2121results about "Spray discharge apparatus" patented technology

Preferred embodiments of the present invention provides a sublimation system employing guidance structures including certain preferred embodiments having a high surface area support medium onto which a solid source material for vapor reactant is coated. Preferably, a guidance structure is configured to facilitate the repeated saturation of the carrier gas with the solid source for a vapor reactant. Methods of saturating a carrier gas using guidance structures are also provided.

A UV irradiation apparatus for processing a semiconductor substrate includes: a UV lamp unit; a reaction chamber disposed under the UV lamp unit; a gas ring with nozzles serving as a first electrode between the UV lamp unit and the reaction chamber; a transmission window supported by the gas ring; an RF shield which covers a surface of the transmission window facing the UV lamp unit; a second electrode disposed in the reaction chamber for generating a plasma between the first and second electrodes; and an RF power source for supplying RF power to one of the first or second electrode.

The present invention provides a wafer support tool for heat treatment easy in working and capable of realizing reduction in cost without generating damages or slip dislocations that would be otherwise caused by high temperature heat treatment and a heat treatment apparatus. The present invention is directed to a wafer support tool for heat treatment comprising: a plurality of wafer support members for supporting a wafer to be heat treated; and a support member holder for holding the wafer support members, wherein the wafer support members each has a contact portion with the wafer, at least one of the contact portions being movable relative to the support member holder.

In an immersion lithography apparatus, the immersion liquid is supplied from a tank via a flow restrictor. The liquid held in the tank is maintained at a substantially constant height above the flow restrictor to ensure a constant flow of liquid.

Methods and systems for coating at least a portion of a medical device (e.g., a stent structure) include providing a plurality of coating particles (e.g., monodisperse coating particles) in a defined volume. For example, the particles may be provided using one or more nozzle structures, wherein each nozzle structure includes at least one opening terminating at a dispensing end. The plurality of coating particles may be provided in the defined volume by dispensing a plurality of microdroplets having an electrical charge associated therewith from the dispensing ends of the one or more nozzle structures through use of a nonuniform electrical field between the dispensing ends and the medical device. Electrical charge is concentrated on the particle as the microdroplet evaporates. With a plurality of coating particles provided in the defined volume, such particles can be moved towards at least one surface of the medical device to form a coating thereon (e.g., using an electric field and / or a thermophoretic effect).

A plasma processing method performs a desired plasma process on substrates by using a plasma generated in a processing space. A first and a second electrode are disposed in parallel in a processing vessel that is grounded, the substrate is supported on the second electrode to face the first electrode, the processing vessel is vacuum evacuated, a desired processing gas is supplied into the processing space formed between the first electrode, the second electrode and a sidewall of the processing vessel, and a first radio frequency power is supplied to the second electrode. The first electrode is connected to the processing vessel via an insulator or a space, and is electrically coupled to a ground potential via a capacitance varying unit whose electrostatic capacitance is varied based on a process condition of the plasma process performed on the substrate.

Method for electrostatically depositing select doses of medicament powder at select locations on a substrate. Specifically, the apparatus contains a charged particle emitter for generating charged particles that charge a predefined region of a substrate and a charge accumulation control circuit for computing the amount of charge accumulated upon the substrate and deactivating the emitter when a selected quantity of charge has accumulated. Additionally, a triboelectric charging apparatus charges the medicament powder and forms a charged medicament cloud proximate the charged region of the substrate. The medicament particles within the medicament cloud electrostatically adhere to the charged region. The quantity of charge accumulated on the substrate at the predefined region and the charge-to-mass ratio of the medicament powder in the cloud control the amount (dose) of medicament deposited and retained by the substrate. Consequently, this apparatus accurately controls both medicament dosage and deposition location. Furthermore, since the substrate can be of any dielectric material that retains an electrostatic charge, the apparatus can be used to deposit medicament on substrates that are presently used in oral medicament consumption, e.g., substrates that are used to fabricate suppositories, inhalants, tablets, capsules and the like.

A method for electrostatically depositing select doses of medicament powder at select locations on a substrate. Specifically, an apparatus contains a charged particle emitter for generating charged particles that charge a predefined region of a substrate and a charge accumulation control circuit for computing the amount of charge accumulated upon the substrate and deactivating the emitter when a selected quantity of charge has accumulated. Additionally, a triboelectric charging apparatus charges the medicament powder and forms a charged medicament cloud proximate the charged region of the substrate. The medicament particles within the medicament cloud electrostatically adhere to the charged region. The quantity of charge accumulated on the substrate at the predefined region and the charge-to-mass ratio of the medicament powder in the cloud control the amount (dose) of medicament deposited and retained by the substrate. Consequently, this apparatus accurately controls both medicament dosage and deposition location. Furthermore, since the substrate can be of any dielectric material that retains an electrostatic charge, the apparatus can be used to deposit medicament on substrates that are presently used in oral medicament consumption, e.g., substrates that are used to fabricate suppositories, inhalants, tablets, capsules and the like.

An electrospraying apparatus and / or method is used to coat particles. For example, a flow including at least one liquid suspension may be provided through at least one opening at a spray dispenser end. The flow includes at least particles and a coating material. A spray of microdroplets suspending at least the particles is established forward of the spray dispenser end by creating a nonuniform electrical field between the spray dispenser end and an electrode electrically isolated therefrom. The particles are coated with at least a portion of the coating material as the microdroplet evaporates. For example, the suspension may include biological material particles.

Spraying apparatus and methods that employ multiple nozzle structures for producing multiple sprays of particles, e.g., nanoparticles, for various applications, e.g., pharmaceuticals, are provided. For example, an electrospray dispensing device may include a plurality of nozzle structures, wherein each nozzle structure is separated from adjacent nozzle structures by an internozzle distance. Sprays of particles are established from the nozzle structures by creating a nonuniform electrical field between the nozzle structures and an electrode electrically isolated therefrom.

A method of coating a non-rotary object with an electrospun coat, the method comprising, dispensing a charged liquefied polymer through at least one dispensing element within an electric field to thereby form a jet of polymer fibers, and moving the dispensing element relative to the object so as to coat the object with the electrospun coat.

The systems, methods and products of the invention include systems and methods for manufacturing servo tracks on a magnetic tape. In one aspect, the invention includes systems for manufacturing magnetic tapes having servo tracks thereon wherein the servo tracks are optically detectable and are capable of being processed by a servo control system for maintaining alignment of a magnetic recording head with the data tracks on the recording side of the magnetic tape. In one practice, the manufacturing systems described herein engrave the servo tracks onto the non-recording side of a magnetic tape by directing a laser beam at the non- recording side of the magnetic tape. In another practice, the manufacturing systems described herein engrave the servo tracks onto the magnetic side of a magnetic tape by directing a laser beam at the magnetic side of the magnetic tape. Such engraved patterns can act as optical servo tracks for maintaining alignment of the recording head with the data tracks on the magnetic tape.

A lithographic method to enhance image resolution in a lithographic cluster using multiple projections and a lithographic cluster used to project multiple patterns to form images that are combined to form an image having enhanced resolution.

A thermal processing system and method for curing a dielectric film. The thermal processing system is configured to treat the dielectric film with ultraviolet (UV) radiation and infrared (IR) radiation in order to cure the dielectric film. The thermal processing system can include an array if IR and UV light-emitting devices (LEDs) configured to irradiate a substrate having a low dielectric constant (low-k) film. The method dries the dielectric film to remove contaminants from the film and exposes the dielectric film at a single stage to ultraviolet radiation and IR radiation.

A method for manufacturing a magnetic recording medium includes steps of forming a magnetic layer containing magnetic powder particles on a web-like non-magnetic support being continuously transported in one direction and applying a magnetic field to the magnetic layer by a plurality of magnets in such a manner that an angle of the magnetic field applied to the magnetic layer to the transporting direction of the non-magnetic support in a plane perpendicular to a surface of the magnetic layer and parallel to the transporting direction of the non-magnetic support gradually increases in the transporting direction of the non-magnetic support, thereby orienting the magnetic powder particles in an oblique direction with respect to the surface of the magnetic layer. According to this method, it is possible to orient magnetic powder particles in a desired direction with respect to the surface of a magnetic layer and to manufacture a magnetic recording medium having a high squareness ratio without increasing the size of the apparatus.

Embodiments of the invention contemplate forming an electrochemical device and device components, such as a battery cell or supercapacitor, using thin-film or layer deposition processes and other related methods for forming the same. In one embodiment, a battery bi-layer cell is provided. The battery bi-layer cell comprises an anode structure comprising a conductive collector substrate, a plurality of pockets formed on the conductive collector substrate by conductive microstructures comprising a plurality of columnar projections, and an anodically active powder deposited in and over the plurality of pockets, an insulative separator layer formed over the plurality of pockets, and a cathode structure joined over the insulative separator.

A method for manufacturing a three-dimensional object by successively solidifying layers of a building material at positions in the respective layer corresponding to the cross-section of the object is provided, wherein at least a partial region of a layer is solidified such that a pattern is generated, which pattern contains a plurality of substantially parallel solidification lines (V, S), and at least a partial region of a subsequent layer is exposed such that a pattern is generated, which pattern contains a plurality of substantially parallel solidification lines (V, S) that are rotated with respect to the solidification lines of the pattern of the previous layer by an angle (α) that differs from 180°, 90° and 45°.

The invention relates to an apparatus and process for solid-state deposition and consolidation of powder particles entrained in a subsonic or sonic gas jet onto the surface of an object. Under high velocity impact and thermal plastic deformation, the powder particles adhesively bond to the substrate and cohesively bond together to form consolidated materials with metallurgical bonds. The powder particles and optionally the surface of the object are heated to a temperature that reduces yield strength and permits plastic deformation at low flow stress levels during high velocity impact, but which is not so high as to melt the powder particles.

A cleaning method of removing a vapor-deposition material adhering to equipments without exposure to the atmosphere is provided. A vapor-deposition material adhering to equipments (components of a film-forming apparatus) such as a substrate holder, a vapor-deposition mask, a mask holder, or an adhesion preventing shield provided in a film-forming chamber are subjected to heat treatment. Because of this, the adhering vapor-deposition material is re-sublimated, and removed by exhaust through a vacuum pump. By including such a cleaning method in the steps of manufacturing an electro-optical device, the manufacturing steps are shortened, and an electro-optical device with high reliability can be realized.

The present invention relates to surface assisted fluid loading and droplet dispensing on a droplet micro actuator. A droplet actuator is provided and includes one or more electrodes configured for conducting one or more droplet operations on a droplet operations surface of the substrate. The droplet actuator further includes a wettable surface defining a path from a fluid reservoir into a locus which is sufficiently near to one or more of the electrodes that activation of the one or more electrodes results in a droplet operation. Methods and systems are also provided.

A solid free form fabrication system for manufacturing a component by successively building feedstock layers representing successive cross-sectional component slices includes a platform for receiving and supporting the feedstock layers, a feedstock supplying apparatus that deposits the feedstock into a predetermined region to form the feedstock layers, an energy source directed toward the predetermined region to modify the feedstock in the predetermined region and thereby manufacture the component, and a temperature control block disposed on the platform and directly in contact with the deposited feedstock layers to modify the feedstock temperature while manufacturing the component. A solid free form fabrication method uses the system to manufacture the component from the feedstock material

Embodiments of the invention contemplate the formation of a high efficiency solar cell using novel methods to form the active doped region(s) and the metal contact structure of the solar cell device. In one embodiment, the methods include the steps of depositing a dielectric material that is used to define the boundaries of the active regions and / or contact structure of a solar cell device. Various techniques may be used to form the active regions of the solar cell and the metal contact structure.

A method for applying a plasma prayed coating using liquid injection is disclosed. The method includes providing a mixture of a liquid and solid particles. The solid particles are constituents of a thermal barrier coating. The mixture is injected into a plasma jet of a plasma spray device and the plasma jet is directed toward a substrate to deposit a gradient film formed from the constituents onto the substrate.

The invention relates generally to dispensing of fluids and, in particular, to methods and systems for dispensing microfluidic or sub-microfluidic volumes of droplets of chemical, biological or other reagents or liquids. Embodiments of the invention have particular efficacy in accurately dispensing small drops having volumes from about 100 nL down into the picoliter range.

Methods and apparatuses are provided for assembling a structure on a support having a pattern of binding sites. In accordance with the method, a first fluid is provided on the surface of the support with the first fluid being of a type that that increases viscosity when heated, the first fluid having first micro-components suspended therein each adapted to engage the binding sites. The first fluid proximate to selected binding sites is heated to increase the viscosity of the responsive fluid proximate to the selected binding sites so that the first micro-components suspended in the first fluid are inhibited from engaging the selected binding sites.

A coating of an encapsulated electrophoretic medium is formed on a substrate (106) by dispersing in a fluid (104) a plurality of electrophoretic capsules (102), contacting at least a portion of a substrate (106) with the fluid (104); and applying a potential difference between at least a part of the portion of the substrate (106) contacting the fluid (104) and a counter-electrode (110) in electrical contact with the fluid (104), thereby causing capsules (102) to be deposited upon at least part of the portion of the substrate (106) contacting the fluid (102). Patterned coatings of capsules containing different colors may be deposited in registration with electrodes using multiple capsule deposition steps. Alternatively, patterned coatings of capsules may be formed by applying a fluid form of an electrophoretic medium to a substrate, and applying a temporally varying voltage between an electrode and the substrate. The process may be repeated to allow for deposition of full color displays.

An apparatus and method for electrostatic spray deposition of small targets, such as medical devices like stents. The apparatus includes a target holder which applies a first electrical potential to the target, and an electrostatic dispensing nozzle which applies a second potential sufficient to attract the coating fluid from the nozzle toward the target. Because the entire dispensing nozzle is conductive, the coating fluid may receive a greater charge than may be obtained with internal electrode-type nozzles. Electrostatic attraction of the coating fluid to the target is enhanced by the combination of higher charge density imparted to the coating fluid by the conductive nozzle, and application of a momentary voltage spike to the target to provide consistent conductivity between the target and its holder, thereby ensuring the target is presents the full first potential applied to the holder. The voltage spike may also be used independently of the conductive nozzle.

The present invention relates to methods and apparatus that employ electrohydrodynamic flows in miscible, partially miscible and immiscible multiphase systems to induce mixing for dissolution and / or reaction processes. The apparatus and methods of the present invention allow micromixing of two or more components and can advantageously be used to conduct liquid-phase reactions uniformly and at high rates