Laser preprocessing and restoring method and device having on-line detection function and used for optical elements

Abstract

The invention discloses a laser preprocessing and restoring method and device having on-line detection function and used for optical elements. A non-contact on-line detection system is introduced into a laser processing or laser restoring system for detecting a laser processing region or a laser restoring region of an optical element on line, so that processing and restoring effects reach desired effects, and the processing and restoring effects do not need to be checked through a subsequent damage experiment; the processing and manufacturing process of the large-aperture optical element is greatly simplified; and the cost is greatly saved. The laser preprocessing and restoring method and the laser preprocessing and restoring device can be used in the fields of laser preprocessing and laser damage point restoring of smelted quartz, potassium dihydrogen phosphate (KDP) crystal, BK7 glass and various types of other laser materials and thin films, and is particularly suitable for laser preprocessing of defect points on the surface and the subsurface of the large-aperture optical element in an ultra-large-size laser system and laser restoring of laser damage points on the surface and the subsurface.

Description

[0001] technical field [0002] The invention relates to the field of laser processing and repairing of optical components, in particular to a method and device for laser preprocessing and repairing of optical components with online detection. Background technique [0003] In the design, manufacture and application of high-power or high-energy intense laser systems, laser damage to optical components is often a key factor restricting the operating level of related systems. The laser damage threshold of these optical components is often well below the intrinsic damage threshold of the material used to fabricate the component. Taking the large-aperture fused silica element used in the laser inertial confinement fusion system as an example, its damage threshold in the 355nm ultraviolet laser band is much lower than the intrinsic threshold of the pure quartz material used to make the element, which restricts related systems. One of the key factors in design and development. ...

AI Technical Summary

Problems solved by technology

[0010] A method for laser pretreatment and repair of an optical element with on-line detection. The laser pretreatment method for an optical element uses laser to irradiate the surface of the optical element with laser to remove defects and pollution that are likely to cause laser damage on the surface of the element. The laser repair method for optical components mentioned above is to use laser to repair the damaged points on the surface and sub-surface of optical components that have been damaged by laser, so that the performance of the damaged points can be stabilized, so that the growth of the related damaged points can be slowed down during the subsequent laser irradiation process. The speed does not even increase further. The online detection system detects the surface and subsurface absorption defects and photothermal defects of the optical element during the laser pretreatment and repair process. Development changes are detected in real time

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