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296results about How to "Reduce electric field" patented technology

Low temperature electric precipitation system in fuel electric plant

A low temperature electric precipitation system in a fuel electric plant comprises at least one air preheater, at least one electric precipitator and connecting pipes for connecting the air preheater and the electric precipitator together, a flue-gas heat exchanger for lowering the flue-gas temperature entering the electric precipitator to enable the flue-gas temperature to reach or be lower than flue-gas dew point at the temperature of 90 DEG C is arranged between the air preheater outlet and the electric precipitator inlet; the electric precipitator is communicated with a desulfuration absorption tower through an induced-draft fan; a chimney is connected with the rear part of the desulfuration absorption tower. The flue-gas heat exchanger adopts a backward flow heat exchange type; a vertical pipe heat exchange flow passage or a horizontal pipe heat exchange flow passage is arranged at the inner part of the flue-gas heat exchanger; the system has the characteristics that the project equipment investment is reduced; the auxiliary power ratio is lowered; the energy is saved; the consumption is reduced; the heat economy of the unit can be improved; the latest environment-friendly emission standard can be satisfied.
Owner:ZHEJIANG ELECTRIC POWER DESIGN INST +1

Silicon-based near-infrared single photon avalanche diode detector and manufacturing method thereof

The invention discloses a silicon-based near-infrared single photon avalanche diode detector, and belongs to the technical field of photoelectric detection. The single photon avalanche diode detectorcomprises a P-type epitaxial layer arranged above a P-type substrate, wherein the P-type substrate and the P-type epitaxial layer are provided with an N+ buried layer region therebetween, deep P wellregions are symmetrically arranged on the N+ buried layer region, a deep P well region is arranged on the N+ buried layer region at the central position, and an avalanche region is formed between thedeep P well region and the N+ buried layer region. According to the single photon avalanche diode detector, the deep avalanche region is formed between the deep P well and the N+ buried layer, the lightly-doped and uniformly distributed P-type epitaxial layer is utilized as a virtual protection ring at the same time to improve the near-infrared photon detection efficiency, the size of the device is reduced, and the dark counting noise is reduced. The manufacturing method can carry out manufacturing based on the standard silicon-based process, and has the advantages of low cost, high integration, low power consumption, near-infrared detection capability and the like.
Owner:NANJING UNIV OF POSTS & TELECOMM

Three-mesa p-Pi-n structured III-nitride semiconductor avalanche photodetector and preparation method thereof

InactiveCN104282793AAvoid premature breakdownSolve the problem of reverse premature breakdownFinal product manufactureSemiconductor devicesPhotodetectorElectrode Contact
The invention relates to the technical field of detectors, in particular to a three-mesa p-Pi-n structured III-nitride semiconductor avalanche photodetector and a preparation method of the three-mesa p-Pi-n structured III-nitride semiconductor avalanche photodetector. The three-mesa p-Pi-n structured III-nitride semiconductor avalanche photodetector comprises a substrate, a buffer layer, an n-type doping nitride ohmic electrode contact layer, a Pi-type nitride active layer, a p-type doping nitride layer, a p-type heavy-doping nitride ohmic contact layer, n-type ohmic contact electrodes and a p-type ohmic contact electrode, wherein the buffer layer, the n-type doping nitride ohmic electrode contact layer, the Pi-type nitride active layer, the p-type doping nitride layer and the p-type heavy-doping nitride ohmic contact layer are sequentially grown on the substrate through epitaxial growth methods such as a molecular beam epitaxial method or an organometallic chemical vapor deposition epitaxial method; the n-type ohmic contact electrodes are manufactured on the n-type layer, and the p-type ohmic contact electrode is manufactured on the p-type layer. The three-mesa p-Pi-n structured III-nitride semiconductor avalanche photodetector can solve the problems that a traditional p-i-n structured device leaks a large number of currents and the edge of the traditional p-i-n structured device can be broken through easily in advance; moreover, a three-mesa structure conducts double-suppression protection on edge electric fields of a strong electric field region and a weak electric field region of a p-Pi-n structured device, so that the edge electric field is effectively prevented from being broken through in advance.
Owner:SUN YAT SEN UNIV

CMOS (Complementary Metal-Oxide-Semiconductor) transistor and stress memory treatment method thereof

The invention discloses a CMOS (Complementary Metal-Oxide-Semiconductor) transistor and a stress memory treatment method thereof. The method comprises the following steps of: providing a substrate with a formed CMOS transistor, wherein the lower surface of the substrate is provided with a silicon oxide layer corresponding to the inner layer of the side wall of a grid of the CMOS transistor and a silicon nitride layer corresponding to the outer layer of the side wall of the grid; sequentially depositing a buffer oxide layer and a stress silicon nitride layer on the upper surface of the CMOS transistor; removing the stress silicon nitride layer on the upper surface of a PMOS (P-channel Metal Oxide Semiconductor) transistor and annealing the substrate if the CMOS transistor comprises a NMOS (N-channel Metal Oxide Semiconductor) transistor and the PMOS transistor; directly annealing the substrate if the CMOS transistor comprises the NMOS transistor; and removing the stress silicon nitride layer on the upper surface of the NMOS transistor and the buffer oxide layer and keeping the silicon oxide layer and the silicon nitride layer, corresponding to the side wall of the grid, on the lower surface of the substrate. The stress memory treatment method in the invention is favorable for decreasing the occurrence probability of PID (Proportion Integration Differentiation) and saving cost, and is simple.
Owner:SEMICON MFG INT (SHANGHAI) CORP +1

Semiconductor device, p-type MOS transistor and manufacturing method thereof

The invention relates to a semiconductor device, a p-type MOS transistor and a manufacturing method thereof. The method for manufacturing the semiconductor device comprises the following steps: providing a semiconductor substrate; taking a grid medium layer and a grid electrode as masks, and implanting fluorine ions into a semiconductor substrate in a high-voltage device region; taking the grid medium layer and the grid electrode as the masks, and implanting low doped ions into a semiconductor substrate in the p-type MOS transistor region of the high-voltage device region; performing quick thermal annealing; forming side walls on both sides of the grid medium layer and the grid electrode in the high-voltage device region; and forming a heavy doping source / drain region in the semiconductor substrate of the high-voltage device region. The invention also provides the semiconductor device, the p-type MOS transistor and the manufacturing method thereof. The invention is favorable for restricting the influence of the NBTI effect on the MOS transistor by forming a fluorine ion implantation region on a low doping source / drain region in the p-type MOS transistor region of the high-voltage device region, and simultaneously can reduce the hot carrier injection effect.
Owner:SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP

Production method of semi-conductive buffer water-blocking band

The invention relates to a production method of a water-blocking band, in particular to a production method of a semi-conductive buffer water-blocking band. The production method comprises the following steps: firstly, supercharging and soaking a high-temperature resistant polyester sponge and terylene cloth in conductive liquid, spraying high water-absorbent resin on the terylene cloth and compounding the high-temperature resistant polyester sponge and the terylene cloth; then, spraying the conductive liquid with a high-pressure spray gun and drying the high-temperature resistant polyester sponge and the terylene cloth which are compounded in vacuum at a high temperature; and finally, coiling, cutting and packaging the high-temperature resistant polyester sponge and the terylene cloth which are compounded in vacuum to be a finished semi-conductive buffer water-blocking band . Proved by detection, the semi-conductive buffer water-blocking band has the advantages of high intensity, thinness, rapid swelling in water, high water absorption, good water-blocking effect, high-temperature environment influence resistance, small surface resistance, low volume electric resistivity, European Union environmental protection accordance, and the like, can satisfy the water blocking and the electric field shielding among parts of power cables, and the like, maintains the safe use of the cables, can generate the semi-conductive shielding action so as to buffer an electric field, can be lined at the inner side of a metal protective sleeve to buffer the friction between the inner protective sleeve and the metal protective sleeve and can satisfy the normal working temperature of the cables.
Owner:YANG ZHOU TENGFEI ELECTRIC CABLE & APPLIANCE MATERIALS CO LTD

Power transistor and manufacturing method thereof

The invention relates to a power transistor, which comprises a substrate, an active region and a terminal region, wherein the active region and the terminal region are formed on the substrate; the terminal region comprises a transition field limiting ring, field limiting rings, a cut-off ring and voltage-sharing protection structures; the transition field limiting ring, the field limiting rings and the cut-off ring are formed on the substrate and are sequentially arranged from inside to outside; gate oxidation layers in the voltage-sharing protection structures are formed on the surfaces of various doped regions; the field oxidation layers, first dielectric layers and second dielectric layers are formed on substrates at one side of various doped regions and are sequentially distributed upwards in a stepped form; the thickness of each field oxidation layer is greater than that of each gate oxidation layer; polysilicon field plates partially cover the gate oxidation layers and partially cover the field oxidation layers; first contact holes are formed in the first dielectric layers, run through the first dielectric layers and are connected to the polysilicon field plates; metal field plates partially cover the first dielectric layers and the second dielectric layers; and the metal field plates are connected with the polysilicon field plates through the first contact holes. The breakdown voltage of the power transistor is relatively high. The invention further relates to a manufacturing method of the power transistor.
Owner:深圳深爱半导体股份有限公司

Method for manufacturing PMOS transistor

The invention provides a method for manufacturing a PMOS transistor. First of all, a second groove is formed through etching in a stress filling layer which is about to be predoped to prepare a source region and a drain region, the side wall of the second groove below a gate area being adjacent to a reserved part of a lightly doped source leakage extension area before the stress filling layer is formed, and afterwards, the second groove is filled so as to form an adjustment layer whose doping concentration is higher than that of the stress filling layer so that at the time when a source-drain area is prevented from generating break-through currents, the Ge and B doping concentrations on the surfaces of the source region and the drain region are improved; on one hand, the lost B doping impurities in the reserved part of the lightly doped source leakage extension area are supplemented, the B doping concentration of the lightly doped source leakage extension area is increased, the resistance of a channel region, the source region and the drain region is reduced, the electric field of the channel region is reduced, and the working currents are improved; and on the other hand, the stress applied to the channel region by the source region and the drain region is enhanced, the carrier mobility of the device channel region is improved, and the working currents of the PMOS transistor are increased.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Semiconductor device, n-type MOS transistor and manufacturing method thereof

The invention relates to a semiconductor device, an n-type MOS transistor and a manufacturing method thereof. The semiconductor device comprises a semiconductor substrate, a grid medium layer, a grid electrode, side walls, a light doping source/drain region, a heavy doping source/drain region, and a fluorine ion implantation region, wherein the gird medium layer, the grid electrode and the side wall are positioned inside an input/output device region of the semiconductor substrate; the low doping source/drain region and the heavy doping source/drain region are positioned inside semiconductor substrates in an n-type MOS transistor region and a p-type MOS transistor region of the input/output device region; and the fluorine ion implantation region is positioned inside a semiconductor substrate in the n-type MOS transistor region of the input/output device region. Correspondingly, the invention also provides a method for manufacturing the semiconductor device, the n-type MOS transistor and the method for manufacturing the n-type MOS transistor. The fluorine ion implantation region is formed in the low doping source/drain region of the n-type MOS transistor region, and fluorine ions in the fluorine ion implantation region and silicon in the semiconductor substrate form fluorine-silicon groups so as to prevent the formation of charge traps, prevent the aggregation of charges in the low doping source/drain region under the condition of additional voltage, and forming hot carrier effect.
Owner:SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP

Manufacturing method of through hole interconnection structure and product of through hole interconnection structure

The invention discloses a manufacturing method of a through hole interconnection structure. The manufacturing method of the through hole interconnection structure comprises the following steps: (a) a blind hole is machined in one surface of a substrate; (b) an insulating layer and a barrier layer are deposited on the whole surface in sequence, where the blind hole is machined, of the substrate; (c) a light-sensitive dry film is paved on and attached to the surface, containing the barrier layer, of the substrate, and exposure imaging treatment is carried out on the surface, so that an opening exposed out of the blind hole is formed; (d) the dry film is used as a covering film, a seed layer is formed on the barrier layer on the bottom of the blind hole, and the seed layer is prevented from covering the barrier layer deposited on the lateral wall of the blind hole; (e) growth from bottom to top is achieved with the seed layer on the bottom of a through hole as guiding media, and the thickness of another surface of the substrate is reduced until the blind hole is machined to be the through hole. The invention further discloses a product of the through hole interconnection structure. According to the manufacturing method of the through hole interconnection structure and the product of the through hole interconnection structure, through hole electroplating which is convenient to control, low in cost, and high in efficiency can be achieved, and the product of the through hole interconnection structure and with better filling effect can be obtained.
Owner:HUAZHONG UNIV OF SCI & TECH

Enhanced silicon carbide MOSFET device and manufacturing method thereof

The invention discloses an enhanced silicon carbide MOSFET device. The enhanced silicon carbide MOSFET device sequentially comprises back metal, an N+ type heavily doped SiC substrate, an N- epitaxiallayer, an insulating dielectric layer and front metal from bottom to top. According to the invention, a Schottky diode is integrated into the MOSFET device, and the area of a Schottky barrier metal layer is flexibly increased or decreased to adjust and adapt to the current and specification of the MOSFET and the Schottky diode, so that the effects of increasing the switching speed of the MOSFET,reducing the switching loss and the like are achieved, the performance and the reliability of the device can be greatly improved, and the application cost of the device is reduced. The enhanced silicon carbide MOSFET device adopts a trench SiC MOSFET design, and a conductive channel is changed from the traditional horizontal direction to the vertical direction, so that a JFET effect between primitive cells of the traditional MOSFET is eliminated, and the current capability of the device is improved. The gate bottom P region at the bottom of the trench can protect and weaken an electric field at the bottom of the trench, thereby playing a certain role in electrostatic shielding of gate oxide at the bottom of the trench, and improving the reliability of the device. Meanwhile, certain help isprovided for voltage resistance of the device.
Owner:SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA

SiC power device

ActiveCN110767753ASmall pressure dropEliminate minority carrier injection effectDiodeHeterojunction diodeMinority carrier injection
The invention belongs to the field of power semiconductors, and particularly provides a SiC power device. The SiC power device comprises a SiC MOSFET and a SiC IGBT. For the SiC MOSFET device integrated with a PN junction body diode, the reverse recovery charge and related loss of the body diode can be greatly reduced, the reverse recovery peak current is reduced, and the EMI noise is reduced; forthe SiC MOSFET device integrated with an N-type Schottky diode or an integrated heterojunction diode, the voltage drop during reverse conduction of the MOSFET can be reduced, and the minority carrierinjection effect is eliminated, so that the conduction loss and reverse recovery loss of the diode are reduced; for the reverse conduction type SiC IGBT device integrated with the PN junction body diode, the reverse recovery charge and related loss of the body diode can be greatly reduced, the reverse recovery peak current is reduced, and the EMI noise is reduced; and moreover, for the reverse conduction type SiC IGBT device integrated with the N-type Schottky diode or the heterojunction diode, the voltage drop during reverse conduction of the reverse conduction IGBT can be reduced, the minority carrier injection effect is eliminated, and the conduction loss and reverse recovery loss of the diode are reduced.
Owner:UNIV OF ELECTRONIC SCI & TECH OF CHINA

Heterojunction field effect transistor for groove insulated gate type multiple source field plate

The invention discloses a heterojunction field effect transistor of a groove-insulated gate type composite source field plate. The transistor comprises a substrate, a transition layer, a barrier layer, a source electrode, a drain electrode, an insulation medium layer, an insulated groove gate, a passivation layer, a source field plate and a protection layer from bottom to top; a groove is opened on the barrier layer, the insulated groove gate is arranged on the insulation medium layer at the upper part of the groove, the source field plate is arranged on the passivation layer, and the source electrode is electrically connected with the source field plate, wherein, n floating field plates are deposited on the passivation layer arranged between the source field plate and the drain field plate. The floating field plates have the same size and are mutually independent, and the spacing between two adjacent floating field plates increases based on the number of the floating field plates arranged along the direction from the source field plate to the drain electrode. The n floating field plates are in floating state and completed together with the source field plate on the passivation layer by one-time process. The heterojunction field effect transistor has the advantages of simple process, good reliability, strong stability, good frequency characteristic and high output power, and can be used for fabricating microwave power devices based on III-V group compound semiconductor heterojunction structure.
Owner:XIDIAN UNIV

A structure of SiC UMOSFET integrated with SBD and a preparation method thereof

The invention provides a silicon carbide trench gate metal oxide with semiconductor field effect transistor (SiC UMOSFET) structure integrated Schottky diode (SBD) and a method for manufacturing the same, The structure is characterized by, a p +-type bury layer (50) is formed on the n-type current transport layer (40) by implantation, and further an n-type current transport layer (40) is epitaxially formed so that the p +-type buried layer (50) floats, and the p +-type buried layer (50) can effectively reduce the electric field in the gate trench oxide and the electric field at the Schottky contact position in the blocking mode, so that the SBD integrated SiC UMOSFET has high blocking ability, and the high temperature and high field reliability of the device are greatly improved. At that same time, the relative position of the main trench (80), the main trench (80') and the p +-type buried layer (50) and the n-type current transport layer (40) are adjusted so that when the MOSFET is operated in the first quadrant, the conduction characteristic of the MOSFET does not degrade significantly; When the MOSFET is operated in the third quadrant, the conduction of the parasitic pn diode inthe MOSFET is effectively suppressed and the Schottky diode conduction mode is obtained. SiC UMOSFETs with integrated SBD have a lower total chip area than discrete SBD and MOSFET devices.
Owner:INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI

Schottky barrier diode device structure and manufacturing method thereof

The invention provides a Schottky barrier diode device structure and a manufacturing method of the structure. The device structure comprises a first conductive type substrate, first conductive type epitaxial layers which are combined on the surface of the first conductive type substrate, a plurality of groove structures, second conductive type doping areas, a Schottky metal layer and an upper electrode. The groove structures comprise grooves formed in the first conductive type epitaxial layers, dielectric layers combined on the surfaces of the grooves, and conductive materials, the grooves are filled with the conductive materials, the second conductive type doping areas are formed at the positions, arranged on two sides of the groove structures, of the surfaces of the first conductive type epitaxial layers, and the Schottky metal layer is formed on the surfaces of the first conductive type epitaxial layers. The doping areas are added on two sides of the groove structures, the P / N knot is introduced, electric fields of the areas are reduced, and therefore reverse leakage currents are reduced. Meanwhile, JFET structures are introduced between the doping areas, reverse breakdown voltages of the Schottky barrier diode device structure are improved, and the reverse leakage currents are reduced.
Owner:CHINA RESOURCES MICROELECTRONICS (CHONGQING) CO LTD
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