Infrared metal reflecting film with high adhesive force and manufacturing method thereof

A technology of metal reflection and high adhesion, applied in the direction of metal layered products, chemical instruments and methods, metal material coating technology, etc., can solve the problem of poor film adhesion and surface abrasion resistance, and the film cannot withstand wiping Improve the moisture resistance and friction resistance, improve the surface mechanical strength, and improve the film quality

Active Publication Date: 2014-10-08
NO 717 INST CHINA MARINE HEAVY IND GRP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the softness of the metal film layer and the inability to form a good chemical adsorption with the substrate, the film adhesion and surface abrasion resistance are often poor.
This makes the metal mirror must be extra careful in the assembly process, and it is not easy to clean when the surface of the film layer is contaminated
In practical applications, the internal stress of the metal layer causes problems such as peeling off, moisture absorption corrosion, and the film layer cannot withstand wiping, which directly affect the working performance and reliability of the mirror.
For special-shaped mirrors or large-sized mirrors, due to the oblique incidence effect and the lateral accumulation of internal stress in the film layer during the film growth process, the adhesion between the metal layer and the substrate and the surface abrasion resistance will often become worse.

Method used

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  • Infrared metal reflecting film with high adhesive force and manufacturing method thereof
  • Infrared metal reflecting film with high adhesive force and manufacturing method thereof
  • Infrared metal reflecting film with high adhesive force and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] A medium-wave and long-wave infrared high-reflection film, the substrate material is single crystal silicon, and the size is 110×180×14mm. The technical requirements are as follows: The angle of incidence is 45°. Coating samples pass the adhesion and moderate friction test specified in GJB2485-1995 at one time.

[0039] First of all, according to the above technical requirements, the optimal design of the film structure is carried out, and the results are as follows:

[0040] Sub / aCr / bM / cAu / dZnS / eYF 3 / fZnS / gTa 2 o 5 / Air

[0041] Wherein, a-f are the physical thickness of the film layer, M is the occlusal bonding layer composed of the ultra-thin chromium layer and the ultra-thin gold layer, and the physical thicknesses are 3.0nm and 5.5nm respectively. Other thicknesses are: a-30nm; c-130nm; d-18nm; e-125nm; f-60nm, g-20nm.

[0042] The specific implementation of the preparation process is as follows:

[0043] (1) Preparation: First, roughly wipe it with a spe...

Embodiment 2

[0054] A laser / infrared dual-band high-reflection film, the substrate material is K9 glass, and the size is 100×140×12mm. The technical requirements are as follows: The incident angle is 10°~60°. Coating samples must pass the adhesion and moderate friction test specified in GJB2485-1995, and the threshold level of anti-laser damage is greater than 300MW / cm 2 .

[0055] First of all, according to the above technical requirements, the optimal design of the film structure is carried out, and the results are as follows:

[0056] Sub|aCr / bM / cAg / dAl 2 o 3 / eSiO 2 / fO 2 / gSiO 2 / TiO 2 / iTa 2 o 5 / Air

[0057] Wherein, a-f are the physical thickness of the film layer, M is the occlusal bonding layer composed of the ultra-thin copper layer and the ultra-thin silver layer, and the physical thicknesses are 8.5nm and 13.0nm respectively. Other thicknesses are: a-30nm; c-130nm; d-35nm; e-28nm; f-71.8nm; g-53.9nm; h-54.2nm; i-20nm.

[0058] The specific implementation of the p...

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Abstract

The invention provides an infrared metal reflecting film with high adhesive force and a manufacturing method thereof, wherein the infrared metal reflecting film with high adhesive force is plated on substrates of optical components such as glass, metal and silicon crystals. The infrared metal reflecting film with high adhesive force comprises a substrate, and is characterized in that a first transition layer, a holding-on bonding layer, a metal layer, a stress matching layer, a dielectric enhancement protecting layer and a hard wear-resistant layer are sequentially arranged on the substrate in an evaporation mode. The infrared metal reflecting film has the advantages of being good in film adhesive force, high in reflectivity, resistant to wear and high in environmental suitability, has a high laser damage resistance threshold value level, and can be widely applied to military and civilian photoelectron technical fields such as infrared lasers, refraction-reflection type optical systems and laser/infrared universal photoelectric equipment.

Description

technical field [0001] The invention relates to a high-adhesion infrared metal reflective film plated on optical components such as glass, metal and silicon crystal and a preparation method thereof, belonging to the technical field of optical thin films. Background technique [0002] With the continuous development of multi-band and multi-functional integration of military optoelectronic equipment, the application of scanning mirrors and catadioptric mirrors is becoming more and more extensive, and the related technical requirements are also increasing. Not only is the reflective film required to have good optical and mechanical properties, but it must also have a certain level of anti-laser damage threshold. On the other hand, infrared metal reflective film in high performance CO 2 Lasers are also widely used, such as large-scale reflectors in stacked lasers, adjustment-free right-angle cone reflectors, and scanning reflective primary mirrors for laser numerical control cu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B1/10B32B17/06B32B15/04C23C14/30C23C14/02C23C14/14
Inventor 姚细林熊长新耿安兵李东亮何光宗
Owner NO 717 INST CHINA MARINE HEAVY IND GRP
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