The invention provides an epitaxial layer structure of a doped InSb film and a preparation process thereof, based on an MOCVD (
Metal Organic
Chemical Vapor Deposition) process, an InSb: Te layer and an InSb layer are periodically and alternately grown to form a doped InSb functional layer of a
Hall element, the
band gap of an InSb material can be increased, and the
temperature coefficient of the
Hall element of the InSb film is reduced; furthermore, according to the epitaxial layer structure and the preparation process provided by the invention, uniform
doping can be realized, excessive Te
doping can be avoided, and the defect density and the surface
state density of the doped InSb functional layer can be reduced, so that the sensitivity of the InSb
Hall element is improved, and the
background noise of the Hall element is reduced. Besides, according to the epitaxial layer structure of the doped InSb film and the preparation process thereof provided by the invention, the growth processes, materials, thicknesses and the like of the buffer layer and the gradient layer are further improved,
lattice mismatch between the substrate and the InSb film is slowed down, the
dislocation density of the InSb film caused by mismatch is reduced, the InSb film with higher mobility can be grown, and the yield of the InSb film is improved. And therefore, higher sensitivity can be obtained on the Hall element.