The invention belongs to the technical field of photoelectricity, and discloses a
cascade multiplication linear mode
silicon APD array
chip and a preparation method thereof, the
cascade multiplication linear mode
silicon APD array
chip comprises a substrate layer and a plurality of pixel structure units arranged on the substrate layer in an array; the substrate layer is made of P-type doped
gallium phosphide; each pixel structure unit comprises a p + buffer layer, an intrinsic
absorption layer, a
cascade multiplication layer and an n +
contact layer which are sequentially arranged from bottom to top; the top of the pixel structure unit and the substrate layer are respectively provided with a
contact electrode. According to the
silicon APD array
chip provided by the invention, P-type
gallium phosphide with relatively wide forbidden bandwidth is adopted as the substrate, so that the silicon APD array chip provided by the invention can realize back light incidence and a relatively thin silicon
absorption layer design. According to the invention, the cascade multiplication layer with multi-stage periodic
doping based on the relaxation space
gain theory is also adopted, the collision
ionization coefficient of holes is inhibited, the
ionization coefficient ratio is reduced, and thus the
gain of the silicon APD array pixel is improved.