The application relates to a double-gate structure, a field
oxygen structure and a manufacturing method of a
semiconductor device, and the manufacturing method of the double-gate structure comprises the following steps: obtaining a
wafer formed with a first
gate dielectric layer and a second
gate dielectric layer; forming a gate material layer on the first and second
gate dielectric layers; forming a
photoresist anti-reflection layer on the gate material layer;
coating photoresist on the
photoresist anti-reflection layer, exposing by using a
polysilicon gate photoetching plate, developing the photoresist, then
etching the photoresist anti-reflection layer and the gate material layer, forming a first gate on the first gate
dielectric layer and a second gate on the second gate
dielectric layer, and the first gate
dielectric layer extends from the bottom of the first gate on both sides; removing the photoresist, then
dry etching the first gate
dielectric layer extending from the bottom of the first gate, and the photoresist anti-reflection layer is used as a
blocking layer of the
dry etching. The application uses the photoresist anti-reflection layer as an
etching blocking layer, removes the excess first gate
dielectric layer extending out of the first gate by
dry etching, and ensures that the device does not break the trench.