A method for
surface shape control of optical elements based on target-substrate eccentric deposition includes the following steps: First, select the
coating material for the
surface shape control layer, calculate the non-uniformity of the film thickness distribution of the
coating material under different target-substrate eccentric angles, and determine the actual target-substrate eccentric angle for preparing the
surface shape control layer; next, fit the calculated film thickness distribution of the surface
shape control layer under the target-substrate eccentric angle to obtain the compensated surface shape power value achieved by the surface
shape control layer within a certain deposition time; then, determine the actual deposition time for preparing the surface
shape control layer based on the power value to be compensated for the optical element; finally, prepare the surface shape
control layer using magnetron
sputtering technology. This invention achieves surface shape control by adjusting the relative eccentricity angle between the target and the substrate during magnetron
sputtering deposition, adapting to any surface shape optical element without modifying hardware and without affecting the element's optical performance; the thickness of the surface shape control layer is significantly reduced compared to traditional methods, which helps to improve the damage threshold of
laser thin film elements.