The invention provides a capacitive
silicon miniature
microphone and a manufacturing method thereof. The capacitive
silicon miniature
microphone comprises a substrate, a backing plate and a supporting structure. A tunneling layer is arranged on the substrate, a
dielectric layer is arranged on the tunneling layer and serves as a storage layer, a
barrier layer is arranged on the storage layer, a cavity is formed in the position under the substrate, the substrate, the tunneling layer, the storage layer and the
barrier layer, located over the cavity, form a vibrating diaphragm together, the backing plate is arranged above the substrate, through holes are formed in the backing plate, the backing plate is connected with the vibrating diaphragm through the supporting structure, and a gap is formed over the vibrating diaphragm. An additional power supply is not needed by the capacitive
silicon miniature
microphone, and the capacitive silicon miniature microphone is compatible with a
CMOS process, has the advantages of being easy to microminiaturize, low in cost, high in precision and high in reliability and can be applied to severe environments such as a high-temperature environment and a high-
humidity environment.