The invention discloses a preparation method of a selective
boron-doped P + emitter based on a low-temperature process and a battery. The preparation method comprises the following steps: (1) texturing two surfaces of a
silicon substrate; (2) introducing a
boron source into the surface of the
silicon substrate, and simultaneously introducing
water vapor to perform low-temperature BSG deposition; (3) carrying out
laser boron doping on the front surface of the
silicon substrate to form a selective boron-doped P + emitter; (4) carrying out oxidation treatment on the surface of the silicon substrate to obtain a
silicon oxide layer; and (5) removing the BSG on the back surface of the silicon substrate,
polishing the back surface, removing the low-concentration boron-doped region on the back surface, and then removing the BSG and the
silicon oxide layer on the front surface to obtain the front-surface selective boron-doped P + emitter.
Boron diffusion is realized through a low-temperature process, then
doping is performed in cooperation with
laser to form the selective P + emitter, bending and damage of the silicon
wafer are avoided through low-temperature
boron diffusion, limitation on thickness selection of the silicon
wafer is reduced, the prepared P + emitter is the front-side selective boron-doped P + emitter, the surface
recombination rate is low, and the battery efficiency can be improved.