The invention discloses a high-threshold high-anti-reflection
laser window and a manufacturing method thereof, and belongs to the field of micro-nano
optical processing. According to the method, traditional
precious metal and high-temperature annealing processes are abandoned, and low-melting-point
soft metal is adopted as an
evaporation film material. The method comprises the following steps: heating an optical substrate to 80-200 DEG C in a vacuum environment, maintaining the temperature, and carrying out at least two times of cyclic deposition by utilizing an
electron beam
evaporation technology; in each deposition,
metal is self-assembled on the surface of the heating substrate through a dehumidification effect to form spherical nano-particles, the particles continue to grow on an original array through subsequent deposition, and finally the spherical nano-
metal mask with high uniformity and high filling degree is obtained. And
etching by taking the
mask as a protective layer, transferring the appearance of the
mask to the surface of the substrate to form a micro-nano structure, and cleaning to obtain the
laser window. The method is simple in process, low in cost and suitable for large-area manufacturing, and the obtained window has the high
laser damage threshold value, the
high transmittance and the self-cleaning surface characteristic.