and automatic focusing, in particular to an automatic focusing method and microscope image acquisition equipment. According to the method, the adaptive Gaussian filtering and the point spread function model are combined, the fuzzy parameters are dynamically adjusted on the basis of global fuzzy characteristic description, and the local blurring of the image is effectively optimized. According to the method, a multi-dimensional evaluation auxiliary mechanism is introduced, the quality of a focal length position is comprehensively evaluated by analyzing fuzzy parameters and a target detection result in real time, the coverage capability of a target is optimized while the focusing precision is ensured, and stable focusing in a complex scene is ensured. According to the method, dynamic search and fine optimization strategies are combined, accurate positioning is achieved through small-range dynamic search near the focal length plane, and the local optimum problem is avoided while the focusing efficiency is improved. According to the method, the ambiguity, target detection and image definition are optimized in real time in image processing, the robustness and precision of the focusing process are improved, and the method is suitable for the fields of biomedicine, nondestructive testing, unmanned driving and the like.

The invention discloses a high-precision automatic focusing system and focusing method for a continuous zooming television camera, and solves the technical problem of insufficient focusing precision caused by image delay and system rotation errors in the prior art. According to the method, the definition evaluation value of the current frame image is associated with the exposure time of the current frame image in the CMOS imaging stage, the definition evaluation value of the image and the corresponding exposure time of the current frame image are obtained at the same time in the automatic focusing process, and the clear position deviation of the focusing motor caused by image delay is accurately compensated; by means of trajectory planning in the search process of the image sharpness evaluation value extremum of automatic focusing, it is guaranteed that the direction of reaching the most image sharpness evaluation value extremum finally is consistent with the direction of searching the extremum, the method completely eliminates the influence of system rotation errors, and the adaptability is higher; and all units are integrated on the same FPGA platform, so that more product space is saved, the communication transmission delay of the definition evaluation value is eliminated, and the focusing precision is higher.

The invention belongs to the technical field of automatic optical detection, and particularly discloses a focusing distance out-of-range pre-adjustment device and method and an automatic focusing system and method.The focusing distance out-of-range pre-adjustment device comprises distance detection equipment and a first controller which are electrically connected; the distance detection equipment is parallel to a target microscope objective, aligned with a to-be-detected object, in the automatic focusing device, and is used for detecting first height information of a to-be-detected area of the to-be-detected object and sending the first height information to the first controller; the first controller is used for judging whether a first height difference between the first height information and the first standard height information exceeds a preset focusing range of the target microscope objective or not; if yes, in the process that the to-be-detected area moves from the detection range of the distance detection equipment to the view center of the target microscope objective, the automatic focusing device and the distance detection equipment are controlled to synchronously carry out focusing coarse adjustment movement in advance along the Z axis based on the first height difference, and the over-range focusing condition of microscopic automatic focusing imaging is effectively handled.

The invention relates to the technical field of automatic focusing control, and discloses a rotary objective switching control method and system, a storage medium and a processor, and the method comprises the following steps: obtaining the actual position of an objective turntable based on a magnetic encoder, carrying out curve planning according to the actual position information, and carrying out the open-loop control of a motor to drive the objective turntable to rotate; and after entering a set error range of the actual position and the target position, ending curve planning and starting closed-loop control, and based on a relation model of deviation weight vectors of the actual position and the theoretical position of the magnetic encoder at the zero point and a motor output weight vector, controlling a motor to output pulses according to deviation so as to realize switching and positioning of the rotary objective lens. According to the scheme, the turntable end magnetic encoder is adopted for positioning, locking is carried out based on a fuzzy control strategy after curve planning is finished, the clamp spring only plays a role of a damper and does not need to be positioned, and the precision requirement of the clamp spring and the equipment manufacturing cost are reduced.

The utility model relates to the technical field of lens production, in particular to a rotating disc type automatic lens focusing machine which comprises a rack. The rack is rotationally provided with a rotating seat; a plurality of jigs are arranged at the top of the rotating seat in the circumferential direction; a focusing mechanism, a dispensing mechanism and a curing mechanism are sequentially arranged on the rack along the periphery of the rotating seat; the focusing mechanism comprises a focusing seat arranged on the rack, a hollow rotating table arranged on the focusing seat and a camera arranged on the focusing seat; a channel is formed in the hollow rotary table in a penetrating manner; the camera is arranged at the top of the channel; a rotary table is rotationally arranged at the bottom of the hollow rotary table; the rotating disc is provided with a clamping assembly. The focusing seat is provided with a driving assembly used for driving the rotating disc to rotate. According to the utility model, the plurality of jigs are arranged on the rotating seat, and the focusing mechanism, the dispensing mechanism and the curing mechanism are arranged around the periphery of the rotating seat, so that automatic focusing, automatic dispensing and automatic curing processing of the lens can be realized, and the working efficiency is effectively improved.

The invention provides an automatic focusing scanning imaging device and method based on a bright and dark field confocal objective lens. The device comprises a spatial modulation illumination module, the bright and dark field confocal objective lens, an annular light beam differential confocal module, a dark field confocal detection module and a bright field differential interference contrast imaging module. According to the invention, the bright and dark field confocal objective lens based on the combination of the parabolic mirror and the bright field microscope objective lens is arranged, the focus point of the annular light beam reflected by the parabolic mirror coincides with the focus of the bright field microscope objective lens, and the annular light reflected by the surface of the sample realizes automatic focusing through the differential confocal module; dark-field scattering confocal detection is realized by dark-field scattering light reflected by sample surface and subsurface defects through the confocal module, bright-field imaging of a defect area is realized by the bright-field differential interference contrast imaging module, and bright-field and dark-field three-dimensional imaging of the sample surface and subsurface defects can be realized through point-by-point scanning of the sample in x, y and z directions.

The invention discloses a microscopic automatic focusing method based on single photon counting, and relates to the field of automatic focusing, and the method comprises the steps: employing a photon counter to obtain multi-channel signals, carrying out the single-pixel imaging according to the multi-channel signals, and determining a gray-scale map of a sample; the definition evaluation operator and the grey-scale map are adopted for convolution, the definition evaluation value of the position is obtained, the definition evaluation value of the current position is compared with the definition evaluation value of the previous position, the initial focus position is determined, and the nanometer piezoelectric translation table is moved to the initial focus position; taking the initial focus position as a central point of a next search interval, determining a target area, adjusting the target area by adopting an improved hill-climbing search algorithm, and determining a final focus position; and moving the nanometer piezoelectric translation stage from the initial focus position to the final focus position to realize automatic focusing.

The invention belongs to the technical field of material detection, and provides an automatic image focusing method and device, and the method comprises rough focusing and fine focusing, the rough focusing comprises the steps: moving towards a direction close to a material at a first speed at a position far away from the material, shooting a plurality of images in real time at a fixed frame rate, calculating the definition score of each image, and calculating the definition score of each image; and taking the definition score of the image as a temporary extreme value until the obtained definition score of the image is lower than a threshold value, and ending rough focusing. And fine focusing: a plurality of images are shot in real time at a second speed and a fixed frame rate from the position above the shooting position corresponding to the temporary extreme value, the definition score of each image is calculated, all the definition scores are subjected to function fitting, the maximum extreme value of the function is calculated, and the coordinate corresponding to the maximum extreme value is a focusing accurate point. According to the invention, focal length change caused by material deformation can be avoided, microscope out-of-focus is avoided, the acquired image becomes clear, and the measurement precision is improved.

The invention discloses a fitting method for automatic and rapid zooming and focus following of an ophthalmic camera, and relates to the technical field of image processing and automatic focusing. According to the method, firstly, rapid calibration is carried out, a lens is initialized to a minimum zoom position, an optimal focus point is obtained through an automatic focusing algorithm, Zoom-Focus mapping data are sequentially collected at five sites from ZoomA to ZoomE, and calibration is completed within one second; secondly, on the basis of Lagrange nonlinear fitting, by taking an exponential function model as a target, constructing a Lagrange function, iteratively solving parameters through a Newton method, and reconstructing a complete Zoom-Focus curve by using five sampling points; and finally, during real-time zooming, positioning a nearest sampling point according to a current Zoom value, dynamically calculating an optimal Focus value through a fitted curve, and driving a focusing motor to adjust an image distance. According to the invention, high-precision focus following can be realized by only needing five sampling points, the cost is remarkably reduced, and the clear imaging requirement of real-time zooming in ophthalmic diagnosis is met.

The invention provides a dynamic interference focusing method and system based on a Michelson interferometer, and the method comprises the steps: obtaining interference fringes under different defocusing amounts through employing the dynamic interference focusing system based on the Michelson interferometer, carrying out the analysis of the received interference fringes through an upper computer, and obtaining phase information, based on the phase information of the interference fringes corresponding to different defocusing amounts, a mapping relation between the defocusing amounts and the phase information is constructed; in the application, the current interference fringes are obtained through the dynamic interference focus fixing system of the Michelson interferometer, the current interference fringes are analyzed through the upper computer to obtain the current phase information, and the current defocusing amount is obtained by adopting the mapping relation based on the current phase information. And moving the sample to a calibrated focal plane position by controlling a dynamic interference focus fixing system of a Michelson interferometer based on the current defocusing amount to complete automatic focus fixing. The method can achieve the nanoscale focusing sensitivity.

The invention relates to the technical field of optical detection and automatic control, and discloses a computer vision-assisted nano-particle recognition and micro-spectrum automatic measurement system, which comprises a sample positioning module, an imaging module, an optical measurement module and a processing control module, automatic focusing is realized on the basis of a definition evaluation value calculated by performing Fourier transform on the microscopic image; graying, binaryzation and morphological operation are carried out on the focused image so as to identify effective nano-particles and calculate centroid coordinates of the effective nano-particles; according to the coordinates of the center of mass, the X axis and the Y axis of the electric three-axis displacement table are controlled through closed-loop iteration movement, and the measured particles are accurately positioned to the center of the view field. According to the invention, the problems of low manual measurement efficiency, poor repeatability and complex operation in the prior art are solved, and high-flux, full-automatic and high-precision measurement of the spectral characteristics of the nanoparticles is realized.

An automatic focusing method, a laser processing apparatus and system, and a non-transitory computer-readable storage medium are provided. The automatic focusing method for a laser processing apparatus includes: controlling the first light output module to emit a first light spot onto a workpiece, and controlling the second light output module to emit a second light spot onto the workpiece; controlling the first light output module to move downward, and acquiring a plurality of images of the workpiece at different distances; and determining, based on the plurality of images, a distance between a processing surface of the workpiece and the first light output module or a thickness of the workpiece.

The invention belongs to the technical field of high-precision automatic focus fixing, and particularly relates to a high-precision automatic focus fixing method based on dynamic MTF feedback. The method comprises the following steps: S1, setting a search area based on a focal length design value of a measured optical system, and realizing global search of an optimal focusing area in the search area by using a particle swarm optimization algorithm; s2, on the basis of the optimal focusing area output in the step S3, local search of the optimal focusing position is achieved in the optimal focusing area through a golden section method; s3, the image sensor is moved to the optimal focusing position, and automatic focus fixing of the detected optical system is achieved. According to the method, the limitation of a traditional automatic focus fixing method in practical application is effectively overcome, the MTF measurement precision and repeatability of the optical system are improved, and more accurate and reliable technical support is provided for performance evaluation and image quality improvement of the optical system.

The invention provides a microscope automatic focusing method based on an end-to-end model, and relates to the technical field of optical instruments. The method comprises the following steps: shooting an image on a microscope glass slide through an image acquisition module, and carrying out image preprocessing through a gray histogram equalization algorithm; deploying an end-to-end neural network model at the cloud server, receiving the preprocessed image and predicting a first focusing position value; the first focusing position value is sent to an electric focusing module controlled by a stepping motor, and focusing is completed; and acquiring a second image, performing image preprocessing, predicting a second focusing position value by using the end-to-end neural network model, and sending a relative position between the second focusing position value and the first focusing position value to the electric focusing module to complete final automatic focusing. According to the method, the optimal focusing position is directly predicted from the microscopic image through the deep learning model, a traditional focusing scoring function or an image sequence analysis process is simplified, end-to-end efficient prediction is realized, and the focusing speed and precision are remarkably improved.

The present application discloses a method, system and device for intelligent automatic focusing of a microscope, which relates to the field of microscope focusing. The method includes: performing target detection on a set of scanned images by using an adaptive search algorithm to obtain a detection result; if there is a target sample in the set of scanned images, extracting multiple frames of scanned images based on the existing position area, and calculating the clarity score value of each frame of scanned image extracted based on multiple image features; selecting the scanned image with the highest clarity score value, and marking the corresponding focal plane as the final focal plane of the path point; using the adaptive search algorithm to determine the next path point, and then returning to the step of obtaining the set of scanned images; if the result indicates that there is no target sample in the set of scanned images, using the adaptive search algorithm to determine the next path point, and then returning to the step of obtaining the set of scanned images. The present application can improve the efficiency, accuracy and adaptability of microscope automatic focusing.

The invention discloses an on-orbit automatic focusing method for a spaceborne space target observation camera, relates to the technical field of space application of spaceborne cameras, and solves the problems of poor real-time performance and insufficient unattended operation adaptability of a manual focusing technology in the existing focusing technology. And meanwhile, in the automatic focusing technology, the hardware structure is complex, the space environment adaptability is weak, satellite-borne platform resources are limited and difficult to deploy, and focusing is difficult in a severe out-of-focus scene. According to the invention, the realization of automatic focusing is divided into a coarse adjustment stage and a fine adjustment stage. A large step pitch is adopted in the coarse tuning stage, rapid crossing is achieved, and an area adjacent to a positive focus position is rapidly positioned; in the fine adjustment stage, small step pitch is adopted, fine adjustment is achieved, and the peak position is accurately locked. The contradiction between the search speed and the positioning precision is balanced. When far away from the positive focus, a large-step-pitch fast approximation peak region is used, so that the number of iterations and the number of image acquisition frames are greatly reduced; when the focus is approached, small step pitch is switched for fine tuning, and the final precision is ensured.

The invention discloses a Linnik type wide spectrum measurement automatic focusing system and method. The Linnik type wide spectrum measurement automatic focusing system comprises a sample objective lens, a reference objective lens, a beam splitter prism, a beam splitter, an astigmatic lens group, a first detector, a barrel lens and a second detector. Light with sample morphology information enters the beam splitter prism through the sample objective lens, light reflected by the reference mirror enters the beam splitter prism through the reference objective lens, the light with the sample morphology information and the light reflected by the reference mirror are combined in the beam splitter prism and then enter the beam splitter, and the beam splitter divides the combined light into a first light beam and a second light beam. The first light beam enters the astigmatic lens group and irradiates the first detector, and the second light beam irradiates the second detector through the barrel lens. According to the invention, the focal plane can be searched in a large range, and the problem of short detection distance due to the coherent gap of the existing wide-spectrum interference measurement system is solved.