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250 results about "Tandem solar cell" patented technology

Tandem solar cells comprise more than one layer, and are effectively a stack of different solar cells on top of each other. Tandem solar cells can either be individual cells or connected in series, and tandem solar cells typically have much higher efficiencies...

Back contact cell and preparation method thereof, laminated cell and photovoltaic module

The invention discloses a back contact cell and a preparation method thereof, a laminated cell and a photovoltaic module, and belongs to the technical field of photovoltaics, the back contact cell comprises a substrate, the substrate comprises a first region, a second region and a spacer region located between the first region and the second region, and a tunneling oxide layer and a doped polycrystalline silicon layer are arranged in the first region and the spacer region. The doped polycrystalline silicon layer is arranged on the surface, deviating from the substrate in the thickness direction, of the tunneling oxide layer, the amorphous silicon passivation layer and the doped amorphous silicon layer are arranged in the second region and the spacer region, and the doped amorphous silicon layer is arranged on the surface, deviating from the substrate in the thickness direction, of the amorphous silicon passivation layer. And the amorphous silicon passivation layer in the spacer region is positioned on one side, deviating from the substrate along the thickness direction, of the doped polycrystalline silicon layer. The insulating layer is arranged between the amorphous silicon passivation layer and the doped polycrystalline silicon layer, the insulating layer comprises a first insulating part which extends in the thickness direction and is arranged at the junction position of the second region and the spacer region, the first insulating part can prevent the back contact cell from leaking electricity in the horizontal direction, and the overall electrical performance of the back contact cell is improved.
Owner:JINKO SOLAR (HAINING) CO LTS

Full-perovskite laminated solar cell based on narrow-band gap buried interface modification and preparation method and application of full-perovskite laminated solar cell

The invention discloses a full-perovskite laminated solar cell based on narrow-band-gap buried interface modification and a preparation method and application of the full-perovskite laminated solar cell. According to the preparation method of the full-perovskite laminated solar cell based on narrow-band-gap buried interface modification, hydrazine sulfate and lead iodide are introduced to serve as an interface modification layer between a narrow-band-gap perovskite layer and a hole transport layer, and through the synergistic effect of the hydrazine sulfate and the lead iodide, surface defects of the hole transport layer can be effectively passivated; moreover, the hole mobility can be improved remarkably, and the photoelectric conversion efficiency of the cell is improved based on the preparation method of the full-perovskite laminated solar cell. The full-perovskite laminated solar cell has high photovoltaic performance and can be widely applied to the photoelectric field.
Owner:NANJING TECH UNIV

Perovskite crystalline silicon laminated cell, manufacturing method thereof, photovoltaic module and photovoltaic system

The invention relates to the technical field of batteries, and discloses a perovskite crystalline silicon laminated battery, a manufacturing method thereof, a photovoltaic module and a photovoltaic system. The manufacturing method of the perovskite crystalline silicon laminated cell comprises the following steps: providing a silicon substrate, wherein the silicon substrate comprises a first surface and a second surface which are oppositely arranged; manufacturing a P-type doped layer and a first electrode layer which are stacked in sequence on the first surface of the silicon substrate; an N-type doped layer, a tunneling layer, a hole transport layer, a perovskite layer, an electron transport layer, a buffer layer, a second electrode layer and an antireflection layer which are sequentially stacked are manufactured on the second surface of the silicon substrate; wherein the step of manufacturing the buffer layer comprises the step of forming the buffer layer on one side, far away from the perovskite layer, of the electron transport layer by adopting a plasma enhanced atomic layer deposition method. According to the technical scheme provided by the invention, the long-term stability of the perovskite crystalline silicon laminated cell can be improved.
Owner:SHENZHEN HIKING PV TECHNOLOGY CO LTD

Perovskite-silicon laminated solar cell, preparation method thereof and photovoltaic module

The invention discloses a perovskite-silicon laminated solar cell, a preparation method thereof and a photovoltaic module, the perovskite-silicon laminated solar cell comprises a silicon bottom cell and a perovskite top cell arranged on the silicon bottom cell, the exposed side surface of the silicon bottom cell is provided with a first hydrogen enrichment layer, and the perovskite top cell is provided with a second hydrogen enrichment layer; wherein the perovskite top cell comprises a transparent conductive layer arranged away from the silicon bottom cell, and the second hydrogen enrichment layer at least comprises a first sub-layer arranged on the top surface, away from the silicon bottom cell, of the transparent conductive layer. The passivation effect of the outer edge region of the perovskite-silicon laminated cell can be effectively improved, so that the photoelectric conversion efficiency of the cell is improved.
Owner:TONGWEI SOLAR ENERGY (CHENGDU) CO LID

Solar cell and tandem solar cell

Provided is a solar cell and a tandem solar cell. The solar cell includes substrate, tunnel dielectric layer, doped conductive layer and first electrode. First surface of the substrate includes metallization and non-metallization regions. The metallization region has first texture structure including first recess. The non-metallization region has second texture structure including second recess. Bottom surface of the first recess has a smaller average one-dimensional size than the second recess. The metallization region includes first and second regions, the first regions are arranged at intervals in first direction, the second regions are arranged at intervals in second direction and connected between adjacent first regions. The tunnel dielectric layer is arranged on the first texture structure. The doped conductive layer is arranged on the tunnel dielectric layer away from the substrate. The first electrode includes finger electrodes electrically connected with the doped conductive layer and corresponding to the first regions.
Owner:ZHEJIANG JINKO SOLAR CO LTD

Laminated cell, preparation method thereof and photovoltaic module

The invention relates to the field of photovoltaic technology, and provides a laminated cell and a preparation method thereof, and a photovoltaic module, the laminated cell comprises a bottom cell and a top cell which are laminated, the bottom cell comprises a crystalline silicon solar cell, and the top cell comprises a perovskite solar cell; the perovskite solar cell comprises a perovskite light absorption layer and a functional layer which are arranged in a stacked mode, the functional layer comprises a first functional layer and a second functional layer which are arranged in a stacked mode, the first functional layer is adjacent to the perovskite light absorption layer, and the second functional layer is arranged on the side, away from the perovskite light absorption layer, of the first functional layer; the first functional layer comprises a titanium oxide nanorod array, and the second functional layer comprises a zirconium oxide layer with a plurality of pores. The laminated cell provided by the invention has the advantages that the optical utilization rate is improved, so that the photoelectric conversion efficiency is improved.
Owner:JINKO SOLAR (HAINING) CO LTS

Tandem solar cell and method for manufacturing same

PCT designated stageWO2025249111A1Electrical batteryTandem solar cell
The present invention addresses the problem of providing a tandem solar battery (1) having a simple configuration and exceptional battery performance. A tandem solar battery (1) that solves the aforementioned problem includes a first solar battery cell (CB1) that includes a first light absorption layer (10) containing n-type or p-type crystal silicon, a titanium oxide layer (31) that is disposed on the first light absorption layer (10) and contains amorphous titanium oxide, an intermediate layer (32) that is disposed adjacent to the titanium oxide layer (31) and contains tin oxide or titanium nitride having a higher nitrogen composition than the titanium oxide layer (31), and a second solar battery cell (CT1) disposed on the intermediate layer (32).
Owner:NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE & TECHNOLOGY

Module layup for perovskite-silicon tandem solar cells

Solar cell modules and methods of fabrication are described. In an embodiment, a pair of tandem solar cells are bonded together along a contact ledge of a first tandem solar cell using a solid electrically conductive bonding material.
Owner:SWIFT SOLAR INC

Perovskite solar cell and tandem solar cell comprising same

The present invention relates to a perovskite solar cell and a tandem solar cell comprising the same, characterized in that the perovskite solar cell comprises: a substrate; a transparent electrode; a hole transport layer; a perovskite light absorption layer; an electron transport layer; and a metal electrode, wherein the electron transport layer is a graded thin film in which a chemical binding state of elements constituting the electron transport layer gradually changes from the lower portion thereof toward the upper portion thereof.
Owner:HANWHA SOLUTIONS CORP

Preparation method of perovskite / crystalline silicon tandem solar cell and cell

The application provides a preparation method of a perovskite / crystalline silicon laminated solar cell and the cell. The self-assembled monolayer is blocked from adsorbing on a tunneling layer through a non-full-coverage insulating layer, so as to achieve the effect of a non-full-coverage hole transport layer. On one hand, the lateral conduction network of the hole transport layer can be directly cut off, so that the holes can only migrate longitudinally along the preset transport channel area, and the hole diffusion loss is reduced from the root; on the other hand, the insulating layer is used as a blocking material, and due to the excellent chemical inertness and thermal stability, the insulating layer can be used as a part of interface barrier to inhibit the chemical reaction between the perovskite layer and the SAM layer, slow down the decomposition rate of the perovskite crystal caused by interface erosion, and moreover, the non-full-coverage design can reduce the total amount of SAM molecules by 40%-55%, the SAM molecules in the transport channel area are not densely accumulated, and the problems of transport channel rupture and defect increase caused by molecular aggregation in the traditional structure are avoided.
Owner:SHENZHEN HIKING PV TECHNOLOGY CO LTD

Solar cell and preparation process thereof, laminated cell, photovoltaic module

This invention provides a solar cell, its fabrication process, a tandem solar cell, and a photovoltaic module. The fabrication process of the solar cell includes: providing a cell substrate; printing a conductive material onto the cell substrate; and curing the conductive material to form initial grid lines. The conductive material includes bismuth-based lead-free glass; the conductive material also includes copper powder and nickel powder; the mass ratio of copper powder to nickel powder is 80~99.5:0.5~20, and the copper powder includes flake-shaped copper powder and spherical copper powder. In the fabrication process of this invention, the conductive material, through a ternary synergistic system of "copper-nickel-glass" and a dual-morphology copper powder composite design, achieves multiple effects such as suppressing copper diffusion and oxidation and improving adhesion under an air-sintering atmosphere, thereby improving the fill factor and photoelectric conversion efficiency of the solar cell.
Owner:JINKO SOLAR (HAINING) CO LTS

A back-contact tandem solar cell, its fabrication method, and a photovoltaic module.

This application relates to a back-contact tandem solar cell, its fabrication method, and a photovoltaic module, belonging to the field of photovoltaic technology. The back-contact tandem solar cell includes a back-contact bottom cell and a perovskite top cell, with the perovskite top cell electrically connected to the front side of the back-contact bottom cell via an interconnect layer. The back-contact bottom cell includes a substrate, and the perovskite top cell includes an electron transport layer, a perovskite layer, and a hole transport layer sequentially disposed on the interconnect layer. The surface of the substrate facing the perovskite layer has a textured structure, so that the surfaces of the interconnect layer and the electron transport layer facing the perovskite top cell also have textured structures. The textured structure includes multiple pyramidal structures, and the surface of the pyramidal structures includes multiple recessed structures. The perovskite precursor liquid is guided downward by the recessed structures, promoting the uniform spreading of the perovskite precursor liquid on the surface of the electron transport layer, reducing the risk of pinholes in the perovskite layer, and improving the quality of the perovskite layer.
Owner:JINKO SOLAR (HAINING) CO LTS

Perovskite / silicon laminated solar cell and preparation method thereof

The invention provides a perovskite / silicon laminated solar cell and a preparation method thereof. The perovskite / silicon laminated solar cell comprises a silicon substrate cell, a hole transport layer, a perovskite light absorption layer, an electron transport layer, a functional layer and an electrode which are sequentially laminated, the material of the electron transport layer comprises tungsten disulfide, and the material of the perovskite light absorption layer comprises a rare earth doped perovskite material. The perovskite / silicon laminated solar cell has high charge transmission capability and space environment endurance capability, is especially suitable for space scenes such as near-earth orbit satellites, and has high stability and environment adaptability.
Owner:SHANGHAI AMPTAI FUTURE ENERGY TECHNOLOGY R&D CO LTD

Solar cell, tandem solar cell, and photovoltaic module

Provided are a solar cell, a method for preparing a solar cell, a tandem solar cell, and a photovoltaic module. The solar cell includes a substrate, a doped conductive layer, and a dielectric layer. The substrate has a first surface, where the first surface includes electrode regions and non-electrode regions that are alternatingly arranged along a first direction. The doped conductive layer is formed over the first surface of the substrate. The doped conductive layer includes first conductive portions and at least one second conductive portion. Each respective first conductive portion of the first conductive portions is formed over a respective electrode region of the electrode regions, and each respective second conductive portion of the at least one second conductive portion is formed over a part of a non-electrode region of the non-electrode regions. The dielectric layer is between the first surface and the doped conductive layer.
Owner:ZHEJIANG JINKO SOLAR CO LTD

Laminated cell, preparation method thereof and photovoltaic module

The invention relates to a laminated cell, a preparation method thereof and a photovoltaic module. The laminated cell comprises a bottom cell, a top cell and a composite layer arranged between the bottom cell and the top cell, wherein the bottom cell comprises a silicon substrate, one side, facing the top cell, of the silicon substrate is provided with a first suede structure, the first suede structure comprises a plurality of first rounded pyramid structures, the suede size of each first rounded pyramid structure is 1 [mu] m-3. 5 [mu] m, and the rounded radius of the tower top and the tower bottom is 5 nm-300 nm; the top cell includes a perovskite absorption layer. The laminated cell has improved photoelectric conversion efficiency.
Owner:TONGWEI SOLAR ENERGY (CHENGDU) CO LID

A solar cell, a stacked cell, and a photovoltaic module

This application discloses a solar cell, a tandem solar cell, and a photovoltaic module. The solar cell includes a silicon substrate. The silicon substrate includes a first surface and a second surface disposed opposite to each other. The first surface includes a first region and a second region spaced apart. The surface height of the silicon substrate at the first region is lower than the surface height of the silicon substrate at the second region, so that a step is formed at the boundary between the first region and the second region. An electrode structure is also provided on the first surface, corresponding to the first region and extending to the step. Blind slot structures are distributed on the step, extending in a direction parallel to the thickness direction of the silicon substrate. The method for fabricating the solar cell of the present invention optimizes the interface of the step region, reduces optical loss at the edge of the cell, improves light absorption efficiency, and improves the conversion efficiency of the solar cell.
Owner:HUAIAN JIETAI NEW ENERGY TECHNOLOGY CO LTD

A perovskite / crystalline silicon tandem solar cell preparation method, cell and application

The application provides a perovskite / crystalline silicon laminated solar cell preparation method, a cell and application. The body heterojunction film layer obtained by mixing N-type SAM and P-type SAM is used as a core tunneling layer, the performance of the tunneling layer is precisely optimized, the defects of a traditional technical solution are effectively solved, the photoelectric conversion efficiency and stability of a device are improved, and the perovskite / crystalline silicon laminated solar cell prepared by the method can be well applied to the field of space photovoltaics.
Owner:SHENZHEN HIKING PV TECHNOLOGY CO LTD

Control method of tandem solar cell

A control method of a tandem solar cell includes: determining a P-V curve of a silicon solar cell by performing scanning for generated electric power while changing a generated voltage of the silicon solar cell at regular intervals; performing power generation control of the silicon solar cell at a maximal power point of a P-V curve; predicting an optimum power generation voltage appropriate for a perovskite solar cell using information regarding a P-V curve of the silicon solar cell; and performing power generation control of the perovskite solar cell using an optimum power generation voltage.
Owner:TOYOTA JIDOSHA KK

Adjusting and measuring method and system for a photovoltaic power plant

A method for adjusting and measuring a photovoltaic power plant including a photovoltaic string having solar panels in series and an inverter to convert a DC voltage generated by the photovoltaic string into an AC voltage, the inverter having a DC-voltage inputs, includes:measuring a frequency of an AC voltage generated by the photovoltaic power plant and computing a frequency variation of the AC voltage with respect to a reference frequency and computing a power variation applied by the photovoltaic power plant based on the frequency variation,selecting a DC-voltage input, being the i-th input, to measure a curve of current vs. voltage of the input, having an initial DC voltage, thencomputing a residual power variation applied by the photovoltaic power plantif the residual power variation is non-zero, distributing it over inputs different from the i-th input,repeating the steps to create different points of the measured curve.
Owner:COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Tandem solar cell, and preparation method therefor and use thereof

The present application relates to a tandem solar cell, and a preparation method therefor and the use thereof. The tandem solar cell comprises a first electrode, a first light-absorbing layer, a composite layer, a second light-absorbing layer and a second electrode that are stacked, wherein the composite layer comprises metal composite particles, which comprise metal particles and organic active substances disposed on surfaces of the metal particles. The tandem solar cell has excellent photoelectric conversion efficiency.
Owner:CONTEMPORARY AMPEREX TECHNOLOGY CO LTD

Electron transport layer coating liquid, electron transport layer, perovskite-organic laminated solar cell connection layer, perovskite-organic laminated solar cell and preparation method of perovskite-organic laminated solar cell

The invention relates to the technical field of solar cells, and discloses an electron transport layer coating liquid, an electron transport layer, a perovskite-organic laminated solar cell connection layer, a perovskite-organic laminated solar cell and a preparation method thereof. The electron transport layer coating liquid comprises an electron transport layer material, a solvent and an additive, the electron transport layer material comprises one of a fullerene derivative and C60, the solvent is an organic solvent, and the additive contains one or two functional groups of-S,-SH and-S-S-and a-COOH functional group and has self-polymerization or self-crosslinking capability. Additive molecules interact with an electron transport layer material (PCBM) through intermolecular hydrogen bonds to inhibit agglomeration of the PCBM and promote ordered accumulation of the molecules.
Owner:SOUTHERN UNIVERSITY OF SCIENCE AND TECHNOLOGY

Bifacial three-terminal tandem solar cell

PCT designated stageWO2026095358A1Tandem solar cellElectrical battery
The present invention relates to a bifacial three-terminal tandem solar cell, more specifically to a bifacial three-terminal tandem solar cell having three electrodes in the tandem solar cell, and provided with transparent electrodes that are on both sides to absorb light from both sides and that are spaced apart at a particular ratio to prevent drop in efficiency due to current mismatching and to improve the efficiency of the solar cell.
Owner:KOREA INST OF ENERGY RES

Solar cell, tandem solar cell, passivation material, photovoltaic system, electric device, and power generation device

A solar cell, a passivation material, a photovoltaic system, an electric device, and a power generation device. The solar cell comprises a first light absorption layer (11), the first light absorption layer (11) comprising a passivation material; or, the solar cell comprises a first light absorption layer (11) and a passivation layer, the passivation layer being arranged on one side of the first light absorption layer (11) and comprising a passivation material; or, the solar cell comprises a first light absorption layer (11) and an electron transport layer, the electron transport layer being arranged on one side of the first light absorption layer (11) and comprising a passivation material, and the structural formula of cations of the passivation material being L-R1 and / or R2-L-R3, wherein R1, R2 and R3 each independently comprise a group of -NH-CH=NH2 + and -C(-NH2)=NH2 +. The passivation material is used to passivate the interface of the first light absorption layer (11), achieving a better passivation effect, and improving the efficiency and stability of solar cells.
Owner:CONTEMPORARY AMPEREX TECHNOLOGY CO LTD

Crystalline silicon substrate processing method, perovskite laminated solar cell and photovoltaic module

The invention provides a crystalline silicon substrate processing method, a perovskite laminated solar cell and a photovoltaic module, and the processing method comprises the steps: providing a crystalline silicon substrate with line marks on the surface, and carrying out the first corrosion processing of the line marks through a first mixed solution containing HF, HCl and an ozone solution, and carrying out second corrosion treatment on the crystalline silicon substrate by using a second mixed solution containing NaOH, H2O2 and a texturing additive, carrying out texturing treatment on the crystalline silicon substrate by using a NaOH solution, and forming a textured structure formed by a plurality of pyramid micro-unit structures on the surface of the crystalline silicon substrate. According to the processing method, the height of the line marks on the surface of the crystalline silicon substrate can be effectively reduced to the level suitable for perovskite film forming, a uniform suede structure is formed, the film forming quality of a perovskite film layer is improved, and the photoelectric conversion efficiency and reliability of the perovskite laminated solar cell are improved.
Owner:TONGWEI SOLAR ENERGY (CHENGDU) CO LID

Broadband-gap perovskite solar cell and full-perovskite laminated solar cell

The invention discloses a wide-band-gap perovskite solar cell and a full-perovskite laminated solar cell. Methyl ammonium bromide and guanidine bromide are jointly doped into the perovskite precursor solution to partially replace formamidine iodide, and a multi-element A-site alloy structure is introduced into the perovskite solar cell, so that defects in a perovskite layer are reduced, the service life of a carrier is prolonged, surface non-radiation is inhibited, the voltage loss of a device is reduced, and the performance of the device is improved. Therefore, the performance of the perovskite solar cell is obviously improved.
Owner:UNIV OF SCI & TECH OF CHINA

Solar cells and their fabrication methods, tandem cells and photovoltaic modules

This application relates to the photovoltaic field, providing a solar cell and its fabrication method, a tandem solar cell, and a photovoltaic module. The solar cell includes a substrate; a tunneling dielectric layer located on the surface of the substrate; a doped conductive layer located on the surface of the tunneling dielectric layer; a fluorinated silicon oxide layer located on the surface of the doped conductive layer, the fluorinated silicon oxide layer having a mesoporous structure; a passivation layer located on the surface of the fluorinated silicon oxide layer; and an electrode electrically connected to the doped conductive layer. The solar cell, its fabrication method, the tandem solar cell, and the photovoltaic module provided by this application can at least improve the PID (Potential Influence of Processing) problem.
Owner:JINKO SOLAR (HAINING) CO LTS

Tandem solar cell and method for manufacturing a tandem solar cell

PendingDE102024122154A1Electrical batteryEngineering
The invention relates to a tandem solar cell with a front side forming a light-incidence side and a back side facing away from the light-incidence side, and edges (3) extending between the front and the back side, wherein the tandem solar cell comprises: - an upper thin-film subcell (2) which has an optically transparent, electrically conductive front electrode layer (22) which is formed as the light-incidence side of the upper thin-film subcell (2), and - a lower subcell (1) which has a semiconductor wafer substrate (11) with pn junction layers and with an insulating layer (12) which extends along the edges (3) in the region of the lower subcell (1), so that in the region of the edges (3) at least the semiconductor wafer substrate (11) with the pn junction layers is covered by the insulating layer (12).Furthermore, the invention relates to a method for manufacturing a tandem solar cell with a front side forming a light-incidence side and a back side facing away from the light incidence and edges (3) extending between the front and the back side, wherein the method comprises the following steps: - providing a semiconductor wafer substrate (11) with pn junction layers, - applying an insulating layer (12) along the edges (3) of the semiconductor wafer substrate (11) with the pn junction layers, - applying an upper thin-film subcell (2) with an optically transparent electrically conductive front electrode layer (22) to the semiconductor wafer substrate (11) with the pn junction layers of the lower subcell (1).
Owner:HANWHA Q CELLS GMBH

Perovskite laminated solar cell and preparation method thereof, photovoltaic module, system, power utilization device and power generation device

The invention relates to a perovskite laminated solar cell and a preparation method thereof, a photovoltaic module, a system, a power utilization device and a power generation device. The perovskite laminated solar cell comprises a first sub-cell, a composite layer and a second sub-cell which are sequentially laminated, the composite layer comprises transparent conductive oxide nanoparticles and an insulating filler; in the spreading direction of the composite layer, gaps are formed between at least part of the transparent conductive oxide nanoparticles and the adjacent transparent conductive oxide nanoparticles; at least part of the insulating filler is filled in the gap. The perovskite laminated solar cell disclosed by the invention has relatively high open-circuit voltage, filling factor and conversion efficiency.
Owner:CONTEMPORARY AMPEREX TECHNOLOGY CO LTD

Perovskite laminated solar cell and preparation method thereof

The invention relates to the technical field of solar cells, in particular to a perovskite laminated solar cell and a preparation method thereof. The perovskite laminated solar cell provided by the invention comprises a metal substrate, an InGaAs sub-cell, a middle composite layer and a perovskite sub-cell which are arranged in sequence, the middle composite layer comprises a wide-band-gap InGaAs layer and a p-InGaAs layer which are stacked in sequence, and the band gap of the p-InGaAs layer is smaller than that of the wide-band-gap InGaAs layer; the perovskite sub-cell comprises a perovskite material layer, an electron transport layer and a transparent electrode layer which are arranged in sequence, and the perovskite material layer is in contact with the p-InGaAs layer and is used for forming a planar heterojunction on the contact surface. According to the perovskite laminated solar cell, the band gap requirement of the laminated cell is met, meanwhile, holes and non-uniform coverage are not prone to being generated when the perovskite laminated solar cell is stacked with the perovskite material, the bending degree is good, and the conversion efficiency of the cell is improved.
Owner:WUXI UTMOST LIGHT TECH CO LTD

Fabricating solar cell devices to reduce active layer damage

A method includes obtaining a chassis of a tandem solar cell device, and forming a transparent conductive oxide (TCO) layer on the chassis using a low damage sputter deposition (LDSD) process. The LDSD process includes a rotating facing sputter deposition process.
Owner:APPLIED MATERIALS INC