Method for prolonging service life of semiconductor laser device

Abstract

The invention belongs to the technical field of an optoelectronics technology of a semiconductor and relates to a method for prolonging the service life of a semiconductor laser device, namely an integrated technology of plasma technology, passivation technology, ion auxiliary technology and optical film technology. The method comprises a semiconductor laser device bar 1, a semiconductor laser device bar 2 processed by the plasma technology, a passivation film 3, a front cavity surface film 4 and a rear cavity surface film 5. The method comprises the following steps of: orderly stacking the sorted semiconductor laser device bar 1 on a special bar clamp; putting into a vacuum coating machine; and extracting vacuum. When a pre-set vacuum degree is realized, the plasma technology is firstly adopted to carry out cavity surface washing to wash cavity surface oxides and an unstable surface state to form the semiconductor laser device bar 2 processed by the plasma technology; then the passivation technology is adopted to deposit one layer of the passivation film 3 on the cavity surface to inhibit the cavity surface from being oxidized; and finally, the ion auxiliary technology and the optical film technology are adopted to prepare the front cavity surface film 4 and the rear cavity surface film 5, which have high-laser damage threshold values, so as to improve a cavity surface damage threshold value of the semiconductor laser device. With the adoption of the method disclosed by the invention, the service life of the semiconductor laser device can be effectively prolonged.

Description

technical field [0001] The invention belongs to the technical field of semiconductor optoelectronics and relates to a method for improving the service life of a semiconductor laser. Background technique [0002] High-power semiconductor lasers are widely used in the fields of pumping solid-state lasers, optical fiber communications, optical disk reading and writing, laser processing and laser medical treatment due to their advantages of high power, light weight, small size and easy modulation. With the continuous improvement of the output power of semiconductor lasers, the most important factor restricting the direct use of semiconductor lasers for military applications, material processing and laser medical treatment is the life of semiconductor lasers. [0003] The most important factor affecting the service life of semiconductor lasers is the damage of the cavity surface of semiconductor lasers. The cavity surface damage of semiconductor laser includes the laser damage o...

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Problems solved by technology

[0008] Aiming at the shortcomings of the prior art, the present invention proposes a method for improving the service life of semiconductor lasers, that is, the integrated technology of "plasma technology-passivation technology-ion assist and optical film technology". The cavity surface light absorption problem caused by oxides and unstable surface states makes the cavity surface passivation material completely occupy the easy oxidation state of the cavity surface, eliminates the state to be oxidized, inhibits the cavity surface from being oxidized again, and prevents the formation of cavity surface defects, thereby improving Diode laser lifetime

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