Method and system for predicting surface laser damage performance of optical element

A technology for optical components and laser damage, which is applied in the direction of optical testing for flaws/defects, material analysis through optical means, and measurement devices, etc. To achieve the effect of improving the accuracy of the assessment

Active Publication Date: 2020-02-28
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology

The quality of optical components used under high-power laser conditions is very high, and the surface residual absorption is mostly on th...

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  • Method and system for predicting surface laser damage performance of optical element
  • Method and system for predicting surface laser damage performance of optical element
  • Method and system for predicting surface laser damage performance of optical element

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Embodiment Construction

[0043] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0044] The purpose of the present invention is to provide a method and system for predicting the laser damage performance of the surface of an optical component, which can improve the evaluation accuracy of the damage performance of the optical component without damaging the optical component.

[0045] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in deta...

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Abstract

The invention relates to a method and a system for predicting surface laser damage performance of an optical element. The method comprises the steps of: selecting a standard optical element; acquiringabsorptive defect distribution characteristics of the standard optical element to obtain defect densities of different absorption levels; acquiring damage performance, wherein the damage performancecomprises damage thresholds and damage densities; determining the defect density with the highest correlation with the damage performance in the defect densities of different absorption levels of thestandard optical element by adopting a Spearman correlation analysis method, so as to obtain the defect density corresponding to each damage performance, and establishing a correlation curve between the damage performance and the corresponding defect density to serve as a standard curve; and acquiring the defect density of a to-be-detected optical element, and determining the damage performance ofthe to-be-detected optical element according to the standard curve. According to the method and the system for predicting the surface laser damage performance of the optical element, the evaluation precision of the damage performance of the optical element can be improved without damaging the optical element.

Description

technical field [0001] The invention relates to the technical field of laser damage assessment on the surface of optical components, in particular to a method and system for predicting the performance of laser damage on the surface of optical components. Background technique [0002] A large number of high-performance optical components are used in large-scale high-power laser devices, such as fused silica, K9, UBK7, silicon wafers, and KDP crystals. With the continuous improvement of the output energy of laser devices, the problem of laser damage of optical components has become increasingly prominent , has become an important bottleneck limiting the continuous improvement of laser output energy. [0003] At present, the actual laser damage performance of most optical components is far lower than its theoretical value, indicating that the residual surface defects after optical components are processed are an important cause of laser damage. The general process of laser dam...

Claims

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Application Information

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IPC IPC(8): G01N21/17G01N21/95G06F30/20
CPCG01N21/171G01N21/95G01N2021/1712
Inventor 石兆华王凤蕊刘红婕吴之清邵婷夏汉定周晓燕邓青华孙来喜黄进叶鑫唐烽黎维华李青芝刘明星陈进湛
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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