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144results about How to "Improve imaging resolution" patented technology

Continuous zooming laser interference end point detection system

The invention discloses a continuous zooming laser interference end point detection system, which is used for semiconductor etching and thin film process end point detection, and comprises an illumination module, a laser interference module and an imaging module, the laser interference module comprises a laser, a beam splitter, a beam splitting cube, a lens and a detector, a laser beam emitted by the laser passes through the beam splitter, the beam splitting cube and the lens and then is focused to a to-be-detected area on the surface of a wafer, and the surface of the wafer reflects the laser to the detector for detection; the focal length of the lens is continuously adjustable; the illumination module comprises a light source which is arranged on one side of the lens, and an illumination light beam emitted by the light source is used for illuminating a to-be-detected area on the surface of the wafer; and the imaging module comprises a camera which is arranged on one side of the lens and is used for recording and outputting image information of a to-be-detected area on the surface of the wafer. According to the invention, through continuous zooming and large numerical aperture of the lens, high-definition imaging and etching of a long working distance and accurate detection of a thin film process end point are realized.
Owner:SHANGHAI CHEYITIAN TECH CO LTD

Two-photon imaging system and method based on vector light field regulation and control

PendingCN119148398Acontrol shapeImprove scanning accuracyMicroscopesImage resolutionBeam diameter
The invention discloses a two-photon imaging system and method based on vector light field regulation and control, and belongs to the technical field of microscopic imaging. The two-photon imaging system comprises a laser beam expanding module, a vector light field modulation module, a light beam scanning module and an imaging module which are arranged in sequence; the laser beam expanding module comprises a laser, a first half-wave plate, a first polarization beam splitter, a first lens and a second lens which are arranged in sequence; a laser beam generated by the laser passes through the first half-wave plate and the first polarization beam splitter for laser power adjustment, and then passes through the first lens and the second lens for beam diameter adjustment. According to the two-photon imaging system based on vector light field regulation and control, the focal field is regulated and controlled by regulating and controlling the amplitude, the phase and the polarization of the vector light field, and the imaging resolution or the volume imaging speed of the system can be improved.
Owner:SHENZHEN UNIV

Ultra-wide-angle ellipsoid confocal laser scanning fundus imaging system

The invention belongs to the technical field of fundus imaging, and discloses an ultra-wide-angle ellipsoid confocal laser scanning fundus imaging system, which comprises a light splitting module, a light condensing module, a scanning module, a transmitting mirror group, an ellipsoid reflector and a detection module, wherein the center of the scanning module and the center of the transmitting mirror group are located on the same optical axis A, the pupil of the human eye is located at the first focus of the ellipsoidal reflector, and the entrance pupil of the transmitting mirror group is located at the second focus of the ellipsoidal reflector; and the transmitting lens group comprises a movable focusing lens and is used for changing the position of a first image surface of light reflected by the retina of the human eyes when moving along the optical axis A so as to realize clear imaging of the retina of the human eyes with different diopters. Under the condition that a free-form surface is not introduced, ultra-wide-angle multi-wavelength confocal laser scanning fundus imaging with the single intraocular field angle of 200 degrees is achieved, and the full-field optical resolution reaches 15 micrometers. And by moving the focusing lens, imaging compensation can be carried out on human eyes with diopters of-15D to + 15D.
Owner:HUAZHONG UNIV OF SCI & TECH

Design optimization method and device for intracardiac ultrasonic transducer array and medium

The invention provides a design optimization method and device for an intracardiac ultrasonic transducer array, a medium and a program product, and relates to the technical field of ultrasonic imaging equipment. The method comprises the following steps: acquiring a marshalling scheme and independent array elements of an ultrasonic transducer array, and marshalling the independent array elements based on the marshalling scheme to form at least two independent equivalent sub-apertures; establishing a spherical coordinate system by taking the geometric center of the ultrasonic transducer array as an original point, determining a pre-deflection direction and an imaging focus of the pre-deflection focus representation array based on the spherical coordinate system, and calculating static time delay; calculating the geometric center coordinate of each equivalent sub-aperture and the flight time of the imaging focus to obtain the dynamic time delay of each equivalent sub-aperture; and obtaining a space sound field based on the static time delay, the dynamic time delay and other parameters. Under the limitation of a limited space, the imaging performance of the ultrasonic transducer array is maintained while array element connection and circuit design are optimized, so that high-quality imaging quality is obtained.
Owner:ZHEJIANG PROVINCIAL PEOPLES HOSPITAL

A rotating endoscopic OCT probe

The present application provides a rotating endoscopic OCT probe, the technical solution of which is as follows: it includes a transparent catheter and an optical fiber for extending into biological tissue, the optical fiber is arranged in the transparent catheter, and is used to transmit light emitted by a light source, and is characterized in that the transparent catheter also includes: a self-focusing lens for converging light; a right-angle prism for reflecting the light converged by the self-focusing lens to a direction perpendicular to the transparent catheter; a cylindrical mirror for receiving light reflected by the right-angle prism, the side of the cylindrical mirror close to the right-angle prism is a plane, and the other side is a convex surface, and silicone oil is arranged between the cylindrical mirror and the transparent catheter. The rotating endoscopic OCT probe provided by the present application has the advantages of high imaging resolution, small size, and compact structure.
Owner:FOSHAN LIGHTVISION-MEDICAL TECH INC +1

Lateral transceiving integrated optical fiber ultrasonic endoscope and preparation method

ActiveCN119587077Asmall sizeincrease sound pressureSurgeryEndoscopesFocus ultrasoundFiber
The invention discloses a lateral transceiving integrated optical fiber ultrasonic endoscope and a preparation method, and belongs to the field of ultrasonic endoscopic imaging. Comprising a double-clad optical fiber, an excitation film, a dielectric mirror and a sensing film. A part of the inner cladding of the optical fiber is etched into a concave spherical surface and coated with an excitation film, excitation light transmitted in the inner cladding is absorbed, and focused ultrasonic waves transmitted in the lateral direction are excited. A part of an inner cladding layer and a fiber core of the optical fiber are etched, and a Fabry-Perot (Fabry-Perot, F-P) cavity is prepared. When an ultrasonic signal laterally transmitted into the ultrasonic endoscope acts on the sensing film of the cavity, the effective refractive index and the F-P cavity length of the sensing film are changed, and the change is demodulated through signal light in the fiber core to complete ultrasonic detection. According to the lateral transmitting-receiving integrated optical fiber ultrasonic endoscope, the inner cladding is etched and coated with the excitation thin film to excite laterally focused ultrasonic waves, an F-P cavity is formed through lateral etching of the optical fiber to achieve lateral ultrasonic detection, and the lateral transmitting-receiving integrated optical fiber ultrasonic endoscope is formed.
Owner:SHENZHEN QIZHEN OPTOELECTRONICS TECHNOLOGY CO LTD

Light field microscope three-dimensional image reconstruction system and method integrated with event camera

The invention provides a light field microscope three-dimensional image reconstruction system and method integrated with an event camera, and belongs to the technical field of optics. According to the invention, original light field data is synthesized into event data for training a network, the event data is input into an event image reconstruction network module capable of converting continuous event streams into a series of intensity images to obtain light field event images, and then three-dimensional reconstruction of a target area is obtained through a three-dimensional image reconstruction network module. And a new technical reference is provided for solving the problem of how to improve the three-dimensional reconstruction quality and resolution of the light field microscope.
Owner:YANSHAN UNIV

Multi-metal borate nanoparticles as well as preparation method and application thereof

The invention discloses a multi-metal borate nano-particle as well as a preparation method and application thereof. The preparation method comprises the following steps: in the presence of small molecules with alkyl chains, performing high-temperature thermal decomposition on an organic metal compound or a metal salt compound precursor and organic borate in a solvent, and then centrifuging, modifying, performing ultrafiltration, dialyzing and purifying to obtain the multi-metal borate nanoparticles. The preparation method disclosed by the invention has the characteristics of mildness, high efficiency and strong controllability. The multi-metal borate nanoparticles prepared by the preparation method disclosed by the invention have the advantages of monodisperse size, relatively high magnetic property and good biocompatibility. Therefore, the prepared multi-metal borate nanoparticles not only have multi-modal imaging functions such as magnetic resonance imaging, near-infrared two-region imaging, nuclear medicine imaging and magnetic particle imaging, but also can be used for various treatment means such as magnetocaloric therapy and boron neutron capture therapy; potential advantages are realized in biomedical applications such as magnetic targeting tumor treatment and imaging contrast agents, and high practical values are realized.
Owner:SUZHOU UNIV

Digital image correlation strain measurement system and method based on super-structure lens

The invention provides a digital image correlation strain measurement system and method based on a super-structure lens. The system comprises the super-structure lens, a digital camera, an illumination light source and a computer. The super-structure lens comprises a plurality of super-structure lens units, light scattered or emitted by an object is imaged, and the formed image is located on the plane where a photosensitive chip of the digital camera is located. The digital camera is used for acquiring an image of a measured object formed by the super-structure lens; the computer is used for processing the calibration and experiment image data acquired by the digital camera, calculating camera parameters through the calibration image, and performing three-dimensional digital image analysis and calculation on the experiment image to obtain the three-dimensional shape, displacement and deformation data of the measured object; according to the invention, 3D-DIC measurement can be realized by only adopting single shooting of one camera, and a conventional lens is replaced by the metamaterial lens, so that a simpler and more compact optical structure can be obtained on the premise of keeping the imaging quality, and the 3D-DIC measurement device has the characteristics of high efficiency, no need of camera synchronization and the like.
Owner:SHANGHAI JIAOTONG UNIV

Tunnel face multichannel transient electromagnetic detection method and device

The invention discloses a multi-channel transient electromagnetic detection method and device for a tunnel face, and relates to the technical field of geophysical information, and the method comprises the steps: planning horizontal measuring lines for the tunnel face at equal intervals, and planning measuring points on each measuring line at equal intervals; building a multi-channel detection array composed of a transient electromagnetic receiving coil and a transient electromagnetic transmitting coil, and carrying out primary field zero magnetic flux point adjustment; the method comprises the following steps: setting emission parameters according to detection depth and resolution requirements, then emitting bipolar square waves, carrying out measurement point-by-measurement observation by using an adjusted multi-channel detection array, constructing a geometric network which takes measurement lines, measurement points and channel numbers as indexes according to observation data, and carrying out multi-channel combined three-dimensional imaging. By constructing a multi-channel detection array, the data volume of a measuring point is increased, and the fineness of three-dimensional imaging is improved; through primary field zero magnetic flux point adjustment, the influence of a primary magnetic field is counteracted, and the signal-to-noise ratio of data is improved.
Owner:SHANDONG UNIV +1

NIR-IIb / c rare earth nanoparticle fluorescent probe as well as preparation method and application thereof

The invention provides an NIR-IIb / c rare earth nanoparticle fluorescent probe as well as a preparation method and application thereof. The fluorescent probe sequentially comprises a core, an active shell and an inert shell from inside to outside, wherein the core comprises Tm < 3 + > ions and Er < 3 + > ions, and the active shell comprises Er < 3 + > ions, Yb < 3 + > ions and Ce < 3 + > ions. The fluorescent probe provided by the invention has an efficient energy transfer system, not only has bright luminescence in an NIR-IIb wave band (1500-1700 nm), but also has luminous intensity increased by dozens of times in an NIR-IIc wave band (1700-1900 nm) compared with that of a traditional probe. The hydrophilic modification method of the probe is also improved, and the biocompatibility of the probe is improved by a multi-layer polymer cross coating method, so that the probe still has good luminescence property in an organism, and the penetration depth and resolution of biological tissues during imaging are improved.
Owner:THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA

High-resolution fast compressed sensing single photon array imaging system and method

The invention discloses a high-resolution fast compressed sensing single photon array imaging system and method, and relates to the technical field of weak light imaging and computational imaging. The system comprises an imaging light source, an optical attenuator, a light beam expander, a to-be-detected target, a signal generator, a spatial light modulator, a single photon detection array, a counting storage module and a data processing module. Wherein the imaging light source is used for emitting a light beam to illuminate a target scene to be imaged; the optical attenuator, the light beam expander, the target to be measured and the spatial light modulator are sequentially arranged on a transmission light path of a light beam; the signal generator is respectively connected with the spatial light modulator and the single photon detection array; and the single photon detection array, the counting storage module and the data processing module are connected in sequence. According to the invention, the problem that the measurement mask is difficult to manufacture and store due to overlarge reconstruction resolution can be solved, and the imaging resolution and the imaging rate are improved.
Owner:TAIYUAN UNIVERSITY OF TECHNOLOGY

Near-infrared light nano probe as well as preparation method and application thereof

The invention discloses a near-infrared light nano probe as well as a preparation method and application thereof. The preparation method of the near-infrared nano probe comprises the following steps: dissolving polylactic acid-co-acetic acid in an acetonitrile solution, and adding lecithin and 1, 2-dipalmitoyl-sn-glycerol-3-phosphatidyl glycol to obtain a solution A; dissolving indocyanine green in an ethanol solution to obtain a solution B; and mixing the solution A and the solution B, and carrying out ultrasonic treatment to obtain the near-infrared nano probe. The near-infrared light nanoprobe can be used for imaging diagnosis of acute kidney injury, and effectively solves the problems of long diagnosis time, poor stability, high in-vivo clearance rate, low cell absorption rate and the like. Compared with existing ICG nano-particles, the ICG nano-particles are high in biological tissue penetrability, high in resolution ratio, low in phototoxicity and good in fluorescence imaging effect in an acute kidney injury model and have wide application prospects in AKI clinical diagnosis.
Owner:SHENZHEN BAOAN DISTRICT PEOPLES HOSPITAL +1

Photoresist composition and patterning method thereof

The invention discloses a photoresist composition and a patterning method thereof, the photoresist composition comprises an organic solvent, a free radical photoinitiator, a co-initiator and a film-forming monomer, the film-forming monomer is metal oxygen cluster and metal oxide nanoparticles, the mass percentage content of the film-forming monomer is 1-30%, the mass percentage content of the co-initiator is 1-30%, and the mass percentage content of the film-forming monomer is 1-30%. The mass percentage content of the free radical photoinitiator is 0.01%-3%, the mass percentage content of the auxiliary initiator is 0-10%, and the mass percentage content of the organic solvent is 57%-98.99%. According to the photoresist composition introduced with the free radical photoinitiator, free radicals are efficiently generated under illumination, cross-linking polymerization of double bonds on the surfaces of metal oxygen clusters and metal oxide nanoparticles is promoted, the photosensitive performance is greatly improved, excellent sensitivity is shown in extreme ultraviolet, electron beams and visible light (within the light source range of 250-600 nanometers), and high-precision photoetching patterning is achieved.
Owner:张江国家实验室 +1

Method for realizing super-resolution optical microscopic imaging based on deviation of optical axis of objective lens from primary optical axis of microscope

The invention provides a method for realizing super-resolution optical microscopic imaging on the basis that an optical axis of an objective lens deviates from a primary optical axis of a microscope. The invention provides a method for realizing super-resolution imaging by using a conventional optical microscope without modifying or adding complex equipment. By finely adjusting the angle of the objective lens turntable, an included angle of 3-4 degrees is formed between the optical axis of the objective lens and the main optical axis of the microscope, and the opening diameter of the aperture diaphragm is reduced, so that the resolution of the microscope can be improved from about 300nm to 100nm. According to the method, the optical imaging condition of the microscope is reasonably optimized and utilized, and the method is particularly suitable for high-resolution, real-time and nondestructive observation of the periodic linear array nanostructure on the surface of the sample. The method is easy to operate and low in cost, the application range of a conventional optical microscope is expanded, and the method has good practical value and application prospects in the fields of material microstructure analysis, semiconductor chip detection and the like.
Owner:HUBEI UNIV

Intelligent ship distance Doppler data generation method based on multiple feature constraints

The invention provides a ship distance Doppler data intelligent generation method based on multiple feature constraints, which uses a deep learning method in the field of artificial intelligence, solves the problems of limited data, insufficient features and the like in small sample learning, and realizes expansion and balance of real samples. According to the technical scheme, the method comprises a generator module based on a deep convolutional neural network, a discriminator module forming adversarial training and a loss function module based on regularization constraint. The generator module is used for sampling and generating noise, the discriminator module is used for judging whether generated data and real data are true or false, and the loss function module is used for calculating a penalty value according to the quality of the generated data. The whole system needs to train two models at the same time, one is a generator module used for simulating real data distribution, and the other is a discriminator module used for estimating the probability that a sample is from real data instead of the generation module. According to the method, the generative adversarial network is innovatively used for generating the R-D data set of the ship, the simulation degree of the generated image is improved in combination with the multi-feature loss function, and the quality and the number of training samples are effectively improved.
Owner:SHANGHAI RADIO EQUIP RES INST

Multi-mode deformation monitoring method based on millimeter wave radar

The invention discloses a multi-mode deformation monitoring method based on a millimeter wave radar. The method comprises the following steps: selecting a radar imaging mode according to requirements; if the real-time requirement for deformation monitoring is higher than a preset condition, selecting a real aperture radar imaging mode: adopting a multi-input multi-output millimeter wave radar, and obtaining a continuous multi-frame range direction-azimuth angle diagram of an observation area by using echo signal mixing, windowing, FFT (Fast Fourier Transform) and the like of the multi-input multi-output millimeter wave radar; if the precision of deformation monitoring is higher than a preset threshold value, selecting a synthetic aperture radar imaging mode: carrying a millimeter wave radar on a foundation track, and extracting a range direction-azimuth angle diagram in each time period by adopting a backward projection algorithm on an echo signal; and finally, performing interference and unwrapping processing on the distance direction-azimuth angle diagrams of different frames / time periods to obtain a phase difference of two adjacent frames, and further obtaining deformation quantity between different frames / time periods. Real aperture imaging synthetic aperture radar imaging can be selected according to requirements so as to realize flexible deformation monitoring.
Owner:CENT SOUTH UNIV

Viscoelastic pre-stack depth migration method and system based on path-related equivalent Q value

The invention provides a viscoelastic pre-stack depth migration method and system based on a path-dependent equivalent Q value, and particularly relates to the technical field of seismic exploration. The scheme comprises the following steps: collecting pre-stack seismic data of a target work area; performing inverse Q filtering on the pre-stack seismic data to obtain a constant Q scanning gather changing along with the offset group; performing constant Q scanning on the constant Q scanning gather according to preset time windows, and determining a constant Q value corresponding to each time window; establishing a path-related equivalent Q field based on the constant Q values of all the offset groups; and performing viscoelastic pre-stack depth migration based on the path-dependent equivalent Q field to obtain an imaging result. The scheme does not depend on time domain Q field modeling and travel time calculation, the efficiency and precision of depth domain Q field modeling can be greatly improved, the constructed depth domain Q field is used for viscoelastic pre-stack depth migration imaging, and the imaging resolution and accuracy can be remarkably improved.
Owner:SOUTHERN UNIVERSITY OF SCIENCE AND TECHNOLOGY

Autonomous tuning metasurface structure, imager and target identification method

The invention relates to the technical field of optical devices, and provides a self-tuning metasurface structure, an imager and a target recognition method, the structure comprises a polaroid, an electrode layer with a plurality of sub-electrodes, a liquid crystal layer with a plurality of pixel units and a metasurface layer with a plurality of periodically distributed nano-columns; the brightness of each light spot in the light spot matrix is independently adjusted by controlling the applied voltage of each sub-electrode on the corresponding pixel unit, cooperating with the polaroid for amplitude adjustment and combining with the phase adjustment of the corresponding nano-column in the metasurface layer; generating a multi-channel B * B light spot matrix through spatial multiplexing, and determining an emergent feature image through the light spot matrix; different light spot brightness in the light spot matrix is used for representing different convolution kernel weights. The liquid crystal layer is adjustable in light amplitude, the metasurface layer is adjustable in phase, the imaging quality and the minimum resolution are improved, various coding information can be processed, and therefore the object recognition accuracy and robustness are improved.
Owner:ZHEJIANG UNIV

Medical image acquisition and analysis method and system for endocrine patient

The invention relates to the technical field of medical image processing, in particular to a medical image acquisition and analysis method and system for an endocrine patient, and the method comprises the following steps: uniformly irradiating the thyroid tissue of the endocrine patient with laser with a target wavelength, detecting and recording the intensity of light reflected back from the tissue surface, and performing initialization mapping on the internal structure of the tissue to obtain an original medical image of the speckles. According to the method, the light intensity change in the speckle image is analyzed, pixel-level calculation is carried out, and tiny change in the tissue is identified in a detailed mode, so that the information amount of the medical image is increased, high-precision basic data is provided for subsequent lesion analysis, and the accuracy of the medical image is improved through the light intensity distribution data. The brightness change between pixels is compared to mark different areas, pathological features are distinguished through texture analysis, the disease early detection and classification ability is improved, and doctors can make a more accurate recovery scheme for patients.
Owner:中国人民解放军总医院第八医学中心

Industrial lens and optical equipment

ActiveCN119596508AGuaranteed Optical Performancesmall color differenceOptical elementsAngle of incidenceOphthalmology
The invention discloses an industrial lens and optical equipment, the industrial lens comprises a first lens group, a diaphragm and a second lens group which are coaxially arranged in sequence, the first lens group comprises a first lens, a second lens, a third lens and a fourth lens which are sequentially arranged from an object space to an image space along an optical axis, the first lens, the second lens and the fourth lens have positive focal power, and the third lens has negative focal power; the second lens group comprises a fifth lens, a sixth lens, a seventh lens and an eighth lens which are sequentially arranged from the object space to the image space along the optical axis, the fifth lens, the seventh lens and the eighth lens have positive focal power, and the sixth lens has negative focal power; the industrial lens satisfies the following relational expression: 4.3 < = FOV / CRA < = 5.6; 13 < = (fu1 + fu2) / IH < = 26; fOV / (D * TTL) > = 0.025; wherein FOV is the maximum field angle of the industrial lens, CRA is the main ray incident angle of the industrial lens, fu1 is the effective focal length of the first lens group in the industrial lens, fu2 is the effective focal length of the second lens group in the industrial lens, IH is the maximum image plane height of the industrial lens, D is the head aperture size of the industrial lens, and RA is the main ray incident angle of the industrial lens. TTL is the total optical length of the industrial lens. The miniature industrial lens is large in image plane, low in distortion, low in chromatic aberration and high in resolution.
Owner:SUZHOU LIGHTLNS OPTICAL TECH

A high definition lens

This invention discloses a high-definition lens, comprising a first lens, a first cemented lens group, an aperture stop, a fourth lens, and a fifth lens arranged sequentially from the object plane to the image plane; wherein the first lens and the fourth lens have negative optical power; the first cemented lens group and the fifth lens have positive optical power, and the fifth lens has a biconvex structure; the focal length of the lens is f, and the focal length of the first cemented lens group is f. U1 f U1 The following relationship exists between f and f: 0.35 < |f U1 / f|<0.90. The lens formed by this invention is not only compact and economical, but also ensures high imaging resolution, small aperture and low distortion, which can meet the needs of industrial applications and has great market prospects and economic value.
Owner:GUANGDONG AOPUTE TECH CO LTD

A near-infrared aggregation-induced luminescence material and its preparation method and application

The present invention relates to the technical field of latent fingerprint detection, and specifically to a near-infrared aggregation-induced luminescence material and a preparation method and application thereof. In the near-infrared aggregation-induced luminescence material, triphenylamine is used as an electron donor, isoquinoline is used as an electron acceptor, an aromatic ring is used as a π bridge to connect the two parts, and the single-bonded benzene ring in the molecule has a strong intermolecular torsional charge transfer (TICT) effect. The material has excellent near-infrared luminescence performance in an aggregated state, has high affinity for fingerprint secretions, grease, etc., has the advantages of simple synthesis, mild reaction conditions, good luminescence performance in an aggregated state, etc., can realize latent fingerprint imaging on various materials through atomizer spraying, and realize high-resolution imaging of the tertiary structure of the fingerprint, achieving extremely high resolution.
Owner:HENAN AGRICULTURAL UNIVERSITY

A continuous zoom laser interferometer endpoint detection system

The present invention discloses a continuous zoom laser interference endpoint detection system for semiconductor etching and thin film process endpoint detection, comprising: an illumination module, a laser interference module and an imaging module; the laser interference module comprises a laser, a beam splitter, a beam splitter cube, a lens and a detector, the laser beam emitted by the laser is focused to the area to be detected on the surface of the wafer after passing through the beam splitter, the beam splitter cube and the lens, and the wafer surface reflects the laser to the detector for detection; the focal length of the lens is continuously adjustable; the illumination module comprises a light source, which is arranged on one side of the lens, and the illumination beam emitted by the light source is used to illuminate the area to be detected on the surface of the wafer; the imaging module comprises a camera, which is arranged on one side of the lens, and is used to record and output image information of the area to be detected on the surface of the wafer. The present invention realizes high-definition imaging and precise detection of etching and thin film process endpoints at long working distances through continuous zoom and large numerical aperture of the lens.
Owner:SHANGHAI CHEYITIAN TECH CO LTD

Dual-beam system and method for decoupling working distance of charged particle beam device from limitations caused by focused ion beam geometry

A method of obtaining a sequence of multiple cross-sectional images of a measurement site of a wafer parallel to each other, the method comprising the steps of: 1a) providing a focused ion beam (FIB) column and a charged particle beam (CPB) imaging column in a coincident configuration in which the FIB optical axis of the FIB column and the CPB optical axis of the CPB imaging column coincide at the wafer surface, a configuration angle GFE is formed between the FIB optical axis and the CPB optical axis; 1b) in the overlapping configuration, using the FIB column to remove a profile surface layer of the measurement site of the wafer to form a new profile for imaging; 1c) shortening the working distance between the CPB imaging column and the wafer surface in a direction along the axis of the CPB imaging column; 1d) imaging the new profile at the measurement site of the wafer with the CPB imaging column at the shortened working distance and thus not in the coincident configuration; 1e) increasing the working distance between the CPB imaging column and the wafer surface in a direction along the axis of the CPB imaging column until the coincident configuration is achieved.
Owner:CARL ZEISS SMT GMBH

All-optical lateral transceiving integrated optical fiber ultrasonic endoscopic probe

The invention discloses an all-optical lateral transceiving integrated optical fiber ultrasonic endoscopic probe, and belongs to the technical field of ultrasound. Comprising an optical fiber, a first-layer wavelength selective transmission reflector, a second-layer wavelength selective transmission reflector, a heat insulation layer and a photoacoustic conversion layer, the first-layer wavelength selective transmission reflector, the second-layer wavelength selective transmission reflector, the heat insulation layer and the photoacoustic conversion layer sequentially cover the side face of the optical fiber from inside to outside, and the first-layer wavelength selective transmission reflector and the second-layer wavelength selective transmission reflector are connected through a supporting structure. The three parts form a Fabry-Perot interference cavity; the tail end of the optical fiber is an inclined end face, and a full-wavelength reflector is arranged on the surface of the inclined end face. Compared with a traditional piezoelectric ultrasonic endoscope, a method of photoinduced ultrasonic excitation and optical ultrasonic detection is adopted, and the ultrasonic endoscope has the advantages of being wide in frequency band, high in imaging resolution, simple in preparation process, resistant to electromagnetic interference and the like.
Owner:SHENZHEN QIZHEN OPTOELECTRONICS TECHNOLOGY CO LTD

Space target joint imaging and attitude inversion method based on spaceborne platform

The application relates to a space target joint imaging and attitude inversion method based on a spaceborne platform, and relates to the field of inverse synthetic aperture radar imaging, in particular to a space target joint imaging and attitude inversion method based on a spaceborne platform. The application aims to solve the problems that in the existing space target imaging process of a spaceborne platform, three-dimensional high-order space-variable range migration and phase errors caused by complex relative motion between the target and the platform are difficult to realize high-precision imaging, and the existing attitude estimation algorithm needs to be completely compensated for the rectangular component segmentation and orbit error before the attitude inversion can be realized. The process is as follows: one, a narrowband tracking system of a radar obtains target slant range and a radar line-of-sight unit vector; two, a wedge-shaped transformed signal is obtained; three, spatial Doppler parameter distribution of a special point is obtained; four, an imaging result is obtained; and five, accurate estimation of target attitude parameters is completed through plane coefficient fitting.
Owner:HARBIN INST OF TECH

Thermal neutron imaging detector based on TFT area array detector

The utility model discloses a thermal neutron imaging detector based on a TFT area array detector, comprising a housing, a TFT substrate and a scintillator layer, the TFT substrate and the scintillator layer are both arranged in the housing, the TFT substrate comprises a substrate layer and an optical adhesive layer, the scintillator layer is arranged on the optical adhesive layer, and the scintillator layer is arranged on the substrate layer. The optical adhesive layer is matched with the scintillator layer to optimize optical signal transmission and improve imaging resolution; according to the TFT area array detector, the optical adhesive layer is arranged on the surface of the substrate layer of the TFT area array detector, and the optical adhesive layer is combined with the scintillator layer, so that optical signal transmission is optimized, and the imaging resolution is improved.
Owner:SINO-INNOVATION (MIANYANG) INTELLIGENT SCI & TECH LTD +2

Multi-frequency ultra-wideband ground penetrating radar device, method, storage medium and program product

PendingCN122239069AGuaranteed detection depthImprove detection efficiencyAcoustic wave reradiation
This invention discloses a multi-frequency ultra-wideband ground-penetrating sonar device, method, storage medium, and program product. The device includes a host subsystem for generating a first multi-frequency ultra-wideband acoustic signal and generating an array element spatiotemporal control sequence based on the current operating mode; an air-coupled multi-frequency transceiver array subsystem for radiating a second multi-frequency ultra-wideband acoustic signal into the underground solid medium based on the array element spatiotemporal control sequence after receiving the first multi-frequency ultra-wideband acoustic signal, and receiving the echo signal radiated back into the air from the underground solid medium; wherein the second multi-frequency ultra-wideband acoustic signal is incident on the underground solid medium after passing through the air-solid interface in sequence, and the echo signal is a longitudinal wave formed at the surface by various elastic wave responses; a data processing subsystem is used to perform multi-frequency collaborative processing and spatial inversion on the echo signal to obtain a multi-dimensional image of the underground solid medium. Thus, the detection efficiency is improved while ensuring the detection depth.
Owner:CHINA INST OF WATER RESOURCES & HYDROPOWER RES

Agile imaging satellite task sequence time optimization method based on neighborhood optimization

The invention provides a sequence imaging time optimization method based on neighborhood search. The task planning problem of an agile imaging satellite is solved. According to the method, the number of neighborhood scales is determined according to the length of a task sequence, the probability that a neighborhood reference task is selected is determined according to the optimal time difference of the task, and then the time adjustment amount of the reference task is determined by adaptively adjusting the search step length, so that the imaging moment is optimized and adjusted. And with the reference task as a starting point, the executable performance of the adjusted sequence is verified forwards and backwards respectively. And selecting the neighborhood subset with the optimal optimization effect as the latest state, and continuing the subsequent optimization until the optimization is finished. According to the method, based on the rapid maneuvering capability of the agile satellite, the imaging moment adjustment of the imaging task in the visible time window is realized, the imaging task sequence is realized, especially the comprehensive imaging moment optimization of the multi-task sequence in the local area is realized, the high-resolution imaging is realized, and the satellite operation efficiency is improved.
Owner:BEIJING INST OF CONTROL ENG