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146 results about "Quasioptics" patented technology

Quasioptics concerns the propagation of electromagnetic radiation when the size of the wavelength is comparable to the size of the optical components (e.g. lenses, mirrors, and apertures) and hence diffraction effects become significant. It commonly describes the propagation of Gaussian beams where the beam width is comparable to the wavelength. This is in contrast to geometrical optics, where the wavelength is small compared to the relevant length scales.

Ultrafast laser welding method and device for large-spacing heterogeneous materials

The invention provides an ultrafast laser welding method and device for large-spacing heterogeneous materials. The ultrafast laser welding method specifically comprises the steps that a lower workpiece and an upper workpiece are stacked and clamped through a clamp; a laser beam is collimated, then enters a scanning galvanometer and is focused through a field lens after being emitted, first scanning laser energy is absorbed by a lower-layer material to generate plasma, the plasma continuously expands and overflows, meanwhile, the lower-layer material is melted to fill a gap, and the quasi-optical contact condition is achieved; free expansion of plasmas in second scanning is effectively inhibited, laser energy is limited near a welding seam, the melting volume of the area is remarkably increased, and the welding strength is remarkably improved; and the third scanning and the second scanning are consistent in mechanism, the material melting amount is increased, and finally welding head strengthening is achieved. Through the scanning galvanometer and the field lens, a focusing light spot moves along a specified route in the contact surface of the upper and lower workpieces, so that the workpieces are melted and combined. After three times of scanning, the large-spacing heterogeneous material can finally obtain a high-strength and high-quality welding joint.
Owner:CENT SOUTH UNIV

FLIP-chip integrated photonic devices for optical engines

A flip-chip bonded photonic device and methods of fabrication are described. The device has a spot size converter and an antireflective coating on a sidewall of the spot size converter. The device has a semiconductor layer comprising a stack of quantum wells and an etch stop semiconductor layer beneath the layer comprising a stack of quantum wells. The device has a vertical sidewall for optical coupling and a sloped sidewall for metal interconnects. The device has a substrate and an optical waveguide residing above substrate. A mirror is coupled to the optical waveguide that bends light from the optical waveguide and transmits the light through the substrate. The light expands as it passes through the substrate. A collimating lens receives the light transmitted through the substrate and is lithographically aligned with the mirror. An optical engine has a flip-chip integrated electro-absorption modulated laser (EML) on a substrate.
Owner:ELEPHINT INC

Terahertz gas insulated switch measuring equipment and method based on artificial intelligence

The invention discloses a terahertz gas insulated switch measuring device and method based on artificial intelligence, the terahertz gas insulated switch measuring device comprises a data imaging module and a data processing module, the data imaging module comprises a terahertz wave emission source, a lock-in amplifier module, a quasi-optical system and a high-sensitivity detector, and the data processing module comprises an upper computer; when the insulation degree of the gas insulated switch is measured, the data imaging module terahertz wave emission source generates terahertz waves, the terahertz waves are focused through the quasi-optical system and transmitted to the gas insulated switch equipment, the high-sensitivity detector receives the terahertz waves passing through the gas insulated switch equipment and converts the terahertz waves into electric signals, and the electric signals are transmitted to the gas insulated switch equipment. Further, the lock-in amplifier module amplifies and filters the electric signals output by the high-sensitivity detector, the data processing module receives the electric signals output by the lock-in amplifier module, defects are recognized through a noise reduction algorithm and a deep learning model, and a data processing result is displayed; the problems that traditional detection is low in precision, small in range, low in efficiency and the like are solved.
Owner:NANJING PRODUCT QUALITY SUPERVISION & INSPECTION INSTITUTE (NANJING QUALITY DEVELOPMENT & ADVANCED TECHNOLOGY APPLICATION RESEARCH INSTITUTE) +1

Systems, devices, and methods for optical frequency combs

A method may comprise: generating an optical frequency comb; applying a filter in a first configuration to the generated optical frequency comb to select a first frequency of the optical frequency comb, wherein, in the first configuration, the first frequency aligns with a first pass-band of the filter, and a second frequency of the optical frequency comb does not align with a second pass-band of the filter; altering the filter to a second configuration to shift the first pass-band and the second pass-band to a shifted first pass-band and a shifted second pass-band; and applying the altered filter to the generated optical frequency comb to select the second frequency of the optical frequency comb, wherein the second frequency aligns with the shifted second pass-band of the filter, and the first frequency of the optical frequency comb does not align with the shifted first pass-band of the filter.
Owner:HONEYWELL INTERNATIONAL INC

Optical measurement device for die bonding alignment

An optical measurement device includes: a first align mark including at least one transmissive diffractive element; a second align mark apart from the first align mark in a first direction and including at least one reflective diffractive element; a beam splitter configured to reflect incident light in a direction toward the first align mark and transmit light from the first align mark; a focusing lens on a path of the light that passes through the beam splitter; and at least one image sensor configured to sense the light after the light passes through the focusing lens.
Owner:SAMSUNG ELECTRONICS CO LTD

Method for Runtime Temperature-Position Scaling Drift Inaccuracy Compensation in Camera OIS Systems

This disclosure describes a method to calibrate a position of an optical image stabilization (OIS) lensing element 308 based on a temperature reading. The temperature reading is of one or more sensors, such as a Hall Effect sensor, and the position is a deviation from a center position, which is the position of the OIS lensing element 308 when it is not influenced by a force. A center drift coefficient is generated based on the temperature reading. A derived value for the position is adjusted based on the center drift coefficient. Additionally, a scaling sensitivity coefficient is generated based on the temperature reading. The adjusting of the derived value for the position is further based on the scaling sensitivity coefficient. The center drift coefficient and the scaling sensitivity coefficient are further based on maximum and minimum values for the Hall Effect sensor at the temperature reading and a calibration temperature.
Owner:GOOGLE LLC

Fiber block alignment structure

Embodiments of alignment structures are disclosed that enable the alignment of a fiber attach unit (FAU) and the optical fibers contained therein to optical components on optical interposers or substrates on which photonic integrated circuits (PICs) are formed. Alignment of the optical fibers is enabled without the requirement for powering of the active optoelectrical devices in the PIC, but rather use an external testing apparatus to provide one or more optical signals to facilitate alignment. Methods for alignment using embodiments of the alignment structure is also disclosed.
Owner:POET TECH INC

Calibrating optical combiner using structured light

Disclosed is a system implemented in an enclosed space. The system includes light source(s); tracking camera(s); an optical combiner arranged on an optical path of a light field display unit and on an optical path of a real-world light field of a real-world environment; and processor(s) configured to: control the tracking camera(s) to capture image(s) of the enclosed space, whilst controlling the light source(s) to project light pattern(s) onto a semi-reflective surface of the optical combiner; detect, in the image(s), a reflection of at least a part of the light pattern(s) off surface(s) in the enclosed space, and determine a shape of said reflection; and determine a curvature of the optical combiner, based on shapes of at least said part of the light pattern(s) and the reflection.
Owner:DISTANCE TECHNOLOGIES OY

Single and multi-stage high power optical isolators using a single polarizing element

An optical isolator for generally collimated laser radiation includes a single polarizing element, at least one Faraday optical element, at least one reciprocal polarization altering optical element disposed at the single polarizing element, at least one reflective optical element for reflecting radiation to provide an even number of passes through the at least one Faraday optical element, and a magnetic structure. The magnetic structure is capable of generating a magnetic field within the at least one Faraday optical element that is generally aligned with the even number of passes along a beam propagation axis. The optical isolator is configured to receive generally collimated laser radiation, which passes through the single polarizing element and the at least one reciprocal polarization altering optical element and which makes at least two passes through the at least one Faraday optical element, whereby generally collimated laser radiation is output from the optical isolator.
Owner:ATTALON SOLUTIONS INC

Portable light intensity verification device

The invention discloses a portable light intensity verification device, and belongs to the technical field of environment and meteorological monitoring. The portable light intensity verification device comprises a voltage-stabilized power supply, a light source and a shading sealing cover, and the voltage-stabilized power supply is connected with the light source through an electric wire, supplies power to the light source and controls the light intensity of the light source; the light source is a group of LED lamp beads, the shading sealing cover is made of a hot good conductor, a plurality of open holes are formed in the shading sealing cover, and the LED lamp beads are fixedly arranged on the inner wall of the shading sealing cover through the open holes. A heat dissipation assembly can be further arranged to promote heat dissipation of the shading sealing cover. In the process of measuring the photolysis rate of the gas in the atmosphere by a spectroscopic method, the optical receiving head is covered by the shading sealing cover provided with the LED lamp beads, and the spectrograph is subjected to simple, rapid and reliable field calibration or verification, so that the verification work can be carried out without a standard optical platform, and the characteristics of accuracy, convenience and the like are achieved.
Owner:PEKING UNIV

OPTOELECTRONIC DEVICE

An optoelectronic device (10) comprises a laser light-emitting component (100) and an optical component (200) with an optical waveguide (201). The laser light-emitting component (100) has a light-exit surface (120) for emitting the laser light and at least one first alignment structure (130) on a first end face (110). The optical component (200) has a light-entry surface (220) on a second end face (210) where the laser light can be coupled into the optical waveguide (201), and at least one second alignment structure (230).The first and second alignment structures (130, 230) are designed to be complementary to each other in order to align the laser light emitting component (100) to the optical component (200) in such a way that the light exit surface (120) and the light entry surface (220) are opposite each other, whereby the laser light is coupled into the optical waveguide (201) in the case of emission of laser light by the laser light emitting component (100).
Owner:AMS OSRAM INT GMBH

Overlay alignment optical measurement system and overlay alignment detection equipment

The invention provides an overlay alignment optical measurement system and overlay alignment detection equipment, and belongs to the semiconductor overlay alignment amount detection technology, the overlay alignment optical measurement system comprises an illumination module, an image acquisition module, an automatic focusing module, a coupling light path module and a pre-alignment module; the overlay alignment detection equipment comprises a machine table, a movable carrying table, a measuring frame, a Z-axis driving module and an optical machine module. According to the invention, the pre-alignment light path is integrated on the basis of the self-focusing imaging light path, the overall measurement efficiency is improved, and the space occupation is reduced through the layout that the automatic focusing module is inclined and the light path side is offset; the measuring head is integrally arranged on the Z-axis driving module, so that the overall stability of the equipment is improved; and the two wafer fork grooves with different lengths are formed in the tray body, so that a wafer taking manipulator with fork handles with different lengths can be conveniently and quickly inserted, and the wafer replacement efficiency is improved. The method is convenient to popularize and apply in semiconductor overlay alignment, CD, defect and other nanoscale quantity detection scenes.
Owner:TZTEK TECHNOLOGY CO LTD

Inter-satellite alignment and fine-following aiming optical system

The invention discloses an inter-satellite alignment and fine-following aiming optical system which comprises a reflective off-axis optical antenna and a fast reflecting mirror. Wherein the reflective off-axis optical antenna and the fast reflecting mirror are sequentially arranged along the direction of an optical axis, and the fast reflecting mirror and the optical axis are placed at an included angle of 45 degrees. The device has the advantages of being small in size, light in weight, high in chain building efficiency and convenient to install and adjust.
Owner:SHANGHAI AEROSPACE CONTROL TECH INST

Detection alignment device and assembly equipment of optical module

The invention provides a detection alignment device and assembly equipment of an optical module, the detection alignment device is provided with a detection station, and the detection alignment device comprises a detection module arranged on one side of the detection station; the motion module is provided with an image module and a bearing module, and the motion module can be switched between a first state and a second state; wherein the image module is suitable for providing a detection image, and the bearing module is suitable for bearing a display screen of an optical module; when the motion module is in the first state, the image module corresponds to the position of the detection station, and the detection module is matched with the image module to detect the lens assembly located at the detection station; when the moving module is in the second state, the bearing module corresponds to the position of the detection station so that the detection module can detect an optical module formed by the lens assembly and the display screen, and the moving module can adjust the position of the display screen according to the detection result of the optical module so as to be aligned with the optical module.
Owner:GOERTEK INC

Runtime Posture - Position Inaccuracy Compensation in Camera OIS Systems

This disclosure describes a method to calibrate a position of an optical image stabilization (OIS) lensing element 308 based on an electric current reading of one or more areas of a mobile imaging device 200. The position is a deviation from a center position, where the OIS lensing element 308 is not influenced by a force. A coupling compensation coefficient is generated based on the electric current reading. A derived value for the position is adjusted based on the coupling compensation coefficient. A scaling sensitivity coefficient is generated based on the electric current reading. The derived value for the position is further adjusted based on the scaling sensitivity coefficient. The coupling compensation coefficient and the scaling sensitivity coefficient are further based on maximum and minimum values for the Hall Effect sensor at the temperature reading and a calibration temperature.
Owner:GOOGLE LLC

Precision alignment between optical arrays and steering arrays

A system for aligning optical signals for optical networking includes a light station, a collimator element corresponding to the light station, a steering array including a steering element corresponding to the light station, and a set of optical transfer elements. The set of optical transfer elements is positioned between the steering array and the light station. The set of optical transfer elements forms a light image from a first plane positioned at a first location onto a second plane positioned at a second location.
Owner:BRIGHT SILICON TECHNOLOGIES INC

Adiabatic optical interfaces secured using photo-activated lithography

PCT designated stage expiredWO2025106126A3Coupling light guidesFiberQuasioptics
System and methods for aligning optical elements to form adiabatic couplings are disclosed. An alignment device includes a common platform and a plurality of electrically-controlled mounts affixed to the common platform. Individual fibers of a first set of fibers that are to be aligned with a second set of fibers are coupled into respective ones of the plurality of electrically-controlled mounts. The platform as a whole is positioned in 3D space to align the first set of fibers with the second set of fibers, within a threshold level of alignment. Then, individual ones of the electrically-controlled mounts are adjusted to further align respective fibers of the first set of fibers with a corresponding fiber of the second set. In some embodiments, scattered light and / or signal strength are used as feedback measurements to guide the alignment process.
Owner:LIGHTSYNQ TECHNOLOGIES INC

Digital differential interference imaging method

The invention discloses a digital differential interference imaging method, and belongs to the technical field of optical imaging and microscopic imaging. The method comprises the steps that bright field illumination is used, a first image and a second image are collected at defocus positions which are vertically symmetrical on a sample focal plane respectively, and the defocus distance is larger than the physical depth of field of an objective lens; and carrying out pixel-level gray value subtraction on the two images to obtain a digital differential phase image. Digital image processing is adopted to replace optical shearing and interference of a traditional DIC, a polarized optical element and a special DIC prism are not needed, the system cost and complexity are remarkably reduced, the system can be compatible with non-standard optical material sample containers such as a plastic culture dish, and the directional shadow problem of the traditional DIC is solved. Meanwhile, by providing two specific implementation modes, namely accurate positioning acquisition and automatic focusing fusion acquisition, the imaging efficiency and the system robustness are further improved on the basis of ensuring the high contrast and the pseudo three-dimensional relief imaging effect.
Owner:WUXI XIGUANG HEALTH IND CO LTD

PEM fuel cell metal bipolar plate carbon-based composite coating defect detection method

The invention relates to the technical field of defect detection, and discloses a PEM fuel cell metal bipolar plate carbon-based composite coating defect detection method, which comprises: applying stepped thermal excitation to a bipolar plate carbon-based composite coating to obtain a plurality of temperature stepped points corresponding to the bipolar plate carbon-based composite coating; after each temperature step point is stable, generating an optical response data sequence according to the optical response data under each temperature step point; analyzing a thermal teratogenesis coefficient sequence corresponding to the temperature step point based on the reference optical characteristic data and the optical response data sequence; performing differential processing on the thermal teratogenesis coefficient sequence to obtain a gradient change curve, and analyzing inflection point features in the gradient change curve; and analyzing the defect evolution behavior of the bipolar plate carbon-based composite coating according to the inflection point characteristics, and detecting the defect type and defect grade of the bipolar plate carbon-based composite coating through the defect evolution behavior. According to the invention, the precision of PEM fuel cell metal bipolar plate carbon-based composite coating defect detection can be improved.
Owner:HEFEI UNIV OF TECH

Methods and systems for aligning an optical instrument

An optical steering mechanism and methods for using the same. One optical steering mechanism includes a first lens defining a first focal length having a first magnitude and a first polarity and a second lens defining a second focal length having a second magnitude and a second polarity. The first and second magnitudes are substantially equal and the first and second polarities are opposite, and wherein the second lens is positioned to directly receive an optical beam passing through the first lens. The optical beam steering mechanism also includes at least one rotary motor coupled to one of the first lens and the second lens and configured to swing the lens coupled thereto in an arcuate path. An optical beam path of the optical beam passed through the second lens is adjustable by operating the rotary motor.
Owner:THERMO ELECTRONICS SCI INSTR LLC

Quasi-optical beamformer comprising two reflectors

ActiveUS12719176B2QuasiopticsWaveguide
A quasi-optical beamformer includes a plurality N>1 of power feeds (PF), each of the i∈[1; N] power feeds (PF) being configured to emit a respective radio-frequency beam denoted Ri, a radio-frequency transmission line (LT) fed at a first end by the power feeds and comprising at a second end a plurality of network ports (PR) that are configured to collect radio-frequency radiation, the transmission line (LT) comprising a radio-frequency waveguide (GO) that comprises at least two metal plates (PM) that are stacked so as to guide the radio-frequency beams Ri, i∈[1; N] towards the network ports (PR), the transmission line (LT) extending along a central main axis denoted axis x, a first reflector (M1) having a first centre (C1) centred on the axis x and a first effective radius of curvature and being configured to reflect the guided radio-frequency beams Ri, i∈[1; N], a second reflector (M2) having a second effective radius of curvature and being configured to reflect the radio-frequency beams (RFi) reflected by the first reflector so as to direct them towards the network ports so as to form output radio-frequency beams (RSi), the first and second effective radii of curvature and an arrangement of the power feeds (PF) with respect to the first reflector being configured so that: each of the output radio-frequency beams (RSi) is a plane wave, and a transverse amplitude distribution Ai, on the network ports (PR), of each output radio-frequency beam (RSi), is substantially identical.
Owner:THALES SA +6

Range finder window lens test support with adjustable angle

The utility model discloses an angle-adjustable range finder window lens testing support, which relates to the technical field of support testing and comprises a base, a rotating module and a clamping module. According to the technical scheme, the base is placed on the standard optical platform, so that the window lens clamped by the clamping module can be arranged relative to the distance measuring instrument, and the distance measuring instrument can be arranged by controlling the base to move on the standard optical platform along the optical axis or controlling the rotating module to move on the base along the extending direction of the fixing groove. The distance between the window lens and the range finder is adjusted by rotating the rotating module and / or the clamping module, the rotating angle of the window lens in a single direction or multiple directions is controlled to be adjusted, tests on different range finders can be simulated when the window lens is tested, and the final installation effect is accurately simulated. And the adaptation degree of the window lens is further improved.
Owner:ZHEJIANG AEROSPACE RUNBO MEASUREMENT & CONTROL TECH CO LTD

Co-packaged optics

Electro-optical systems and methods are described including a photonic substrate optically coupled to a photonic integrated circuit (PIC). The photonic substrate and the PIC may comprise one or more optical elements. A mechanical aligner may be coupled to the photonic substrate. The mechanical aligner may be configured to align an optical element (e.g., optical fiber) to optically couple the optical element to the PIC via the one or more optical elements.
Owner:TERAMOUNT LTD

Laser alignment system and method for laser alignment

The present disclosure relates generally to systems and methods for laser alignment, and more particularly to systems and methods for aligning optical elements to enable laser transmission. In some embodiments, the cover plate is configured to slide into position on the optics mounting plate. The positioning cover plate is to apply a force to the biasing element to press the optical element against the registration surface of the optical device mounting plate to align the optical element with the optical aperture. The cover plate may be fixed relative to the optic mounting plate to retain the biasing element and the optical element.
Owner:ALCON INC

Optical sensor and method of initializing and calibrating optical sensor

There is provided a method of calibrating an optical sensor (1) for measuring one or more physiological signs of a person after a device is attached to the person, the sensor comprising one or more detectors (15) and one or more light sources (12), (14). The method comprises the steps of, after the device is attached to the human body: emitting one or more light pulses of a plurality of different wavelengths using one or more light sources (12), (14) wherein each light pulse of each wavelength is emitted at a known power level and over a known length of time; using one or more detectors (15) to record signals for the light pulses of each wavelength to create an optical characteristic of the person; and selecting one or more of the plurality of wavelengths based on the optical characteristic of the person for use in measuring the one or more physiological signs.
Owner:NORDIQ PROD AS

A multimodal data fusion method for online plastic quality monitoring

This invention relates to the field of image processing technology and discloses a multimodal data fusion method for online quality monitoring of plastics. The method includes: simultaneously acquiring a reference optical image of the plastic surface and a temporal infrared thermal distribution image containing the current frame and the previous frame infrared image; calculating a spatial temperature gradient matrix; correcting the geometric affine matrix based on the displacement vector normal component determined by the dense optical flow field, constructing a spatiotemporal compensation mapping matrix to achieve alignment of heterogeneous pixel coordinate systems, and generating a structure-guided tensor; applying morphological opening operations to remove low-frequency background thermal fluctuations from the structure-guided tensor to obtain a pure-state high-frequency thermal gradient matrix; adjusting the diffusion coefficient using the pure-state high-frequency thermal gradient matrix as a constraint, applying anisotropic diffusion filtering to the reference optical image, and extracting defect regions. This invention achieves physical-level decoupling between optical artifacts and real defects, eliminates feature mapping deviations caused by thermal conduction hysteresis, and improves the signal-to-noise ratio of image feature extraction.
Owner:CHONGQING HUASU TECH CO LTD

Machine difference control method and standard optical system

PendingCN122023323AImage enhancementImage analysisQuasiopticsMinimum deviation
The invention relates to a machine difference control method and a standard optical system. The method comprises the following steps: carrying out flat field correction on a camera under different working distances; shooting an object to be detected under different flat field correction conditions, selecting a plurality of feature points and measuring to obtain corresponding first feature values; measuring feature points of the same picture and the same position of the to-be-detected object, determining measurement data, and selecting a working distance with the minimum deviation as an optimal calibration distance; selecting a first camera which is qualified in calibration as a reference template, shooting the high-uniformity optical integrating sphere and extracting second characteristic values of uniformly distributed point locations; and comparing the third feature value extracted by each camera with the second feature value, and determining that the corresponding camera is calibrated to be qualified under the condition that the maximum difference value in the third feature value and the second feature value conforms to a preset specification, otherwise, performing calibration again. The method can improve the calibration precision, and effectively controls the machine difference.
Owner:HYC (CHENGDU) TECHNOLOGY CO LTD

A multi-party semi-quantum secret size comparison method based on two-dimensional single-photon states

PendingCN122339693AThird partyAlgorithm
This invention discloses a method for comparing the size of multi-party semi-quantum secrets based on two-dimensional single-photon states. First, each participant shares a key and encrypts their own secret, maintaining the numerical relationship. A semi-honest quantum third party (STP) randomly prepares a two-dimensional single-photon sequence using a Z-based or X-based approach and distributes it to each participant. Each participant performs corresponding operations on each pair of adjacent photons according to the encrypted bit values ​​and sends the results back to the STP. The STP receives the returned photons and decodes them to obtain encrypted data strings. After security checks, the STP performs a bitwise XOR operation on each data string to determine the size relationship of the multi-party secrets. This invention uses experimentally easily prepared and manipulated two-dimensional single-photon states instead of high-dimensional or entangled states, requiring only standard optical devices, significantly reducing the implementation difficulty. By combining additive encryption with XOR comparison rules, it achieves size comparison while protecting privacy, solving the problems of difficult physical implementation and reduced security in existing methods. It has economical, efficient, and practical technical advantages.
Owner:NANCHANG UNIV

Optocoupler Components and Assemblies

The present invention describes an optical coupling element including a groove and a light redirecting member. The groove is for receiving and aligning an optical waveguide and includes an open front end and a rear end. The light redirecting member includes an input side for receiving light from the optical waveguide received and supported in the groove and a light redirecting side for changing the direction of the light received from the input side. The groove may include a bottom surface extending between the front end and the rear end of the groove and including a raised bottom surface portion that is raised upward relative to the non-raised bottom surface portion. The non-raised bottom surface portion of the bottom surface may be disposed between the raised bottom surface portion of the bottom surface and the input side of the light redirecting member. The present invention describes an optical coupling assembly including an optical coupling element and an optical waveguide.
Owner:3M INNOVATIVE PROPERTIES CO

Lithography machine interferometer beam calibration apparatus and method

The present application relates to the field of optical measurement, and provides a lithography machine interferometer light beam calibration device and method. The lithography machine interferometer light beam calibration device is used for calibrating a measurement light beam of an interferometric measurement system in a lithography machine, and comprises a reference optical element configured to establish an absolute angle reference in a calibration environment; a simulation target having at least one reflecting surface and configured to be detachably placed in the optical path of the measurement light beam during calibration; a reference transmission assembly configured to transmit the absolute angle reference defined by the reference optical element to the reflecting surface of the simulation target; and a diagnostic optical module configured to be detachably installed at the light beam outlet of the interferometric measurement system to receive the measurement light beam reflected by the reflecting surface of the simulation target; the diagnostic optical module interferes the received measurement light beam with an internal reference light beam of the diagnostic optical module, and uses the form of the formed interference fringes as a basis for judging the collimation state of the measurement light beam.
Owner:NEW YIDONG (SHANGHAI) TECH CO LTD