The application relates to a preparation method of a high-frequency dynamic response flexible thin film array sensor based on alveolar biomimetic structure, and belongs to the technical field of pressure sensors. First, a flexible
polymer thin film is spin-coated on a
glass sheet and solidified, a
metal thin film is deposited on the surface of the flexible
polymer thin film, a
photoresist is spin-coated on the surface of the
metal thin film, and the
photoresist and the
metal thin film are patterned; second,
photoresist type
polyimide is spin-coated on the surface of the patterned
metal thin film, and the photoresist type
polyimide is patterned to
expose only the interdigital unit area and the pad area; third, a
pressure sensitive layer
microstructure prepared from a nano-
composite material is integrally bonded with the interdigital area of the encapsulated photoresist type
polyimide sheet; and finally, high-temperature-resistant
silicone rubber is spin-coated on the surface of the
pressure sensitive layer to obtain a flexible piezoresistive sensor. The application has high-
frequency response characteristics and high sensitivity, can be seamlessly attached to the inner wall of a complex curvature casing, can realize in-situ high-fidelity capture of the space-
time distribution of wind pressure in a high-temperature and limited
space environment, and provides a data cornerstone for intelligent
perception and active flow control of a
turbine engine.