The invention discloses an n -
zinc oxide / p-
nickel oxide heterogeneous pn junction
ultraviolet laser diode and a preparation method thereof. The heterogeneous pn junction
diode at least comprises a pn junction, a substrate and an
ohm contacting
electrode, wherein the pn junction is the heterogeneous pn junction by plating a p-type
nickel oxide film on an n-type
zinc oxide film; and the substrate is a
sapphire plated with n-type GaN. The preparation method comprises the following steps: firstly preparing the n-type ZnO film layer on the substrate by the
radio frequency magnetron
sputtering technology; then
sputtering a p-type NiO film layer on the n-type ZnO film layer to form the heterogeneity pn junction; finally manufacturing a pn junction
electrode by a
sputtering method or a thermal
evaporation method; sputtering gold electrodes or
platinum electrodes or
nickel platinum electrodes or ITO electrodes on the NiO surface; plating
indium electrodes or aluminum electrodes or gold electrodes on the GaN or the edge of ZnO; and making the electrodes form
ohm contact after annealing alloying. The heterogeneous pn junction
diode has the advantages of better electro-
ultraviolet lasing
luminescence characteristic, peak luminous
wavelength of about 375 nm, simple preparation process and low cost.