Method for realizing lossless evaluation for damage performance of optical element

Abstract

The invention discloses a method for realizing lossless evaluation for damage performance of an optical element. A continuous laser device can transmit continuous laser. After a first energy regulator, a first lens, a reflector and the front surface of a sample, the continuous laser is irradiated to the back surface of the sample. The reflecting direction of the continuous laser after reflection by the sample is provided with a residual laser collector. The pulse laser can transmit pulse laser. After a second energy regulator, a beam compressing system, a split board and a second lens, the pulse laser is irradiated to the back surface of the sample. According to the method of the invention, multiple-sample and multiple-position testing is performed on the elements which are same with a to-be-tested optical element for obtaining a correlation relation between fluorescent defect data and a laser damage threshold and a damage density in the optical elements of this kind, thereby calculating the damage threshold and the damage density in measurement of the to-be-tested sample through measuring the fluorescent defect data. According to the method of the invention, a damage performance level of the optical element can be obtained through lossless testing for the fluorescent defect of the optical element, thereby realizing lossless evaluation to the damage performance of the optical element.

Description

technical field [0001] The invention relates to a non-destructive evaluation method of an optical element, in particular to a method for non-destructive evaluation of the damage performance of an optical element. Background technique [0002] The damage of optical components has always been a key issue in the development of large-scale high-power / high-energy laser devices, which determines the maximum output capability of laser devices and limits the further improvement of laser output. In order for a laser device to operate safely at the maximum output flux possible, it is extremely important to evaluate the damage performance of optical components before they are put into shelf use. At present, the evaluation of the damage performance of optical components is realized by directly performing damage tests on the components. The most direct and accurate results can be obtained through the damage test, but the damage test itself is a consuming process, and the tested componen...

AI Technical Summary

Problems solved by technology

[0002] The problem of optical component damage has always been a key issue in the development of large-scale high-power / high-energy laser devices, which determines the maximum output capability of laser devices and limits the further improvement of laser output

[0004] At present, the commonly used optical component testing methods are mainly surface shape, stress, surface roughness, defect, transmittance, etc. Research shows that the test results of these methods have no direct relationship with the damage performance of optical components, but are directly related to subsurface microscopic defects. Below the surface, extremely small and difficult to detect

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