The invention belongs to the technical field of
semiconductor devices, and particularly relates to a preparation method of a
semiconductor X-
ray detector, by adopting a PNN type double built-in
electric field configuration with the free
electron density increasing step by step, the intensity of built-in electric fields is enhanced, meanwhile, the
electron transporting capacity of the built-in electric fields is expanded, and under the condition that no external power supply exists, the performance of the X-
ray detector is improved.
Self energy supply is achieved through the Compton effect and the
photovoltaic effect of the X-rays, and detection of the X-rays is completed. A built-in
electric field of the
detector is strong enough, absorption of X-
ray energy and transport of carriers are better than those of a traditional X-ray detector, and detection is sensitive; as the detector is not provided with a power supply, the detector has the technical effects of no
power consumption, low
failure rate, light weight, small size and convenience in carrying. The invention also provides a non-transitory readable recording medium storing the program of the method and a
system comprising the medium, and the program can be called through a
processing circuit to execute the method.